Vacuum environment device capable of carrying out continuous variable temperature measurement

Abstract

The utility model provides a vacuum environment device capable of carrying out continuous variable temperature measurement, which relates to a vacuum environment device and comprises a vacuum furnace body, a thermocouple switching device and a transfer piece, the thermocouple switching device comprises a telescopic box installed on one side of the vacuum furnace body through a connecting support, a stepping motor installed in the telescopic box, gears, racks, a guide rail, a low-temperature thermocouple and a high-temperature thermocouple, the stepping motor is fixed to the telescopic box, and the driving end of the stepping motor is in meshing transmission with two sets of racks arranged in parallel through the gears; the two groups of racks are matched with a guide rail fixed in the telescopic box in a sliding connection manner through corresponding sliding blocks, and are respectively connected with a low-temperature thermocouple and a high-temperature thermocouple, and the low-temperature thermocouple and the high-temperature thermocouple alternately penetrate into the vacuum furnace body to measure the temperature under the pushing of the respective racks; and a penetrating channel through which the low-temperature thermocouple and the high-temperature thermocouple penetrate and which is provided with a sealing ring is also arranged in the transfer piece. The continuous temperature change measuring device can realize a continuous temperature change measuring effect in a continuous temperature change environment.

Description

Technical Field

[0001] The utility model relates to a vacuum environment device, in particular to a vacuum environment device capable of continuously varying temperature measurement. Background Art

[0002] Since a single thermocouple on the current market cannot meet the temperature measurement requirements from -190°C to 2000°C, but some tests require the sample to be in a continuously varying temperature environment, and the minimum and maximum temperatures of the test span the measurement range of any single thermocouple, and it is also necessary to ensure that the sample is always in a vacuum environment; this is a problem that has not been solved by the previous ray field and diffraction field.

[0003] Therefore, there is an urgent need to develop a vacuum environment device capable of continuously varying temperature measurement. Through the thermocouple switching device in this device, combined with an ultra-low temperature + ultra-high temperature integrated vacuum furnace, the processes of continuous heating, cooling, and temperature measurement can be realized, meeting the continuous monitoring and scanning of the sample between -190°C and 2000°C. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a vacuum environment device capable of continuously varying temperature measurement, which is mainly applied in the ray field and diffraction field environments. It can overcome the defect that existing products on the market can only measure temperature through a single thermocouple. The temperature measurement range of the T-type thermocouple is from -200°C to +350°C, and that of the tungsten-rhenium thermocouple is from 0 to +2800°C. If the change process of the sample from low temperature to high temperature needs to be measured, the thermocouple must be switched midway. The traditional solution is to directly pull out the T-couple and replace it with a tungsten-rhenium thermocouple, but there are many drawbacks. First, the vacuum environment is damaged. Second, the operation is cumbersome. Third, during the process of switching the thermocouple, the sample will stay at a certain temperature section for a long time, affecting the entire test result. By applying the thermocouple switching device to a continuously varying temperature vacuum furnace, the effect of continuously varying temperature measurement in a continuously varying temperature environment can be achieved.

[0005] The utility model provides the following technical solutions:

[0006] A vacuum environment device capable of continuously varying temperature measurement includes a vacuum furnace body and a thermocouple switching device installed on the vacuum furnace body. The thermocouple switching device includes a telescopic box installed on one side of the vacuum furnace body through a connecting bracket, a stepping motor, a gear, a rack, a guide rail, a low-temperature thermocouple, and a high-temperature thermocouple installed in the telescopic box. The stepping motor is fixed on the telescopic box, and its driving end is in meshing transmission with two groups of parallel racks through a gear. The two groups of racks are slidably connected with the guide rail fixed in the telescopic box through corresponding sliders, and a group of low-temperature thermocouples and a group of high-temperature thermocouples are respectively connected thereto. The low-temperature thermocouple and the high-temperature thermocouple alternately enter the vacuum furnace body under the propulsion of their respective racks for temperature measurement.

