Automatic take-up device, reaction cavity and thin film deposition equipment
By introducing an automatic wire retraction device into the coating equipment, the problem of overlapping heating rings when the thermocouple cable is closed is solved, and the cable is automatically adjusted, which improves safety and maintenance efficiency and improves the equipment's productivity.
Patent Information
- Application Number
- CN202422437747.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-09
- Publication Date
- 2025-07-04
- Estimated Expiration
- 2034-10-09
AI Technical Summary
In semiconductor manufacturing process, during the maintenance of coating equipment, the thermocouple cable is easily overlapped on the heating ring of the shower plate when closing the cavity, resulting in the cable being scalded at high temperatures, and the existing solutions are inefficient and unreliable.
An automatic wire retraction device is designed, including a base, wire retraction member, temperature measuring element and rotary member. The rotary member provides a rotating force to make the cable extend when opening the cavity and automatically shorten when closing the cavity to prevent the cable from overlapping on the heating ring.
Automatic cable adjustment is realized, safety and reliability are improved, manual intervention is reduced, and equipment maintenance efficiency and productivity are improved.
Smart Images
Figure CN223060419U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductors, and particularly relates to an automatic wire winding device, a reaction chamber and a thin film deposition device. Background Art
[0002] In the semiconductor manufacturing process, the coating equipment is one of the crucial components, and its main function is to form a uniform thin film on the surface of the wafer to meet the requirements of subsequent process steps. During the coating process, the shower plate, as a core component, is responsible for evenly distributing the process gas to the surface of the wafer, and its heating ring is responsible for heating and raising the temperature to ensure the uniformity of the coating quality. To ensure the coating quality and the long-term stable operation of the equipment, it is essential to regularly maintain and service the coating equipment and replace necessary hardware. During the daily maintenance and hardware replacement of the coating equipment, frequent opening and closing of the chamber are required, and this process involves the handling of the thermocouple cable connected to the shower plate. The thermocouple cable needs to have a certain reserved length, and the reserved length must be sufficient to adapt to the maximum distance when the chamber is opened. However, when the chamber is closed, the state of the thermocouple cable becomes unpredictable and may droop freely, posing a risk of touching the heating ring of the shower plate. Since the heating ring generates high temperature during operation, this may cause the cable to be damaged by the high temperature. Therefore, the operator needs to pay extra attention to the cable state and manually adjust the cable position to ensure that it will not touch the heating ring of the shower plate. However, this method is often inefficient and cannot guarantee long-term reliability and safety. Summary of the Utility Model
[0003] The embodiments of the utility model provide an automatic wire winding device, a reaction chamber and a thin film deposition device, aiming to solve the problem that the thermocouple cable touches the heating ring of the shower plate when the chamber is closed, resulting in the cable being damaged by the high temperature.
[0004] In a first aspect, the utility model provides an automatic wire winding device applied to a reaction chamber. The automatic wire winding device includes:
[0005] A base;
[0006] A wire winding member rotatably arranged on the base;
[0007] A temperature measuring element including a cable, a connecting portion and a temperature sensing portion. The connecting portion and the temperature sensing portion are respectively arranged at both ends of the cable. The connecting portion is used for connecting with the cover plate, and the temperature sensing portion is used for connecting with the shower plate. The cable is wound around the outer periphery of the wire winding member and drives the wire winding member to rotate when being stretched;
[0008] A rotating member arranged inside the wire winding member. The rotating member is adapted to provide a rotating force to the wire winding member to drive the wire winding member to rotate in the reverse direction so that the cable is wound around the wire winding member.
[0009] Further, the rotating member includes an elastic rotating body, one end of the elastic rotating body is fixedly connected to the base, and the other end of the elastic rotating body is fixedly connected to the wire winding member.
[0010] Further, the elastic rotating body is a scroll spring. The scroll spring has a first fixed end and a second fixed end. A positioning post protrudes from the base. The scroll spring is sleeved outside the positioning post. The first fixed end is fixedly connected to the positioning post, and the second fixed end is fixedly connected to the wire winding member.
[0011] Further, a receiving cavity is formed on one side of the wire winding member close to the base. The scroll spring is received in the receiving cavity, and the second fixed end is fixedly connected to the circumferential inner side wall of the receiving cavity.
