Exhaust pipe control valve device and photoetching machine coating box

Abstract

The utility model provides an exhaust pipe control valve device and a photoetching machine coating box, and relates to the technical field of photoresist coating devices.The exhaust pipe control valve device comprises a filter box with an air inlet, a control box with an air outlet, a control valve body and a filter assembly, the air inlet is communicated with the air outlet through the filter box and the control box to form the linear air exhaust channel, air is exhausted from the linear air exhaust channel during air exhaust, smoothness of the air exhaust channel is guaranteed to the maximum degree, and the air exhaust effect is improved. And a filtering assembly arranged in the filtering box is matched to filter residual photoresist and other impurities, so that the operation precision of the control valve body during air exhaust is ensured, and the air exhaust efficiency is improved while faults are reduced. According to the photoresist coating box provided by the invention, the exhaust pipe control valve is adopted in the exhaust pipeline of the coating box, so that the utilization efficiency of the exhaust pressure of equipment is higher, and the failure rate of the equipment is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of photoresist coating devices, in particular to an exhaust pipe control valve device and a coating box of a lithography machine. Background Art

[0002] In the existing photoresist coating (PR Coating) preparation process technology, during the coating process, due to the limitations of the process chamber itself, the air flow and residual photoresist during the coating operation can only be discharged through the exhaust pipe. During the coating process, when the photoresist is spin-coated, the exhaust air flow will cause slight changes on the surface of the photoresist. Therefore, during the spin-coating process, the exhaust extraction will be intermittently turned on. At this time, an automatic control switch system for the exhaust pipe needs to be installed below the process chamber to regularize the air flow and ensure the flatness of the film surface and other purposes.

[0003] In the prior art, a piston-type control valve is mainly used to control the opening and closing of the exhaust pipe. Since the pipe of the existing piston-type control valve is a right-angle structure, residual photoresist is extremely easy to accumulate on the inner wall of the piston cylinder or the control piston, resulting in problems such as the piston getting stuck and the exhaust capacity becoming weak during the process of coating photoresist, which will cause poor coating and unstable chamber flow field at the process level, and ultimately reduce the coating yield. Summary of the Utility Model

[0004] The purpose of the utility model is to provide an exhaust pipe control valve device to solve the above technical problems.

[0005] In a first aspect, an embodiment of the utility model provides an exhaust pipe control valve device, which includes: a filter box with an air inlet, a control box with an air outlet, a control valve body, and a filter component. The air inlet is communicated with the air outlet through the filter box and the control box to form a linear exhaust channel. The filter component is arranged inside the filter box, and the control valve body is arranged inside the control box for controlling the on-off of the linear exhaust channel.

[0006] Further, a pressure detection port is opened on the filter box, and the pressure detection port is connected to a pressure detection device through a pipeline.

[0007] Further, the control valve body includes a driving motor, a connecting shaft, and a control valve plate. The control valve plate is movably arranged inside the control box, and the driving motor is connected to the control valve plate through the connecting shaft.

[0008] Further, the filter component includes a filter cover arranged inside the filter box, and a plurality of filter holes are opened on the filter cover.

[0009] Further, a taking-out port is opened on the filter box, the filter cover is slidably arranged inside the filter box, and the filter cover can be taken out along the taking-out port.

[0010] Further, a sealing plate is provided on one side of the filter cover close to the extraction port, and the sealing plate covers the extraction port.

[0011] Further, a sealing ring is provided on the sealing plate, and the sealing ring is located at the connection between the sealing plate and the filter box.

[0012] Further, a pushing handle is provided on the side of the sealing plate away from the filter cover.

[0013] Further, a mounting plate is provided on the side of the control box away from the filter box, and mounting holes are formed in the mounting plate.

[0014] On the other hand, an embodiment of the present utility model further provides a photoresist coating box, which includes a sealed box body and the exhaust pipe control valve device of the above item, and the exhaust pipe control valve device is connected in series on the exhaust pipeline of the sealed box body.

