Intermittent conveying mechanism of characteristic size electron microscope

Abstract

The utility model discloses an intermittent conveying mechanism of a characteristic size electron microscope, and relates to the technical field of conveying mechanisms. The intermittent conveying mechanism of the characteristic size electron microscope comprises a conveying disc arranged on a rack and an intermittent transmission unit arranged on the rack, and the intermittent transmission unit comprises a driving motor arranged at the bottom of the rack and a Y-shaped transmission frame arranged on the driving motor. The intermittent transmission unit further comprises an intermittent fluted disc rotationally connected to the lower portion of the rack, and a lubricating unit is arranged on the rack. The intermittent conveying mechanism of the characteristic size electron microscope is compact in overall structure and stable in operation, intermittent conveying action is achieved through the intermittent transmission unit, meanwhile, the lubricating unit is arranged on the rack, the intermittent transmission unit is automatically lubricated in the operation process, it is guaranteed that the transmission position is stable, abrasion is small, the service life is long, and manual lubrication is not needed; maintenance and operation are convenient, and use requirements are met.

Description

Technical Field

[0001] The utility model relates to the technical field of transmission mechanisms, in particular to an intermittent transmission mechanism for a feature size electron microscope. Background Art

[0002] During the semiconductor wafer size detection process, the sample needs to be accurately transferred to the observation area of the electron microscope. The intermittent transmission mechanism is responsible for controlling the movement of the sample to ensure that the sample can move intermittently at a predetermined position and speed during the measurement process, so as to observe and measure different areas one by one.

[0003] Traditional semiconductor wafer intermittent transmission mechanisms usually adopt a disc type, continuously rotating intermittently to achieve sample transmission. However, during the use of traditional intermittent transmission mechanisms, the resistance at the transmission position is large, and lubricating grease needs to be applied for lubrication. And the transmission position is usually under the transmission table, making the operation inconvenient. Moreover, the lubricating function of the applied lubricating grease gradually weakens after a period of use, so periodic maintenance is required, and the maintenance period is short, which cannot meet the use requirements. In view of the deficiencies of the prior art, the utility model provides an intermittent transmission mechanism for a feature size electron microscope to solve the above problems. Summary of the Utility Model

[0004] In view of the deficiencies of the prior art, the utility model provides an intermittent transmission mechanism for a feature size electron microscope, with a compact overall structure and stable operation. The intermittent transmission action is realized through an intermittent transmission unit, and a lubrication unit is arranged on the frame, so that the intermittent transmission unit is automatically lubricated during operation, ensuring stable transmission position, small wear, long service life, no need for manual lubrication, convenient maintenance operation, and meeting the use requirements.

[0005] To achieve the above object, the utility model is realized through the following technical solutions: An intermittent transmission mechanism for a feature size electron microscope includes a transmission disk arranged on a frame and an intermittent transmission unit arranged on the frame. The intermittent transmission unit includes a driving motor arranged at the bottom of the frame and a Y-shaped transmission frame arranged on the driving motor.

[0006] The intermittent transmission unit further includes an intermittent gear disk rotatably connected below the frame, and the intermittent gear disk is engaged with the Y-shaped transmission frame.

[0007] A first belt pulley is arranged on the rotating shaft of the intermittent gear disk, a second belt pulley is arranged on the rotating shaft of the transmission disk, and a transmission belt is sleeved on the second belt pulley and the first belt pulley.

[0008] A lubrication unit is arranged on the frame, and the lubrication unit is used to lubricate the engagement position between the intermittent gear disk and the Y-shaped transmission frame.

[0009] Preferably, the lubrication unit includes a lubrication seat provided on the frame. A lubricating wheel is embedded in the side of the lubrication seat. The lubricating wheel is aligned with the Y-shaped transmission frame. A storage tank is provided on the lubrication seat for storing lubricating oil.

[0010] Preferably, the lubrication unit further includes a positioning frame clamped on the frame. The lubrication seat is slidably connected to the positioning frame, and a spring is fixedly connected between the lubrication seat and the positioning frame.

[0011] Preferably, a sleeve is provided on the positioning frame, and a sliding column is fixedly connected to the lubrication seat. The sliding column is slidably connected within the sleeve.

[0012] Preferably, a support frame is fixedly connected to the frame for supporting the drive motor.

[0013] Preferably, intermittent grooves are formed in the intermittent gear disk, and the Y-shaped transmission frame is movably clamped within the intermittent grooves.

[0014] Preferably, a screw cap is threadedly connected to the storage tank.