[0012] Further, the second fixed end is formed by curling the end of the scroll spring in the opposite direction. A fixing post is provided on the circumferential inner side wall of the receiving cavity, and a cutting groove is formed along the circumference of the fixing post. The second fixed end is sleeved on the outer circumference of the fixing post along the cutting groove.
[0013] Further, the automatic wire winding device further includes a fixing member and a collar. A shaft hole is provided in the center of the wire winding member. The collar is inserted through the shaft hole, and the fixing member passes through the collar and is fixed on the base.
[0014] Further, a limiting groove is formed by sinking on one side of the base close to the wire winding member. The bottom of the wire winding member is arranged in the limiting groove.
[0015] Further, the automatic wire winding device further includes a protective cover. The protective cover covers the base. The protective cover is provided with a first wire passing hole and a second wire passing hole. The connecting portion and the temperature sensing portion respectively pass through the first wire passing hole and the second wire passing hole.
[0016] In a second aspect, the present invention provides a reaction chamber, including a chamber body, a spraying plate, a cover plate and an automatic wire winding device. The automatic wire winding device is the above-mentioned automatic wire winding device. The automatic wire winding device is arranged on the chamber body. The connecting portion is connected to the cover plate, and the temperature sensing portion is connected to the spraying plate.
[0017] In a third aspect, the present invention provides a thin film deposition device, including the above-mentioned reaction chamber.
[0018] The present utility model provides an automatic wire winding device, a reaction chamber and a thin film deposition apparatus. The reaction chamber includes a chamber body, a cover plate, a spray plate and an automatic wire winding device. The automatic wire winding device is arranged on the chamber body and includes: a base, a wire winding member, a temperature measuring element and a rotating member. The wire winding member is rotatable on the base. The temperature measuring element includes a cable, and a connecting portion and a temperature sensing portion provided at both ends of the cable. The cable is wound around the outer periphery of the wire winding member. When the cable is stretched, it can drive the wire winding member to rotate. A rotating member is provided inside the wire winding member for providing a rotating force to the wire winding member. The connecting portion is connected to the cover plate, and the temperature sensing portion is connected to the spray plate. When opening the chamber, the cover plate is opened, and the cable moves following the opening of the cover plate, passively stretching the cable. When the cable is stretched, it drives the wire winding member to rotate, realizing the automatic elongation of the cable. When closing the chamber, the cover plate is put back in place, and the wire winding member rotates in the reverse direction under the action of the rotating force provided by the rotating member, so that the cable is wound around the wire winding member, realizing the automatic winding of the cable. In this way, the length of the cable can be automatically adjusted by the automatic wire winding device, it can be elongated when opening the chamber and shortened when closing the chamber, avoiding the cable being caught on the heating ring of the spray plate when closing the chamber, improving the safety and reliability of the cable, and eliminating the need for operators to manually adjust the position of the cable, thus enhancing the equipment utilization rate. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.
[0020] Figure 1 Shows an exploded schematic view of the automatic wire winding device according to an embodiment of the present utility model;
[0021] Figure 2 Shows a schematic view of the automatic wire winding device according to an embodiment of the present utility model;
[0022] Figure 3 Shows a top view schematic view of the automatic wire winding device according to an embodiment of the present utility model;
[0023] Figure 4 Shows Figure 3 the A-A cross-sectional schematic view of
[0024] Figure 5 Shows a schematic view of the base of the automatic wire winding device according to an embodiment of the present utility model;
[0025] Figure 6 Shows a schematic view of the scroll spring of the automatic wire winding device according to an embodiment of the present utility model;
[0026] Figure 7Shows a bottom view schematic diagram of the wire winding member of the automatic wire winding device according to an embodiment of the present utility model;
[0027] Figure 8 Shows a schematic diagram of the bottom of the wire winding member of the automatic wire winding device according to an embodiment of the present utility model;
[0028] Figure 9 Shows a schematic diagram of the protective cover of the automatic wire winding device according to an embodiment of the present utility model;
[0029] Figure 10 Shows a schematic diagram of the reaction chamber according to an embodiment of the present utility model;
[0030] Reference numerals:
[0031] 1, base; 11, positioning post; 12, limiting groove; 2, wire winding member; 21, accommodating cavity; 22, shaft hole; 23, fixing post; 24, cutting groove; 3, temperature measuring element; 31, connecting portion; 32, temperature sensing portion; 33, cable; 4, rotating member; 41, first fixed end; 42, second fixed end; 5, screw; 6, gasket; 7, shaft collar; 8, protective cover; 81, first wire passing hole; 82, second wire passing hole; 83, observation window; 9, shielding cover; 10, automatic wire winding device. Detailed implementation manners
[0032] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.
