Cleaning device for polishing polycrystalline silicon

Abstract

The utility model relates to the technical field of polycrystalline silicon processing, and discloses a cleaning device for polishing polycrystalline silicon, which comprises a cleaning box, mounting tables bolted on the two sides of the back surface of the cleaning box, drying fans fixed on the surfaces of the mounting tables, hydraulic cylinders fixed on the left and right sides of the cleaning box, and connecting blocks fixed at the top ends of output shafts of the hydraulic cylinders, the whole connecting block is in an L shape, a mounting plate is fixed to one side of the connecting block, and a lifting frame is fixed to the bottom of the mounting plate. The polycrystalline silicon cleaning device has a shaking function, can directly shake polycrystalline silicon after cleaning the polycrystalline silicon, throws a large amount of cleaning liquid on the surface of the polycrystalline silicon, enables the cleaned polycrystalline silicon to be quickly dried by matching with a fan, greatly improves the working efficiency, also has a lifting function, and is convenient to use. And workers can conveniently feed and discharge polycrystalline silicon, the labor burden of the workers is relieved, and convenience is provided for the workers.

Description

Technical Field

[0001] The utility model relates to the technical field of polysilicon processing, in particular to a cleaning device for polishing polysilicon. Background Technique

[0002] Polysilicon is a form of elemental silicon with a gray metallic luster. Polysilicon has semiconductor properties and is an extremely important excellent semiconductor material. It can be used to prepare semiconductor devices and solar cells. Currently, during the processing of polysilicon, it is often necessary to polish the polysilicon, mainly to remove surface contaminants and defects to improve the quality and performance of the product. During the manufacturing process, the surface of polysilicon may be contaminated by dust and grease. These contaminants will affect the electrical and mechanical properties of polysilicon. Through polishing, these contaminants can be removed, making the surface smoother and cleaner, thereby improving the quality and performance of the product. In addition, polishing can also help remove some minor defects on the surface, such as surface unevenness and scratches, thereby improving the appearance quality of the product. After the polysilicon is polished, the staff needs to clean the surface of the polysilicon to wash away the polished debris and dirt for subsequent processing of the polysilicon.

[0003] After retrieval, a cleaning device for polishing steel structures, application number: CN202121649515.6, only relies on blowing to dry the surface of the workpiece after cleaning the workpiece. However, after the workpiece is cleaned, a large amount of cleaning liquid often adheres to its surface. Only by blowing cannot quickly dry the workpiece, and the drying time is relatively long, reducing the work efficiency. Moreover, this device is not convenient for loading operations. When cleaning the workpiece, the staff still needs to put the workpiece into the device and then manually take out the workpiece after cleaning again, increasing the labor intensity of the staff and being relatively inconvenient to use. Content of the Utility Model

[0004] The purpose of the utility model is to provide a cleaning device for polishing polysilicon to solve the problems raised in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solution: A cleaning device for polishing polysilicon, including a cleaning box, mounting platforms bolted to both sides of the back of the cleaning box, and drying fans fixed on the surfaces of the mounting platforms, and further includes:

[0006] A hydraulic cylinder is fixed on the left and right sides of the cleaning box, and a connecting block is fixed on the top of the output shaft of the hydraulic cylinder. The connecting block is L-shaped as a whole, and a mounting plate is fixed on one side of the connecting block. A lifting frame is fixed on the bottom of the mounting plate, and a plurality of fixing plates are bolted to the inner wall of the lifting frame. A plurality of springs are fixed on the top of the fixing plate. A filter screen is arranged above the lifting frame, and the top of the spring is fixedly connected to the bottom of the filter screen. A driving structure for controlling the activity of the filter screen is arranged inside the mounting plate;

[0007] A base is fixed at the bottom of the front side of the cleaning box, a support platform for placing polysilicon is arranged above the base, and a transmission structure for controlling the up and down movement of the support platform is arranged inside the base.

[0008] Preferably, the driving structure includes a first motor fixed above the surface of one side of the mounting plate, a timing pulley rotatably connected to the upper and lower sides of the mounting plate, a timing belt sleeved on the surface of the timing pulley, a connecting shaft fixed to the lower surface of the timing pulley, and a cam fixed to one end of the connecting shaft, one side of the connecting shaft passes through the outside of the mounting plate and is rotatably connected to the mounting plate.

[0009] Preferably, guide grooves are provided on both left and right sides of the filter screen, and the mounting plate is located inside the guide groove and is slidably connected to the inner wall of the guide groove.

