Silane tail gas treatment device and coating system

Abstract

The utility model relates to a silane tail gas treatment device and a coating system, and the silane tail gas treatment device comprises a first pipeline, a driving pump, a second pipeline and a tail gas combustion part which are communicated in sequence; the second pipeline is provided with a temperature detection component and a pressure detection component; the first pipeline is provided with a first valve. The silane tail gas treatment device can be used for treating silane tail gas and ensuring the safety at the same time.

Description

Technical Field

[0001] This application relates to the technical field of tail gas treatment, and particularly to a silane tail gas treatment device and a coating system. Background Art

[0002] At present, during the process of LPCVD (Low Pressure Chemical Vapor Deposition) machines, the tail gas includes silane (SiH4). Silane is a colorless, toxic, flammable and explosive gas. Its chemical properties are active and it is extremely easy to be oxidized. When the silane concentration reaches 3%, it will burn in the air.

[0003] Usually, the tail gas containing silane is treated by the combustion method. Specifically, a driving pump provides power to introduce the tail gas containing silane into the tail gas combustion part along the exhaust pipe. However, the length of the exhaust pipe is relatively long. During the process of the tail gas containing silane passing through the exhaust pipe, it will contact a large amount of air inside the exhaust pipe, which may cause internal combustion of the exhaust pipe. When the combustion reaches a certain degree and no measures are taken, the exhaust pipe will heat up, and the heat will be transferred to the driving pump through heat conduction. The heat of the driving pump continues to accumulate, which will cause the driving pump to overheat and malfunction. In severe cases, the driving pump will be damaged, and even the entire exhaust pipe will burn, resulting in accidents in the production workshop.

[0004] Therefore, how to treat silane tail gas while ensuring safety is a technical problem that needs to be urgently solved by those skilled in the art. Summary of the Utility Model

[0005] The purpose of this application is to provide a silane tail gas treatment device and a coating system, which can ensure safety while treating silane tail gas.

[0006] To solve the above technical problems, this application provides a silane tail gas treatment device, which includes a first pipeline, a driving pump, a second pipeline and a tail gas combustion part that are connected in sequence; the second pipeline is provided with a temperature detection component and a pressure detection component; the first pipeline is provided with a first valve member.

[0007] The temperature detection component is used to detect the temperature of the tail gas in the second pipeline, and the pressure detection component is used to detect the pressure of the tail gas in the second pipeline. Through the temperature detection component and the pressure detection component, the tail gas in the second pipeline can be monitored, and whether combustion occurs in the second pipeline can be known through the temperature and pressure of the tail gas in the second pipeline.

[0008] If silane in the second pipeline catches fire, the temperature of the tail gas in the second pipeline will rise, and at the same time, the pressure of the tail gas in the second pipeline will increase. When the temperature result detected by the temperature detection component exceeds the preset temperature range, or the pressure result detected by the pressure detection component exceeds the preset pressure range, it indicates that a combustion situation has occurred in the second pipeline. At this time, the first valve component can be closed to block the continuous discharge of silane tail gas and prevent further combustion in the second pipeline, avoiding damage to the drive pump or even more serious accidents.

[0009] That is to say, the temperature result detected by the temperature detection component can be used to judge whether a combustion situation has occurred in the second pipeline, and the pressure result detected by the pressure detection component can also be used to judge whether a combustion situation has occurred in the second pipeline. The temperature detection component and the pressure detection component are set simultaneously to monitor the tail gas situation in the second pipeline. The temperature result and the pressure result can also verify each other to ensure the accuracy of the detection result. Moreover, when any one of the detection components fails, the other detection component can still ensure continuous monitoring of the situation in the second pipeline, thereby ensuring safety.

[0010] Both the temperature detection component and the pressure detection component are set in the second pipeline, and whether a combustion situation has occurred in the second pipeline is judged based on the temperature or pressure of the tail gas in the second pipeline. Such a setting can ensure higher detection accuracy. And compared with judging whether combustion has occurred in the pipeline based on the temperature or pressure in the tail gas combustion part, it can significantly improve the judgment accuracy and effectively ensure safety.

