Multi-crystal growing furnace cooling device convenient for observing crystal bars
By designing a cooling device with stepped waterways and crystal rod observation holes in multiple crystal growth furnaces, the problems of uneven diameters of crystal rods and inconvenient observation are solved, and the uniformity of crystal rod diameters is improved and the precise control of growth conditions is achieved.
Patent Information
- Application Number
- CN202421917586.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-08
- Publication Date
- 2025-07-01
- Estimated Expiration
- 2034-08-08
AI Technical Summary
In the existing multi-crystal growth furnace, the crystal rod diameter is uneven, and the cooling device is not convenient for observing the growth of the crystal rod.
A multi-crystal growth furnace cooling device including a fixed ring, an inlet and outlet structure, a cooling plate and a thermal insulation device is designed. The cooling plate is equipped with a stepped water channel and a crystal rod observation hole. The stepped water channel reduces the temperature difference, and the crystal rod observation hole is convenient for observing the growth of the crystal rod.
Through the step-type waterway design, the temperature difference of the crystal rod is reduced, the uniformity of the crystal rod diameter is improved, and the quality of the crystal rod is improved. Through the design of the crystal rod observation hole, accurate observation and control of the growth of the crystal rod is achieved, the generation of unqualified products is reduced, and the utilization rate of materials is improved.
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Figure CN223047639U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of crystal bar forming, and relates to a cooling device for a multi-crystal growth furnace for facilitating the observation of crystal bars. Background Art
[0002] At present, in the vertical multi-crystal growth furnace in the industry, multiple silicon bars are directly pulled at one time. The raw materials are placed in a crucible, melted by a heater, and then cooled and crystallized. Through a lifting device, multiple crystal bars are pulled out while rotating and lifting. In this process, due to the temperature difference in the liquid level of the entire crucible, there is a temperature difference at the position where each crystal bar is located, which will cause the diameters of the pulled crystal bars to be uneven. How to develop a device for cooling crystal bars with a simple structure, convenient installation and good use effect has become the technical requirement in the industry, and the current device is not easy to observe the growth of crystal bars.
[0003] Therefore, in order to solve the deficiencies in the prior art, it is necessary to design a cooling device for a multi-crystal growth furnace for facilitating the observation of crystal bars with a simple structure. Content of the Utility Model
[0004] The utility model provides a cooling device for a multi-crystal growth furnace for facilitating the observation of crystal bars to solve the problems of the prior art.
[0005] The purpose of the utility model can be achieved by the following technical solutions: A cooling device for a multi-crystal growth furnace for facilitating the observation of crystal bars includes: a fixing ring, a water inlet and outlet structure, a cooling disk and a heat preservation device. The cooling disk is arranged at the lower end of the fixing ring. A water channel is arranged inside the cooling disk. The water inlet and outlet structure is arranged at the upper end of the fixing ring and the lower end is communicated with the water channel inside the cooling disk. A stepped water channel is arranged inside the cooling disk. An inner crystal bar hole and an outer crystal bar hole for accommodating crystal bars are arranged inside the stepped water channel in a ring shape. A crystal bar observation hole for observing the inner crystal bar or the outer crystal bar is arranged on the cooling disk. The heat preservation device is arranged in the middle channel and at the bottom of the cooling disk.
[0006] Further improvement: The crystal bar observation hole is located inside the middle channel of the cooling disk, and the crystal bar observation hole is an arc-shaped observation hole.
[0007] Further improvement: The crystal bar observation hole is located inside the stepped water channel. The crystal bar observation hole extends inward to the middle channel to form an observation inclined plane. The middle part of the crystal bar observation hole includes a waist-shaped hole. The distance from the outermost side of the waist-shaped hole to the connection line of the middle channel is equal to the distance from the outer crystal bar hole to the connection line of the middle channel. The distance from the innermost side of the waist-shaped hole to the connection line of the middle channel is equal to the distance from the inner crystal bar hole to the connection line of the middle channel. The crystal bar observation hole is located between the inner crystal bar hole and the outer crystal bar hole arranged at the head and the tail.
[0008] Further improvement: The stepped water channel inside the cooling disk is integrally formed.
