Chain type machine bearing sealing groove body

Abstract

The utility model discloses a chain type machine bearing sealing groove body which comprises a base groove, an installation base and a transmission roller, the installation base is installed on the base groove, and a cleaning groove is defined by the installation base and the base groove. A plurality of mounting blocks are arranged on the mounting seat in the first direction of material transportation; the multiple transmission rollers are inserted into the multiple mounting blocks in the first direction in a one-to-one correspondence mode. Bearings are arranged on the two sides of the transmission roller. A mounting hole is formed in the mounting block, an annular retaining shoulder is arranged in the mounting hole, an inner ring of the bearing is connected with the transmission roller, an outer ring of the bearing is suitable for abutting against the annular retaining shoulder, and a gap is formed between the annular retaining shoulder and the inner ring of the bearing. The structure prevents the bearing inner ring and the mounting block from generating sliding friction to damage the bearing, meanwhile, due to the existence of the annular retaining shoulder, the gap between the mounting block and the transmission roller can be made small enough, and the structure can greatly reduce the liquid leakage amount at the position of the bearing.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer processing, and particularly relates to a bearing sealing groove body of a chain machine. Background Art

[0002] Etching is a processing technology that corrodes the surface of materials through liquid or gaseous chemicals to form the desired shape. For a long time, it has been used in the production of copper plate prints and printing plates. In recent years, photoetching using precision imaging technology has been used to produce fine circuits, ICs, printed circuit boards, and various precision electronic devices with a wiring width of less than dozens of micrometers. The basic principle of etching is to form a resist pattern on the surface of a metal film, and by corroding and removing the parts not coated with the resist, the desired shape, such as a circuit pattern, is formed. After the metal film etching is completed, cleaning is required to remove the excess resist film on the surface.

[0003] There are gaps between the existing bearing mounting seat and the bearing bushing. If the gaps are narrowed, the bearing mounting seat will contact the inner ring of the bearing, resulting in continuous wear during operation; moreover, there is no sealing structure between the bearing mounting seat and the bearing, making it easy to leak liquid. Summary of the Utility Model

[0004] Therefore, the technical problem to be solved by the utility model is to overcome the defects that there are gaps between the existing bearing mounting seat and the bearing bushing. If the gaps are made smaller, the bearing mounting seat will contact the inner ring of the bearing, resulting in continuous wear during operation; moreover, there is no sealing structure between the bearing mounting seat and the bearing, making it easy to leak liquid.

[0005] To this end, the utility model provides a bearing sealing groove body of a chain machine, including:

[0006] A base groove, on which a mounting seat is installed, and the mounting seat and the base groove enclose a cleaning groove; a plurality of mounting blocks are arranged on the mounting seat along the first direction of material transportation;

[0007] Drive rollers, a plurality of drive rollers are provided, and the plurality of drive rollers are inserted into the plurality of mounting blocks one by one along the first direction; bearings are arranged on both sides of the drive rollers;

[0008] Wherein, a mounting hole is formed in the mounting block, an annular shoulder is arranged in the mounting hole, the inner ring of the bearing is connected to the drive roller, the outer ring of the bearing is adapted to abut against the annular shoulder, and there is a gap between the annular shoulder and the inner ring of the bearing.

[0009] Beneficial effects: The outer wall of the outer ring of the bearing with this structure is adapted to abut against the inner wall of the mounting hole and the annular shoulder, so that there is a gap between the inner wall of the annular shoulder and the transmission roller, and thus there is a clearance between the annular shoulder and the inner ring of the bearing. This prevents sliding friction between the inner ring of the bearing and the mounting block from damaging the bearing. At the same time, due to the existence of the annular shoulder, the gap between the mounting block and the transmission roller can be made small enough. This structure can greatly reduce the liquid leakage at the bearing position.

[0010] Optionally, the above-mentioned chain machine bearing sealing groove body further includes a base; the base is arranged in the base groove along a second direction perpendicular to the first direction, and there are at least two bases, and at least two bases are arranged at intervals along the first direction.

[0011] Optionally, the above-mentioned mounting seat includes a first mounting seat and a second mounting seat; there are two first mounting seats, and the two first mounting seats are symmetrically arranged on both sides of the base; the mounting block is inserted into the first mounting seat and / or the second mounting seat;

[0012] There are two second mounting seats, and the two second mounting seats are symmetrically arranged between the two first mounting seats; any one of the first mounting seats, the second mounting seat close to it, and the base enclose a cleaning area.

[0013] Optionally, the two second mounting seats are arranged at intervals.