[0015] An exhaust pipe control valve device provided by the present utility model includes: a filter box with an air inlet, a control box with an air outlet, a control valve body, and a filter component. The air inlet is communicated with the air outlet through the filter box and the control box to form a linear exhaust channel. The filter component is arranged inside the filter box, and the control valve body is arranged inside the control box for controlling the on-off of the linear exhaust channel. The air inlet passes through the filter box, the control box, and the air outlet to form a linear exhaust channel. When exhausting, the gas is discharged from the linear exhaust channel, which maximally ensures the smoothness of the exhaust channel, greatly reduces the loss of air volume caused by diameter change or structural jamming, and improves the exhaust effect. At the same time, the gas is directly discharged, reducing the situation where residual photoresist remains in the linear exhaust channel, avoiding the accumulation of photoresist or other impurities at the control valve body, and reducing the failure rate of the equipment. Cooperating with the filter component arranged in the filter box, it further filters residual photoresist and other impurities, ensures the operation accuracy of the control valve body during exhaust, reduces the occurrence of failures, and improves the exhaust efficiency at the same time.

[0016] A photoresist coating box provided by the present utility model uses the above exhaust pipe control valve in the exhaust pipeline of the coating box, making the utilization efficiency of the exhaust air pressure of the equipment higher and more convenient for accurately controlling the exhaust air volume, thereby improving the quality of the product. During exhaust, the airflow can be filtered through the filter component to collect residual photoresist, residues, dust and other impurities, avoid the accumulation of impurities at the control valve body, ensure the control effect and service life of the control valve body, reduce the failure rate of the equipment, reduce the probability of chamber environment change and even component open circuit blockage caused by the change of air pressure during exhaust, reduce the occurrence of failures, and improve the exhaust utilization rate more. Description of the Drawings

[0017] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0018] Figure 1 A perspective view of the exhaust duct control valve device provided by an embodiment of the present invention;

[0019] Figure 2 A sectional view of the exhaust duct control valve device provided by an embodiment of the present invention.

[0020] Reference numerals: 100 - filter box; 200 - control box; 300 - control valve body; 400 - air inlet; 201 - air outlet; 500 - air pressure detection port; 301 - drive motor; 302 - connecting shaft; 303 - control valve plate; 600 - filter cover; 601 - filter holes; 101 - extraction port; 602 - sealing plate; 603 - push handle; 700 - mounting plate; 701 - mounting holes. Specific embodiments

[0021] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. Usually, the components of the embodiments of the present invention described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0022] Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the present invention to be protected, but merely represents the selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.

[0023] It should be noted that: similar reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0024] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the present utility model is usually placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0025] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and defined, the terms "set", "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0026] The following will describe in detail some embodiments of the present utility model with reference to the drawings. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0027] Embodiment 1

[0028] This embodiment provides an exhaust duct control valve device, which includes: a filter box 100 with an air inlet 400, a control box 200 with an air outlet 201, a control valve body 300, and a filter assembly. The air inlet 400 is communicated with the air outlet 201 through the filter box 100 and the control box 200 to form a linear exhaust duct. The filter assembly is arranged inside the filter box 100, and the control valve body 300 is arranged inside the control box 200 for controlling the on-off of the linear exhaust duct.

[0029] Please refer to Figure 1As shown, in this embodiment, both the filtration box 100 and the control box 200 are boxes with hollow interiors, and the interiors of the filtration box 100 and the control box 200 are interconnected. An air inlet 400 is provided on one side of the filtration box 100, and an air outlet 201 is provided on the corresponding side of the control box 200. The air inlet 400, the filtration box 100, the control box 200, and the air outlet 201 form a linear exhaust passage, ensuring the smoothness of the exhaust passage to the greatest extent and improving the exhaust effect. The control box 200 is provided with a control valve body 300, which is used to control the on-off of the exhaust passage and the opening degree of the exhaust passage to control the exhaust speed. A filtration component is arranged in the filtration box 100, which can effectively filter the residual photoresist, prevent the photoresist from accumulating at the control valve body 300, affect the smooth opening and closing of the control valve body 300, ensure the operation accuracy of the control valve body 300 during exhaust, reduce the occurrence of faults, and improve the exhaust efficiency at the same time.