[0009] Compared with the prior art, the beneficial effects of the cooling device for multiple crystal growth furnaces of the utility model for facilitating the observation of crystal bars are as follows:
[0010] The stepped water channel design realizes the cooling effect on crystal bars at different positions through the internally winding and circuitous structure, reduces the temperature difference, makes the diameter difference of the drawn crystal bars smaller, improves the diameter uniformity of the crystal bars, and enhances the quality of the crystal bars; the innovative design of the crystal bar observation hole, the arc-shaped observation hole and the waist-shaped hole extending inwards to form an observation inclined plane, selects the overall inner and outer circle crystal bar diameters of the inner circle crystal bar observation hole or the overall inner and outer circle crystal bar diameters of the outer circle crystal bar observation hole according to the actual situation, accurately controls the crystal bar diameter, reduces unqualified products, and improves the material utilization rate. Description of the Drawings
[0011] Figure 1 Structural schematic diagram of Part I of the utility model
[0012] Figure 2 Structural schematic diagram of Part II of the utility model
[0013] Figure 3 is Figure 1 Structural schematic diagram of the internal cooling disk
[0014] Figure 4 is Figure 2 Structural schematic diagram of the internal cooling disk
[0015] Figure 5 is Figure 4 Structural schematic diagram from another perspective
[0016] Figure 6 Structural schematic diagram of the sectional view of the utility model
[0017] In the figure, 1 - fixing ring, 2 - water inlet and outlet structure, 3 - cooling disk, 31 - stepped water channel, 32 - inner layer crystal bar hole, 33 - outer layer crystal bar hole, 34 - middle channel, 4 - crystal bar observation hole, 41 - observation inclined plane, 42 - waist-shaped hole, 5 - heat preservation device. Specific Embodiments
[0018] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.
[0019] In the description of the present utility model, it should be noted that unless otherwise clearly defined and limited, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0020] The following will further elaborate on the technical solutions of the present utility model in conjunction with the embodiments and the attached Figures 1 to 6 drawings.
[0021] Embodiment 1
[0022] A cooling device for multiple crystal growth furnaces facilitating the observation of crystal rods, comprising: a fixing ring 1, a water inlet and outlet structure 2, a cooling plate 3, and a heat preservation device 5. The cooling plate 3 is arranged at the lower end of the fixing ring 1. A water channel 31 is arranged inside the cooling plate 3. The water inlet and outlet structure 2 is arranged at the upper end of the fixing ring 1 and its lower end is communicated with the water channel 31 inside the cooling plate 3. A stepped water channel 31 is arranged inside the cooling plate 3. An inner crystal rod hole 32 and an outer crystal rod hole 33 for accommodating crystal rods are arranged in the inner ring of the stepped water channel 31. A crystal rod observation hole 4 for observing the inner or outer crystal rod is arranged on the cooling plate 3. The heat preservation device 5 is arranged in the middle channel 34 and at the bottom of the cooling plate 3. The crystal rod observation hole 4 is located inside the middle channel 34 of the cooling plate 3, and the crystal rod observation hole 4 is an arc-shaped observation hole.
[0023] As Figures 1 to 6 shown, the working principle of the present utility model: Through the internally meandering stepped water channel 31, steps are formed in the outer shape to achieve different degrees of cooling effects on crystal rods at different positions, reduce the temperature difference at different positions, make the diameter difference of the drawn crystal rods smaller, make the diameter more uniform, and improve the quality. At the same time, the crystal rod observation hole 4 inside the middle channel 34 of the cooling plate 3 is used for a CCD to observe the inner ring of crystal rods. The CCD detection provides data. The software program processes the data, and then according to the set target diameter, compares the diameter detected by the CCD, automatically synchronously adjusts the stretching speeds of the inner and outer crystal rods through a controller to control the diameter, and then adjusts the temperature by comparing the actual stretching speed with the set target stretching speed deviation, so that the diameter is stabilized within the set range. After controlling the diameter of the inner ring of crystal rods, the outer ring of crystal rods will also change simultaneously with the inner ring of crystal rods. The setting of the heat preservation device helps to maintain the stability of the crystal rod growth environment.
