Cam carrying mechanism of vacuum reflow soldering furnace

Abstract

The utility model belongs to the technical field of semiconductor packaging, and particularly discloses a vacuum reflow soldering furnace cam carrying mechanism which comprises a cam carrying mechanism body installed below a heating furnace body, and the cam carrying mechanism body comprises two sets of T-shaped steel bars used for bearing and driving a frame to move in the heating furnace body. Through mutual cooperation of the X-axis moving mechanism, the rotary jacking mechanism, the supporting mechanism and the T-shaped steel bar, after the frame located in the heating furnace body is jacked up through the rotary jacking mechanism, the T-shaped steel bar is driven by the X-axis moving mechanism to move to the next temperature zone in the X-axis direction, the T-shaped steel bar driven by the rotary jacking mechanism is downwards placed on the frame in the Z-axis direction, and the T-shaped steel bar is supported by the supporting mechanism. In this way, the framework moves in a reciprocating mode to penetrate through the furnace body heating area, the vacuum heating area and the cooling area in the furnace body step by step, so that the framework does not displace in the carrying process, the stability of framework carrying is improved, and the reliability of product quality is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor packaging, and particularly relates to a cam handling mechanism for a vacuum reflow soldering furnace. Background Technique

[0002] With the continuous miniaturization of components, the chip integration degree is getting higher and higher, and the quality requirements for products are increasing. It is necessary to continuously improve the process to improve the quality. To ensure high-reliability products through high-quality soldering, a handling device for a vacuum reflow soldering furnace dedicated to moving and loading the vacuum reflow soldering furnace is required.

[0003] At present, the handling devices for vacuum reflow soldering furnaces on the market mainly include a gas circuit system, a cooling system, a heating system, as well as a vacuum system, a measurement system, and a safety system, etc. In semiconductor manufacturing, vacuum reflow soldering can significantly reduce the void ratio in solder joints, which is crucial for improving the reliability and performance of devices. Therefore, the design and use of the handling device for the vacuum reflow soldering furnace need to fully consider these factors to achieve the best soldering effect;

[0004] However, the current handling devices for vacuum reflow soldering furnaces have a complex structure, and the handling stability is low, resulting in easy displacement of the frame chips during the handling process, posing a potential risk to the reliability of product quality. Therefore, we need to propose a cam handling mechanism for a vacuum reflow soldering furnace to solve the above existing problems and enable it to effectively improve the stability of the handling frame. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a cam handling mechanism for a vacuum reflow soldering furnace. Through the mutual cooperation of the X-axis moving mechanism, the rotating lifting mechanism, the supporting mechanism, and the T-shaped steel bars, the frame will not be displaced during handling, improving the stability of frame handling, thereby enhancing the reliability of product quality, so as to solve the problems raised in the background technique.

[0006] To achieve the above purpose, the utility model provides the following technical solution: A cam handling mechanism for a vacuum reflow soldering furnace, including a cam handling mechanism body installed below the heating furnace body. The cam handling mechanism body includes two groups of T-shaped steel bars for carrying and driving the frame to move in the heating furnace body. An X-axis moving mechanism for driving the T-shaped steel bars to perform X-axis horizontal movement is installed below the T-shaped steel bars, and one end of the T-shaped steel bars is connected to the X-axis moving mechanism through a supporting mechanism. The two groups of X-axis moving mechanisms are symmetrically arranged, and a rotating lifting mechanism for jacking up the frame is installed between the two supporting mechanisms.

[0007] Preferably, the support mechanism includes a support base, a plurality of support blocks are installed at the upper end of the support base, one end of the T-shaped steel bar is installed on one side of the support block, and a support member for supporting the T-shaped steel bar is arranged below the T-shaped steel bar.

[0008] Preferably, the support members each include a plurality of equally spaced mounting blocks, round bars are fixed at both ends of the mounting blocks, and a steel belt support rod for supporting the T-shaped steel bar is installed between the two round bars. A stop block for limiting the movement of the T-shaped steel bar is fixed on the steel belt support rod, and the plurality of mounting blocks are connected by two connecting rods.

[0009] Preferably, the support member further includes a plurality of equally spaced fixing plates, support plates are arranged at both ends of the fixing plates, notches for the fixing plates to be inserted into are formed on the support plates, and an elastic reset mechanism is arranged between the fixing plates and the notches. The plurality of fixing plates are also connected by connecting rods.

[0010] Preferably, the elastic reset mechanism includes a linear slide rail, the fixing plate is slidably connected inside the notch through the linear slide rail, and a plug rod is slidably inserted into the fixing plate. A rectangular spring is sleeved on the plug rod between the fixing plate and the upper end of the notch.