[0007] A set of transfer parts is also installed outside the vacuum furnace body. A threading channel for a low-temperature thermocouple and a high-temperature thermocouple to pass through and enter the vacuum furnace body is also arranged inside the transfer parts, and a sealing ring is also arranged inside the threading channel to improve the sealing effect;

[0008] So far, this device can use a stepper motor as a driving element to drive the gear to rotate forward and backward to drive the rack to move back and forth, thereby realizing the switching of the front-end high-temperature thermocouple and low-temperature thermocouple, solving the problem that the high and low temperature thermocouples in a high-temperature furnace cannot be switched during the test process and can only rely on a single thermocouple to complete the temperature measurement in a small temperature range, meeting the continuous temperature measurement requirements from -190°C to 2000°C. There is a sealing ring between the thermocouple and the furnace body to ensure that the vacuum cavity will not leak during the working process.

[0009] Preferably, a set of liquid nitrogen delivery modules is also arranged between the low-temperature thermocouple and the high-temperature thermocouple. The liquid nitrogen delivery modules pass through the transfer parts and are connected to the vacuum furnace body. A set of low-temperature channels for supplying liquid nitrogen into the vacuum furnace body is also arranged inside. A set of graphite heating elements for heating is arranged inside the vacuum furnace body;

[0010] Liquid nitrogen enters the vacuum furnace body through the low-temperature channels, making the sample area inside the vacuum furnace body reach -190°C. At this time, under the drive of the stepper motor, the gear drives the rack to move, so that the low-temperature thermocouple reaches the area where the sample is located, and the high-temperature thermocouple is far away from the area where the sample is located. The low-temperature thermocouple reads the actual temperature at the sample position. On the contrary, to increase the temperature of the sample area, the liquid nitrogen channel is cut off, and the graphite heating element inside the vacuum furnace body is used for atmosphere heating. When the temperature of the area to be measured is higher than 300°C, the stepper motor rotates in reverse, the gear drives the rack to move, so that the high-temperature thermocouple reaches the area where the sample is located, and the low-temperature thermocouple is far away from the area where the sample is located. The high-temperature thermocouple reads the actual temperature at the sample position.

[0011] Preferably, a multi-layer heat insulation screen for heat insulation and a cooling module are also arranged between the graphite heating element and the furnace wall of the vacuum furnace body. The cooling module is arranged between the outermost heat insulation screen and the vacuum furnace body. A first water-cooling channel communicated with the water-cooling pipe on the furnace wall of the vacuum furnace body is arranged inside the cooling module;

[0012] The model is located in the middle of the graphite heating body. The voltage and current output of the graphite heating body are controlled by a controller, so as to control the temperature field inside the graphite heating body at a constant temperature. The outside is treated with multiple layers of thermal insulation, and a heat insulation screen is made of high-temperature resistant insulation boards. When the entire furnace body is filled with argon as a protective gas, the multi-layer heat insulation screen can also play a better role in thermal insulation. A cooling module is added outside the outermost heat insulation screen, and a water cooling channel 1 is arranged on the cooling module. The water cooling channel 1 is connected to the water cooling pipe of the vacuum furnace body. During the test, the temperature of the water cooling module is kept constant by circulating water, which can better protect the vacuum furnace body.

[0013] Preferably, the side of the graphite heating body having the placement notch is a front cover facing the vacuum furnace body, so that the graphite heating body can be conveniently placed into the graphite heating body through the placement notch, and the front cover and the vacuum furnace body are sealed.

[0014] Preferably, upper clamps and lower clamps are installed on opposite sides of the vacuum furnace body, and the upper clamps and lower clamps pass through the vacuum furnace body and are placed in the center of the cylindrical graphite heating body to clamp the sample for positioning, thereby ensuring that the sample is heated more evenly.