[0024] Embodiment 2
[0025] A cooling device for multiple crystal growth furnaces facilitating the observation of crystal bars, comprising: a fixing ring 1, a water inlet and outlet structure 2, a cooling plate 3, and a heat preservation device 5. The cooling plate 3 is arranged at the lower end of the fixing ring 1. A water channel 31 is provided inside the cooling plate 3. The water inlet and outlet structure 2 is arranged at the upper end of the fixing ring 1 and its lower end is communicated with the water channel 31 inside the cooling plate 3. A stepped water channel 31 is provided inside the cooling plate 3. An inner crystal bar hole 32 and an outer crystal bar hole 33 for accommodating crystal bars are provided in the inner ring of the stepped water channel 31. A crystal bar observation hole 4 for observing the inner or outer crystal bar is provided on the cooling plate 3. The heat preservation device 5 is arranged in the middle channel 34 and at the bottom of the cooling plate 3. The crystal bar observation hole 4 is located inside the stepped water channel 31. The crystal bar observation hole 4 extends inwards to the middle channel 34 to form an observation inclined plane 41. The middle part of the crystal bar observation hole 4 includes an oval hole 42. The distance from the outermost side of the oval hole 42 to the connection line of the middle channel 34 is equal to the distance from the outer crystal bar hole 33 to the connection line of the middle channel 34. The distance from the innermost side of the oval hole 42 to the connection line of the middle channel 34 is equal to the distance from the inner crystal bar hole 32 to the connection line of the middle channel 34. The crystal bar observation hole 4 is located between the inner crystal bar hole 32 and the outer crystal bar hole 33 arranged at the head and the tail.
[0026] The observation inclined plane 41 of the oval hole 42 is for a CCD to observe an outer ring crystal bar arranged inside the oval hole 42. The CCD detection provides data. The software program processes the data, and then according to the set target diameter, compares the diameter detected by the CCD, automatically synchronously adjusts the stretching speeds of the inner and outer crystal bars through a controller to control the diameter, and then adjusts the temperature by comparing the actual drawing speed with the set target drawing speed deviation, so that the diameter is stabilized within the set range. After controlling the diameter of the outer ring crystal bar, the inner ring crystal bar will also change simultaneously with the outer ring crystal bar.
[0027] As a further preferred embodiment, the stepped water channel 31 inside the cooling plate 3 is integrally formed, and the strength and rigidity of the overall processed body are higher.
[0028] The preferred specific embodiments of the present invention have been described in detail above. It should be understood that those of ordinary skill in the art can make many modifications and variations according to the concept of the present invention without creative labor. Therefore, all technical solutions that can be obtained by those skilled in the art in the technical field of the present invention based on the concept of the present invention through logical analysis, reasoning or limited experiments on the basis of the existing technology should be within the protection scope determined by the claims.
Claims
1. A cooling device for a multi-branch crystal growth furnace that facilitates observation of crystal rods, characterized in that: include: A fixing ring, a water inlet and outlet structure, a cooling plate and a heat preservation device, wherein the cooling plate is arranged at the lower end of the fixing ring, a water channel is arranged inside the cooling plate, the water inlet and outlet structure is arranged at the upper end of the fixing ring and the lower end is connected with the water channel inside the cooling plate, a stepped water channel is arranged inside the cooling plate, an inner ring of the stepped water channel is provided with inner layer crystal rod holes and outer layer crystal rod holes for accommodating crystal rods, a crystal rod observation hole for observing the inner layer crystal rod or the outer layer crystal rod is provided on the cooling plate, and the heat preservation device is arranged in the middle channel and the bottom of the cooling plate.
2. A cooling device for a multi-branch crystal growth furnace for facilitating observation of crystal rods according to claim 1, characterized in that: The crystal rod observation hole is located at the inner side of the middle channel of the cooling plate, and the crystal rod observation hole is an arc-shaped observation hole.
3. The cooling device for a multi-branch crystal growth furnace for facilitating observation of crystal rods according to claim 1, characterized in that: The crystal rod observation hole is located inside the stepped water channel, and the crystal rod observation hole extends inward to the middle channel to form an observation slope. The middle part of the crystal rod observation hole includes a waist-shaped hole, and the distance between the outermost side of the waist-shaped hole and the middle channel is equal to the distance between the outer crystal rod hole and the middle channel, and the distance between the innermost side of the waist-shaped hole and the middle channel is equal to the distance between the inner crystal rod hole and the middle channel. The crystal rod observation hole is located between the inner crystal rod hole and the outer crystal rod hole arranged at the head and tail.
4. The cooling device for a multi-branch crystal growth furnace for facilitating observation of crystal rods according to claim 1, characterized in that: The stepped water channel inside the cooling plate is integrally formed.