Fluid heating device

Abstract

The utility model relates to the technical field of heating equipment, in particular to a fluid heating device which is used for a semiconductor degumming machine, the degumming machine comprises a fluid pipeline, the heating device comprises a heating assembly, the heating assembly comprises a fluid inlet and a fluid outlet, the fluid inlet and the fluid outlet are communicated with the fluid pipeline, and the fluid pipeline is communicated with the fluid pipeline. The heating assembly comprises an electric heating tube and an inner core located in the electric heating tube, a fluid gap is formed between the inner core and the electric heating tube, the fluid gap is communicated with a fluid inlet and a fluid outlet, and the inner core comprises a tube body and plugs blocking the two ends of the tube body respectively. The heating assembly is arranged in the fluid pipeline, the flowing distance of the heated fluid is shortened, heat loss is reduced, the temperature of the fluid sprayed out of the jet nozzle of the semiconductor degumming machine can be controlled, the inner core is arranged in the electric heating pipe, and when the fluid flows in the fluid gap, the heat exchange efficiency of the fluid and the electric heating pipe is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of heating equipment, in particular to a fluid heating device. Background Art

[0002] A semiconductor wet stripping machine needs to heat stripping liquids such as NMP, DMSO, and TMAH. The heated stripping liquid is sprayed onto the part to be stripped through a spray nozzle. In related technologies, the equipment for heating the stripping liquid generally adopts a heater with a PTC outer stainless steel shell, which has a relatively large outer diameter size and is usually placed at the bottom of the stripping machine, occupying a large space, and its heating efficiency is relatively low. Summary of the Utility Model

[0003] An object of the utility model is to solve at least one of the problems pointed out in the background art, and a fluid heating device is proposed.

[0004] In order to achieve the above object, the utility model adopts the following technical scheme:

[0005] A fluid heating device is used for a semiconductor stripping machine. The stripping machine includes a fluid pipeline. The heating device includes a heating component. The heating component includes a fluid inlet and a fluid outlet. The fluid inlet and the fluid outlet are communicated with the fluid pipeline. The heating component includes an electric heating tube and an inner core located inside the electric heating tube. There is a fluid gap between the inner core and the electric heating tube. The fluid gap is communicated with the fluid inlet and the fluid outlet. The inner core includes a tube body and plugs respectively blocking both ends of the tube body.

[0006] At least one of the plugs includes a first blocking part. One end of the first blocking part is open. The open end of the first blocking part has a first connecting part. The first connecting part is fixedly connected with the tube body.

[0007] The heating component includes two first end components. The two first end components are respectively located at both ends of the electric heating tube. At least one of the first end components includes a first tube part and a first cover part. One end of the first cover part is fixedly connected or integrally formed with the first tube part. The other end of the first cover part is fixedly sealed with the electric heating tube. The first tube part is communicated with the fluid gap;

[0008] And / or one side of the first blocking part away from the tube body has a first conical surface;

[0009] And / or one end of the first connecting part close to the tube body has a first stepped ring. The first stepped ring is placed inside the tube body.

[0010] At least one of the plugs includes a second pipe portion and a second plugging portion. One end of the second plugging portion is open, and the open end of the second plugging portion has a second connecting portion, which is fixedly connected to the pipe body. The second pipe portion is fixedly connected or integrally formed on the side of the second plugging portion away from the pipe body. The second pipe portion has a communication hole, and the second pipe portion communicates with the fluid gap through the communication hole.

[0011] The heating assembly includes two first end components, which are respectively located at both ends of the electric heating pipe. At least one of the first end components includes a cover shell. The second pipe portion penetrates through the cover shell. One end of the cover shell is fixedly sealed with the second pipe portion, and the other end of the cover shell is fixedly sealed with the electric heating pipe. The communication hole is located in the chamber between the cover shell and the electric heating pipe.

[0012] The side of the second plugging portion away from the pipe body has a second conical surface;

[0013] And / or one end of the second connecting portion close to the pipe body has a second stepped ring, and the second stepped ring is placed inside the pipe body.

[0014] The heating assembly includes a housing, which includes two half-shells. The half-shells have a groove cavity. The half-shells have a first limiting protrusion and a second limiting protrusion in the groove cavity. The first limiting protrusion has a first notch, and the second limiting protrusion has a second notch. At least part of the cover shell is limited in the first notch, and at least part of the second pipe portion is limited in the second notch.