[0033] The directional terms mentioned in the present utility model, such as "upper", "lower", "front", "rear", "left", "right", "inner", "outer", "side", etc., are only references to the directions in the attached drawings. Therefore, the directional terms used are for explaining and understanding the present utility model, rather than for limiting the present utility model. In addition, in the drawings, structures that are similar or the same are denoted by the same reference numerals.
[0034] In the semiconductor manufacturing process, the maintenance of coating equipment is crucial to ensure the stable operation of the equipment and the coating quality. However, during the maintenance process, the management of the thermocouple cable on the spray plate is a problem that cannot be ignored. In practical applications, the thermocouple cable is connected to the cover plate of the cavity. When the cavity is opened, the thermocouple cable will be stretched passively as the cover plate is opened. Therefore, a certain length needs to be reserved for the thermocouple cable. When the machine is maintained and the cavity is closed again, the state of the cable becomes difficult to control. Because a certain length is reserved for the cable, it will hang down naturally when closing the cavity and may accidentally touch the heating ring of the spray plate. Since the heating ring generates high temperature during operation, this may cause the cable to be damaged due to overheating, thus affecting the normal operation of the equipment. Therefore, during the maintenance process, the operator needs to pay extra attention to the state of the cable to ensure that it will not be damaged by contacting the heating ring.
[0035] To solve this problem, the embodiment of the utility model proposes an automatic cable retracting device to manage the thermocouple cable. This automatic cable retracting device can automatically retract the cable after the cavity is closed and store it in a safe position, thus avoiding the cable being damaged by high temperature due to contacting the heating ring. In this way, there is no need for the operator to pay extra attention to the state of the cable, which can not only reduce the workload of the operator, but also effectively prevent the abnormal failure of the cable, not only improving the efficiency of the maintenance work, but also significantly reducing the probability of abnormal cable failure and improving the stability and reliability of the equipment.
[0036] The embodiment of the utility model aims to solve the problem that the thermocouple cable accidentally touches the heating ring, and the specific idea is as follows: An automatic cable retracting device is added to the cavity, and the thermocouple cable is wound in this automatic cable retracting device, which can extend and shorten the thermocouple cable. Specifically, when opening the cavity, the cover plate is opened, and the thermocouple cable stretches as the cover plate is opened, and the thermocouple cable extends; when closing the cavity, the cover plate is closed, and the thermocouple cable retracts the extended length, and the thermocouple cable shortens. Thus, when closing the cavity, the automatic cable retracting device automatically retracts the cable, shortening the length of the thermocouple cable, keeping it taut and not hanging down naturally, thereby avoiding accidentally touching the heating ring and effectively avoiding the abnormal failure of the cable, improving the equipment utilization rate.
[0037] To better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings of the specification and specific implementation manners.
[0038] Please refer to Figures 1 - 10The embodiment of the utility model shows an automatic wire-taking device 10, which is applied to a reaction chamber. The automatic wire-taking device 10 includes: a base 1, a wire-taking piece 2, a temperature measuring element 3 and a rotating piece 4. The wire-taking piece 2 is rotatably arranged on the base 1; the temperature measuring element 3 includes a cable 33, a connecting part 31 and a temperature sensing part 32, the connecting part 31 and the temperature sensing part 32 are respectively arranged at two ends of the cable 33, the connecting part 31 is used to connect with the cover plate, and the temperature sensing part 32 is used to connect with the spray plate, the cable 33 is wound around the outer periphery of the wire-taking piece 2 and drives the wire-taking piece 2 to rotate when stretched; the rotating piece 4 is arranged in the wire-taking piece 2, and the rotating piece 4 is suitable for providing a rotating force to the wire-taking piece 2 to drive the wire-taking piece 2 to rotate in the opposite direction so that the cable 3 is wound around the wire-taking piece 2.
