On-line detection equipment of formula cleaning fluid particle instrument for high-purity photoresist

Abstract

The utility model relates to the technical field of photoresist, in particular to an online detection device of a formula cleaning solution particle instrument for high-purity photoresist, which comprises an online particle detector, a liquid outlet pipe and a one-way valve, a liquid inlet component is arranged at the liquid inlet end of the online particle detector, and a liquid outlet component is arranged at the liquid outlet end of the one-way valve. The liquid inlet assembly comprises a liquid inlet pipe connected to the liquid inlet end of the online particle detector through a threaded groove, a flow meter is arranged on the outer side of the liquid inlet pipe in a sleeving mode, and a regulating valve is arranged on the outer side, located at the bottom of the flow meter, of the liquid inlet pipe in a sleeving mode; a liquid inlet treatment assembly is arranged at the bottom end of the liquid inlet pipe, the liquid inlet treatment assembly comprises a cylinder connected to the bottom end of the liquid inlet pipe through a threaded groove, and a driving motor is mounted at the top of the cylinder through a mounting frame; the driving motor is started to drive the connecting rod and the stirring rod on the outer side of the connecting rod to rotate at a high speed to stir the cleaning liquid in the barrel, so that particles in the cleaning liquid float up and are fully mixed with the cleaning liquid, and an online particle detector can conveniently detect the particles.

Description

Technical Field

[0001] The utility model relates to the technical field of photoresist, in particular to an on-line detection device for particles of a formula cleaning solution for high-purity photoresist. Background Art

[0002] A photoresist is a corrosion-resistant thin film material whose solubility changes by irradiation or radiation such as ultraviolet light, electron beam, ion beam, X-ray, etc., and is a light-sensitive mixed liquid composed of three main components: a photosensitive resin, a sensitizer, and a solvent.

[0003] A photoresist cleaning solution is a chemical solvent used to remove the photoresist used in the lithography process. After the photoresist undergoes steps such as exposure, development, and etching, it is usually necessary to use a cleaning solution to remove the residual photoresist. The quality of the photoresist cleaning solution will affect the smooth progress of subsequent processes. Therefore, a particle analyzer is used to detect the particle size of the cleaning solution. However, the existing on-line particle detector does not have a stirring structure. When the cleaning solution flows into the on-line particle detector, the internal particles will precipitate due to reasons such as sedimentation, which will affect the detection results. Therefore, an on-line detection device for particles of a formula cleaning solution for high-purity photoresist is proposed. A driving motor drives a connecting rod and a stirring rod on its outer side to rotate at a high speed, stir the cleaning solution flowing into the cylinder body, so that the internal particles do not precipitate and are fully mixed in the cleaning solution, so that the on-line particle detector can detect it. Summary of the Utility Model

[0004] Aiming at the problems in the prior art, the utility model provides an on-line detection device for particles of a formula cleaning solution for high-purity photoresist. A driving motor drives a connecting rod and a stirring rod on its outer side to rotate at a high speed, stir the cleaning solution flowing into the cylinder body, so that the internal particles do not precipitate and are fully mixed in the cleaning solution, so that the on-line particle detector can detect it.

[0005] The technical solution adopted by the utility model to solve its technical problems is an on-line detection device for particles of a formula cleaning solution for high-purity photoresist, including an on-line particle detector, an outlet pipe, and a one-way valve. An inlet liquid component is arranged at the inlet end of the on-line particle detector. The inlet liquid component includes an inlet pipe connected to the inlet end of the on-line particle detector through a threaded groove. A flow meter is sleeved on the outer side of the inlet pipe, and a regulating valve is sleeved on the outer side of the inlet pipe at the bottom of the flow meter.

[0006] The bottom end of the inlet pipe is provided with an inlet liquid treatment component. The inlet liquid treatment component includes a cylinder body connected to the bottom end of the inlet pipe through a threaded groove. A driving motor is installed on the top of the cylinder body through a mounting bracket. The output shaft of the driving motor located inside the cylinder body is connected to a connecting rod through a connecting sleeve, and stirring rods are welded equidistantly on the outer side of the connecting rod.

