Bushing ring for capturing CCD (Charge Coupled Device) liquid port distance of single crystal furnace

Abstract

The utility model discloses a bushing ring for capturing the liquid port distance of a CCD (Charge Coupled Device) of a single crystal furnace, which comprises a bushing ring body, the top of the bushing ring body extends outwards to form an assembly ring, the bottom end of an outer guide cylinder is provided with an assembly plane, the assembly ring is lapped above the assembly plane, the top of the bushing ring body is provided with an inner guide cylinder support ring, and the inner guide cylinder support ring is lapped above the assembly plane. Catching sections are symmetrically arranged on the inner wall of the bushing ring body, and the sides, close to the circle center of the bushing ring body, of the catching sections are first inclined planes. According to the utility model, the capturing section enables the CCD to capture a clear arc, enlarges and ensures the definition of projection, realizes clear capturing of the liquid opening distance in the crystal bar drawing process, reduces the wire breakage rate, and improves the product qualification rate; and meanwhile, the positioning columns and the positioning holes achieve rapid and accurate installation, and deviation is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of solar photovoltaic single crystal silicon, and particularly relates to a lining ring for capturing the liquid orifice distance of a CCD in a single crystal furnace. Background Art

[0002] In the production process of pulling single crystal silicon by the Czochralski method, in order to stably pull a crystal rod with a constant diameter size specification, usually in the isodiametric stage, the distance between the inner circular edge of the deflector tube or its lining ring thereon and the projected edge formed on the molten silicon liquid surface is captured by a CCD camera, converted into the liquid orifice distance through calculation, and then the speeds and magnitudes of crystal lifting, crucible lifting, water flow, etc. in the furnace are automatically controlled by PID to achieve the consistency of the liquid orifice distance under dynamic conditions, so as to stably pull an equal-diameter silicon rod.

[0003] For the current capture of the liquid orifice distance by a CCD camera, due to the large number of existing single crystal silicon wafer size specifications, while the size of the water-cooled hot screen used for crystal pulling is relatively single and cannot be changed. When pulling a medium-sized single crystal silicon rod, if a small-sized water-cooled screen and a small-sized lining ring are used, the gap between the silicon rod and the inner circle of the lining ring is small, the light of the camera becomes dim, resulting in a blurred and unclear projected edge of the liquid surface, and it is impossible to accurately capture; if a small-sized water-cooled screen and a large-sized lining ring are used, the projected edge moves outwards and the liquid surface fluctuation becomes larger, and the edge is also blurred; if a large-sized water-cooled screen is used, the temperature gradient becomes smaller, the pulling speed is reduced and the wire breakage rate is increased, resulting in a reduction in production efficiency. Content of the Utility Model

[0004] The purpose of the utility model is to provide a lining ring for capturing the liquid orifice distance of a CCD in a single crystal furnace. A capture section with a first inclined surface is mainly arranged on the inner peripheral surface of the lining ring body, which retains the clarity of the CCD capture projection line, can normally pull the crystal rod, and at the same time makes the installation of the lining ring and the bottom end of the outer deflector tube simple and fast, solving the problems existing in the prior art.

[0005] To solve the above technical problems, the utility model adopts the following solutions:

[0006] A lining ring for capturing the liquid orifice distance of a CCD in a single crystal furnace includes a lining ring body. An assembly ring extends outwards from the top of the lining ring body. An assembly plane is provided at the bottom end of the outer deflector tube. The assembly ring overlaps above the assembly plane. An inner deflector tube support ring is provided at the top of the lining ring body. Capture sections are symmetrically arranged on the inner wall of the lining ring body. One side of the capture section adjacent to the center of the lining ring body is a first inclined surface.

[0007] The technical concept of this application is as follows: capture segments are symmetrically arranged on the inner wall of the lining ring body. The capture segment has a first inclined surface, and the first inclined surface provides a clear and complete capture edge line, so that the edge line projected by the CCD is wider and clearer. Eventually, the CCD captures a clear circular arc, which expands and ensures the clarity of the projection. At the same time, positioning columns are provided, and the positioning columns are located in the positioning holes arranged on the assembly plane, ensuring no offset between the lining ring body and the outer flow guide cylinder.

[0008] Further, the width of the capture segment is 5 - 8 mm.

[0009] Further, the angle of the first inclined surface of the capture segment is 12°.

[0010] Here, the width of the capture segment specifically refers to the width of its surface or bottom surface, and the selection of its width is set according to actual needs; at the same time, under the condition that the angle of the first inclined surface is 12°, the CCD has the best effect on capturing the liquid port distance with the first inclined surface of the capture segment 100.

[0011] Further, positioning columns are symmetrically provided at the bottom end of the assembly ring, positioning holes matching the positioning columns are provided on the assembly plane, and the positioning columns are located in the positioning holes.

