Drawer type linear evaporation automation equipment

Abstract

The utility model belongs to the technical field of evaporation coating, and relates to drawer type linear evaporation automation equipment which comprises an evaporation line body and a plurality of drawer type evaporation units. The evaporation line body comprises a conveying channel and a plurality of evaporation chambers, the evaporation chambers are in one-to-one correspondence with the drawer type evaporation units, the different evaporation chambers are connected to the lower portion of the conveying channel, and a line source inlet and outlet is formed in the Y-direction side of each evaporation chamber; the drawer type evaporation unit comprises a pair of first Y-direction sliding rails passing through the outer side of the evaporation chamber, a door plate assembly moving along the first Y-direction sliding rails and a line source mounting frame arranged on the side, close to the evaporation chamber, of the door plate assembly, the door plate assembly comprises a sealing door plate, and when the sealing door plate is tightly attached to the line source inlet and outlet, the contact face of the sealing door plate and the line source inlet and outlet is closed. According to the equipment, the first Y-direction sliding rail is located outside the evaporation chamber, the inner side part of the door plate assembly can enter the evaporation chamber, and therefore the situation that evaporation materials are accumulated on the sliding contact face of the first Y-direction sliding rail and the door plate assembly to affect movement of the door plate assembly is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation coating, and particularly relates to a drawer-type linear evaporation coating automation device. Background Art

[0002] At present, in evaporation coating automation equipment, especially in the perovskite industry, the linear evaporation coating automation production line equipment for large-size glass is a key field for the industrialization of next-generation photovoltaic products. The evaporation coating principle of this equipment is to send the glass into the evaporation coating chamber, and the evaporation coating line source evaporates and coats the evaporation coating material on the lower surface of the glass from below the glass. In the evaporation coating equipment, the evaporation coating material is a consumable, so the evaporation coating line source inevitably needs to be replaced frequently. It is not very convenient to replace the evaporation coating line source directly in the evaporation coating chamber, so sometimes a drawer-type structure is used to move the evaporation coating line source out from one side of the evaporation coating chamber.

[0003] Chinese Patent CN215288948U discloses a drawer-type evaporation source, which moves on the guide rail arranged inside the evaporation coating machine through the roller mechanism at the bottom of the base, that is, both the roller mechanism and the guide rail are arranged inside the evaporation coating machine. However, during the evaporation coating process, the evaporation coating material will fill the evaporation coating space and is very likely to adhere to the gaps between the roller mechanism and the guide rail, resulting in adhesion and affecting the smoothness of movement.

[0004] Therefore, it is necessary to improve the equipment structure to solve the above problems. Summary of the Utility Model

[0005] The main purpose of the utility model is to provide a drawer-type linear evaporation coating automation device, which can make most of the structure of the drawer-type evaporation unit located outside the evaporation coating chamber, avoiding the evaporation coating material adhering to the sliding contact surface and affecting the movement of the door panel assembly.

[0006] The utility model realizes the above purpose through the following technical scheme: a drawer-type linear evaporation coating automation device, comprising an evaporation coating line body and a plurality of drawer-type evaporation units;

[0007] The evaporation coating line body includes a conveying channel and a plurality of evaporation coating chambers. The conveying channel passes through the upper part of the evaporation coating line body along the X direction. The evaporation coating chambers correspond to the drawer-type evaporation units one by one. Different evaporation coating chambers are respectively connected to the lower part of the conveying channel. A wire source inlet and outlet is arranged on one side of the evaporation coating chamber in the Y direction. The X direction and the Y direction are both in the horizontal plane and perpendicular to each other;

[0008] The drawer-type evaporation unit includes a pair of first Y-direction slide rails passing outside the evaporation chamber, a door panel assembly moving along the first Y-direction slide rails, and a wire source mounting rack provided on the side of the door panel assembly close to the evaporation chamber. The wire source mounting rack is used to place the wire source. The door panel assembly includes a sealing door panel, and when the sealing door panel is in close contact with the wire source inlet and outlet, the contact surface between the two is sealed.