[0011] Preferably, the X-axis moving mechanism includes a fixed seat and a lead screw rotatably installed inside the fixed seat. A linear module is threadedly connected to the lead screw. A connecting plate is installed on the linear module. Both ends of the connecting plate are connected to the support base through guide rods. One end of the lead screw is installed with a second servo motor.

[0012] Preferably, the linear module includes a moving block, the moving block is slidably connected inside the fixed seat, a guide block is fixed at the lower end of the moving block, and the guide block is slidably sleeved on the connecting rod.

[0013] Preferably, the rotating jacking mechanism includes a rotating shaft, both ends of the rotating shaft are rotatably connected to the middle of the fixing plate, and a driving mechanism for driving the rotating shaft to rotate is installed at one end of the rotating shaft. A plurality of cams capable of jacking up the frame are fixedly sleeved on the outside of the rotating shaft.

[0014] Preferably, the driving mechanism includes a first servo motor and a speed reducer. The speed reducer is installed on one side of the fixing plate, and the output shaft of the first servo motor is connected to the rotating shaft of the speed reducer.

[0015] Preferably, a follower bearing is embedded inside the fixing plate, and one end of the rotating shaft is inserted into the inside of the follower bearing.

[0016] Compared with the prior art, the beneficial effects of the present utility model are:

[0017] 1. Through the mutual cooperation of the X-axis moving mechanism, the rotating lifting mechanism, the supporting mechanism and the T-shaped steel strip, after the frame located in the heating furnace body is lifted by the rotating lifting mechanism, the X-axis moving mechanism drives the T-shaped steel strip to move to the next temperature zone along the X-axis direction, and then the T-shaped steel strip driven by the rotating lifting mechanism places the frame downward along the Z-axis. By moving and transporting in this reciprocating manner, the frame gradually passes through the furnace body heating zone, the vacuum heating zone and the cooling zone in the furnace body, so that the frame will not be displaced during transportation, improving the stability of frame transportation, and thus enhancing the reliability of product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a structural schematic diagram of the present utility model;

[0019] Figure 2 is an exploded structural schematic diagram of the present utility model;

[0020] Figure 3 is an exploded structural schematic diagram of the X-axis moving mechanism and the supporting mechanism of the present utility model; Figure 4 is an installation structural schematic diagram of the present utility model.

[0021] In the figure: 1. First servo motor; 2. Reducer; 3. Cam; 4. Follow-up bearing; 5. Linear slide rail; 6. Rectangular spring; 7. Linear module; 8. Second servo motor; 9. Linear bearing; 10. T-shaped steel strip; 11. Support base; 12. Steel strip support rod; 13. Cooling zone; 14. Furnace body heating zone; 15. Vacuum heating zone; 16. Frame; 17. Round rod; 18. Installation block; 19. Support block; 20. Support plate; 21. Rotating shaft; 22. Connecting rod; 23. Connecting plate; 24. Guide rod; 25. Fixed seat; 26. Fixed plate; 27. Guide block. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0023] Please refer to Figures 1-4, the present utility model provides a technical solution: a cam handling mechanism for a vacuum reflow soldering furnace, including a cam handling mechanism body installed below the heating furnace body. The cam handling mechanism body includes two groups of T-shaped steel bars 10 for carrying and driving the frame 16 to move inside the heating furnace body. An X-axis moving mechanism for driving the T-shaped steel bars 10 to move horizontally in the X-axis direction is installed below the T-shaped steel bars 10, and one end of the T-shaped steel bars 10 is connected to the X-axis moving mechanism through a support mechanism. The two groups of X-axis moving mechanisms are symmetrically arranged, and a rotary jacking mechanism for jacking up the frame 16 is installed between the two support mechanisms.

[0024] As Figure 4 shown, the inside of the heating furnace body includes a furnace body heating area 14, a vacuum heating area 15, and a cooling area 13. The frame 16 is driven by the T-shaped steel bars 10 to pass through the furnace body heating area 14, the vacuum heating area 15, and the cooling area 13 respectively, so that the frame 16 will not displace during handling.

[0025] The support mechanism includes a support base 11. A plurality of support blocks 19 are installed at the upper end of the support base 11. One end of the T-shaped steel bar 10 is installed on one side of the support block 19. A support member for supporting the T-shaped steel bar 10 is arranged below the T-shaped steel bar 10. Each group of T-shaped steel bars 10 has a plurality of them, and each T-shaped steel bar 10 corresponds to a support block 19. The X-axis moving mechanism drives the support base 11 to move, so that the support base 11 drives a plurality of T-shaped steel bars 10 to move horizontally in the X-axis direction through the support blocks 19.

