Cooling device for cooling crystal bars of multiple silicon core furnaces

By designing a cooling device for multi-silicon core furnaces, the problem of uneven diameter of multiple silicon rods is solved, uniform control of silicon rod diameter and temperature gradient management are achieved, production efficiency and product quality are improved, and production costs are reduced.

CN223047632UActive Publication Date: 2025-07-01ZHEJIANG JINGYANG ELECTROMECHANICAL CO LTD
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Patent Information

Application Number
CN202421928926.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-08-08
Publication Date
2025-07-01
Estimated Expiration
2034-08-08

AI Technical Summary

Technical Problem

In multi-crystal growth furnaces, it is difficult for the prior art to effectively control the diameter uniformity and temperature gradient of multiple silicon rods, resulting in waste of resources and degradation of product quality during production.

Method used

A cooling device for a multi-silicon core furnace is designed, including a fixed ring, a water inlet and outlet structure and a cooling plate. The cooling plate is equipped with a waist-shaped crystal rod stretching hole and a step hole. Combined with the insulation device, through the waterway design and insulation measures at different locations, uniform cooling and insulation of the crystal rod is achieved, and the diameter tolerance is controlled within 1.5mm.

Benefits of technology

The diameter uniformity control of multiple silicon rods is achieved, reducing resource waste, improving production efficiency and product quality, and reducing production costs.

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Abstract

The utility model relates to the field of crystal bar forming, in particular to a cooling device for cooling crystal bars of a plurality of silicon core furnaces, which comprises a fixing ring, a water inlet and outlet structure and a cooling disc, the cooling disc is arranged at the lower end of the fixing ring, and a water channel is arranged inside the cooling disc. The water inlet and outlet structure is arranged at the upper end of the fixing ring, the lower end of the water inlet and outlet structure communicates with a water channel in the cooling disc, kidney-shaped crystal bar stretching holes which are vertically through are annularly formed in the cooling disc at intervals, and the water channel located in the inner side area of the kidney-shaped crystal bar stretching holes is higher than the water channel located in the outer side area of the kidney-shaped crystal bar stretching holes. A stepped hole communicated with the channel is formed in the bottom of the cooling disc, the diameter of the stepped hole is equal to the connecting line distance between the middle of the kidney-shaped crystal bar stretching hole and the channel, different cooling effects can be achieved for crystal bars at different positions of the inner side and the outer side through the stepped water channel, and the diameter difference of the crystal bars combined with different temperatures of the liquid level can be better controlled. And the diameters of the crystal bars subjected to outer ring stretching forming and inner ring stretching forming are almost the same and uniform.
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Description

Technical Field

[0001] The utility model relates to the field of crystal bar forming, and relates to a cooling device for cooling crystal bars in a multi-rod silicon core furnace. Background Art

[0002] In terms of improving the conversion rate of crystal products, how to improve the drawing speed of crystals is one of the key technologies. Taking the preparation of poly / single crystal silicon as an example, during the entire production process of poly / single crystal silicon, the usage of columnar silicon bars with a diameter of 8 mm to 12 mm is very large. In the actual production process, it is found that the waste materials generated during the preparation of columnar silicon bars, accidentally broken silicon bars, and the scraps generated by poly / single crystal silicon production enterprises during processes such as cutting and crushing are very cumbersome to handle. Many enterprises, for the sake of convenience, directly discard the above-mentioned scraps or store them in the warehouse for a long time. There are also some enterprises that recycle the above-mentioned scraps, draw them into silicon bars through a Czochralski furnace, and then cut the silicon bars into a plurality of columnar silicon bars with dimensions of 8 mm * 8 mm or 10 mm * 10 mm through a multi-wire cutting machine. This not only increases the production cost of columnar silicon bars, but also increases the introduction of impurities during the cutting process, reducing the product quality while causing relatively large resource waste, etc. Therefore, simultaneously drawing multiple crystal bars of the same thickness by the Czochralski method is a difficult problem in the industry.

[0003] Investigations show that currently, when directly drawing multiple silicon bars at one time in a direct-drawing multi-crystal growth furnace in the industry, the diameter tolerance of the drawn silicon bars is more than 2.5 mm, and the control of the diameter of each crystal bar is directly related to the temperature during the drawing of the crystal bar. How to develop a device for cooling crystal bars with a simple structure, convenient installation, and good use effect has become the technical requirement in the industry. Summary of the Utility Model

[0004] The utility model provides a cooling device for cooling crystal bars in a multi-rod silicon core furnace to solve the problems of the prior art.