[0007] By adopting the above technical solution, the driving motor is turned on to drive the connecting rod and the stirring rod outside it to rotate at a high speed, stirring the cleaning liquid in the cylinder, causing the particles in the cleaning liquid to float up and fully mix with the cleaning liquid. The flow rate of the cleaning liquid flowing into the on-line particle detector can be controlled through the regulating valve, and the flow meter is used to detect and display the flow rate of the cleaning liquid in the liquid inlet pipe.

[0008] Specifically, a liquid outlet assembly is provided at the liquid outlet end of the on-line particle detector. The liquid outlet assembly includes a liquid outlet pipe connected to the liquid outlet end of the on-line particle detector through a threaded groove.

[0009] Specifically, a liquid outlet valve is sleeved outside the liquid outlet pipe, and a one-way valve is connected to the bottom end of the liquid outlet pipe through a threaded groove.

[0010] Specifically, a water inlet pipe is welded to the top end of the liquid inlet pipe, and a water inlet valve is connected to the top end of the water inlet pipe through a threaded groove.

[0011] Specifically, a water outlet pipe is welded to one side of the liquid outlet pipe, and a water outlet valve is connected to one end of the water outlet pipe through a threaded groove.

[0012] Specifically, a first pipe joint is connected to the bottom end of the cylinder through a threaded groove, and a second pipe joint is connected to the bottom end of the one-way valve through a threaded groove.

[0013] Specifically, a support assembly is provided at the bottom of the on-line particle detector. The support assembly includes an arc-shaped plate located at the bottom of the on-line particle detector. A pipe sleeve is connected to the top of the arc-shaped plate through a threaded groove, and a support rod is sleeved on the top end of the pipe sleeve.

[0014] Specifically, the top end of the support rod is fixed to the bottom of the on-line particle detector through a flange, and a fixing bolt is connected to one side of the pipe sleeve through a threaded groove.

[0015] The beneficial effects of the present utility model:

[0016] (1) For the on-line detection device for the particles of the formula cleaning liquid for high-purity photoresist of the present utility model, the cleaning liquid in the conveying pipeline flows into the cylinder. The driving motor is turned on to drive the connecting rod and the stirring rod outside it to rotate at a high speed, stirring the cleaning liquid in the cylinder, causing the particles in the cleaning liquid to float up, which is convenient for the on-line particle detector to detect the cleaning liquid.

[0017] (2) For the on-line detection device for the particles of the formula cleaning liquid for high-purity photoresist of the present utility model, the regulating valve is opened to make the stirred cleaning liquid flow into the on-line particle detector through the liquid inlet pipe. The on-line particle detector detects the particles in the cleaning liquid. By adjusting the opening angle of the regulating valve, the flow rate of the cleaning liquid flowing into the on-line particle detector can be controlled, and the flow meter can detect and display the flow rate of the cleaning liquid in the liquid inlet pipe.

[0018] (3) For the on-line detection equipment of particles in the formula cleaning liquid for high-purity photoresist of the present utility model, close the regulating valve and the liquid outlet valve, open the water inlet valve so that external clear water flows through the water inlet pipe into the liquid inlet pipe, and then flows into the on-line particle detector, where the on-line particle detector can be flushed. Open the liquid outlet valve so that the flushing water in the on-line particle detector can be discharged through the liquid outlet pipe and the water outlet pipe. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present utility model will be further described below in conjunction with the drawings and embodiments.