[0015] The present utility model discloses an intermittent transmission mechanism for a feature size electron microscope, and the beneficial effects thereof are as follows:

[0016] This intermittent transmission mechanism for a feature size electron microscope has a compact overall structure and stable operation. The intermittent transmission action is achieved through the intermittent transmission unit. At the same time, a lubrication unit is provided on the frame, enabling automatic lubrication of the intermittent transmission unit during operation, ensuring stable transmission positions, small wear, long service life, no need for manual lubrication, convenient maintenance operation, and meeting the usage requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0018] Figure 1 It is a schematic diagram of the overall structure of the present utility model;

[0019] Figure 2 It is a schematic diagram of the structure of the intermittent transmission unit of the present utility model;

[0020] Figure 3 It is a schematic diagram of the structure of the lubrication unit of the present utility model;

[0021] Figure 4This is a schematic structural view of the Y-shaped transmission frame of the present utility model;

[0022] Figure 5 This is a schematic structural view of the storage box of the present utility model.

[0023] In the figure: 1, frame; 101, transmission disc; 2, intermittent transmission unit; 201, drive motor; 2011, support frame; 202, Y-shaped transmission frame; 203, intermittent gear disc; 2031, intermittent groove; 204, first pulley; 205, second pulley; 206, transmission belt; 3, lubrication unit; 301, lubrication seat; 302, lubrication wheel; 303, storage box; 3031, screw cap; 304, positioning frame; 305, sleeve; 306, spring; 307, sliding column. Specific embodiments

[0024] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described. Apparently, the described embodiments are some but not all of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0025] By providing an intermittent transmission mechanism for a feature size electron microscope in the embodiments of the present application, the problems in the use of the traditional intermittent transmission mechanism are solved. During use, the resistance at the transmission position is large, and lubricating grease needs to be applied for lubrication. However, the transmission position is usually under the transmission table, and the operation is not convenient. Moreover, the lubricating function of the applied lubricating grease gradually weakens after a period of use. Therefore, periodic maintenance is required, and the maintenance period is short, which cannot meet the use requirements.

[0026] To better understand the above technical solutions, the above technical solutions will be described in detail below in conjunction with the accompanying drawings of the specification and specific embodiments.

[0027] Embodiments of the present utility model disclose an intermittent transmission mechanism for a feature size electron microscope. As shown in the attached Figures 1-5 figures, it includes a transmission disc 101 provided on a frame 1 and an intermittent transmission unit 2 provided on the frame 1. The intermittent transmission unit 2 includes a drive motor 201 provided at the bottom of the frame 1 and a Y-shaped transmission frame 202 provided on the drive motor 201;

[0028] The intermittent transmission unit 2 further includes an intermittent gear disc 203 rotatably connected below the frame 1, and the intermittent gear disc 203 is engaged with the Y-shaped transmission frame 202;

[0029] A first pulley 204 is provided on the rotating shaft of the intermittent gear disk 203, a second pulley 205 is provided on the rotating shaft of the transfer disk 101, and a transmission belt 206 is sleeved on the second pulley 205 and the first pulley 204;

[0030] This characteristic dimension electron microscope intermittent transfer mechanism facilitates the intermittent transmission of the transfer disk 101, thereby facilitating the characteristic dimension electron microscope to perform size scanning and detection on the semiconductor components on the transfer disk 101;

[0031] This intermittent transfer mechanism is driven by an intermittent drive unit 2 and driven by a drive motor 201. The drive motor 201 drives the Y-shaped drive frame 202, the Y-shaped drive frame 202 drives the intermittent gear disk 203 to rotate intermittently, the intermittent gear disk 203 drives the first pulley 204 to move when it moves, the first pulley 204 drives the transmission belt 206 to move, the transmission belt 206 drives the second pulley 205 to move, and the second pulley 205 drives the transfer disk 101 to move, so as to provide intermittent detection for the semiconductor components to be detected on the transfer disk 101.

[0032] A lubrication unit 3 is provided on the frame 1, and the lubrication unit 3 is used to lubricate the engagement position between the intermittent gear disk 203 and the Y-shaped drive frame 202.

[0033] With the design of the lubrication unit 3, it is convenient to automatically lubricate the intermittent drive unit 2 during operation, ensure stable transmission position, small wear, and long service life, so that the intermittent drive unit 2 has small vibration and accurate position during the transmission process of the semiconductor, and improve the detection accuracy of the characteristic dimension electron microscope;

[0034] The lubrication unit 3 includes a lubrication seat 301 provided on the frame 1, a lubricating wheel 302 is embedded in the side of the lubrication seat 301, the lubricating wheel 302 is aligned with the Y-shaped drive frame 202, and a storage tank 303 is provided on the lubrication seat 301 for storing lubricating oil.