[0010] Preferably, the transmission structure includes a fixed box, a second motor, a double-groove pulley, a single-groove pulley, a threaded rod, a threaded sleeve, a through groove and a connecting rod, the fixed box is fixed on the left and right sides of the top of the base, and the support platform is located between the fixed boxes, the second motor is fixed on the top of the base, and the output shaft of the second motor passes through the interior of the base, the double-groove pulley is rotatably connected to the middle part of the interior of the base, and the output shaft of the second motor is fixedly connected to the top of the double-groove pulley, the single-groove pulley is rotatably connected to the left and right sides of the interior of the base, and the single-groove pulley is connected to the double-groove pulley through a belt transmission connection, the threaded rod is rotatably connected to the interior of the fixed box, the top of the single-groove pulley is fixedly connected to the rotating shaft, and the top of the rotating shaft passes through the fixed box and is fixedly connected to the bottom end of the threaded rod, the threaded sleeve is threadedly connected to the surface of the threaded rod, the through groove is opened on the surface of the fixed box on the opposite side, the connecting rod is fixed on one side of the surface of the threaded sleeve, and the connecting rod passes through the through groove and is fixedly connected to the surface of the support platform.

[0011] Preferably, a limiting block is fixed on the surface of one side of the threaded sleeve, a limiting groove is provided on one side of the inner wall of the fixing box, and the limiting block is located inside the limiting groove and is slidably connected to the inner wall of the limiting groove.

[0012] Preferably, vertical plates are fixed to both the front and rear sides of the top of the filter screen, and the surfaces of the vertical plates facing each other are bonded with soft pads.

[0013] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0014] The present utility model has a shaking function. After the polysilicon is cleaned, the device can directly shake the polysilicon to shake off a large amount of cleaning liquid on the surface of the polysilicon. By cooperating with a blower, the cleaned polysilicon can be quickly dried, greatly improving the work efficiency. Moreover, the device also has a lifting function, which is convenient for workers to load and unload the polysilicon, reducing the labor burden of the workers and providing convenience for the workers. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a three-dimensional structural schematic diagram of the present utility model;

[0016] Figure 2 is a three-dimensional schematic diagram of a partial structure of the present utility model;

[0017] Figure 3 is a three-dimensional schematic diagram of a cleaning tank in the present utility model;

[0018] Figure 4 is a three-dimensional schematic diagram of a filter screen in the present utility model;

[0019] Figure 5 is a three-dimensional schematic diagram of a lifting frame in the present utility model;

[0020] Figure 6 is a sectional view of a mounting plate in the present utility model;

[0021] Figure 7 is a sectional view of a base in the present utility model.

[0022] In the figure: 1, cleaning tank; 2, mounting table; 3, drying blower; 4, hydraulic cylinder; 5, connecting block; 6, mounting plate; 7, lifting frame; 8, fixing plate; 9, spring; 10, filter screen; 11, driving structure; 111, first motor; 112, timing pulley; 113, timing belt; 114, connecting shaft; 115, cam; 12, base; 13, transmission structure; 131, fixed box; 132, second motor; 133, double-groove pulley; 134, single-groove pulley; 135, threaded rod; 136, threaded sleeve; 137, through groove; 138, connecting rod; 14, supporting table; 15, vertical plate; 16, soft pad; 17, guiding groove; 18, limiting groove; 19, limiting block. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0023] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0024] Please refer to Figure 1-7 As shown, a cleaning device for polysilicon polishing includes a cleaning tank 1. Installation platforms 2 are bolted to the left and right sides of the back of the cleaning tank 1, and a drying fan 3 is fixed on the surface of the installation platform 2. The installation platform 2 is inclined as a whole. Hydraulic cylinders 4 are fixed to the left and right sides of the cleaning tank 1, and a connecting block 5 is fixed to the top of the output shaft of the hydraulic cylinder 4. The connecting block 5 is L-shaped as a whole, and a mounting plate 6 is fixed to one side of the connecting block 5. A lifting frame 7 is fixed to the bottom of the mounting plate 6, and a number of fixing plates 8 are bolted to the inner wall of the lifting frame 7. A number of springs 9 are fixed to the top of the fixing plate 8. A filter screen 10 is arranged above the lifting frame 7, and the top of the spring 9 is fixedly connected to the bottom of the filter screen 10. A driving structure 11 for controlling the movement of the filter screen 10 is arranged inside the mounting plate 6. A base 12 is fixed to the bottom of the front side of the cleaning tank 1. A support table 14 for placing polysilicon is arranged above the base 12, and a transmission structure 13 for controlling the up and down movement of the support table 14 is arranged inside the base 12.