[0020] Figure 1 is a schematic diagram of the overall structure of the present utility model;

[0021] Figure 2 is a schematic diagram of the structure of the liquid inlet assembly of the present utility model;

[0022] Figure 3 is a schematic diagram of the structure of the liquid inlet treatment assembly of the present utility model;

[0023] Figure 4 is a schematic diagram of the structure of the liquid outlet assembly of the present utility model;

[0024] Figure 5 is a schematic diagram of the structure of the support assembly of the present utility model;

[0025] In the figure: 1, on-line particle detector; 2, liquid inlet assembly; 201, liquid inlet pipe; 202, flow meter; 203, regulating valve; 3, liquid inlet treatment assembly; 301, cylinder body; 302, driving motor; 303, connecting rod; 304, stirring rod;

[0026] 4, liquid outlet assembly; 401, liquid outlet pipe; 402, liquid outlet valve; 403, one-way valve; 5, water inlet pipe; 501, water inlet valve;

[0027] 6, water outlet pipe; 601, water outlet valve; 7, first pipe joint; 8, second pipe joint; 9, support assembly; 901, arc plate; 902, pipe sleeve; 903, support rod; 904, fixing bolt. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0028] In order to make the technical means, creative features, achieved purposes and effects of the present utility model easy to understand, the present utility model will be further described below in conjunction with the specific embodiments.

[0029] The driving motor drives the connecting rod and the stirring rod on its outer side to rotate at high speed, stir the cleaning liquid flowing into the cylinder body, so that the particles inside do not precipitate and are fully mixed in the cleaning liquid, so that the on-line particle detector can detect it, as Figures 1-5As shown in the figure, an on-line detection device for particles of a formula cleaning liquid for high-purity photoresist according to the present utility model includes an on-line particle detector 1, a liquid outlet pipe 401 and a one-way valve 403. An inlet liquid assembly 2 is arranged at the inlet liquid end of the on-line particle detector 1. The inlet liquid assembly 2 includes an inlet liquid pipe 201 connected to the inlet liquid end of the on-line particle detector 1 through a thread groove. A flow meter 202 is sleeved outside the inlet liquid pipe 201, and a regulating valve 203 is sleeved outside the inlet liquid pipe 201 at the bottom of the flow meter 202;

[0030] The bottom end of the inlet liquid pipe 201 is provided with an inlet liquid treatment assembly 3. The inlet liquid treatment assembly 3 includes a cylinder body 301 connected to the bottom end of the inlet liquid pipe 201 through a thread groove. A driving motor 302 is installed at the top of the cylinder body 301 through a mounting frame. An output shaft of the driving motor 302 located inside the cylinder body 301 is connected to a connecting rod 303 through a connecting sleeve, and stirring rods 304 are welded equidistantly on the outside of the connecting rod 303.

[0031] During use, the driving motor 302 is turned on to drive the connecting rod 303 and the stirring rods 304 on its outside to rotate at a high speed, stirring the cleaning liquid in the cylinder body 301, causing the particles in the cleaning liquid to float up and be fully mixed with the cleaning liquid. The flow rate of the cleaning liquid flowing into the on-line particle detector 1 can be controlled through the regulating valve 203, and the flow meter 202 is used to detect and display the flow rate of the cleaning liquid in the inlet liquid pipe 201.

[0032] Exemplarily, as Figure 1 、 Figure 4 shown in the figure, the present utility model further includes that an outlet liquid assembly 4 is arranged at the outlet liquid end of the on-line particle detector 1. The outlet liquid assembly 4 includes an outlet liquid pipe 401 connected to the outlet liquid end of the on-line particle detector 1 through a thread groove.

[0033] During use, the cleaning liquid detected in the on-line particle detector 1 flows out through the outlet liquid pipe 401.

[0034] Exemplarily, as Figure 4 shown in the figure, the present utility model further includes that an outlet liquid valve 402 is sleeved outside the outlet liquid pipe 401, and a one-way valve 403 is connected to the bottom end of the outlet liquid pipe 401 through a thread groove.

[0035] During use, the one-way valve 403 can prevent the cleaning liquid in the conveying pipeline from flowing into the on-line particle detector 1 through the outlet liquid pipe 401.