[0005] The purpose of the utility model can be achieved by the following technical solutions: A cooling device for cooling crystal bars in a multi-rod silicon core furnace includes: a fixing ring, a water inlet and outlet structure, and a cooling disk. The cooling disk is arranged at the lower end of the fixing ring. A water channel is arranged inside the cooling disk. The water inlet and outlet structure is arranged at the upper end of the fixing ring and the lower end is communicated with the water channel inside the cooling disk. The cooling disk is annularly and spacedly provided with waist-shaped crystal bar stretching holes that penetrate up and down. The height of the water channel in the inner area of the waist-shaped crystal bar stretching holes is higher than the height of the water channel in the outer area of the waist-shaped crystal bar stretching holes. A stepped hole communicated with the channel is arranged at the bottom of the cooling disk, and the diameter of the stepped hole is equal to the distance between the middle of the waist-shaped crystal bar stretching hole and the channel connection line.

[0006] For further improvement, the cooling disk includes an upper cover and a disk body. The upper cover is arranged on the disk body, and the upper cover is provided with a second waist-shaped crystal bar stretching hole that matches the waist-shaped crystal bar stretching hole.

[0007] For further improvement, heat insulation devices are provided at the bottom and middle of the cooling plate. The heat insulation devices include a middle heat insulation device and a bottom heat insulation device. A channel is provided in the middle of the cooling plate and inside the waist-shaped crystal bar stretching hole. The middle heat insulation device is arranged in the channel with a clearance fit. The bottom heat insulation device is arranged in the stepped hole. A second channel concentric and of the same size as the channel is provided on the bottom heat insulation device. A crystal bar hole communicating with the inside of the waist-shaped crystal bar stretching hole is provided on the bottom heat insulation device.

[0008] For further improvement, a bottom integral heat insulation device is integrally connected to the lower end of the bottom heat insulation device, and the shape of the bottom integral heat insulation device is the same as that of the upper cover.

[0009] For further improvement, a transparent quartz glass plate matching the shape of the upper cover is provided on the cooling plate.

[0010] Compared with the prior art, the beneficial effects of the cooling device of the present utility model for cooling crystal bars in a multi-tube silicon core furnace are as follows:

[0011] Each waist-shaped crystal bar stretching hole can accommodate two crystal bars for simultaneous drawing. Different cooling effects can be achieved on the crystal bars at different positions on the inner and outer sides through the stepped water channels. For the crystal bars combined with different temperatures of the liquid surface, their diameters can be better controlled, so that the diameters of the crystal bars formed by outer ring stretching and inner ring stretching are uniform and the tolerance is controlled within 1.5 mm. The middle heat insulation device and the bottom heat insulation device in the stepped hole achieve heat insulation for the inner ring crystal bars. The bottom integral heat insulation device is below the bottom heat insulation device and plays a role in heat insulation for the two circles of crystal bars arranged inside and outside. The overall use effect is good. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic structural diagram of the present utility model

[0013] Figure 2 It is a schematic structural diagram of the exploded view of the present utility model

[0014] Figure 3 It is Figure 2 A schematic structural diagram from another perspective

[0015] Figure 4 It is a schematic structural diagram of the cooling plate in the present utility model

[0016] Figure 5 It is a schematic structural diagram of the inside of the cooling plate of the present utility model

[0017] In the figure, 1 is a fixed ring, 2 is a water inlet and outlet structure, 3 is a cooling disk, 31 is a water channel, 32 is a waist-shaped crystal bar stretching hole, 33 is an upper cover, 331 is a second waist-shaped crystal bar stretching hole, 34 is a disk body, 35 is a channel, 4 is a heat preservation device, 41 is a middle heat preservation device, 42 is a bottom heat preservation device, 421 is a second channel, 422 is a crystal bar hole, 43 is a bottom integral heat preservation device, 5 is a stepped hole, and 6 is a transparent quartz glass plate. Detailed implementation mode

[0018] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0019] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0020] The following combines the embodiments and the attached Figures 1 to 5 to further elaborate on the technical solutions of the present invention.