[0039] Reference Figures 1 - 4 Specifically, the base 1 of the present embodiment is a circular base 1, and the base 1 is used to support the wire take-up member 2. The base 1 is fixed on the cavity and can be fixed on the shielding cover 9 of the cavity. The wire take-up member 2 is a take-up wheel of a cylindrical structure. The wire take-up member 2 is concentric with the base 1, and the wire take-up member 2 can rotate clockwise or counterclockwise around its axis. The rotating member 4 is arranged in the wire take-up member 2, and the rotating member 4 has a rotating function, which can provide a rotating force to the wire take-up member 2, so that the wire take-up member 2 rotates in the opposite direction under the action of the rotating force. For example, the wire take-up member 2 rotates clockwise, and the wire take-up member 2 rotates counterclockwise under the action of the rotating force. It should be noted that the specific structure of the rotating member 4 can be in various forms, for example, a spiral spring, a hydraulic motor, an electric motor, a pneumatic motor, a shape memory metal and the like. No matter what kind of structure it is, as long as it can provide a rotating force for the wire take-up member 2, it is not limited here. The temperature measuring element 3 may be a thermocouple, and the temperature measuring element 3 includes a cable 33, a connecting portion 31 and a temperature sensing portion 32. The cable 33 is coiled on the outer periphery of the take-up member 2. The connecting portion 31 may be a docking plug, and the connecting portion 31 is connected to the cover plate (not shown in the figure). The temperature sensing portion 32 may be the measuring end of the temperature measuring element 3, and the temperature sensing portion 32 is inserted into the temperature measuring interface of the spray plate. Since the temperature sensing portion 32 is connected to the spray plate, the temperature sensing portion 32 is usually a stationary end, and the cover plate moves with the opening and closing of the cavity, so the connecting portion 31 is usually a movable end. When the cavity is opened, the cover plate moves, and the connecting portion 31 follows the movement of the cover plate to stretch the cable 33, driving the take-up member 2 to rotate and release the cable 33 so that the cable 33 is extended. When the cavity is closed, the cover plate is returned to the cavity, and the take-up member 2 is subjected to the rotational force provided by the rotating member 4. Under the action of the rotational force, it rotates in the opposite direction to retract the cable 33, so that the cable 33 is shortened. The cable 33 remains tensioned and does not fall naturally, thereby avoiding overlapping with the heating ring of the spray plate and preventing the cable 33 from being burned by high temperature.
[0040] In this embodiment, by using the rotational force provided by the rotating member 4 for the wire winding member 2, the wire winding member 2 can be rotated in the reverse direction when closing the cavity, so that the cable 33 is wound back onto the wire winding member 2, shortening the cable 33, making the state of the cable 33 controllable after closing the cavity, preventing the cable 33 from being in contact with the heating ring of the spray plate, avoiding abnormal failure of the cable 33, improving safety and reliability, and moreover, eliminating the need for operators to manually adjust the position of the cable 33, thus improving the maintenance efficiency.
[0041] In one embodiment, the rotating member 4 includes an elastic rotating body, one end of the elastic rotating body is fixedly connected to the base 1, and the other end of the elastic rotating body is fixedly connected to the wire winding member 2. Specifically, the rotating member 4 in this embodiment includes an elastic rotating body. The elastic rotating body can be, for example, a scroll spring, a torsion spring, or a clockwork spring, etc., which is not limited herein. One end of the elastic rotating body is fixed to the base 1, and the other end is fixed to the wire winding member 2. The elastic force provided by the elastic rotating body is used as the rotational force to drive the wire winding member 2 to rotate in the reverse direction. Specifically, when opening the cavity and stretching the cable 33, the wire winding member 2 rotates to drive the elastic rotating body to compress, and the elastic rotating body is in a compressed state and stores elastic potential energy; when closing the cavity, the cable 33 loses the tensile force or the tensile force weakens, and the elastic force provided by the elastic rotating body is greater than the tensile force. At this time, the wire winding member 2 rotates in the reverse direction under the action of the elastic force, so that the cable 33 contracts and winds back onto the wire winding member 2. Through this embodiment, the elastic rotating body is used to achieve automatic wire winding, with a simple structure and low cost.