[0009] Specifically, the evaporation wire body further includes a reflux channel, a feeding lifting mechanism located at the inlet of the conveying channel, a material returning lifting mechanism located at the outlet of the conveying channel, and a feeding position located on one side of the feeding lifting mechanism. The conveying channel and the feeding position are located on the X-direction two sides of the feeding lifting mechanism. The reflux channel passes through the lower part of the evaporation wire body along the X direction, and the conveying directions of the conveying channel and the reflux channel are opposite.

[0010] Specifically, a maintenance door is rotatably provided on the other Y-direction side of the evaporation chamber.

[0011] Specifically, a probe replacement port is provided in the middle of the sealing door panel. The door panel assembly further includes a pair of second Y-direction slide rails fixed to the outside of the sealing door panel, and a probe mounting door panel moving along the Y direction on the second Y-direction slide rails. A plurality of crystal oscillators for detecting the remaining amount of the evaporation material in the wire source are provided on the inner side of the probe mounting door panel. When the probe mounting door panel is in close contact with the probe replacement port, the contact surface between the two is sealed.

[0012] Specifically, the first Y-direction slide rails are located on the moving frame, and four universal rollers are provided at the bottom of the moving frame.

[0013] Furthermore, a plurality of support feet are provided at the bottom of the moving frame, and the height of the support feet relative to the moving frame can be adjusted by threads.

[0014] The beneficial effects of the technical solution of the present utility model are as follows:

[0015] The sealing door panel and the wire source mounting rack of this equipment are fixed structures. When the evaporation chamber is evacuated, the sealing door panel closely adheres to the wire source inlet and outlet to separate the evaporation chamber from the outside world, and the wire source will remain in the evaporation chamber. When the evaporation chamber is broken vacuum, the sealing door panel can move along the first Y-direction slide rails, so that the wire source mounting rack moves to the outside of the evaporation chamber, and thus the staff can replace the wire source very conveniently. Here, the first Y-direction slide rails are located outside the evaporation chamber, and only the inner part of the door panel assembly enters the evaporation chamber, so the evaporation material will not accumulate on the sliding contact surface of the first Y-direction slide rails and the door panel assembly to affect the movement of the door panel assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a three-dimensional view of the evaporation equipment of this embodiment;

[0017] Figure 2 It is a positional relationship diagram of the section where the first evaporation chamber of the evaporation line body is located and the first drawer-type evaporation unit;

[0018] Figure 3 It is a positional relationship diagram of the section where the second evaporation chamber of the evaporation line body is located and the second drawer-type evaporation unit.

[0019] The numbers in the figure represent:

[0020] 1 - Evaporation line body, 11 - Conveyor channel, 12a - First evaporation chamber, 12b - Second evaporation chamber, 121 - Wire source inlet and outlet, 122 - Maintenance door, 13 - Return channel, 14a - Feeding lifting mechanism, 14b - Return material lifting mechanism, 15 - Feeding position;

[0021] 2a - First drawer-type evaporation unit, 2b - Second drawer-type evaporation unit, 21 - First Y-direction slide rail, 22 - Door panel assembly, 221 - Sealing door panel, 2221 - Probe replacement port, 222 - Second Y-direction slide rail, 223 - Probe mounting door panel, 224 - Crystal oscillator probe, 23 - Wire source mounting rack, 24 - Wire source, 25 - Moving rack, 251 - Universal roller, 252 - Support foot. Specific embodiments

[0022] The present utility model will be further described in detail below in conjunction with specific embodiments.

[0023] Embodiment:

[0024] As Figure 1 shown, the drawer-type linear evaporation automation equipment of the present utility model includes an evaporation line body 1 and several drawer-type evaporation units (the first drawer-type evaporation unit 2a, the second drawer-type evaporation unit 2b).