[0025] The driving structure 11 includes a first motor 111, a timing pulley 112, a timing belt 113, a connecting shaft 114 and a cam 115. The first motor 111 is fixed above the surface of one side of the mounting plate 6. The timing pulley 112 is rotatably connected to the upper and lower sides inside the mounting plate 6. The timing belt 113 is sleeved on the surface of the timing pulley 112, and the timing belt 113 is meshed with the timing pulley 112. The connecting shaft 114 is fixed to the surface of the lower timing pulley 112, and one side of the connecting shaft 114 penetrates to the outside of the mounting plate 6 and is rotatably connected to the mounting plate 6. The cam 115 is fixed to one end of the connecting shaft 114. Guide grooves 17 are opened on the left and right sides of the filter screen 10, and the mounting plate 6 is located inside the guide grooves 17 and is slidably connected to the inner wall of the guide grooves 17. After the staff turns on the first motor 111, the upper timing pulley 112 can be rotated. The lower timing pulley 112 is rotated through the timing belt 113. The connecting shaft 114 will drive the cam 115 to move. The cam 115 will push the filter screen 10 downward, and the spring 9 will be compressed. As the cam 115 rotates continuously, the filter screen 10 will move up and down, shaking the polysilicon above the filter screen 10. The guide grooves 17 on both sides of the surface of the filter screen 10 can guide the filter screen 10 and improve the stability of the filter screen 10 when shaking up and down.

[0026] The transmission structure 13 includes a fixed box 131, a second motor 132, a double-groove pulley 133, a single-groove pulley 134, a threaded rod 135, a threaded sleeve 136, a through groove 137 and a connecting rod 138. The fixed box 131 is fixed on the left and right sides of the top of the base 12, and the platform 14 is located between the fixed boxes 131. The second motor 132 is fixed on the top of the base 12, and the output shaft of the second motor 132 penetrates into the interior of the base 12. The double-groove pulley 133 is rotatably connected to the middle of the interior of the base 12, and the output shaft of the second motor 132 is fixedly connected to the top of the double-groove pulley 133. The single-groove pulley 134 is rotatably connected to the left and right sides of the interior of the base 12, and the single-groove pulley 134 is drivingly connected to the double-groove pulley 133 through a belt. The threaded rod 135 is rotatably connected to the interior of the fixed box 131. The top of the single-groove pulley 134 is fixedly connected with a rotating shaft, and the top end of the rotating shaft penetrates through the fixed box 131 and is fixedly connected to the bottom end of the threaded rod 135. The threaded sleeve 136 is threadedly connected to the surface of the threaded rod 135. The through groove 137 is opened on the surface of the opposite sides of the fixed box 131. One side of the surface of the threaded sleeve 136 is fixedly connected with the connecting rod 138, and the connecting rod 138 penetrates through the through groove 137 and is fixedly connected to the surface of the platform 14. A limiting block 19 is fixed on one side of the surface of the threaded sleeve 136. A limiting groove 18 is opened on one side of the inner wall of the fixed box 131, and the limiting block 19 is located inside the limiting groove 18 and is slidably connected to the inner wall of the limiting groove 18. When the staff turns on the second motor 132, the double-groove pulley 133 below can be rotated, and the single-groove pulleys 134 on both sides can be synchronously rotated through the belt. The threaded rods 135 on both sides rotate, and the limiting blocks 19 on both sides will limit the threaded sleeve 136, so that the threaded sleeve 136 can only move in the up and down directions, and the platform 14 can move up and down, thereby lifting or lowering the polysilicon, which is convenient for the staff to load and unload.

[0027] Vertical plates 15 are fixed on the front and rear sides of the top of the filter net 10, and soft pads 16 are bonded to the surfaces of the opposite sides of the vertical plates 15. When the filter net 10 shakes up and down, the soft pads 16 on both sides can protect the polysilicon and prevent the polysilicon from colliding with the inner wall of the cleaning tank 1.

[0028] Working principle: When the staff needs to clean the polished polysilicon, the staff first opens the hydraulic cylinders 4 on both sides, so that the output shafts of the hydraulic cylinders 4 drive the lifting frame 7 inside the cleaning tank 1 to rise, moving the filter screen 10 upward to a high position. Then the staff turns on the second motor 132 to control the lowering of the support table 14. Subsequently, the staff places the polysilicon to be cleaned above the support table 14 and turns on the second motor 132 again, so that the support table 14 rises. After lifting the polysilicon to an appropriate height, the staff can push the polysilicon and directly push it into the cleaning tank 1. The polysilicon to be cleaned then falls on the surface of the filter screen 10. Then the staff opens the hydraulic cylinders 4 on both sides again, causing the filter screen 10 to descend. After the filter screen 10 drops below the water level of the cleaning liquid inside the cleaning tank 1, the cleaning liquid can soak the polysilicon, and the staff can clean the polysilicon. After a period of cleaning, the staff can open the hydraulic cylinders 4 again to move the filter screen 10 upward. After the polysilicon falls off the cleaning liquid inside the cleaning tank 1, the staff can turn on the first motors 111 on both sides, thereby causing the cams 115 on both sides to rotate, making the entire filter screen 10 shake up and down. At the same time, the staff turns on the drying blowers 3 on both sides, so that the drying blowers 3 blow air onto the surface of the polysilicon. The shaking filter screen 10 can shake off the cleaning liquid on the surface of the polysilicon and the impurities adhering to the surface of the polysilicon. The impurities then pass through the filter screen 10 and fall below the cleaning tank 1. After a period of drying, the staff can take out the polysilicon above the filter screen 10 and place it on the surface of the support table 14 and control the second motor 132 again to lower the support table 14 to remove the cleaned polysilicon, thus completing the cleaning operation of the polysilicon.