[0014] Beneficial effects: The second mounting seats arranged at intervals are divided into two cleaning areas, and the two cleaning areas are spaced and connected. There is a groove between the two second mounting seats. When liquid leakage occurs, the leaked liquid will flow into this groove and finally flow into the cleaning tank.

[0015] Optionally, the above-mentioned chain machine bearing sealing groove body further includes an overflow baffle. A first mounting groove is opened at the top of the base located in the cleaning area, and the overflow baffle is installed in the first mounting groove, and the overflow baffle can be lifted and lowered to adjust the liquid level in the cleaning area.

[0016] Beneficial effects: A set screw is installed at the lower end of the overflow baffle, and the lifting and lowering of the overflow baffle is controlled by the set screw. Compared with the prior art, the liquid level height can be adjusted, reducing the occurrence of liquid leakage and the liquid leakage caused by the problem of the height of the base.

[0017] Optionally, the above-mentioned mounting block is only inserted into the first mounting seat; the mounting hole includes a first mounting hole and a second mounting hole, the first mounting hole and the second mounting hole are coaxially arranged, the first mounting hole is opened on the outside of the mounting block, the second mounting hole is opened on the inside of the mounting hole, and the first mounting hole is communicated with the second mounting hole.

[0018] Optionally, a third mounting hole is provided on the second mounting seat corresponding to the first mounting hole and the second mounting hole, one end of the transmission roller is inserted into the first mounting hole and the second mounting hole, and the other end is inserted into the third mounting hole.

[0019] Optionally, the inner diameter of the second mounting hole is larger than that of the first mounting hole, and the annular shoulder is arranged on the side of the second mounting hole close to the first mounting hole.

[0020] Beneficial effects: The left end of the transmission roller is inserted into the first mounting hole and the second mounting hole in the left cleaning area. The outer wall of the outer ring of the bearing is adapted to abut against the inner wall of the second mounting hole, and the side of the outer ring of the bearing close to the first mounting hole abuts against the annular shoulder, so that there is a gap between the inner wall of the annular shoulder and the transmission roller, and thus there is a gap between the annular shoulder and the inner ring of the bearing, preventing the inner ring of the bearing from sliding friction with the mounting block and damaging the bearing. At the same time, due to the existence of the annular shoulder and the gap, the gap between the mounting block and the transmission roller can be made small enough, and it is difficult for the cleaning liquid to leak out from the tiny gap, which can greatly reduce the liquid leakage amount at the bearing position.

[0021] Optionally, a second mounting groove is provided on the mounting seat, and the mounting block is inserted into the second mounting groove.

[0022] Optionally, the chain machine bearing sealing groove body includes a transmission structure, and the transmission structure includes a first transmission gear and a second transmission gear. The first transmission gear is connected to at least one of the transmission rollers, and the first transmission gear is adapted to be connected to an external power output device; a second transmission gear is installed on the same side of several of the transmission rollers, and any two adjacent second transmission gears are meshed with each other.

[0023] The technical solution provided by the present utility model has the following advantages:

[0024] 1. The chain machine bearing sealing groove body provided by the present utility model includes: a base groove, a mounting seat and a transmission roller. A mounting seat is installed on the base groove, and the mounting seat and the base groove enclose a cleaning groove; a plurality of mounting blocks are arranged on the mounting seat along the first direction of material transportation; a plurality of transmission rollers are provided, and the plurality of transmission rollers are inserted into the plurality of mounting blocks one by one along the first direction; bearings are arranged on both sides of the transmission roller; mounting holes are provided on the mounting blocks, annular shoulders are arranged in the mounting holes, the inner ring of the bearing is connected to the transmission roller, and the outer ring of the bearing is adapted to abut against the annular shoulder, and there is a gap between the annular shoulder and the inner ring of the bearing.

[0025] The outer wall of the outer ring of the bearing of this structure is adapted to abut against the inner wall of the mounting hole and the annular shoulder, so that there is a gap between the inner wall of the annular shoulder and the transmission roller, and thus there is a clearance between the annular shoulder and the inner ring of the bearing. This prevents sliding friction between the inner ring of the bearing and the mounting block from damaging the bearing. At the same time, due to the presence of the annular shoulder, the gap between the mounting block and the transmission roller can be made small enough. This structure can greatly reduce the liquid leakage at the bearing position. Description of the Drawings

[0026] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0027] Figure 1 It is a schematic diagram of the overall structure of the bearing sealing groove body provided in the present invention;

[0028] Figure 2 It is a schematic diagram of the cooperation between the transmission roller and the mounting block provided in the present invention;