[0025] As Figure 1 shown, the evaporation line body 1 includes a conveyor channel 11, several evaporation chambers (the first evaporation chamber 12a, the second evaporation chamber 12b), a return channel 13, a feeding lifting mechanism 14a located at the entrance of the conveyor channel 11, a return material lifting mechanism 14b located at the exit of the conveyor channel 11, and a feeding position 15 located on one side of the feeding lifting mechanism 14a. The conveyor channel 11 and the feeding position 15 are located on both sides of the feeding lifting mechanism 14a in the X direction. The conveyor channel 11 passes through the upper part of the evaporation line body 1 in the X direction, and the return channel 13 passes through the lower part of the evaporation line body 1 in the X direction. The conveying directions of the conveyor channel 11 and the return channel 13 are opposite. The evaporation chambers correspond to the drawer-type evaporation units one by one. Different evaporation chambers are respectively connected to the lower part of the conveyor channel 11. A wire source inlet and outlet 121 is provided on one side of the evaporation chamber in the Y direction, and a maintenance door 122 is rotatably provided on the other side in the Y direction. The X direction and the Y direction are both in the horizontal plane and perpendicular to each other.

[0026] The conveying channel 11 is used to move the glass substrate in the positive X-axis direction and will stay when passing through the evaporation chamber. At this time, the lower surface of the glass substrate faces the line source 24 in the evaporation chamber. The evaporation sources in the line source 24 are arranged along the Y direction, and the glass substrate moves back and forth along the X-axis, so as to obtain a relatively uniform film thickness. When the glass substrate reaches the end of the conveying channel 11, the return material lifting mechanism 14b will lower the glass substrate to the height of the return channel 13, and then let the return channel 13 send the glass substrate that has completed evaporation back to the feeding position. The feeding lifting mechanism 14a can make the glass substrate adapt to the heights of the conveying channel 11 and the return channel 13 to feed and discharge the glass substrate. When the maintenance door 122 is opened, the inside of the evaporation chamber can be maintained and the anti-plating plate can be replaced. The drawer-type evaporation unit can extract the line source 24 from the evaporation inlet and outlet 121, so that the replacement of the line source 24 can be carried out outside the evaporation chamber.

[0027] As Figure 2 and Figure 3 shown, the drawer-type evaporation unit includes a pair of first Y-direction slide rails 21 passing outside the evaporation chamber, a door panel assembly 22 moving along the first Y-direction slide rails 21, and a line source mounting rack 23 provided on the side of the door panel assembly 22 close to the evaporation chamber. The line source mounting rack 23 is used to place the line source 24. The door panel assembly 22 includes a sealing door panel 221. When the sealing door panel 221 is in close contact with the line source inlet and outlet 121, the contact surface between the two is closed.

[0028] The sealing door panel 221 and the line source mounting rack 23 are of a fixed structure. When the evaporation chamber is evacuated, the sealing door panel 221 is in close contact with the line source inlet and outlet 121 to separate the evaporation chamber from the outside world, and the line source 24 will stay in the evaporation chamber; when the evaporation chamber is broken vacuum, the sealing door panel 221 can move along the first Y-direction slide rails 21, so that the line source mounting rack 23 moves to the outside of the evaporation chamber, so that the staff can replace the line source 24 very conveniently. Here, the first Y-direction slide rails 21 are located outside the evaporation chamber, and only the inner part of the door panel assembly 22 enters the evaporation chamber, so the evaporation material will not accumulate on the sliding contact surfaces of the first Y-direction slide rails 21 and the door panel assembly 22 to affect the movement of the door panel assembly 22.

[0029] As Figure 2 and Figure 3 shown, a probe replacement port 2211 is provided in the middle of the sealing door panel 221. The door panel assembly 22 further includes a pair of second Y-direction slide rails 221 fixed to the outside of the sealing door panel 221, and a probe mounting door panel 223 moving along the Y direction on the second Y-direction slide rails 222. A plurality of crystal oscillators 224 for detecting the remaining amount of the evaporation material in the line source 24 are provided on the inner side of the probe mounting door panel 25. When the probe mounting door panel 223 is in close contact with the probe replacement port 2211, the contact surface between the two is closed.