[0011] Optionally, two of the temperature detection components are provided on the second pipeline.

[0012] Optionally, it further includes a gas supply pipeline. One end of the gas supply pipeline is communicated with the second pipeline, the other end of the gas supply pipeline is communicated with an inert gas source, and a second valve component is provided on the gas supply pipeline.

[0013] Optionally, both the temperature detection component and the pressure detection component are located on the downstream side of the connection between the gas supply pipeline and the second pipeline.

[0014] Optionally, the inert gas source is a nitrogen gas storage tank.

[0015] Optionally, the second pipeline includes at least two connection segments, and adjacent two connection segments are connected by a connection flange and sealed circumferentially by a seal.

[0016] Optionally, a controller is further included. The controller is electrically connected to the temperature detection component, the pressure detection component, and the first valve component respectively. When the temperature result detected by the temperature detection component exceeds the preset temperature range, or the pressure result detected by the pressure detection component exceeds the preset pressure range, the controller controls the first valve component to close.

[0017] Optionally, an alarm mechanism is further included. The alarm mechanism is electrically connected to the controller. When the temperature result exceeds the preset temperature range, or the pressure result exceeds the preset pressure range, the controller controls the alarm mechanism to emit an alarm signal.

[0018] The present application further provides a coating system, including a coating device and the silane tail gas treatment device as described above. One end of the first pipeline of the silane tail gas treatment device far from the driving pump is communicated with the tail gas outlet of the coating device.

[0019] The coating system having the silane tail gas treatment device as described above has technical effects similar to those of the above-mentioned silane tail gas treatment device. For the sake of saving space, it will not be elaborated here. Description of the Drawings

[0020] Figure 1 is a schematic structural diagram of the silane tail gas treatment device provided by the embodiment of the present application in the use state;

[0021] Figure 2 is Figure 1 the enlarged view of A in

[0022] In the attached Figure 1 - Figure 2 drawings, the reference numerals are explained as follows:

[0023] 1 First pipeline, 11 First valve component;

[0024] 2 Driving pump;

[0025] 3 Second pipeline, 31 First section, 32 Second section, 33 Connecting flange;

[0026] 4 Tail gas combustion part;

[0027] 5 Coating device;

[0028] 6 Temperature detection component;

[0029] 7 Pressure detection component;

[0030] 8 Gas supply pipeline, 81 Second valve component. Detailed Embodiments

[0031] In order to enable those skilled in the art to better understand the technical solutions of the present application, the present application will be further described in detail below with reference to the drawings and specific embodiments.

[0032] Embodiments of the present application provide a silane tail gas treatment device and a coating system. Among them, the coating system includes a coating device 5 and a silane tail gas treatment device. The tail gas outlet of the coating device 5 is communicated with the silane tail gas treatment device. Through the silane tail gas treatment device, the tail gas discharged from the coating device 5 can be treated to achieve tail gas purification and avoid air pollution.

[0033] Specifically, as Figure 1 shown, the silane tail gas treatment device includes a first pipeline 1, a driving pump 2, a second pipeline 3, and a tail gas combustion part 4 that are connected in sequence. Among them, the first pipeline 1 is connected between the tail gas outlet of the coating device 5 and the driving pump 2. Through the driving action of the driving pump 2, the tail gas in the cavity of the coating device 5 can be pumped out and introduced into the tail gas combustion part 4 through the second pipeline 3 for combustion to treat the silane in the tail gas.

[0034] As Figure 1 shown, the first pipeline 1 is also provided with a first valve member 11 for controlling the on-off of the first pipeline 1. When the first valve member 11 is in the open state and the first pipeline 1 is connected, through the power provided by the driving pump 2, the tail gas in the cavity of the coating device 5 can be discharged along the first pipeline 1. When the first valve member 11 is in the closed state and the first pipeline 1 is disconnected, the tail gas in the coating device 5 cannot be discharged through the first pipeline 1. The second pipeline 3 is provided with a temperature detection component 6 and a pressure detection component 7. Among them, the temperature detection component 6 is used to detect the temperature of the tail gas in the second pipeline 3, and the pressure detection component 7 is used to detect the tail gas pressure of the second pipeline 3. Through the temperature detection component 6 and the pressure detection component 7, the tail gas in the second pipeline 3 can be monitored, and whether combustion occurs in the second pipeline 3 can be known through the temperature and pressure of the tail gas in the second pipeline 3.