[0012] Further, a fillet is provided at the bottom end of the outer peripheral surface of the assembly ring.

[0013] Further, second inclined surfaces are provided on the outer peripheral surface of the lining ring body and the inner peripheral surface at the bottom end of the outer flow guide cylinder.

[0014] Further, the lining ring body, the assembly ring and the positioning columns are all made of carbon-carbon material.

[0015] The beneficial effects of this utility model are as follows:

[0016] In this utility model, the capture segment provided on the inner wall of the lining ring body has a first inclined surface, and the first inclined surface provides a clear and complete capture edge line, so that the edge line projected by the CCD is wider and clearer. Eventually, the CCD captures a clear circular arc, which expands and ensures the clarity of the projection, realizes clear capture of the liquid port distance during the crystal bar drawing process, reduces the wire breakage rate, and improves the product qualification rate.

[0017] At the same time, by installing the positioning columns provided at the bottom of the assembly ring into the positioning holes arranged on the assembly plane of the outer flow guide cylinder, rapid and accurate assembly of the lining ring body and the outer flow guide cylinder is realized, and offset of the lining ring body and the assembly ring on the outer flow guide cylinder is avoided. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic structural diagram of this utility model;

[0019] Figure 2 is a schematic bottom view structural diagram of this utility model;

[0020] Figure 3 is a schematic assembly structure diagram of the present utility model;

[0021] Figure 4 for the present utility model Figure 3 is a partial enlarged structure diagram of circle A;

[0022] Figure 5 is a schematic diagram of the present utility model during CCD capture simulation.

[0023] Reference numerals: 1 - bushing ring body, 10 - assembly ring, 100 - capture section, 101 - first inclined surface, 102 - fillet, 11 - positioning post, 2 - outer guide cylinder, 20 - positioning hole, 21 - assembly plane, 3 - second inclined surface, 4 - inner guide cylinder support ring. Detailed implementation manners

[0024] The following will further elaborate on the present utility model in conjunction with embodiments and the accompanying drawings. However, the implementation manners of the present utility model are not limited thereto.

[0025] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inner", "outer", "front", "rear", "top", "bottom", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of this utility model is usually placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present utility model.

[0026] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "provided with", "installed", "connected", "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0027] Embodiment 1

[0028] Embodiment 1 of the present utility model is a lining ring for capturing the liquid outlet distance of a single crystal furnace CCD, including a lining ring body 1. An assembly ring 10 extends outward from the top of the lining ring body 1. An assembly plane 21 is provided at the bottom end of the outer draft tube 2. The assembly ring 10 is lapped above the assembly plane 21. An inner draft tube support ring 4 is provided at the top of the lining ring body 1. Capture segments 100 are symmetrically arranged on the inner wall of the lining ring body 1. One side of the capture segment 100 adjacent to the center of the lining ring body 1 is a first inclined surface 101.

[0029] Referring to Figure 1 and Figure 2 In the present utility model, capture segments 100 are symmetrically arranged on the inner wall of the lining ring body 1. The longitudinal section of the capture segment 100 presents a trapezoidal shape. A first inclined surface 101 is provided near the center of the lining ring body 1. At the same time, the surface length of the capture segment 100 is shorter than the length of its bottom surface. One part of the capture segment 100 ensures sufficient and bright light for a clear projection, and the other part enables the CCD to capture along the first inclined surface 101, so that the projected side line of the CCD is also wider and clearer. The first inclined surface 101 provides a clear and complete capture side line, and only then can the CCD capture this capture side line, ultimately enabling the CCD to capture a clear arc, ensuring the clarity of the projection, achieving clear capture of the liquid outlet distance during the crystal bar drawing process, reducing the wire breakage rate, and improving the product qualification rate.

[0030] It should be noted that an assembly plane 21 is provided at the bottom end of the outer draft tube 2. At the same time, the assembly ring 10 is lapped on the assembly plane 21 for installation. The assembly plane 21 provides the installation condition for the assembly ring 10.

[0031] In some preferred embodiments, the width of the capture segment 100 is 5 - 8 mm. The angle of the first inclined surface 101 of the capture segment 100 is 12°.

[0032] Here, the width of the capture segment 100 specifically refers to the width of its surface or bottom surface, and its width is set according to actual requirements. At the same time, when the angle of the first inclined surface 101 is 12°, the CCD captures the liquid outlet distance with the best effect along the first inclined surface 101 of the capture segment 100.

[0033] In some preferred embodiments, positioning posts 11 are symmetrically provided at the bottom end of the assembly ring 10. Positioning holes 20 matching the positioning posts 11 are provided on the assembly plane 21, and the positioning posts 11 are located in the positioning holes 20.