[0030] Optionally, in some embodiments of this embodiment, a pressure detection port 500 is provided on the filtration box 100, and the pressure detection port 500 is connected to a pressure detection device through a pipeline.

[0031] Please refer to Figure 2 As shown, in this embodiment, the pressure detection port 500 is connected to an external pressure detection device through a pipeline, facilitating the detection of the air pressure inside the filtration box 100 by the pressure detection device. The staff or the control system can adjust the opening degree of the control valve body 300 in real time according to the pressure detection device, thereby adjusting the coating effect of the photoresist and ensuring the product quality.

[0032] Optionally, in some embodiments of this embodiment, the control valve body 300 includes a driving motor 301, a connecting shaft 302, and a control valve plate 303. The control valve plate 303 is movably arranged inside the control box 200, and the driving motor 301 is connected to the control valve plate 303 through the connecting shaft 302.

[0033] Please refer to Figure 2As shown, in this embodiment, the control valve body 300 uses a butterfly disc swing cylinder valve to control the on / off of a linear exhaust passage. Specifically, the control valve disc 303 has the same shape and size as the air outlet 201, and the control valve disc 303 is arranged at the air outlet 201 of the control box 200. The control valve disc 303 is connected to the rotating shaft of the driving motor 301 through a connecting shaft 302, and the control valve disc 303 can rotate around the connecting shaft 302. When the control valve body 300 is closed, since the control valve disc 303 has the same shape and size as the air outlet 201, the edge of the control valve disc 303 fits against the inner wall of the air outlet 201 to play a sealing role. At this time, the gas cannot pass through, and the control valve body 300 is completely closed. When the driving motor 301 drives the connecting shaft 302 and the control valve disc 303 to rotate, the control valve body 300 opens, and the gas can smoothly pass through the air outlet 201. By adjusting the rotation angle of the control valve disc 303, the opening and closing amount of the control valve body 300 can be adjusted, thereby accurately adjusting the exhaust air volume.

[0034] Optionally, in some embodiments of this embodiment, the filtering component includes a filter hood 600 arranged inside the filter box 100, and a plurality of filter holes 601 are formed on the filter hood 600.

[0035] Please refer to Figure 1 and Figure 2 As shown, in this embodiment, a hollow filtering cavity is formed inside the filter box 100, and a plurality of filter holes 601 for ventilation are formed on the filter hood 600. When the gas enters from the air inlet 400, the filter hood 600 can collect impurities such as dust and debris, avoiding the accumulation of impurities at the control valve body 300 and affecting the smooth opening and closing of the control valve body 300.

[0036] Optionally, in some embodiments of this embodiment, an access opening 101 is formed on the filter box 100, the filter hood 600 is slidably arranged inside the filter box 100, and the filter hood 600 can be taken out along the access opening 101.

[0037] Please refer to Figure 1 and Figure 2 As shown, in this embodiment, an access opening 101 is formed at the bottom or side wall of the filter box 100, the filter hood 600 is slidably arranged inside the filter box 100, and the filter hood 600 can slide along the access opening 101, so as to put the filter hood 600 into the filter box 100 or take the filter hood 600 out of the filter box 100. One side of the filter hood 600 passes through the extension opening and extends to the outside of the filter box 100, forming a drawer structure, which is convenient for the operator to push and pull to take out or put in the filter hood 600 and is convenient for cleaning. The filter hood 600 is detachably connected to the filter box 100. When the filter hood 600 collects too many impurities, the filter hood 600 can be taken out for cleaning to prevent blockage in advance and avoid affecting the ventilation effect of the filter hood 600.

[0038] Optionally, in some embodiments of this embodiment, a sealing plate 602 is provided on the side of the filter cover 600 close to the outlet 101, and the sealing plate 602 covers the outlet 101.