[0015] The heating assembly includes a flow disturbing member, which is located in the fluid gap between the inner core and the electric heating pipe, and at least part of the flow disturbing member is fixed to the inner core.

[0016] The flow disturbing member includes a spiral portion, at least part of which is fixed to the inner core. One end of the spiral portion has a first support portion and the other end has a second support portion. The inner diameter of the first support portion is d1, the inner diameter of the spiral portion is d2, and the inner diameter of the second support portion is d3, where d1≥d2>d3. The outer diameter of the inner core is D, where d3<D≤d2.

[0017] The electric heating pipe includes a metal pipe substrate, an insulating layer is attached to the surface of the metal pipe substrate, and a nano electric heating film is attached to the surface of the insulating layer. At least two electrode layers are provided on the nano electric heating film;

[0018] Or the electric heating pipe includes a heat-conducting pipe substrate, and an electric heating wire or a thick film heating element is wound around the outer circumference of the heat-conducting pipe substrate.

[0019] A fluid heating device proposed by the present utility model has the beneficial effects that the heating component of the device is arranged in the fluid pipeline, shortening the flow distance of the fluid after heating, reducing heat loss, and being beneficial to controlling the temperature of the fluid ejected from the spray nozzle of the semiconductor debonder. Compared with the traditional PTC heating, an inner core is arranged inside the electric heating tube of the device, and when the fluid flows inside the fluid gap, the heat exchange efficiency between the fluid and the electric heating tube is improved. Description of the Drawings

[0020] Figure 1 Schematic structural diagram of the heating component of the present utility model at the position of the debonder;

[0021] Figure 2 Schematic structural diagram of the first embodiment of the plug of the present utility model;

[0022] Figure 3 Schematic assembly structure diagram of the plug and the flow disturbing member of the first embodiment of the present utility model;

[0023] Figure 4 Schematic assembly structure diagram of the first end component of the first embodiment of the present utility model and the flow disturbing member;

[0024] Figure 5 Schematic diagram of the first end component and the electric heating tube of the first embodiment of the present utility model Figure 1 ;

[0025] Figure 6 Schematic diagram of the first end component and the electric heating tube of the first embodiment of the present utility model Figure 2 ;

[0026] Figure 7 Schematic assembly structure diagram of the first end component of the first embodiment of the present utility model and the half shell for limiting;

[0027] Figure 8 Schematic overall structure diagram of the heating component of the present utility model;

[0028] Figure 9 Schematic half-sectional structure diagram of the first end component, the electric heating tube and the inner core of the first embodiment of the present utility model;

[0029] Figure 10 Schematic half-sectional structure diagram of the second embodiment of the plug of the present utility model;

[0030] Figure 11 Schematic assembly structure diagram of the flow disturbing member and the tube body of the second embodiment of the plug of the present utility model;

[0031] Figure 12 Schematic assembled structure diagram of the second embodiment of the plug of the present utility model;

[0032] Figure 13 Schematic diagram of the assembly structure of the first end component and the second pipe part in the second embodiment of the present utility model;

[0033] Figure 14 Schematic diagram of the assembly structure of the first end component and the electric heating pipe in the second embodiment of the present utility model;

[0034] Figure 15 Schematic diagram of the assembly structure of the first end component and the half-shell limit in the second embodiment of the present utility model;

[0035] Figure 16 Schematic diagram of the cross-sectional structure of the flow disturbing member in the first embodiment of the inner core of the present utility model.

[0036] In the figure: debonder 100, fluid pipeline 101, inner core 1, pipe body 2, plug 3, first connection part 301, first stepped ring 3011, first sealing part 302, second pipe part 303, communication hole 304, second sealing part 305, second connection part 306, flow disturbing member 4, spiral part 401, first support part 402, second support part 403, first end component 7, cover shell 71, first pipe part 8, first cover part 9, electric heating pipe 10, outer shell 12, half shell 121, cavity 14, first limit protrusion 15, second limit protrusion 16, first notch 17, second notch 18, 19, 20, heating assembly 21, fluid inlet 211, fluid outlet 212, fluid gap 22. Specific embodiments

[0037] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments.