[0035] The structural design of the lubrication unit 3 is simple. When the Y-shaped drive frame 202 rotates, it will contact the lubricating wheel 302 every time it rotates. The lubricating oil in the inner cavity of the lubrication seat 301 and the storage tank 303 adheres to the lubricating wheel 302. When the Y-shaped drive frame 202 contacts the lubricating wheel 302, the lubricating oil on the lubricating wheel 302 will adhere to the Y-shaped drive frame 202, and the Y-shaped drive frame 202 will transfer the lubricating oil to the intermittent gear disk 203, thereby realizing the transmission lubrication of the intermittent transmission position of the Y-shaped drive frame 202 and the intermittent gear disk 203.

[0036] The lubrication unit 3 further includes a positioning frame 304 clamped on the frame 1. The lubrication seat 301 is slidably connected to the positioning frame 304. A spring 306 is fixedly connected between the lubrication seat 301 and the positioning frame 304. In the lubrication unit 3, through the design of the positioning frame 304 and the spring 306, the spring 306 will exert an elastic force on the lubrication seat 301, so that the contact effect between the lubrication seat 301 and the lubricating wheel 302 and the Y-shaped transmission frame 202 is good, thereby ensuring good lubrication effect on the Y-shaped transmission frame 202 and the intermittent gear disk 203.

[0037] A sleeve 305 is provided on the positioning frame 304. A sliding column 307 is fixedly connected to the lubrication seat 301. The sliding column 307 is slidably connected in the sleeve 305. Through the design of the sliding column 307 and the sleeve 305, lateral support is provided for the lubrication seat 301 to ensure the stable force of the lubrication seat 301.

[0038] A screw cap 3031 is threadedly connected to the storage box 303. Through the design of the screw cap 3031, the storage box 303 is convenient for adding lubricating oil and performing closed protection.

[0039] A support frame 2011 is fixedly connected to the frame 1. The support frame 2011 is used to support the drive motor 201, and the support frame 2011 makes the installation and positioning of the drive motor 201 convenient.

[0040] An intermittent groove 2031 is formed on the intermittent gear disk 203. The Y-shaped transmission frame 202 is movably clamped in the intermittent groove 2031. When the Y-shaped transmission frame 202 rotates, the Y-shaped transmission frame 202 and multiple intermittent grooves 2031 are continuously clamped, thereby realizing the intermittent rotation action of driving the intermittent gear disk 203.

[0041] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims

1. An intermittent transmission mechanism for a characteristic size electron microscope, comprising a transmission disk (101) arranged on a frame (1) and an intermittent transmission unit (2) arranged on the frame (1), characterized in that: The intermittent transmission unit (2) comprises a driving motor (201) arranged at the bottom of the frame (1) and a Y-shaped transmission frame (202) arranged on the driving motor (201); The intermittent transmission unit (2) further comprises an intermittent gear disc (203) rotatably connected to the lower side of the frame (1), wherein the intermittent gear disc (203) is engaged with the Y-shaped transmission frame (202); A first belt pulley (204) is provided on the rotating shaft of the intermittent toothed disc (203), a second belt pulley (205) is provided on the rotating shaft of the conveying disc (101), and a transmission belt (206) is sleeved on the second belt pulley (205) and the first belt pulley (204); The frame (1) is provided with a lubrication unit (3), and the lubrication unit (3) is used to lubricate the engaging position of the intermittent toothed disc (203) and the Y-shaped transmission frame (202).

2. The intermittent transmission mechanism for characteristic size electron microscope according to claim 1, characterized in that: The lubrication unit (3) comprises a lubrication seat (301) arranged on the frame (1), a lubrication wheel (302) being embedded in the side of the lubrication seat (301), the lubrication wheel (302) being aligned with the Y-shaped transmission frame (202), and a storage box (303) being provided on the lubrication seat (301), the storage box (303) being used for storing lubricating oil.

3. The intermittent transmission mechanism for characteristic size electron microscope according to claim 2, characterized in that: The lubrication unit (3) further comprises a positioning frame (304) mounted on the frame (1) and clamped thereon; the lubrication seat (301) is slidably connected to the positioning frame (304); and a spring (306) is fixedly connected between the lubrication seat (301) and the positioning frame (304).

4. The intermittent transmission mechanism for characteristic size electron microscope according to claim 3, characterized in that: A sleeve (305) is provided on the positioning frame (304), a sliding column (307) is fixedly connected to the lubrication seat (301), and the sliding column (307) is slidably connected in the sleeve (305).

5. The intermittent transmission mechanism for characteristic size electron microscope according to claim 1, characterized in that: A support frame (2011) is fixedly connected to the frame (1), and the support frame (2011) is used to support the drive motor (201).

6. The intermittent transmission mechanism for characteristic size electron microscope according to claim 1, characterized in that: An intermittent groove (2031) is provided on the intermittent toothed disc (203), and the Y-shaped transmission frame (202) is movably engaged in the intermittent groove (2031).

7. The intermittent transmission mechanism for characteristic size electron microscope according to claim 2, characterized in that: The storage box (303) is provided with a screw cap (3031) which is threadedly connected.

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