[0034] Specifically, referring to Figure 3 and Figure 4When assembling the guide tube, the CCD liner ring body 1 should be placed from top to bottom, and the capture section 100 provided in the capture liner ring body 1 needs to be placed exactly in the capture area, so it is necessary to ensure that the CCD liner ring body 1 and the assembly ring 10 cannot be offset on the outer guide tube 2. The positioning holes 20 and the positioning columns 11 do not require the staff to place them by feeling or with the assistance of measuring tools. The positioning columns 11 only need to be assembled in the positioning holes 20 to be installed in place, and the two can be quickly installed at the same time.

[0035] In some preferred embodiments, the bottom end of the outer circumference of the assembly ring 10 is provided with a rounded corner 102. Providing the rounded corner 102 can make the assembly ring 10 more compatible with the assembly platform, reduce the wear of the rounded corner 102 during installation, and extend the service life.

[0036] In some preferred embodiments, the outer circumference of the liner ring body 1 and the inner circumference of the bottom end of the outer guide tube 2 are both provided with a second inclined surface 3. The assembly surfaces between the liner ring body 1 and the outer guide tube 2 are both adapted second inclined surfaces 3. The second inclined surface 3 is provided to extend the path on the one hand, thereby slowing down the heat loss in the furnace during crystal pulling and improving the thermal insulation performance in the furnace; on the other hand, the assembly tightness between the two is improved, and the gap between the two is small.

[0037] In some preferred embodiments, the backing ring body 1, the assembly ring 10 and the positioning column 11 are all made of carbon-carbon material. The carbon-carbon material can effectively prevent impurities from entering the molten silicon solution to a large extent, increase the crystal pulling rate, and further increase the crystallization rate of single crystal silicon.

[0038] The working principle of the utility model is:

[0039] Reference Figure 5 When in use, first, the positioning column 11 set at the bottom of the assembly ring 10 is installed in the positioning hole 20 set on the assembly plane 21 of the outer guide tube 2, so as to realize the rapid and accurate assembly of the liner ring body 1 and the outer guide tube 2, and avoid the liner ring body 1 and the assembly ring 10 from being offset on the outer guide tube 2; at the same time, the capture section 100 located on the inner wall of the liner ring body 1 has a first inclined surface 101, and the first inclined surface 101 provides a clear and complete capture edge line, so that the edge line projected by the CCD is also wider and clearer, and finally the CCD captures a clear arc, expands the clarity of the projection, realizes clear capture of the liquid mouth distance during the crystal rod pulling process, reduces the wire breakage rate, and improves the product qualification rate.

[0040] The above is only a preferred embodiment of the utility model and does not limit the utility model in any form. According to the technical essence of the utility model, within the spirit and principles of the utility model, any simple modification, equivalent replacement and improvement made to the above embodiment still falls within the protection scope of the technical solution of the utility model.

Claims

1. A lining ring for capturing the liquid orifice distance of a CCD in a single crystal furnace, characterized in that, It includes a lining ring body (1). The top of the lining ring body (1) extends outward to form an assembly ring (10). An assembly plane (21) is provided at the bottom end of the outer draft tube (2). The assembly ring (10) overlaps above the assembly plane (21). An inner draft tube support ring (4) is provided at the top of the lining ring body (1). Capture segments (100) are symmetrically provided on the inner wall of the lining ring body (1). One side of the capture segment (100) adjacent to the center of the lining ring body (1) is a first inclined surface (101).

2. The spacer ring for capturing the liquid port distance of the CCD in the single crystal furnace according to claim 1, wherein The width of the capture segment (100) is 5 to 8 mm.

3. A spacer ring for capturing the liquid port distance of a CCD in a single crystal furnace according to claim 1, characterized in that, The angle of the first inclined surface (101) of the capture segment (100) is 12°.

4. A spacer ring for capturing the liquid orifice distance of a CCD in a single crystal furnace according to claim 1, characterized in that, Positioning posts (11) are symmetrically provided at the bottom end of the assembly ring (10). Positioning holes (20) matching the positioning posts (11) are provided on the assembly plane (21). The positioning posts (11) are located in the positioning holes (20).

5. A spacer ring for capturing the liquid level distance of a CCD in a single crystal furnace according to claim 4, characterized in that, A fillet (102) is provided at the bottom end of the outer peripheral surface of the assembly ring (10).

6. A spacer ring for capturing the liquid orifice distance of a CCD in a single crystal furnace according to claim 4, characterized in that, Second inclined surfaces (3) are provided on the outer peripheral surface of the lining ring body (1) and the inner peripheral surface of the bottom end of the outer draft tube (2).

7. A liner ring for capturing the liquid orifice distance of a CCD in a single crystal furnace according to claim 4, characterized in that, The lining ring body (1), the assembly ring (10) and the positioning posts (11) are all made of carbon-carbon material.

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