[0026] Each support member includes a plurality of equally spaced installation blocks 18. Circular rods 17 are fixed at both ends of the installation blocks 18. A steel belt support rod 12 for supporting the T-shaped steel bar 10 is installed between the two circular rods 17. A stop block for limiting the movement of the T-shaped steel bar 10 is fixed on the steel belt support rod 12. The plurality of installation blocks 18 are connected by two connecting rods 22. The stop block is used to limit the T-shaped steel bar 10, so that the T-shaped steel bar 10 can move horizontally on the steel belt support rod 12 to drive the frame 16 to move in position.

[0027] The support member further includes a plurality of fixing plates 26 arranged at equal intervals. Both ends of the fixing plate 26 are provided with support plates 20. Notches for the fixing plates 26 to be embedded are formed on the support plates 20. An elastic reset mechanism is arranged between the fixing plate 26 and the notch. The plurality of fixing plates 26 are also connected by a connecting rod 22. A plurality of steel strip support rods 12 provide a support force for the T-shaped steel strip 10, enabling the T-shaped steel strip 10 to be uniformly stressed, improving the stability of the support for the T-shaped steel strip 10. Moreover, by the cooperation of the fixing plate 26 and the elastic reset mechanism, while providing a support force for the T-shaped steel strip 10, a certain buffer space can also be provided for the frame 16, enabling the frame 16 to have a certain buffering effect when jacking up or falling, and improving the stability of the movement of the frame 16.

[0028] The elastic reset mechanism includes a linear slide rail 5. The fixing plate 26 is slidably connected inside the notch through the linear slide rail 5. A plug rod is slidably inserted into the fixing plate 26. A rectangular spring 6 is sleeved on the plug rod between the fixing plate 26 and the upper end of the notch. The resilience of the rectangular spring 6 enables the fixing plate 26 to have a certain moving space on the support plate 20. The plug rod is used to prevent the rectangular spring 6 from being distorted.

[0029] The X-axis moving mechanism includes a fixed seat 25 and a lead screw rotatably installed inside the fixed seat 25. A linear module 7 is threadedly connected to the lead screw. A connecting plate 23 is installed on the linear module 7. Both ends of the connecting plate 23 are connected to the support base 11 through guide rods 24. The guide rods 24 are connected to the fixed seat 25 through linear bearings 9. One end of the lead screw is installed with a second servo motor 8. By driving the lead screw to rotate through the second servo motor 8, using the threaded cooperation between the lead screw and the linear module 7, and the sliding connection between the linear module 7 and the fixed seat 25, the linear module 7 drives the connecting plate 23 to move horizontally, and the connecting plate 23 drives the support base 11 to move horizontally along the X-axis, thereby driving the T-shaped steel strip 10 to move horizontally. Moreover, the two groups of T-shaped steel strips 10 are relatively independently arranged, enabling the T-shaped steel strips 10 on the left and right sides to independently move along the X-axis direction.

[0030] The linear module 7 includes a moving block. The moving block is slidably connected inside the fixed seat 25. A guide block 27 is fixed to the lower end of the moving block. The guide block 27 is slidably sleeved on the connecting rod 22 and is used to limit the moving direction of the connecting plate 23.

[0031] The rotary lifting mechanism includes a rotating shaft 21, both ends of the rotating shaft 21 are rotatably connected to the middle of a fixed plate 26, and a driving mechanism for driving the rotation of the rotating shaft 21 is installed at one end of the rotating shaft 21. A plurality of cams 3 capable of lifting the frame 16 are fixedly sleeved outside the rotating shaft 21. By driving the rotating shaft 21 to rotate through the driving mechanism, the rotating shaft 21 drives the cams 3 to rotate. When the arc surface of the cam 3 contacts the frame 16, the frame 16 is in the lowered state, and the frame 16 is located on the T-shaped steel strip 10. When the parallel surface of the cam 3 contacts the frame 16, the frame 16 is lifted by the cam 3, so that the frame 16 is separated from the T-shaped steel strip 10, facilitating the reset of the position where the T-shaped steel strip 10 moves, so as to facilitate the movement of the frame 16 to the next position.

[0032] The driving mechanism includes a first servo motor 1 and a speed reducer 2. The speed reducer 2 is installed on one side of the fixed plate 26. The output shaft of the first servo motor 1 is connected to the rotating shaft of the speed reducer 2. Through the cooperation of the first servo motor 1 and the speed reducer 2, the rotation angle of the rotating shaft 21 can be accurately controlled, so that the cam 3 can accurately lift or lower the frame 16.

[0033] A follower bearing 4 is embedded inside the fixed plate 26, and one end of the rotating shaft 21 is inserted into the inside of the follower bearing 4, facilitating the rotation of the rotating shaft 21 on the fixed plate 26 by using the follower bearing 4.