[0021] Embodiment 1

[0022] A cooling device for cooling crystal bars in a multi-barrel silicon core furnace includes: a fixed ring 1, a water inlet and outlet structure 2, and a cooling disk 3. The cooling disk 3 is arranged at the lower end of the fixed ring 1. A water channel 31 is arranged inside the cooling disk 3. The water inlet and outlet structure 2 is arranged at the upper end of the fixed ring 1 and the lower end is communicated with the water channel 31 inside the cooling disk 3. Waist-shaped crystal bar stretching holes 32 that penetrate up and down are annularly spaced on the cooling disk 3. The height of the water channel 31 in the inner region of the waist-shaped crystal bar stretching hole 32 is higher than the height of the water channel 31 in the outer region of the waist-shaped crystal bar stretching hole 32. A stepped hole 5 communicated with the channel 35 is arranged at the bottom of the cooling disk 3. The diameter of the stepped hole 5 is equal to the distance between the middle of the waist-shaped crystal bar stretching hole 32 and the channel 35. The cooling disk 3 includes an upper cover 33 and a disk body 34. The upper cover 33 is arranged on the disk body 34. A second waist-shaped crystal bar stretching hole 331 matching the waist-shaped crystal bar stretching hole 32 is arranged on the upper cover 33.

[0023] In a silicon core furnace, the raw materials are placed in a crucible and melted by a heater, and then cooled and crystallized. Multiple crystal rods are drawn while rotating and lifting by a lifting device. During this process, due to the temperature difference in the liquid level of the entire crucible, the temperature increases from the center to the outside, resulting in a temperature difference at the position of each crystal rod. This will cause the diameters of the drawn crystal rods to be uneven and have a large tolerance.

[0024] The utility model is composed of a water inlet and outlet structure 2, a fixing ring 1, and a cooling disk 3 at the bottom. The cooling medium is sent into the water channel of the cooling disk 3 from the left side through the water inlet and outlet structure 2, and is sent out from the right side of the water outlet structure 2 after cooling the crystal rod. One or more water inlet and outlet structures 2 can be selected according to the actual situation, and the water inlet and outlet angles can also be changed according to the situation. Each waist-shaped crystal rod stretching hole 32 can accommodate two crystal rods to be drawn simultaneously. The crystal rods sequentially pass through the waist-shaped crystal rod stretching hole two 331 of the upper cover 33 and the waist-shaped crystal rod stretching hole 32 of the disk body 34.

[0025] Since the positions of the two groups of crystal rods drawn in each waist-shaped crystal rod stretching hole 32 are different, resulting in a temperature difference between the two groups of crystal rods. Therefore, from the outer circle of the stepped hole 5 to the middle position of the waist-shaped crystal rod stretching hole 32, the water channels in the cooling disk 3 above the stepped hole 5 are in a stepped shape. The height of the water channel part inside the waist-shaped crystal rod stretching hole 32 is higher than the height of the water channel part outside the waist-shaped crystal rod stretching hole 32. Through the stepped water channels, different cooling effects can be achieved for the crystal rods at different positions inside and outside, and the diameter tolerance of the crystal rods combined with different temperatures of the liquid level can be better controlled, making the diameters of the crystal rods formed by stretching the outer circle and the inner circle uniform.

[0026] Embodiment 2

[0027] A cooling device for cooling crystal bars in multiple silicon core furnaces, comprising: a fixing ring 1, a water inlet and outlet structure 2, and a cooling disc 3. The cooling disc 3 is arranged at the lower end of the fixing ring 1. A water channel 31 is arranged inside the cooling disc 3. The water inlet and outlet structure 2 is arranged at the upper end of the fixing ring 1 and the lower end is communicated with the water channel 31 inside the cooling disc 3. Waist-shaped crystal bar stretching holes 32 that penetrate up and down are annularly and spacedly arranged on the cooling disc 3. The height of the water channel 31 in the inner region of the waist-shaped crystal bar stretching hole 32 is higher than the height of the water channel 31 in the outer region of the waist-shaped crystal bar stretching hole 32. A stepped hole 5 communicated with a channel 35 is arranged at the bottom of the cooling disc 3. The diameter of the stepped hole 5 is equal to the distance between the middle of the waist-shaped crystal bar stretching hole 32 and the channel 35. Heat preservation devices 4 are arranged at the bottom and middle of the cooling disc 3. The heat preservation device 4 includes a middle heat preservation device 41 and a bottom heat preservation device 42. A channel 35 is arranged in the middle of the cooling disc 3 and inside the waist-shaped crystal bar stretching hole 32. The middle heat preservation device 41 is arranged in the channel 35 with a clearance fit. The bottom heat preservation device 42 is arranged in the stepped hole 5. A channel two 421 that is concentric and of the same size as the channel 35 is arranged on the bottom heat preservation device 42. A crystal bar hole 422 communicated with the inner side of the waist-shaped crystal bar stretching hole 32 is arranged on the bottom heat preservation device 42. A bottom integral heat preservation device 43 is integrally connected to the lower end of the bottom heat preservation device 42. The shape of the bottom integral heat preservation device 43 is the same as that of the upper cover 33.