[0029] Figure 3 It is a cross-sectional view of the mounting block provided in the present invention;

[0030] Description of the reference numerals:

[0031] 1 - base groove;

[0032] 2 - base; 21 - overflow baffle;

[0033] 31 - first mounting seat; 32 - second mounting seat;

[0034] 4 - mounting block; 41 - first mounting hole; 42 - second mounting hole; 43 - annular shoulder;

[0035] 5 - transmission roller;

[0036] 6 - bearing;

[0037] 7 - transmission structure; 71 - first transmission gear; 72 - second transmission gear. Detailed Embodiments

[0038] The following will clearly and completely describe the technical solutions of the present invention with reference to the drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0039] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0040] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0041] In addition, the technical features involved in different embodiments of the present utility model described below can be combined with each other as long as they do not conflict with each other.

[0042] Embodiment 1

[0043] This embodiment provides a sealing groove body for a chain machine bearing 6, as Figures 1 to 3 shown, including a base groove 1, a mounting seat, and a driving roller 5.

[0044] As Figure 1 shown, the base groove 1 is a U-shaped groove. The bottom plate of the base groove 1 is placed horizontally, and the front and rear sides have vertically bent side plates, and no side plates are provided on the left and right sides. The front and rear directions of the base groove 1 are the first direction, and the left and right directions of the base groove 1 are the second direction. The materials of the base groove 1 body and the mounting seat use PP-N materials, which have the advantages of acid and alkali resistance, high strength, and low cost.

[0045] As Figure 1As shown in the figure, two bases 2 are fixedly installed in parallel in the base groove 1. When the bases 2 are installed, the length direction is parallel to the second direction, that is, the two bases 2 are arranged parallel to the side plates on the front and back sides of the bottom plate. The two bases 2 are arranged at intervals. The mounting seat includes a first mounting seat 31 and a second mounting seat 32. There are two of each of the first mounting seat 31 and the second mounting seat 32. The two first mounting seats 31 are respectively installed on both sides of the two bases 2. The inner sides of the two first mounting seats 31 respectively abut against both sides of the two bases 2. The length direction of the installation of the first mounting seat 31 is parallel to the first direction. The two ends of the first mounting seat 31 respectively abut against the side plates of the base groove 1. The two first mounting seats 31 and the side plates of the base groove 1 enclose a large cleaning tank.

[0046] As Figure 1 shown, there are also two second mounting seats 32. The two second mounting seats 32 are respectively arranged between the two first mounting seats 31 corresponding to the first mounting seats 31 on both sides. There are three installation methods between the second mounting seat 32 and the base 2: First, the second mounting seat 32 is set as a split type and is arranged on both sides of the base 2 along the first direction. The split second mounting seat 32 is fixed on the bottom plate, and the parts close to each other overlap each other; Second, the lower end of the second mounting seat 32 is provided with grooves corresponding to the two bases 2. The bases 2 are inserted into the grooves, and the other parts of the second mounting seat 32 are fixed on the bottom plate of the base groove 1; Third, the second mounting seat 32 is directly fixed on the bottom plate of the base material, and the upper end of the base 2 is provided with grooves corresponding to the two second mounting seats 32. The second mounting seat 32 is inserted into the base 2. Any one of the first mounting seats 31 and a second mounting seat 32 close to it and the base 2 enclose a cleaning area; that is, the two first mounting seats 31, the two second mounting seats 32 and the base 2 enclose two cleaning areas on the left and right. The first mounting seat 31 on the left, the second mounting seat 32 on the left and the base 2 enclose a cleaning area, and the first mounting seat 31 on the right, the second mounting seat 32 on the right and the base 2 enclose a cleaning area. The areas of the cleaning area on the left and the cleaning area on the right are the same.

[0047] There are various installation methods for the mounting seat. First, a number of second installation grooves are opened along the first direction at the upper ends of the first mounting seat 31 and the second mounting seat 32. A number of mounting blocks 4 are inserted into the second installation grooves. Mounting holes are opened on the mounting blocks 4, and the mounting holes penetrate through the mounting blocks 4 along the second direction. Second, only a number of second installation grooves are opened along the first direction at the upper end of the first mounting seat 31. A number of mounting blocks 4 are inserted into the second installation grooves; while the second mounting seat 32 is not provided with second installation grooves, and the mounting blocks 4 are not inserted into the second installation grooves either. Both installation methods are acceptable. The second installation method is used in this embodiment.