[0036] Exemplarily, as Figure 2 shown in the figure, the present utility model further includes that a water inlet pipe 5 is welded to the top end of the inlet liquid pipe 201, and a water inlet valve 501 is connected to the top end of the water inlet pipe 5 through a thread groove.

[0037] In use, open the water inlet valve 501 so that external clean water can flow through the water inlet pipe 5 into the on-line particle detector 1, facilitating the flushing inside the on-line particle detector 1.

[0038] Exemplarily, as Figure 4 shown, the present utility model further includes that one side of the liquid outlet pipe 401 is welded with a water outlet pipe 6, and one end of the water outlet pipe 6 is connected with a water outlet valve 601 through a threaded groove.

[0039] In use, open the water outlet valve 601 so that the flushing water in the on-line particle detector 1 is discharged through the water outlet pipe 6.

[0040] Exemplarily, as Figure 2 shown, the present utility model further includes that the bottom end of the cylinder body 301 is connected with a first pipe joint 7 through a threaded groove, and the bottom end of the one-way valve 403 is connected with a second pipe joint 8 through a threaded groove.

[0041] In use, the setting of the first pipe joint 7 facilitates the connection of the bottom end of the cylinder body 301 to the cleaning liquid delivery pipe, and the setting of the second pipe joint 8 facilitates the connection of the bottom end of the one-way valve 403 to the cleaning liquid delivery pipe.

[0042] Exemplarily, as Figure 5 shown, the present utility model further includes that a support assembly 9 is arranged at the bottom of the on-line particle detector 1. The support assembly 9 includes an arc-shaped plate 901 located at the bottom of the on-line particle detector 1. The top of the arc-shaped plate 901 is connected with a pipe sleeve 902 through a threaded groove, and a support rod 903 is sleeved at the top end of the pipe sleeve 902.

[0043] In use, the arc-shaped plate 901 is placed on the cleaning liquid delivery pipe, and the on-line particle detector 1 is supported by the pipe sleeve 902 and the support rod 903, which can improve the structural stability of the on-line particle detector 1.

[0044] Exemplarily, as Figure 5 shown, the present utility model further includes that the top end of the support rod 903 is fixed to the bottom of the on-line particle detector 1 through a flange, and one side of the pipe sleeve 902 is connected with a fixing bolt 904 through a threaded groove.

[0045] In use, the support rod 903 and the pipe sleeve 902 can be adjusted. The height of the arc-shaped plate 901 can be adjusted to facilitate the placement of the arc-shaped plate 901 on the delivery pipe. Tightening the fixing bolt 904 can fix the telescoped support rod 903 or pipe sleeve 902.

[0046] When the present utility model is in use, the operator fixes the device to the cleaning liquid delivery pipe through the first pipe joint 7 and the second pipe joint 8, and connects the device to an external power supply using a power cord;

[0047] The cleaning liquid in the conveying pipeline flows into the cylinder body 301. The driving motor 302 is turned on to drive the connecting rod 303 and the stirring rod 304 outside it to rotate at high speed, stirring the cleaning liquid in the cylinder body 301 to make the particles in the cleaning liquid float up;

[0048] The regulating valve 203 is opened to make the stirred cleaning liquid flow into the on-line particle detector 1 through the liquid inlet pipe 201. The on-line particle detector 1 detects the particles in the cleaning liquid. By adjusting the opening and closing angle of the regulating valve 203, the flow rate of the cleaning liquid when it flows into the on-line particle detector 1 can be controlled. The flow meter 202 can detect and display the flow rate of the cleaning liquid in the liquid inlet pipe 201;

[0049] The liquid outlet valve 402 is opened to make the cleaning liquid detected in the on-line particle detector 1 flow into the conveying pipeline through the liquid outlet pipe 401. The setting of the one-way valve 403 can prevent the cleaning liquid in the conveying pipeline from flowing into the on-line particle detector 1 through the liquid outlet pipe 401;

[0050] The regulating valve 203 and the liquid outlet valve 402 are closed, and the water inlet valve 501 is opened to make the external clean water flow into the liquid inlet pipe 201 through the water inlet pipe 5. When it flows into the on-line particle detector 1, the on-line particle detector 1 can be flushed. The water outlet valve 601 is opened to make the flushing water in the on-line particle detector 1 flow out through the liquid outlet pipe 401 and the water outlet pipe 6.