[0035] It is not difficult to understand that if combustion occurs to the silane in the second pipeline 3, then the temperature of the tail gas in the second pipeline 3 will rise, and the tail gas pressure in the second pipeline 3 will increase. When the temperature result detected by the temperature detection component 6 exceeds the preset temperature range, or the pressure result detected by the pressure detection component 7 exceeds the preset pressure range, it indicates that combustion may occur in the second pipeline 3. At this time, the first valve member 11 can be closed to block the continuous discharge of the silane tail gas and avoid continuous combustion in the second pipeline 3, resulting in damage to the driving pump 2 or even more serious accidents.

[0036] That is to say, the temperature result detected by the temperature detection component 6 can be used to judge whether combustion occurs in the second pipeline 3, and the pressure result detected by the pressure detection component 7 can also be used to judge whether combustion occurs in the second pipeline 3. The temperature detection component 6 and the pressure detection component 7 are set simultaneously to monitor the tail gas condition in the second pipeline 3. The temperature result and the pressure result can also verify each other to ensure the accuracy of the detection result. Moreover, when any one of the detection components fails, the other detection component can still ensure continuous monitoring of the condition in the second pipeline 3, thereby ensuring safety.

[0037] Both the temperature detection component 6 and the pressure detection component 7 are arranged in the second pipeline 3. Whether combustion occurs in the second pipeline 3 is judged according to the tail gas temperature or pressure in the second pipeline 3. With such an arrangement, the detection accuracy can be guaranteed to be higher. Moreover, compared with judging whether combustion occurs in the pipeline according to the temperature or pressure in the tail gas combustion part 4, the judgment accuracy can be significantly improved, thereby effectively ensuring safety.

[0038] In this embodiment, as Figure 1 and Figure 2 shown, two temperature detection components 6 are arranged in the second pipeline 3. These two temperature detection components 6 simultaneously detect the tail gas temperature in the second pipeline 3. With such an arrangement, compared with detecting the tail gas temperature in the second pipeline 3 through one temperature detection component 6, the accuracy of temperature detection can be guaranteed, and the two temperature detection components 6 are redundant with each other to avoid the situation where the temperature detection component 6 fails and cannot detect.

[0039] Of course, the number of the temperature detection components 6 can also be three or more. The arrangement of two temperature detection components 6 can ensure the accuracy of the detection result while simplifying the overall structure and reducing costs.

[0040] In this embodiment, there is no limitation on the temperature detection component 6. For example, a thermal resistance thermometer or a thermocouple thermometer can be used.

[0041] As Figure 1 shown, the silane tail gas treatment device further includes a gas supply pipeline 8. One end of the gas supply pipeline 8 is communicated with the second pipeline 3, and the other end of the gas supply pipeline 8 is communicated with an inert gas source. The gas supply pipeline 8 is provided with a second valve member 81. The inert gas source can introduce inert gas into the second pipeline 3 through the gas supply pipeline 8 to dilute the silane tail gas in the second pipeline 3, prevent the combustion phenomenon caused by excessive contact between silane and the air in the second pipeline 3, reduce flammability, and improve safety.

[0042] Specifically, the inert gas source can be a nitrogen gas storage tank or other inert gas storage tanks, such as an argon gas storage tank, etc. Diluting the silane tail gas with nitrogen can reduce costs while ensuring safety.

[0043] Of course, a dilution tank can also be additionally provided, and the second pipeline 3 and the gas supply pipeline 8 are respectively connected to the dilution tank. Nitrogen dilutes the silane tail gas in the dilution tank, while the gas supply pipeline 8 is directly connected to the second pipeline 3, and nitrogen is directly introduced into the second pipeline 3 to dilute the silane tail gas in the second pipeline 3, which can effectively simplify the overall structure.