[0048] The mounting holes are successively provided with a first mounting hole 41 and a second mounting hole 42 in the direction from near the second mounting seat 32 to far from the second mounting seat 32. The first mounting hole 41 and the second mounting hole 42 are coaxial and the first mounting hole 41 communicates with the second mounting hole 42. The inner diameter of the second mounting hole 42 is larger than that of the first mounting hole 41. A ring shoulder 43 is provided on the side of the second mounting hole 42 close to the first mounting hole 41. The inner diameter of the ring shoulder 43 is smaller than that of the second mounting hole 42 and larger than that of the first mounting hole 41.

[0049] With the above settings, the cleaning liquid is placed in the cleaning tank enclosed by the two first mounting seats 31, the bottom plate and the side plate of the base groove 1. The two groups of mounting seats divide the inside of a cleaning tank into two cleaning areas, enabling multi-batch cleaning and improving the cleaning efficiency.

[0050] Taking one of the cleaning areas as an example, a plurality of driving rollers 5 are inserted into a plurality of mounting blocks 4 in the cleaning area in one-to-one correspondence along the first direction; one end of the driving roller 5 is inserted into the mounting holes of the mounting blocks 4 on the first mounting seat 31 and the second mounting seat 32 on both sides of the corresponding cleaning area, and the other end is inserted into the third mounting hole above the corresponding second mounting seat 32. Specifically, as Figure 2 shown, a bearing 6 is fixed to the right end of the driving roller 5 by a snap ring, and a bearing 6 is fixed to the left end of the driving roller 5 by a bushing. The left end of the driving roller 5 is inserted into the first mounting hole 41 and the second mounting hole 42 in the left cleaning area. The outer wall of the outer ring of the bearing 6 is adapted to abut against the inner wall of the second mounting hole 42, and one side of the outer ring of the bearing 6 close to the first mounting hole 41 abuts against the ring shoulder 43, so that there is a gap between the inner wall of the ring shoulder 43 and the driving roller 5, and thus there is a gap between the ring shoulder 43 and the inner ring of the bearing 6, preventing sliding friction between the inner ring of the bearing 6 and the mounting block 4 from damaging the bearing 6. At the same time, due to the existence of the ring shoulder 43 and the gap, the gap between the mounting block 4 and the driving roller 5 can be made small enough, and it is difficult for the cleaning liquid to leak out from the tiny gap, which can greatly reduce the liquid leakage amount at the position of the bearing 6. The middle transmission part of the driving roller 5 and the mounting block 4 are made of UPE material, which has good machining performance, outstanding impact resistance, low friction coefficient, self-lubrication, and excellent chemical corrosion resistance. The two side axle shafts of the driving roller 5 are made of PEEK material, which has high temperature resistance, corrosion resistance, low water absorption, easy processing, and excellent mechanical properties.

[0051] On the opposite side, the driving rollers 5 are symmetrically arranged in the cleaning area on the right side, that is, the end of the driving roller 5 with the bushing installed is inserted into the mounting hole of the mounting block 4 on the first mounting seat 31 in the right cleaning area. It also has the above beneficial effects and will not be elaborated here.

[0052] Shoulder structures can also be provided on the mounting blocks 4 on the two second mounting seats 32 to enhance the sealing performance of the entire cleaning device.

[0053] To reduce the amount of processing work, the mounting blocks 4 on the two second mounting seats 32 may not be provided with annular shoulders 43. By providing two cleaning areas that are spaced apart and connected, there is a groove between the two second mounting seats 32. When liquid leakage occurs, the leaked liquid will flow into this groove and finally into the cleaning tank.

[0054] In other feasible embodiments, such as Figure 1 shown, the sealing groove body of the chain machine bearing 6 further includes an overflow baffle 21. A first mounting groove is provided at the top of the base 2 in the cleaning area, and the overflow baffle 21 is installed in the first mounting groove. A setscrew is installed at the lower end of the overflow baffle 21 to control the lifting of the overflow baffle 21 by using the setscrew. Compared with the prior art, the liquid level height can be adjusted, reducing the occurrence of liquid leakage and also reducing the liquid leakage situation caused by the height problem of the base 2.

[0055] In this embodiment, as Figure 1 and Figure 2 shown, a transmission structure 7 is further provided on one side of the transmission roller 5 close to the bushing. The transmission structure 7 includes a first transmission gear 71 and a second transmission gear 72. At least one first transmission gear 71 is fixed on the transmission roller 5, and the first transmission gear 71 is adapted to be connected to an external power output device. A second transmission gear 72 is installed on the same side of several transmission rollers 5, and any two adjacent second transmission gears 72 are meshed with each other. Start the external power output device, and the output device drives the first transmission gear 71 to rotate. The transmission roller 5 corresponding to the first transmission gear 71 and the second transmission gear 72 rotate, and the second transmission gear 72 drives other transmission rollers 5 to rotate through gear meshing, realizing the transportation and cleaning of the metal film.