[0028] Since the crystal bar loses heat due to cooling during the cooling and stretching forming process, if the heat loss is too fast and the gradient is too large, it will cause uneven crystal grains to form during the solidification of the silicon melt, affecting the crystal structure integrity of the crystal bar. Therefore, heat preservation is carried out through the heat preservation device 4 arranged in the middle and at the bottom. The heat preservation device 4 can be composed of various materials with different thickness combinations of graphite, carbon-carbon, cured felt or other heat insulation and heat preservation materials according to different temperature conditions. The inner ring crystal bar is heat-preserved through the middle heat preservation device 41 in the channel 35 and the bottom heat preservation device 42 in the stepped hole 5, thereby improving the forming effect of the crystal bar. The bottom integral heat preservation device 43 can be composed of various materials with different thickness combinations of graphite, carbon-carbon, cured felt or other heat insulation and heat preservation materials according to different temperature conditions. The bottom integral heat preservation device 43 is below the bottom heat preservation device 42 and plays a role in heat-preserving the two circles of crystal bars arranged inside and outside.

[0029] As a further preferred embodiment, a transparent quartz glass plate 6 that matches the shape of the upper cover 33 is arranged on the cooling disc 3. The transparent quartz glass plate 6 is at the top of the cooling disc, which can play a role in heat-preserving the two circles of crystal bars arranged inside and outside, and is also convenient for the CCD to observe the changes of the crystal bar.

[0030] The preferred specific embodiments of the present utility model have been described in detail above. It should be understood that those of ordinary skill in the art can make many modifications and variations based on the concept of the present utility model without creative work. Therefore, all technical solutions that can be obtained by those skilled in the art in the technical field based on the concept of the present utility model through logical analysis, reasoning, or limited experiments on the basis of the prior art shall fall within the protection scope determined by the claims.

Claims

1. A cooling device for cooling crystal rods in a multi-silicon core furnace, characterized in that: include: A fixing ring, a water inlet and outlet structure and a cooling plate, wherein the cooling plate is arranged at the lower end of the fixing ring, a water channel is arranged inside the cooling plate, the water inlet and outlet structure is arranged at the upper end of the fixing ring and the lower end is connected with the water channel inside the cooling plate, waist-shaped crystal rod stretching holes that pass through the cooling plate are arranged at annular intervals, the height of the water channel located in the inner area of ​​the waist-shaped crystal rod stretching hole is higher than the height of the water channel in the outer area of ​​the waist-shaped crystal rod stretching hole, a step hole connected with the channel is arranged at the bottom of the cooling plate, and the diameter of the step hole is equal to the distance between the middle of the waist-shaped crystal rod stretching hole and the channel.

2. A cooling device for cooling crystal rods in a multi-branch silicon core furnace according to claim 1, characterized in that: The cooling plate comprises an upper cover and a plate body, wherein the upper cover is arranged on the plate body, and a second waist-shaped crystal rod stretching hole matching the waist-shaped crystal rod stretching hole is arranged on the upper cover.

3. The cooling device for cooling crystal rods in a multi-silicon core furnace according to claim 1, characterized in that: The bottom and middle of the cooling plate are provided with insulation devices, and the insulation devices include a middle insulation device and a bottom insulation device. A channel is provided in the middle of the cooling plate and located on the inner side of the waist-shaped crystal rod stretching hole. The middle insulation device is arranged in the channel with a clearance fit, and the bottom insulation device is arranged in the step hole. A second channel which is concentric with the channel and has the same size as the channel is provided on the bottom insulation device, and a crystal rod hole which is connected to the inner side of the waist-shaped crystal rod stretching hole is provided on the bottom insulation device.

4. A cooling device for cooling crystal rods in a multi-branch silicon core furnace according to claim 3, characterized in that The lower end of the bottom insulation device is integrally connected with a bottom integral insulation device, and the shape of the bottom integral insulation device is the same as that of the upper cover.

5. The cooling device for cooling crystal rods in a multi-silicon core furnace according to claim 3, characterized in that: The cooling plate is provided with a transparent quartz glass plate matching the shape of the upper cover.