[0042] Referring to Figure 5 and Figure 6 , in one embodiment, the elastic rotating body is a scroll spring. The scroll spring has a first fixed end 41 and a second fixed end 42. A positioning post 11 protrudes from the base 1. The scroll spring is sleeved outside the positioning post 11. The first fixed end 41 is fixedly connected to the positioning post 11, and the second fixed end 42 is fixedly connected to the wire winding member 2. Specifically, the elastic rotating body in this embodiment adopts a scroll spring. The starting end of the scroll spring is the first fixed end 41, located at the center of the scroll spring, and the end of the scroll spring is the second fixed end 42, located at the outermost circle of the scroll spring. A cylindrical positioning post 11 is provided on the base 1, and the positioning post 11 protrudes from the base 1. The scroll spring is sleeved on the outer circumference of the positioning post 11. The first fixed end 41 is fixed to the positioning post 11. For example, it can be fixed by welding, or by fasteners, or by bonding or embedding, or other fixing methods, which is not limited herein. When the wire winding member 2 rotates, the scroll spring will compress and narrow around the positioning post 11, storing elastic potential energy. The outermost second fixed end 42 is fixed to the inner wall of the wire winding member 2. Similarly, the fixing method can also be various, which is not limited herein. Through this embodiment, by protruding the positioning post 11 on the base 1 for the scroll spring to be sleeved and fixed, the structure is simple and compact, and the assembly is convenient.
[0043] Referring to Figure 4 、 Figure 7 and Figure 8 , in this embodiment, a receiving cavity 21 is formed on one side of the wire take-up member 2 close to the base 1. The scroll spring is received in the receiving cavity 21, and the second fixed end 42 is fixedly connected to the circumferential inner side wall of the receiving cavity 21. Specifically, on the side of the wire take-up member 2 close to the base 1, that is, the bottom of the wire take-up member 2 is recessed upward, and a receiving cavity 21 is defined between the bottom of the wire take-up member 2 and the base 1. The scroll spring is located in the receiving cavity 21 and is completely covered by the wire take-up member 2 and located inside the wire take-up member 2. The second fixed end 42 of the scroll spring is fixed on the cavity wall of the receiving cavity 21, specifically the circumferential inner side wall of the receiving cavity 21. For example, it can be fixed by welding, or by fasteners, or by bonding or embedding, or other fixing methods. In this way, when the wire take-up member 2 rotates, it pulls the second fixed end 42 of the scroll spring to move along the circumference of the wire take-up member 2, so that the scroll spring can be compressed around the positioning post 11, better accumulating elastic potential energy. Through this embodiment, the receiving cavity 21 is formed on the wire take-up member 2 to receive the scroll spring, making full use of the axial space of the wire take-up member 2, ensuring that the overall structure is compact, miniaturized, and has a simple structure and convenient assembly.
[0044] Referring to Figure 6 、 Figure 7 and Figure 8 , in a specific implementation, the second fixed end 42 is formed by curling the end of the scroll spring in the opposite direction. A fixing post 23 is provided on the circumferential inner side wall of the receiving cavity 21, and a cutting groove 24 is formed along the circumference of the fixing post 23. The second fixed end 42 is sleeved on the outer circumference of the fixing post 23 along the cutting groove 24. Specifically, the second fixed end 42 of the scroll spring is formed by curling the end of its outermost ring in the opposite direction, forming a non-closed hollow cylindrical structure. A cutting groove 24 is processed at a position on the circumferential inner side wall of the receiving cavity 21. Looking at the top view of the bottom of the wire take-up member 2, the path of the cutting groove 24 is semicircular, cutting a semicircle along the inner edge of the receiving cavity 21 but not exceeding the outer edge of the receiving cavity 21. The cutting groove 24 has a certain depth, so as to form a semicircular fixing post 23 on the circumferential inner side wall of the receiving cavity 21, and the outer circumference of the fixing post 23 is the cutting groove 24. Then, when assembling the second fixed end 42 of the scroll spring, its non-closed hollow cylindrical structure is sleeved into the fixing post 23 along the cutting groove 24, and the assembly can be completed. The structure is simple and the assembly is convenient.