[0034] During use, after using the rotary lifting mechanism to lift the frame 16 located inside the heating furnace body, the X-axis moving mechanism drives the T-shaped steel strip 10 to move to the next temperature zone along the X-axis direction. Then, the rotary lifting mechanism drives the T-shaped steel strip 10 to place the frame 16 downward along the Z-axis. By moving and transporting in this way repeatedly, the frame 16 gradually passes through the furnace body heating zone 14, the vacuum heating zone 15 and the cooling zone 13 inside the furnace body, so that the frame 16 will not have a displacement phenomenon during transportation, improving the stability of the transportation of the frame 16, and thus enhancing the reliability of the product quality.

[0035] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirits of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cam conveying mechanism for a vacuum reflow soldering furnace, comprising a cam conveying mechanism body installed below a heating furnace body, characterized in that: The cam transport mechanism body comprises two groups of T-shaped steel bars (10) for carrying and driving the frame (16) to move in the heating furnace body, an X-axis moving mechanism for driving the T-shaped steel bar (10) to move horizontally along the X-axis is installed below the T-shaped steel bar (10), and one end of the T-shaped steel bar (10) is connected to the X-axis moving mechanism through a supporting mechanism, the two groups of X-axis moving mechanisms are symmetrically arranged, and a rotating lifting mechanism for lifting the frame (16) is installed between the two supporting mechanisms.

2. The cam conveying mechanism of a vacuum reflow soldering furnace according to claim 1, characterized in that: The support mechanism comprises a support base (11), a plurality of support blocks (19) are mounted on the upper end of the support base (11), one end of the T-shaped steel bar (10) is mounted on one side of the support block (19), and a support member for supporting the T-shaped steel bar (10) is arranged below the T-shaped steel bar (10).

3. The cam conveying mechanism of a vacuum reflow soldering furnace according to claim 2, characterized in that: The support members each include a plurality of mounting blocks (18) arranged at equal distances, wherein the mounting blocks (18) Round rods (17) are fixed at both ends, a steel strip support rod (12) for supporting the T-shaped steel bar (10) is installed between the two round rods (17), a stopper for limiting the movement of the T-shaped steel bar (10) is fixed on the steel strip support rod (12), and a plurality of the mounting blocks (18) are connected by two connecting rods (22).

4. The cam conveying mechanism of a vacuum reflow soldering furnace according to claim 3, characterized in that: The support member also includes a plurality of fixing plates (26) arranged at equal intervals, support plates (20) are arranged at both ends of the fixing plates (26), the support plates (20) are provided with notches for the fixing plates (26) to be embedded, an elastic reset mechanism is arranged between the fixing plates (26) and the notches, and the plurality of fixing plates (26) are also connected by a connecting rod (22).

5. The cam conveying mechanism of a vacuum reflow soldering furnace according to claim 4, characterized in that: The elastic reset mechanism comprises a linear slide rail (5), the fixed plate (26) is slidably connected to the inside of the notch via the linear slide rail (5), and a plug rod is slidably inserted on the fixed plate (26), and a rectangular spring (6) is sleeved on the plug rod between the fixed plate (26) and the upper end of the notch.

6. The cam conveying mechanism of a vacuum reflow soldering furnace according to claim 5, characterized in that: The X-axis moving mechanism comprises a fixed seat (25) and a screw rod rotatably mounted inside the fixed seat (25); a linear module (7) is threadedly connected to the screw rod; a connecting plate (23) is mounted on the linear module (7); both ends of the connecting plate (23) are connected to the support base (11) via guide rods (24); and a second servo motor (8) is mounted on one end of the screw rod.

7. The cam conveying mechanism of a vacuum reflow soldering furnace according to claim 6, characterized in that: The linear module (7) comprises a moving block, which is slidably connected to the inside of a fixed seat (25). A guide block (27) is fixed to the lower end of the moving block, and the guide block (27) is slidably sleeved on the connecting rod (22).

8. The cam conveying mechanism of a vacuum reflow soldering furnace according to claim 7, characterized in that: The rotary lifting mechanism comprises a rotating shaft (21), both ends of the rotating shaft (21) are rotatably connected to the middle part of a fixed plate (26), one end of the rotating shaft (21) is provided with a driving mechanism for driving the rotating shaft (21) to rotate, and a plurality of cams (3) capable of lifting the frame (16) are sleeved and fixed on the outside of the rotating shaft (21).

9. The cam conveying mechanism of a vacuum reflow soldering furnace according to claim 8, characterized in that: The driving mechanism comprises a first servo motor (1) and a reducer (2); the reducer (2) is mounted on one side of a fixed plate (26); and the output shaft of the first servo motor (1) is connected to the rotating shaft of the reducer (2).

10. The cam conveying mechanism of a vacuum reflow soldering furnace according to claim 9, characterized in that: A follower bearing (4) is embedded inside the fixed plate (26), and one end of the rotating shaft (21) is inserted into the inside of the follower bearing (4).

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