[0039] Please refer to Figure 1 and Figure 2 As shown, in this embodiment, one end of the filter cover 600 close to the outlet 101 extends to the outside of the filter box 100 to form a handle part, which is convenient for the operator to push and pull. A sealing plate 602 is provided on the handle part. The sealing plate 602 can cover the outlet 101. After the sealing plate 602 is covered, it is used to seal the outlet 101. It can be understood that an exhaust air duct is formed inside the filter box 100 and the control box 200. During operation, in addition to the intake port 400 and the outlet 201 connected to the outside, the tightness of the filter box 100 and the control box 200 needs to be ensured to prevent gas from being discharged from the outlet 101. When the sealing plate 602 covers the outlet 101, it can seal the outlet 101, keeping the inside of the filter box 100 in a relatively sealed environment, ensuring that the gas enters the control box 200 smoothly and is discharged.

[0040] Optionally, in some embodiments of this embodiment, a sealing ring is provided on the sealing plate 602, and the sealing ring is located at the connection between the sealing plate 602 and the filter box 100.

[0041] In this embodiment, the sealing ring can be made of soft materials such as rubber or silica gel. The sealing ring is arranged along the edge of the outlet 101. When the sealing plate 602 covers, it will squeeze the sealing ring, making the sealing ring in interference fit with the filter box 100 and the sealing plate 602, thereby ensuring the sealing effect of the sealing cover plate and improving the tightness of the filter box 100.

[0042] Optionally, in some embodiments of this embodiment, a push handle 603 is provided on the side of the sealing plate 602 away from the filter cover 600.

[0043] Please refer to Figure 1 As shown, in this embodiment, an arc-shaped push handle 603 is provided on the sealing plate 602. The operator can hold the push handle 603 to take out the filter cover 600 from the filter box 100 for cleaning or put the filter cover 600 into the filter box 100.

[0044] Optionally, in some embodiments of this embodiment, a mounting plate 700 is provided on the side of the control box 200 away from the filter box 100, and mounting holes 701 are provided on the mounting plate 700.

[0045] Please refer to Figure 1. In this embodiment, a plurality of strip lamp mounting holes 701 are provided on the mounting plate 700. The entire exhaust air duct control valve device can be connected and fixed to external equipment through components such as bolts or studs to ensure the stability of the exhaust air duct control valve device.

[0046] Example 2

[0047] This embodiment provides a photoresist coating box, which includes a sealed box body and the above exhaust pipe control valve device. The exhaust pipe control valve device is serially arranged on the exhaust pipe of the sealed box body.

[0048] In this embodiment, the exhaust pipe of the coating box uses the exhaust pipe control valve provided in the above embodiment. When exhausting, the air flow smoothly passes through the linear exhaust channel of the exhaust pipe control valve, making the utilization efficiency of the exhaust air pressure of the equipment higher and making it easier to accurately control the exhaust air volume, thereby improving the quality of the product. When exhausting, the air flow can be filtered by the filter component to collect residual photoresist or residues, dust and other impurities, avoiding the accumulation of impurities at the control valve body 300, ensuring the control effect and service life of the control valve body 300, reducing the failure rate of the equipment, reducing the probability of chamber environment change and even component open circuit blockage caused by the change of exhaust air pressure during exhausting, and improving the exhaust air utilization rate while reducing the occurrence of failures.