[0051] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and the descriptions in the specification only illustrate the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of protection required by the present invention. The scope of protection required by the present invention is defined by the appended claims and their equivalents.

Claims

1. An on-line detection device for a particle counter of a formula cleaning solution for high-purity photoresist, characterized in that, It includes an on-line particle detector (1), a liquid outlet pipe (401) and a check valve (403). An inlet liquid assembly (2) is arranged at the liquid inlet end of the on-line particle detector (1). The inlet liquid assembly (2) includes an inlet liquid pipe (201) connected to the liquid inlet end of the on-line particle detector (1) through a thread groove. A flow meter (202) is sleeved outside the inlet liquid pipe (201), and a regulating valve (203) is sleeved outside the inlet liquid pipe (201) at the bottom of the flow meter (202). The bottom end of the inlet liquid pipe (201) is provided with an inlet liquid treatment assembly (3). The inlet liquid treatment assembly (3) includes a cylinder body (301) connected to the bottom end of the inlet liquid pipe (201) through a thread groove. A driving motor (302) is installed at the top of the cylinder body (301) through a mounting bracket. The output shaft of the driving motor (302) located inside the cylinder body (301) is connected to a connecting rod (303) through a connecting sleeve, and stirring rods (304) are welded equidistantly on the outside of the connecting rod (303).

2. The online detection device for particles in the formulation cleaning solution for high-purity photoresist according to claim 1, wherein, A liquid outlet assembly (4) is arranged at the liquid outlet end of the on-line particle detector (1). The liquid outlet assembly (4) includes a liquid outlet pipe (401) connected to the liquid outlet end of the on-line particle detector (1) through a thread groove.

3. An on-line detection device for particles in a formula cleaning solution for high-purity photoresist according to claim 1, characterized in that, A liquid outlet valve (402) is sleeved outside the liquid outlet pipe (401), and a check valve (403) is connected to the bottom end of the liquid outlet pipe (401) through a thread groove.

4. An on-line detection device for particles in a formulation cleaning solution for high-purity photoresist according to claim 1, characterized in that, The top end of the inlet liquid pipe (201) is welded with a water inlet pipe (5), and the top end of the water inlet pipe (5) is connected to a water inlet valve (501) through a thread groove.

5. An on-line detection device for particles in a formulation cleaning solution for high-purity photoresist according to claim 1, characterized in that, One side of the liquid outlet pipe (401) is welded with a water outlet pipe (6), and one end of the water outlet pipe (6) is connected to a water outlet valve (601) through a thread groove.

6. The online detection device for particles in the formulation cleaning solution for high-purity photoresist according to claim 1, wherein, The bottom end of the cylinder body (301) is connected to a first pipe joint (7) through a thread groove, and the bottom end of the check valve (403) is connected to a second pipe joint (8) through a thread groove.

7. An on-line detection device for particles in a formula cleaning solution for high-purity photoresist according to claim 1, characterized in that, A support assembly (9) is arranged at the bottom of the on-line particle detector (1). The support assembly (9) includes an arc-shaped plate (901) located at the bottom of the on-line particle detector (1). A pipe sleeve (902) is connected to the top of the arc-shaped plate (901) through a thread groove, and a support rod (903) is sleeved at the top of the pipe sleeve (902).

8. An on-line detection device for particles in a formulation cleaning solution for high-purity photoresist according to claim 7, characterized in that, The top end of the support rod (903) is fixed to the bottom of the on-line particle detector (1) through a flange, and a fixing bolt (904) is connected to one side of the pipe sleeve (902) through a thread groove.

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