[0015] Preferably, a rear door projection plate is connected to one side of the vacuum furnace body opposite to the front cover through a V-shaped adapter plate, which can facilitate the passage of the conical X-ray beam. The surface of the V-shaped adapter plate is corrugated, so that heat can be dissipated faster, fully ensuring that the heat is closer to room temperature when it reaches the transmission plate. The rear door projection plate is made of PEEK material, which has the advantages of low density, high strength, and high temperature resistance, and does not affect the receiver's reception of X-rays. Finally, the scanned pattern can be better imaged. Adding a V-shaped rear door structure can focus the X-rays, making it easier for the light beam to be received by the receiver through the rear door projection plate. The choice of material can make the pattern closer to the surface of the device, making it easier to take high-resolution images within 3μm. Otherwise, the pattern cannot be close to the test equipment, and the temperature is too high to affect the test. The resolution of the image taken too far away cannot meet the requirements. This is the test application of the device, which will not be described in detail here.

[0016] Preferably, a water-cooling slip ring is arranged between the vacuum furnace body and the upper clamp and the lower clamp, and the water-cooling slip ring has a second water-cooling channel. The water-cooling channel reduces the heat conducted from the vacuum furnace body to the upper clamp and the lower clamp by cooling with water, thereby ensuring that the temperature of the furnace body will not be conducted to other components by the upper and lower clamps.

[0017] The beneficial effects of the present utility model are as follows: By adopting a stepper motor as the driving element, this device drives the gear to rotate forward and backward, thereby driving the rack to move back and forth, so as to realize the switching between the high-temperature thermocouple and the low-temperature thermocouple at the front end. This solves the problem that the high and low temperature thermocouples in the high-temperature furnace cannot be switched during the test process, and can only complete the temperature measurement of a small temperature range by a single thermocouple, meeting the continuous temperature measurement requirements from -190°C to 2000°C. There are sealing rings between the thermocouple and the furnace body for sealing. During the working process, it can ensure that the vacuum cavity does not leak;

[0018] The miniature continuously variable temperature vacuum furnace of this device, after actual processing, has a length, width and height of about 150 mm, with a small volume and light weight. It is mainly applied in CT fields, ray fields, and diffraction fields. The internal heating element is a graphite heating element, which is made of high-end graphite. After precise calculation, the designed product can reach a temperature of 2000°C under a voltage of about 15V and a current of about 100A, and can effectively ensure the stable operation of the equipment under the human safety voltage of 36V. Multiple layers of heat insulation treatment are done on the outside of the graphite heating element, and a cooling module is added after heat insulation, so as to ensure that the heat transferred to the furnace body is close to the water temperature, about 30°C, ensuring that the radiation source of industrial CT can be close to the furnace body, and thus can also be close to the sample, and finally high-resolution images within 3μm can be taken during application. Brief Description of the Drawings

[0019] The drawings are used to provide a further understanding of the present utility model, and constitute a part of the specification. Together with the embodiments of the present utility model, they are used to explain the present utility model, and do not constitute a limitation to the present utility model. In the drawings:

[0020] Figure 1 is the structural schematic diagram of the present utility model;

[0021] Figure 2 is Figure 1 the front view of

[0022] Figure 3 is along Figure 2 the cross-sectional view along the line A-A direction in

[0023] Figure 4 is along Figure 2 the cross-sectional view along the line B-B direction in

[0024] Figure 5 is the structural schematic diagram of the thermocouple switching device;

[0025] Figure 6 is Figure 1 the structural schematic diagram after removing the thermocouple switching device in

[0026] Figure 7 isFigure 6 Top view;

[0027] Figure 8 is a cross-sectional view along the Figure 7 direction of line C-C in

[0028] Figure 9 is a schematic diagram of the positions between the upper fixture, the lower fixture and the graphite heating element;

[0029] Markings in the figure:

[0030] 1. Vacuum furnace body; 2. Thermocouple switching device; 3. Intermediate piece; 4. Liquid nitrogen delivery module; 5. Low-temperature channel; 6. Front cover; 11. Graphite heating element; 12. Heat insulation screen; 13. Cooling module; 14. Upper fixture; 15. Lower fixture; 16. V-shaped adapter plate; 17. Rear door projection plate; 18. Water-cooled slip ring; 21. Connection bracket; 22. Telescopic box; 23. Stepper motor; 24. Gear; 25. Rack; 26. Guide rail; 27. Low-temperature thermocouple; 28. High-temperature thermocouple; 31. Penetration channel; 32. Sealing ring. Detailed implementation method