[0030] During the evaporation process, the evaporation material in the line source 24 will continue to be consumed, so the crystal oscillator probe 224 is needed to detect the remaining amount of the evaporation material, so as to replace the line source 24 in time. However, the crystal oscillator probe 224 may sometimes fail to correctly indicate the remaining amount of the evaporation material during operation due to some reasons, and at this time, the crystal oscillator probe 224 needs to be replaced in time. If the line source 24 is pulled out together when the crystal oscillator probe 224 is replaced, the evaporation position will change and cause the uniformity of the continued evaporation to be destroyed. Therefore, a probe installation door plate 224 is set here, and the position of the line source 24 is not moved when the crystal oscillator probe 224 is replaced, so as to ensure that the evaporation quality is not affected.

[0031] like Figure 2 and Figure 3 As shown, the first Y-direction slide rail 21 is located on a moving frame 25 , and four universal rollers 251 and a plurality of support feet 252 are provided at the bottom of the moving frame 25 . The height of the support feet 252 relative to the moving frame 25 can be adjusted by threads.

[0032] In this way, the entire drawer-type evaporation unit is equivalent to a cart, and can be arbitrarily changed in position to provide use for multiple evaporation lines 1. When the drawer-type evaporation unit needs to be moved, the support foot 252 is first raised to leave the ground, so that the drawer-type evaporation unit can be moved by the universal roller 251. After it is put back in place, the support foot 252 is lowered again to contact the ground, so that the drawer-type evaporation unit can be stopped.

[0033] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A drawer-type linear evaporation automation equipment, characterized in that: It includes a vapor deposition line and several drawer-type evaporation units; The evaporation line body includes a conveying channel and a plurality of evaporation chambers, the conveying channel passes through the upper part of the evaporation line body along the X direction, the evaporation chambers correspond to the drawer-type evaporation units one by one, and different evaporation chambers are respectively connected to the lower part of the conveying channel, and a line source inlet and outlet are provided on one side of the Y direction of the evaporation chamber, and the X direction and the Y direction are both located in a horizontal plane and are perpendicular to each other; The drawer-type evaporation unit includes a pair of first Y-direction slide rails passing through the outer side of the evaporation chamber, a door panel assembly moving along the first Y-direction slide rail, and a line source mounting frame arranged on the side of the door panel assembly close to the evaporation chamber, the line source mounting frame is used to place the line source, and the door panel assembly includes a sealing door panel, and when the sealing door panel is tightly attached to the line source inlet and outlet, the contact surface of the two is closed.

2. The drawer-type linear evaporation automation equipment according to claim 1 is characterized in that: The evaporation line body also includes a reflux channel, a feed lifting mechanism located at the entrance of the conveying channel, a return lifting mechanism located at the exit of the conveying channel, and a feed position located on one side of the feed lifting mechanism. The conveying channel and the feed position are located on both sides of the feed lifting mechanism in the X direction. The reflux channel passes through the lower part of the evaporation line body along the X direction, and the conveying channel is opposite to the conveying direction of the reflux channel.

3. The drawer-type linear evaporation automation equipment according to claim 1, characterized in that: The Y-axis of the evaporation chamber is rotated to the other side and an inspection door is provided.

4. The drawer-type linear evaporation automation equipment according to claim 1, characterized in that: A probe replacement port is provided in the middle of the sealing door panel, and the door panel assembly also includes a pair of second Y-direction slide rails fixed to the outer side of the sealing door panel, and a probe mounting door panel moving along the Y-direction on the second Y-direction slide rails. A plurality of crystal oscillator probes for detecting the residual amount of the evaporated material in the line source are provided on the inner side of the probe mounting door panel, and the contact surface of the probe mounting door panel and the probe replacement port is closed when the probe mounting door panel is tightly attached to the probe replacement port.

5. The drawer-type linear evaporation automation equipment according to claim 1, characterized in that: The first Y-direction slide rail is located on a moving frame, and four universal rollers are arranged at the bottom of the moving frame.

6. The drawer-type linear evaporation automation equipment according to claim 5, characterized in that: A plurality of supporting feet are arranged at the bottom of the movable frame, and the height of the supporting feet relative to the movable frame can be adjusted by screw threads.

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