[0045] Referring to Figure 1 and Figure 4, in one embodiment, the automatic wire winding device 10 further includes a fixing member and a collar 7. A shaft hole 22 is provided at the center of the wire winding member 2, and the collar 7 is inserted through the shaft hole 22. The fixing member passes through the collar 7 and is fixed on the base 1. Specifically, the wire winding member 2 is a wire winding wheel. A shaft hole 22 is formed at the center of the wire winding wheel. The shaft hole 22 penetrates the top and bottom of the wire winding wheel, and a circle of inner flanges is provided inside the shaft hole 22. The fixing member includes a screw 5 and a washer. During assembly, the collar 7 is placed into the shaft hole 22. The screw 5 passes through the washer and then through the collar 7 to be fixed with the positioning post 11 on the base 1. A threaded hole is formed on the positioning post 11, and the screw 5 is fixed in cooperation with the threaded hole. The washer abuts against the inner flange inside the shaft hole 22. In this way, the wire winding wheel can rotate around the screw 5 as the axis, realizing the rotation of the wire winding wheel on the base 1. The structure is simple and the installation is convenient.
[0046] Referring to Figure 5 , in one embodiment, a limiting groove 12 is formed by sinking on one side of the base 1 close to the wire winding member 2, and the bottom of the wire winding member 2 is arranged in the limiting groove 12. Specifically, in order to further limit the wire winding wheel and prevent it from shifting during rotation. A circular limiting groove 12 is formed on the base 1. The circular limiting groove 12 is formed by sinking from the surface of the base 1. The bottom of the wire winding wheel is located in the circular limiting groove 12. The diameter of the cylindrical wire winding wheel matches the diameter of the circular limiting groove 12, so that the wire winding wheel can only rotate in the limiting groove 12, thereby restricting the offset of the wire winding wheel and ensuring the stability and reliability of rotation.
[0047] Referring to Figure 9, in one embodiment, the automatic wire rewinding device 10 further includes a protective cover 8. The protective cover 8 covers the base 1. The protective cover 8 is provided with a first wire passing hole 81 and a second wire passing hole 82. The connecting portion 31 and the temperature sensing portion 32 respectively pass through the first wire passing hole 81 and the second wire passing hole 82. Specifically, a circular protective cover 8 is arranged on the circular base 1. The protective cover 8 covers the entire wire winding wheel. The protective cover 8 has two openings for convenient wire outlet, namely the first wire passing hole 81 and the second wire passing hole 82. Among them, the first wire passing hole 81 is used for the connecting portion 31 to pass the wire, and the second wire passing hole 82 is used for the temperature sensing portion 32 to pass the wire. The first wire passing hole 81 and the second wire passing hole 82 are symmetrically arranged. When the cavity is opened to stretch the cable 33, the cable 33 extends from the first wire passing hole 81 of the protective cover 8; when the cavity is closed to relax the cable 33, the cable 33 retracts from the first wire passing hole 81 of the protective cover 8 back into the protective cover 8. In other embodiments, an observation window 83 is further arranged on the protective cover 8 to facilitate observing whether the wire winding wheel rotates smoothly and whether there is a situation of wire jamming. By arranging the protective cover 8 to protect the wire winding wheel, at the same time, the first wire passing hole 81 and the second wire passing hole 82 of the protective cover 8 can limit the wire outlet position of the cable 33, so that the cable 33 is in the desired position, further avoiding its accidental lap with the heating ring, and ensuring safety and reliability.
[0048] In summary, by adding the automatic wire rewinding device 10 to the cavity, the automatic contraction and elongation of the thermocouple cable 33 can be realized, the uncontrollable state of the cable 33 after the machine is maintained and the chamber is closed is avoided, the cable 33 is prevented from being burned by high temperature due to lapping on the heating ring of the spray plate, the abnormal failure of the cable 33 is effectively avoided, the equipment operation rate is improved, the installation is simple, the operation is convenient, and different scenarios can be adapted.
[0049] Refer to Figure 10 , the embodiment of the present utility model further provides a reaction chamber, including a cavity, a spray plate, a cover plate and an automatic wire rewinding device 10. The automatic wire rewinding device 10 is the automatic wire rewinding device 10 in the above embodiment. The automatic wire rewinding device 10 is arranged on the cavity. The connecting portion 31 is connected to the cover plate, and the temperature sensing portion 32 is connected to the spray plate. Specifically, the automatic wire rewinding device 10 is installed on the shielding cover 9 of the cavity. The connecting portion 31 is connected to the cover plate, and the temperature sensing portion 32 is connected to the temperature measuring interface of the spray plate. The automatic wire rewinding device 10 has been described in detail in the above embodiment. For the sake of simplicity of the specification, it will not be repeated here.