[0031] Embodiment 1

[0032] As Figure 1-9 shown, a vacuum environment device capable of continuous variable temperature measurement, in this embodiment, includes a vacuum furnace body 1 and a thermocouple switching device 2 installed on the vacuum furnace body 1. The thermocouple switching device 2 includes a telescopic box 22 installed on one side of the vacuum furnace body 1 through a connection bracket 21, a stepper motor 23, a gear 24, a rack 25, a guide rail 26, a low-temperature thermocouple 27 and a high-temperature thermocouple 28 installed in the telescopic box 22. The stepper motor 23 is fixed on the telescopic box 22, and its driving end drives two sets of parallel racks 25 through the gear 24 in a meshing transmission manner. The two sets of racks 25 are slidably engaged with the guide rail 26 fixed in the telescopic box 22 through corresponding sliders, and a set of low-temperature thermocouple 27 and a set of high-temperature thermocouple 28 are respectively connected thereto. The low-temperature thermocouple 27 and the high-temperature thermocouple 28 alternately enter the vacuum furnace body 1 for temperature measurement under the propulsion of their respective racks 25;

[0033] A set of intermediate pieces 3 are also installed outside the vacuum furnace body 1. A penetration channel 31 for the low-temperature thermocouple 27 and the high-temperature thermocouple 28 to pass through and enter the vacuum furnace body 1 is provided in the intermediate piece 3, and a sealing ring 32 is also provided in the penetration channel 31 to improve the sealing effect;

[0034] So far, the device can use the stepper motor 23 as the driving element to drive the gear 24 to rotate forward and backward, thereby driving the rack 25 to move back and forth, so as to realize the switching between the front-end high-temperature thermocouple 28 and the low-temperature thermocouple 27, solving the problem that the high and low temperature thermocouples 27 in the high-temperature furnace cannot be switched during the test and can only complete the temperature measurement of a small temperature range by a single thermocouple, meeting the continuous temperature measurement requirement from -190°C to 2000°C. There is a sealing ring 32 between the thermocouple and the furnace body for sealing. During the working process, it can ensure that the vacuum cavity will not leak.

[0035] A group of liquid nitrogen delivery modules 4 are also arranged between the low-temperature thermocouple 27 and the high-temperature thermocouple 28. The liquid nitrogen delivery modules 4 pass through the transfer piece 3 and are connected into the vacuum furnace body 1. A group of low-temperature channels 5 for supplying liquid nitrogen into the vacuum furnace body 1 are also arranged therein. A group of graphite heating elements 11 for heating are arranged in the vacuum furnace body 1.

[0036] Liquid nitrogen enters the vacuum furnace body 1 through the low-temperature channel 5, making the sample area in the vacuum furnace body 1 reach -190°C. At this time, under the drive of the stepper motor 23, the gear 24 drives the rack 25 to move, so that the low-temperature thermocouple 27 reaches the area where the sample is located, and the high-temperature thermocouple 28 is far away from the area where the sample is located. The low-temperature thermocouple 27 reads the actual temperature at the sample position. On the contrary, to increase the temperature of the sample area, the liquid nitrogen channel is cut off, and the graphite heating element 11 in the vacuum furnace body 1 is used for ambient heating. When the temperature in the measurement area is higher than 300°C, the stepper motor 23 rotates in reverse, the gear 24 drives the rack 25 to move, so that the high-temperature thermocouple 28 reaches the area where the sample is located, and the low-temperature thermocouple 27 is far away from the area where the sample is located. The high-temperature thermocouple 28 reads the actual temperature at the sample position.

[0037] Embodiment 2

[0038] A vacuum environment device capable of continuously varying temperature measurement. In this embodiment, based on Embodiment 1, it is further defined that: a multi-layer heat insulation screen 12 and a cooling module 13 for heat insulation are also arranged between the graphite heating element 11 and the furnace wall of the vacuum furnace body 1. The cooling module 13 is arranged between the outermost heat insulation screen 12 and the vacuum furnace body 1. A first water-cooling channel communicated with the water-cooling pipe on the furnace wall of the vacuum furnace body 1 is arranged in the cooling module 13.