[0029] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cleaning device for polishing polysilicon, comprising a cleaning box (1), a mounting platform (2) bolted to both sides of the back of the cleaning box (1), and a drying fan (3) fixed to the surface of the mounting platform (2), characterized in that: Also includes: A hydraulic cylinder (4) is fixed on the left and right sides of the cleaning box (1), and a connecting block (5) is fixed to the top of the output shaft of the hydraulic cylinder (4), the connecting block (5) is arranged in an L-shape as a whole, and a mounting plate (6) is fixed to one side of the connecting block (5), a lifting frame (7) is fixed to the bottom of the mounting plate (6), and a plurality of fixing plates (8) are bolted to the inner wall of the lifting frame (7), a plurality of springs (9) are fixed to the top of the fixing plate (8), a filter screen (10) is arranged above the lifting frame (7), and the top of the spring (9) is fixedly connected to the bottom of the filter screen (10), and a driving structure (11) for controlling the movement of the filter screen (10) is arranged inside the mounting plate (6); A base (12) is fixed to the bottom of the front side of the cleaning box (1), a support platform (14) for placing polysilicon is arranged above the base (12), and a transmission structure (13) for controlling the upward and downward movement of the support platform (14) is arranged inside the base (12).

2. A polysilicon polishing cleaning device according to claim 1, characterized in that: The driving structure (11) comprises a first motor (111) fixed above the surface of one side of the mounting plate (6), a timing pulley (112) rotatably connected to the upper and lower sides of the mounting plate (6), a timing belt (113) sleeved on the surface of the timing pulley (112), a connecting shaft (114) fixed on the lower surface of the timing pulley (112), and a cam (115) fixed to one end of the connecting shaft (114), one side of the connecting shaft (114) passes through the outside of the mounting plate (6) and is rotatably connected to the mounting plate (6).

3. The cleaning device for polishing polysilicon according to claim 1, characterized in that: The left and right sides of the filter screen (10) are both provided with guide grooves (17), and the mounting plate (6) is located inside the guide groove (17) and is slidably connected to the inner wall of the guide groove (17).

4. The cleaning device for polishing polysilicon according to claim 1, characterized in that: The transmission structure (13) comprises a fixed box (131), a second motor (132), a double-groove pulley (133), a single-groove pulley (134), a threaded rod (135), a threaded sleeve (136), a through groove (137) and a connecting rod (138); the fixed box (131) is fixed to the left and right sides of the top of the base (12), and the support platform (14) is located between the fixed boxes (131); the second motor (132) is fixed to the top of the base (12), and the output shaft of the second motor (132) passes through the inside of the base (12); the double-groove pulley (133) is rotatably connected to the middle part of the inside of the base (12), and the output shaft of the second motor (132) is fixedly connected to the top of the double-groove pulley (133); the single-groove pulley (134) is rotatably connected to the left and right sides of the base (12), and the single-groove pulley (134) is connected to the double-groove pulley (133) through a belt, the threaded rod (135) is rotatably connected to the inside of the fixed box (131), the top of the single-groove pulley (134) is fixedly connected to the rotating shaft, and the top of the rotating shaft passes through the fixed box (131) and is fixedly connected to the bottom of the threaded rod (135), the threaded sleeve (136) is threadedly connected to the surface of the threaded rod (135), the through groove (137) is opened on the surface of the fixed box (131) on the opposite side, the connecting rod (138) is fixed to one side of the surface of the threaded sleeve (136), and the connecting rod (138) passes through the through groove (137) and is fixedly connected to the surface of the support platform (14).

5. The polysilicon polishing cleaning device according to claim 4, characterized in that: A limiting block (19) is fixed on the surface of one side of the threaded sleeve (136), a limiting groove (18) is provided on one side of the inner wall of the fixing box (131), and the limiting block (19) is located inside the limiting groove (18) and is slidably connected to the inner wall of the limiting groove (18).

6. The polysilicon polishing cleaning device according to claim 1, characterized in that: Vertical plates (15) are fixed to both the front and rear sides of the top of the filter screen (10), and soft pads (16) are bonded to the surfaces of the vertical plates (15) facing each other.

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