[0056] Obviously, the above embodiments are merely examples given for clear illustration and are not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or variations can be made based on the above description. It is not necessary and impossible to list all the implementation manners here. And the obvious changes or variations derived therefrom still fall within the protection scope of the present invention.

Claims

1. A chain machine bearing sealing groove body, characterized in that Including: A base groove (1), on which a mounting seat is installed, and the mounting seat and the base groove (1) enclose a cleaning tank; a plurality of mounting blocks (4) are arranged on the mounting seat along the first direction of material transportation; Drive rollers (5), a plurality of the drive rollers (5) are provided, and the plurality of drive rollers (5) are inserted into the plurality of mounting blocks (4) one by one along the first direction; bearings (6) are arranged on both sides of the drive rollers (5); Wherein, a mounting hole is formed in the mounting block (4), an annular shoulder (43) is arranged in the mounting hole, the inner ring of the bearing (6) is connected to the drive roller (5), the outer ring of the bearing (6) is adapted to abut against the annular shoulder (43), and there is a gap between the annular shoulder (43) and the inner ring of the bearing (6).

2. The chain machine bearing seal groove body according to claim 1, characterized in that, The chain machine bearing (6) sealing tank body further includes a base (2); the base (2) is arranged in the base groove (1) along the second direction perpendicular to the first direction, and at least two bases (2) are provided, and the at least two bases (2) are arranged at intervals along the first direction.

3. The chain machine bearing seal groove body according to claim 2, characterized in that, The mounting seat includes a first mounting seat (31) and a second mounting seat (32); two first mounting seats (31) are provided, and the two first mounting seats (31) are symmetrically arranged on both sides of the base (2); the mounting blocks (4) are inserted into the first mounting seat (31) and / or the second mounting seat (32); Two second mounting seats (32) are provided, and the two second mounting seats (32) are symmetrically arranged between the two first mounting seats (31); any one of the first mounting seats (31) and the second mounting seat (32) close to it and the base (2) enclose a cleaning area.

4. The chain machine bearing sealing groove body according to claim 3, characterized in that, The two second mounting seats (32) are arranged at intervals.

5. The chain machine bearing sealing groove body according to claim 3, wherein The chain machine bearing (6) sealing tank body further includes an overflow baffle (21), a first mounting groove is formed at the top of the base (2) located in the cleaning area, the overflow baffle (21) is installed in the first mounting groove, and the overflow baffle (21) can be lifted and lowered to adjust the liquid level in the cleaning area.

6. The chain machine bearing sealing groove body according to claim 3, characterized in that The mounting block (4) is only inserted into the first mounting seat (31); the mounting hole includes a first mounting hole (41) and a second mounting hole (42), the first mounting hole (41) and the second mounting hole (42) are coaxially arranged, the first mounting hole (41) is formed on the outer side of the mounting block (4), the second mounting hole (42) is formed on the inner side of the mounting hole, and the first mounting hole (41) is communicated with the second mounting hole (42).

7. The chain machine bearing seal groove body according to claim 6, characterized in that, Third mounting holes corresponding to the first mounting hole (41) and the second mounting hole (42) are formed in the second mounting seat (32), one end of the drive roller (5) is inserted into the first mounting hole (41) and the second mounting hole (42), and the other end is inserted into the third mounting hole.

8. The chain machine bearing seal groove body according to claim 6, characterized in that, The inner diameter of the second mounting hole (42) is larger than that of the first mounting hole (41), and the annular shoulder (43) is arranged on the side of the second mounting hole (42) close to the first mounting hole (41).

9. The chain machine bearing sealing groove body according to claim 1, characterized in that, A second mounting groove is formed in the mounting base, and the mounting block (4) is inserted into the second mounting groove.

10. The chain machine bearing seal groove body according to any one of claims 1-9, characterized in that, The sealing groove body of the chain machine bearing (6) includes a transmission structure (7). The transmission structure (7) includes a first transmission gear (71) and a second transmission gear (72). The first transmission gear (71) is connected to at least one of the transmission rollers (5), and the first transmission gear (71) is adapted to be connected to an external power output device; the second transmission gears (72) are mounted on the same side of a plurality of the transmission rollers (5), and any two adjacent second transmission gears (72) are meshed with each other.

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