[0039] The pattern is in the middle position of the graphite heating body 11, and the voltage and current output of the graphite heating body 11 are controlled by a controller, so as to control the temperature field inside the graphite heating body 11 at a constant temperature. The outside is treated with multiple layers of thermal insulation, and a heat insulation screen 12 is made of high-temperature resistant insulation boards. When the entire furnace body is filled with argon as a protective gas, the multi-layer heat insulation screen 12 can also play a better role in thermal insulation. A cooling module 13 is added outside the outermost heat insulation screen 12, and a water cooling channel 1 is arranged on the cooling module 13. The water cooling channel 1 is connected to the water cooling pipe of the vacuum furnace body 1. During the test, the temperature of the water cooling module is kept constant by circulating water, so that the vacuum furnace body 1 can be better protected.

[0040] The side of the graphite heating body 11 with the placement notch is facing the front cover 6 of the vacuum furnace body 1, so that the graphite heating body 11 can be conveniently placed through the placement notch, and the front cover 6 and the vacuum furnace body 1 are sealed.

[0041] An upper clamp 14 and a lower clamp 15 are also installed on opposite sides of the vacuum furnace body 1. The upper clamp 14 and the lower clamp 15 pass through the vacuum furnace body 1 and are placed in the center of the cylindrical graphite heating body 11 to position the sample in a clamping manner, thereby ensuring that the sample is heated more evenly.

[0042] The side of the vacuum furnace body 1 opposite to the front cover 6 is transitionally connected to a rear door projection plate 17 through a V-shaped adapter plate 16, which can facilitate the passage of the conical X-ray beam. The surface of the V-shaped adapter plate 16 is corrugated, so that the heat can be dissipated faster, fully ensuring that the heat is closer to the room temperature when it reaches the transmission plate position. The rear door projection plate 17 is made of PEEK material, which has the advantages of low density, high strength, and high temperature resistance. It does not affect the receiver's reception of X-rays, and finally the scanning pattern can be better imaged. Adding a V-shaped rear door structure focuses the X-rays, making it easier for the light beam to be received by the receiver through the rear door projection plate 17. The choice of material can make the pattern closer to the surface of the device, making it easier to take high-resolution images within 3μm. Otherwise, the pattern cannot be close to the test equipment, and the temperature is too high to affect the test. The resolution of the image taken too far away cannot meet the requirements. This is the test application of this device, and it will not be repeated here.

[0043] A water-cooling slip ring 18 is also arranged between the vacuum furnace body 1 and the upper clamp 14 and the lower clamp 15. The water-cooling slip ring 18 has a second water-cooling channel. The water-cooling channel 2 reduces the heat conducted from the vacuum furnace body 1 to the upper clamp 14 and the lower clamp 15 by passing water for cooling, thereby ensuring that the temperature of the furnace body will not be conducted to other components by the upper and lower clamps 15.

[0044] The working principle of the present utility model is as follows: The thermocouple switching device 2 is fixed to the side of the vacuum furnace body 1 of the continuous variable temperature vacuum furnace through the connecting bracket 21. The specific working process is that liquid nitrogen enters the vacuum furnace body 1 through the low-temperature channel 5, making the sample area in the furnace body reach -190 °C. At this time, under the drive of the stepping motor 23, the gear 24 drives the rack 25 to move, enabling the low-temperature thermocouple 27 to reach the area where the sample is located, and the high-temperature thermocouple 28 to move away from the area where the sample is located. The low-temperature thermocouple 27 reads the actual temperature at the sample position. Conversely, to increase the temperature of the sample area, the liquid nitrogen channel is cut off, and the graphite heating element 11 is used for atmosphere heating. At this time, the upper and lower water-cooled slip rings 18 need to be cooled by water to ensure that the temperature of the furnace body will not be conducted by the upper fixture 14 and the lower fixture 15 that hold the sample to other components. When the temperature in the measurement area is higher than 300 °C, the stepping motor 23 rotates in reverse, the gear 24 drives the rack 25 to move, enabling the high-temperature thermocouple 28 to reach the area where the sample is located, and the low-temperature thermocouple 27 to move away from the area where the sample is located. The high-temperature thermocouple 28 reads the actual temperature at the sample position.