[0038] Refer to Figures 1 - 16 , a fluid heating device for a semiconductor debonder 100. The debonder 100 includes a fluid pipeline 101. The heating device includes a heating assembly 21. The heating assembly 21 includes a fluid inlet 211 and a fluid outlet 212. The fluid inlet 211 and the fluid outlet 212 are communicatively installed on the fluid pipeline 101. The heating assembly 21 includes an electric heating pipe 10 and an inner core 1 located inside the electric heating pipe 10. There is a fluid gap 22 between the inner core 1 and the electric heating pipe 10. The two ends of the fluid gap 22 are respectively communicatively connected to the fluid inlet 211 and the fluid outlet 212. The inner core 1 includes a pipe body 2 and plugs 3 respectively plugging the two ends of the pipe body 2.

[0039] The heating component of this device is arranged in the fluid pipeline, shortening the flow distance of the fluid after heating, reducing heat loss, and being beneficial to controlling the temperature of the fluid ejected from the spray nozzle of the semiconductor debonder. Compared with traditional PTC heating, an inner core is arranged inside the electric heating tube of this device. When the fluid flows inside the fluid gap, the heat exchange efficiency between the fluid and the electric heating tube is improved.

[0040] As an implementation manner of the electric heating tube 10, the electric heating tube includes a metal tube matrix, an insulating layer is attached to the surface of the metal tube matrix, a nano-electric heating film is attached to the surface of the insulating layer, and at least two electrode layers are arranged on the nano-electric heating film at intervals. By energizing the electrode layers, the nano-electric heating film generates heat, and then conducts the heat to the fluid flowing through the fluid gap, such as the degumming liquid. The nano-electric heating film has a fast heating speed, high thermal efficiency, and is energy-saving and environmentally friendly.

[0041] As another implementation manner of the electric heating tube 10, the electric heating tube includes a tube matrix, an electric heating wire is wound outside the tube matrix, or a thick film heating component is wrapped outside the tube matrix.

[0042] As the first implementation manner of the plug 3, refer to Figure 2 , at least one plug 3 includes a first sealing portion 302. One end of the first sealing portion 302 is open, and the open end of the first sealing portion 302 has a first connecting portion 301. The first connecting portion 301 is fixedly connected to the tube body 2. By plugging the two ends of the hollow tube body with plugs, a closed inner core is formed, reducing the weight of the entire inner core.

[0043] As the first implementation manner of the first end component, refer to Figure 3 , the heating component 21 includes two first end components 7. The two first end components 7 are respectively located at both ends of the electric heating tube 10. At least one first end component 7 includes a first tube portion 8 and a first cover portion 9. One end of the first cover portion 9 is fixedly connected or integrally formed with the first tube portion 8, and the other end of the first cover portion 9 is hermetically fixed to the electric heating tube 10. The first tube portion 8 communicates with the fluid gap 22. By closing both ends of the electric heating tube 10 with two first end components 7, a flow channel for the fluid to pass through is formed;

[0044] And / or refer to Figure 2 , a first conical surface 3021 is provided on the side of the first sealing portion 302 away from the tube body 2. The first sealing portion is set as a conical structure, improving the impact resistance and explosion-proof performance of the entire inner core and reducing the resistance of the fluid passing through;

[0045] And / or, refer to Figure 2 , a first stepped ring 3011 is provided at one end of the first connecting portion 301 close to the tube body 2. The first stepped ring 3011 is placed inside the tube body 2. Through the cooperation of the first stepped ring 3011 and the tube body 2, the convenience and stability of assembly are improved.

[0046] As the second implementation of the plug 3, refer to Figures 10 - 14 , at least one plug 3 includes a second pipe portion 303 and a second plugging portion 305. One end of the second plugging portion 305 is open, and the open end of the second plugging portion 305 has a second connecting portion 306. The second connecting portion 306 is fixedly connected to the pipe body 2. The second pipe portion 303 is fixedly connected or integrally formed on the side of the second plugging portion 305 away from the pipe body 2. The second pipe portion 303 has a communication hole 304, and the second pipe portion 303 communicates with the fluid gap 22 through the communication hole 304. Refer to Figure 10 , Figure 12 , the fluid enters the fluid gap from the second pipe portion of one plug 3 through the communication hole 304, and after being heated by the electric heating pipe, it is discharged through the communication hole and the second pipe portion of another plug. The inner core of this structure and the electric heating pipe 10 are in a stable fixed state, the assembly is more firm, and there will be no shaking during use, and the use effect is better.