[0049] In summary, the embodiment of the present utility model provides an exhaust pipe control valve device, which includes: a filter box 100 with an air inlet 400, a control box 200 with an air outlet 201, a control valve body 300 and a filter component. The air inlet 400 is communicated with the air outlet 201 through the filter box 100 and the control box 200 to form a linear exhaust channel. The filter component is arranged inside the filter box 100, and the control valve body 300 is arranged inside the control box 200 for controlling the on-off of the linear exhaust channel. The air inlet 400, the filter box 100, the control box 200 and the air outlet 201 form a linear exhaust channel. When exhausting, the gas is discharged from the linear exhaust channel, ensuring the smoothness of the exhaust channel to the greatest extent, greatly reducing the loss of air volume caused by diameter change or structural jamming, and improving the exhaust effect. At the same time, the gas is directly discharged, reducing the situation of residual photoresist remaining in the linear exhaust channel, avoiding the accumulation of photoresist or other impurities at the control valve body 300, and reducing the failure rate of the equipment. Cooperating with the filter component arranged in the filter box 100, further filtering residual photoresist and other impurities, ensuring the operation accuracy of the control valve body 300 during exhausting, and improving the exhaust efficiency while reducing the occurrence of failures.

[0050] The embodiment of the present utility model further provides a photoresist coating box, which includes a sealed box body and the above-mentioned exhaust pipe control valve device. The exhaust pipe control valve device is serially arranged on the exhaust pipe of the sealed box body. By adopting the above-mentioned exhaust pipe control valve in the exhaust pipe of the coating box, the utilization efficiency of the air exhaust wind pressure of the equipment is higher, and it is also more convenient to accurately control the air exhaust volume, thereby improving the quality of the product. During air exhaust, the airflow can be filtered through the filter component to collect residual photoresist, residues, dust and other impurities, avoiding the accumulation of impurities at the control valve body 300, ensuring the control effect and service life of the control valve body 300, reducing the failure rate of the equipment, reducing the probability of chamber environment change and even component open circuit blockage caused by the change of air exhaust wind pressure, and improving the air exhaust utilization rate more while reducing the occurrence of failures.

[0051] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present utility model, rather than to limit them; although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present utility model.

Claims

1. An exhaust duct control valve device, characterized in that, Comprising: A filter box (100) having an air inlet (400), a control box (200) having an air outlet (201), a control valve body (300), and a filter assembly. The air inlet (400) is communicated with the air outlet (201) through the filter box (100) and the control box (200) to form a linear exhaust duct. The filter assembly is arranged inside the filter box (100), and the control valve body (300) is arranged inside the control box (200) for controlling the on-off of the linear exhaust duct.

2. The exhaust duct control valve device according to claim 1, characterized in that, An air pressure detection port (500) is opened on the filter box (100), and the air pressure detection port (500) is connected to an air pressure detection device through a pipeline.

3. The exhaust duct control valve device according to claim 1, wherein The control valve body (300) includes a driving motor (301), a connecting shaft (302), and a control valve plate (303). The control valve plate (303) is movably arranged inside the control box (200), and the driving motor (301) is connected to the control valve plate (303) through the connecting shaft (302).

4. The exhaust duct control valve device according to any one of claims 1-3, characterized in that, The filter assembly includes a filter cover (600) arranged inside the filter box (100), and a plurality of filter holes (601) are opened on the filter cover (600).

5. The exhaust duct control valve device according to claim 4, characterized in that, An extraction port (101) is opened on the filter box (100). The filter cover (600) is slidably arranged inside the filter box (100), and the filter cover (600) can be taken out along the extraction port (101).

6. The exhaust duct control valve device according to claim 5, characterized in that, A sealing plate (602) is arranged on one side of the filter cover (600) close to the extraction port (101), and the sealing plate (602) covers the extraction port (101).

7. The exhaust duct control valve device according to claim 6, characterized in that, A sealing ring is arranged on the sealing plate (602), and the sealing ring is located at the connection between the sealing plate (602) and the filter box (100).

8. The exhaust duct control valve device according to claim 6, characterized in that, A pushing handle (603) is arranged on one side of the sealing plate (602) away from the filter cover (600).

9. The exhaust duct control valve device according to claim 1, characterized in that, An installation plate (700) is arranged on one side of the control box (200) away from the filter box (100), and installation holes (701) are opened on the installation plate (700).

10. A photoresist coating box, characterized in that, Comprising a sealed box body and an exhaust duct control valve device according to any one of claims 1-9, and the exhaust duct control valve device is connected in series on the exhaust pipeline of the sealed box body.

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