[0045] The above are only the preferred embodiments of the present utility model and are not used to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A vacuum environment device capable of performing continuous variable temperature measurement, characterized in that: The invention comprises a vacuum furnace body (1) and a thermocouple switching device (2) mounted on the vacuum furnace body (1), wherein the thermocouple switching device (2) comprises a telescopic box (22) mounted on one side of the vacuum furnace body (1) via a connecting bracket (21), a stepping motor (23) mounted in the telescopic box (22), a gear (24), a rack (25), a guide rail (26), a low-temperature thermocouple (27) and a high-temperature thermocouple (28), wherein the stepping motor (23) is fixed on the telescopic box (2 2), the driving end of which is meshed with two sets of parallel racks (25) through a gear (24), the two sets of racks (25) are slidably engaged with a guide rail (26) fixed in the telescopic box (22) through corresponding sliders, and a set of low-temperature thermocouples (27) and a set of high-temperature thermocouples (28) are respectively connected thereto, and the low-temperature thermocouples (27) and the high-temperature thermocouples (28) are alternately entered into the vacuum furnace body (1) for temperature measurement under the push of their respective racks (25); A set of transfer parts (3) is also installed outside the vacuum furnace body (1), and a penetration channel (31) is also provided inside the transfer part (3) for the low-temperature thermocouple (27) and the high-temperature thermocouple (28) to pass through and enter the vacuum furnace body (1), and a sealing ring (32) is also provided inside the penetration channel (31).

2. A vacuum environment device capable of performing continuous variable temperature measurement according to claim 1, characterized in that: A group of liquid nitrogen delivery modules (4) are arranged between the low-temperature thermocouple (27) and the high-temperature thermocouple (28). The liquid nitrogen delivery module (4) passes through the transfer component (3) and is connected to the vacuum furnace body (1). A group of low-temperature channels (5) for supplying liquid nitrogen into the vacuum furnace body (1) are arranged in the module. A group of graphite heating bodies (11) for heating are arranged in the vacuum furnace body (1).

3. A vacuum environment device capable of performing continuous variable temperature measurement according to claim 2, characterized in that: A multi-layer heat insulation screen (12) and a cooling module (13) for heat insulation are also provided between the graphite heating body (11) and the furnace wall of the vacuum furnace body (1); the cooling module (13) is arranged between the outermost heat insulation screen (12) and the vacuum furnace body (1); and a water cooling channel 1 connected to a water cooling pipe on the furnace wall of the vacuum furnace body (1) is arranged in the cooling module (13).

4. A vacuum environment device capable of performing continuous variable temperature measurement according to claim 3, characterized in that: The side of the graphite heating body (11) where the notch is placed is a front cover (6) facing the vacuum furnace body (1), and the front cover (6) and the vacuum furnace body (1) are sealed.

5. A vacuum environment device capable of performing continuous variable temperature measurement according to claim 1, characterized in that: An upper clamp (14) and a lower clamp (15) are also installed on opposite sides of the vacuum furnace body (1). The upper clamp (14) and the lower clamp (15) pass through the vacuum furnace body (1) and are placed at the center of the cylindrical graphite heating body (11) to be positioned in a clamping manner.

6. A vacuum environment device capable of performing continuous variable temperature measurement according to claim 4, characterized in that: A rear door projection plate (17) is transitionally connected to one side of the vacuum furnace body (1) opposite to the front cover (6) via a V-shaped adapter plate (16); the surface of the V-shaped adapter plate (16) is corrugated; and the rear door projection plate (17) is made of PEEK material.

7. A vacuum environment device capable of performing continuous variable temperature measurement according to claim 5, characterized in that: A water-cooling slip ring (18) is also arranged between the vacuum furnace body (1) and the upper clamp (14) and the lower clamp (15), and the water-cooling slip ring (18) has a second water-cooling channel therein, and the heat conducted from the vacuum furnace body (1) to the upper clamp (14) and the lower clamp (15) is reduced by cooling the water in the second water-cooling channel.

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