[0047] As the second implementation of the first end component 7, refer to Figure 13 , Figure 14 , the heating assembly 21 includes first end components 7 located at both ends of the electric heating pipe 10 respectively. One end of one first end component 7 is a fluid inlet 211, and one end of the other first end component 7 is a fluid outlet 212. At least one first end component 7 includes a cover shell 71. The second pipe portion 303 penetrates through the cover shell 71. One end of the cover shell 71 is fixedly sealed with the second pipe portion 303, and the other end of the cover shell 71 is fixedly sealed with the electric heating pipe 10. The communication hole 304 is located in the chamber between the cover shell 71 and the electric heating pipe 10. The two ends of the electric heating pipe 10 are closed by the cover shell 71, and it serves as an intermediate connecting member between the second pipe portion and the electric heating pipe;

[0048] And / or the side of the second plugging portion 305 away from the pipe body 2 has a second tapered surface 3051 to improve the fluid passing property and the explosion-proof property of the whole device;

[0049] And / or the end of the second connecting portion 306 close to the pipe body 2 has a second stepped ring 3061. The second stepped ring is placed inside the pipe body 2 to improve the connection stability between the second connecting portion and the pipe body 2 and the convenience of assembly.

[0050] Refer to Figure 7 , Figure 8, the heating assembly 21 includes a housing 12, the housing 12 includes two half - shells 121, the half - shell 121 has a groove cavity 14, the half - shell 121 located within the groove cavity 14 has a first limiting protrusion 15 and a second limiting protrusion 16, the first limiting protrusion 15 has a first notch 17, the second limiting protrusion 16 has a second notch 18, at least part of the cover shell 71 is limited within the first notch 17, and at least part of the second pipe portion 303 is limited within the second notch 18. The first - end component is limited by the two half - shells, improving the stability and convenience of the assembly of the housing with the first - end component and the electric heating tube.

[0051] The heating assembly 21 includes a flow - disturbing member 4, the flow - disturbing member 4 is located in the fluid gap 22 between the inner core 1 and the electric heating tube 10, and at least part of the flow - disturbing member 4 is fixed to the inner core 1. The fluid passing through the fluid gap is disturbed by the flow - disturbing member, improving the heat - exchange effect.

[0052] Reference Figure 4 , Figure 9 , the flow - disturbing member 4 includes a spiral part 401, at least part of the spiral part 401 is fixed to the inner core 1. One end of the spiral part 401 has a first support part 402 and the other end has a second support part 403. The inner diameter of the first support part 402 is d1, the inner diameter of the spiral part 401 is d2, and the inner diameter of the second support part 403 is d3, where d1≥d2>d3, and the outer diameter of the inner core 1 is D, where d3<D≤d2. The flow - disturbing member is set as a variable - diameter structure. Using the large inner diameter of the first support part 402, the inner core can be better inserted into the interior of the flow - disturbing member, and one end of the inner core is limited by the second support part 403. And the spiral part 401 of the flow - disturbing member is tightly connected to the inner core by welding or interference fit, preventing relative sliding between the flow - disturbing member and the inner core.

[0053] Reference Figure 12 , when adopting the second implementation manner of the plug, the flow - disturbing member 4 can also only adopt the spiral part 401.

[0054] The above - mentioned is only the preferred specific implementation manner of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model, according to the technical solution of the present utility model and its inventive concept, through equivalent replacement or change, the obtained technical solutions, concepts, and designs should all be covered within the protection scope of the present utility model.

Claims

1. A fluid heating device, characterized in that: Used in a semiconductor degumming machine (100), the degumming machine (100) comprises a fluid pipeline (101), the heating device comprises a heating component (21), the heating component (21) comprises a fluid inlet (211) and a fluid outlet (212), the fluid inlet (211) and the fluid outlet (212) are connected to the fluid pipeline (101), the heating component (21) comprises an electric heating tube (10), an inner core (1) located inside the electric heating tube (10), a fluid gap (22) is provided between the inner core (1) and the electric heating tube (10), the fluid gap (22) is connected to the fluid inlet (211) and the fluid outlet (212), the inner core (1) comprises a tube body (2), and plugs (3) for respectively sealing the two ends of the tube body (2).