[0050] Through this embodiment, the automatic wire rewinding device 10 is arranged on the reaction chamber to accommodate the temperature measuring element. When the cavity is opened, the cable 33 can be automatically extended, and when the cavity is closed, the cable 33 can be automatically shortened, so that the state of the cable 33 when the cavity is closed is controllable, and it will not lap on the heating ring of the spray plate, avoiding the cable 33 from being burned by high temperature, and there is no need for the operator to manually adjust the position of the cable 33, improving the maintenance efficiency.
[0051] The embodiment of the present utility model further provides a thin film deposition device, including the reaction chamber of the above embodiment. Specifically, the reaction chamber has been described in detail in the above embodiment. For the sake of simplicity of the specification, it will not be repeated here.
[0052] Through this embodiment, a reaction chamber with an automatic wire take-up device 10 is provided. The length of the cable 33 can be automatically adjusted through the automatic wire take-up device 10. It can extend when opening the chamber and shorten when closing the chamber, avoiding the cable 33 being connected to the heating ring of the spray plate when closing the chamber, making the reaction chamber safer and more reliable, improving the operation rate of the thin film deposition device, and improving production efficiency.
[0053] As described above, only the specific implementation manners of the present utility model are provided, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model can easily think of various equivalent modifications or replacements, and these modifications or replacements should all be covered within the protection scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.
Claims
1. An automatic wire winding device, characterized in that, Applied to a reaction chamber, the automatic wire winding device includes: A base; A wire winding member rotatably provided on the base; A temperature measuring element, including a cable, a connecting portion and a temperature sensing portion. The connecting portion and the temperature sensing portion are respectively provided at two ends of the cable. The connecting portion is used to connect with a cover plate, and the temperature sensing portion is used to connect with a spray plate. The cable is wound around the outer periphery of the wire winding member and drives the wire winding member to rotate when being stretched; A rotating member provided inside the wire winding member. The rotating member is adapted to provide a rotating force to the wire winding member to drive the wire winding member to rotate in the reverse direction so that the cable is wound around the wire winding member.
2. The automatic wire rewinding device according to claim 1, wherein The rotating member includes an elastic rotating body. One end of the elastic rotating body is fixedly connected to the base, and the other end of the elastic rotating body is fixedly connected to the wire winding member.
3. The automatic wire rewinding device according to claim 2, characterized in that The elastic rotating body is a scroll spring. The scroll spring has a first fixed end and a second fixed end. A positioning post protrudes from the base. The scroll spring is sleeved outside the positioning post. The first fixed end is fixedly connected to the positioning post, and the second fixed end is fixedly connected to the wire winding member.
4. The automatic wire rewinding device according to claim 3, characterized in that, A receiving cavity is formed on one side of the wire winding member close to the base. The scroll spring is received in the receiving cavity, and the second fixed end is fixedly connected to the circumferential inner side wall of the receiving cavity.
5. The automatic wire rewinding device according to claim 4, characterized in that, The second fixed end is formed by curling the end of the scroll spring in the reverse direction. A fixing post is provided on the circumferential inner side wall of the receiving cavity, and a cutting groove is formed in the circumferential direction along the fixing post. The second fixed end is sleeved outside the fixing post along the cutting groove.
6. The automatic wire rewinding device according to any one of claims 1-5, characterized in that, It further includes a fixing member and a collar. A shaft hole is provided in the center of the wire winding member. The collar is inserted through the shaft hole, and the fixing member passes through the collar and is fixedly provided on the base.
7. The automatic wire rewinding device according to any one of claims 1-5, characterized in that A limiting groove is formed by sinking on one side of the base close to the wire winding member. The bottom of the wire winding member is provided in the limiting groove.
8. The automatic wire rewinding device according to any one of claims 1-5, characterized in that It further includes a protective cover. The protective cover covers the base. The protective cover is provided with a first wire passing hole and a second wire passing hole. The connecting portion and the temperature sensing portion respectively pass through the first wire passing hole and the second wire passing hole.
9. A reaction chamber, characterized in that, It includes a cavity, a spray plate, a cover plate and an automatic wire winding device. The automatic wire winding device is the automatic wire winding device according to any one of claims 1-8. The automatic wire winding device is provided on the cavity. The connecting portion is connected to the cover plate, and the temperature sensing portion is connected to the spray plate.
10. A thin film deposition device, characterized in that, It includes a reaction chamber as claimed in claim 9.