2. A fluid heating device according to claim 1, characterized in that: At least one of the plugs (3) comprises a first blocking portion (302), one end of the first blocking portion (302) is open, the open end of the first blocking portion (302) has a first connecting portion (301), and the first connecting portion (301) is fixedly connected to the tube body (2).

3. A fluid heating device according to claim 2, characterized in that: The heating component (21) comprises two first end components (7), the two first end components (7) are respectively located at two ends of the electric heating pipe (10), at least one of the first end components (7) comprises a first pipe portion (8) and a first cover portion (9), one end of the first cover portion (9) is fixedly connected to or integrally formed with the first pipe portion (8), the other end of the first cover portion (9) is sealed and fixed to the electric heating pipe (10), and the first pipe portion (8) is connected to the fluid gap (22); and / or the first blocking portion (302) has a first conical surface (3021) on a side away from the tube body (2); And / or the first connecting portion (301) has a first step ring (3011) at one end close to the tube body (2), and the first step ring (3011) is placed inside the tube body (2).

4. A fluid heating device according to claim 1, characterized in that: At least one of the plugs (3) comprises a second tube portion (303) and a second sealing portion (305); one end of the second sealing portion (305) is open; the open end of the second sealing portion (305) has a second connecting portion (306); the second connecting portion (306) is fixedly connected to the tube body (2); the second tube portion (303) is fixedly connected or integrally formed on a side of the second sealing portion (305) away from the tube body (2); the second tube portion (303) has a connecting hole (304); the second tube portion (303) is connected to the fluid gap (22) through the connecting hole (304).

5. A fluid heating device according to claim 4, characterized in that: The heating component (21) comprises two first end components (7), the two first end components (7) are respectively located at two ends of the electric heating tube (10), at least one of the first end components (7) comprises a cover shell (71), the second tube portion (303) passes through the cover shell (71), one end of the cover shell (71) is sealed and fixed to the second tube portion (303), the other end of the cover shell (71) is sealed and fixed to the electric heating tube (10), and the connecting hole (304) is located in the chamber between the cover shell (71) and the electric heating tube (10).

6. A fluid heating device according to claim 4, characterized in that: The second blocking portion (305) has a second conical surface (3051) on a side away from the tube body (2); And / or the second connecting portion (306) has a second step ring (3061) at one end close to the tube body (2), and the second step ring is placed inside the tube body (2).

7. A fluid heating device according to claim 5, characterized in that: The heating component (21) comprises an outer shell (12), the outer shell (12) comprises two half shells (121), the half shell (121) has a groove cavity (14), the half shell (121) is located in the groove cavity (14) and has a first limiting protrusion (15) and a second limiting protrusion (16), the first limiting protrusion (15) has a first notch (17), the second limiting protrusion (16) has a second notch (18), the cover shell (71) is at least partially limited in the first notch (17), and the second tube portion (303) is at least limited in the second notch (18).

8. A fluid heating device according to any one of claims 1 to 7, characterized in that: The heating component (21) comprises a spoiler (4), the spoiler (4) is located in the fluid gap (22) between the inner core (1) and the electric heating tube (10), and the spoiler (4) is at least partially fixed to the inner core (1).

9. A fluid heating device according to claim 8, characterized in that: The spoiler (4) comprises a spiral portion (401), wherein the spiral portion (401) is at least partially fixed to the inner core (1), wherein one end of the spiral portion (401) has a first support portion (402) and the other end has a second support portion (403), wherein the inner diameter of the first support portion (402) is d1, the inner diameter of the spiral portion (401) is d2, and the inner diameter of the second support portion (403) is d3, wherein d1≥d2>d3, and the outer diameter of the inner core (1) is D, wherein d3<D≤d2.

10. A fluid heating device according to any one of claims 1 to 7 and 9, characterized in that: The electric heating tube (10) comprises a metal tube substrate, an insulating layer is attached to the surface of the metal tube substrate, a nano electric heating film is attached to the surface of the insulating layer, and at least two electrode layers are arranged at intervals on the nano electric heating film; Alternatively, the electric heating pipe (10) comprises a heat-conducting pipe base, and an electric heating wire or a thick film heating element is wound around the outer circumference of the heat-conducting pipe base.

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