[0044] In this embodiment, the second pipeline 3 includes at least two connecting segments, and the connecting segments are sequentially connected end to end. Adjacent two connecting segments are connected by a connecting flange 33 and are sealed circumferentially at the connection by a sealing member. As Figure 1 shown, the second pipeline 3 is a two-section structure, including two connecting segments, a first section 31 and a second section 32. The first section 31 and the second section 32 are connected by a connecting flange 33 and are provided with a sealing member to achieve sealing at the connection. One end of the first section 31 away from the second section 32 is connected to the driving pump 2, and one end of the second section 32 away from the first section 31 is connected to the tail gas combustion part 4. With such a setting, it is convenient for the disassembly and assembly operations of the temperature detection component 6 and the pressure detection component 7. At the same time, the second pipeline 3 can also be provided with a bending structure to be applicable to different installation conditions. When the second pipeline 3 is set as a segmented structure, the forming process of the second pipeline 3 is simplified and the cost is reduced.

[0045] Of course, the second pipeline 3 can also include three connecting segments or more connecting segments, which are not specifically limited here. The two-section structure can simplify the overall structure and installation process.

[0046] Both the temperature detection component 6 and the pressure detection component 7 are located on the downstream side of the connection between the gas supply pipeline 8 and the second pipeline 3. Among them, the downstream side refers to the downstream side of the flow direction of the silane tail gas in the second pipeline 3. With such a setting, the gas pressure and temperature on the side close to the tail gas combustion part 4 can be detected. The temperature here is higher and combustion is more likely to occur. Therefore, detecting the temperature and pressure here, the results are more accurate.

[0047] The silane tail gas treatment device further includes a controller, and the controller is electrically connected to the above-mentioned temperature detection component 6, pressure detection component 7, as well as the first valve member 11 and the second valve member 81. Specifically, it can be electrically connected through a connecting wire or can be electrically connected in a wireless manner, such as through Bluetooth connection, WiFi connection, etc., which are not specifically limited here.

[0048] The controller can obtain the temperature result detected by the temperature detection component 6 and the pressure result detected by the pressure detection component 7, and control the first valve member 11 and the second valve member 81 according to the temperature result and the pressure result. When the temperature result exceeds the preset temperature range or the pressure result exceeds the preset pressure range, it indicates that tail gas combustion occurs in the second pipeline 3 at this time. The controller sends a control instruction to the first valve member 11, and the first valve member 11 closes the first pipeline 1 according to the control instruction. With such a setting, the continuous emission of silane gas in the first pipeline 1 and the second pipeline 3 is ensured. Moreover, when the controller controls the first valve member 11 to close, it can also control the second valve member 81 to open. The continuous introduction of nitrogen can dilute the silane gas and reduce the concentration of silane in the gas.

[0049] The silane tail gas treatment device can also be provided with an alarm mechanism, which is electrically connected to the controller. When the temperature result exceeds the preset temperature range or the pressure result exceeds the preset pressure range, the controller will send an alarm instruction to the alarm mechanism, and the alarm mechanism can emit an alarm signal according to the alarm instruction. The alarm signal can be at least one of a sound signal, a light signal, and a text signal. This is to facilitate the operator to timely know the situation of the tail gas in the second pipeline 3.

[0050] In this embodiment, through the electrical connection between the controller and each component, it is possible to realize the automatic control of the first valve member 11, the second valve member 81, and the alarm mechanism according to the tail gas temperature and tail gas pressure in the second pipeline 3. The degree of automation is high, the manual operation is simplified, and the opening and closing of the first valve member 81 and the second valve member 82 can be controlled in a timely manner, and the safety level is higher. Of course, the controller can also be not provided, and the operator can manually control the opening and closing of the first valve member 11 and the second valve member 81.

[0051] Specifically, for those skilled in the art, it is already well-known prior art how the controller obtains the temperature result detected by the temperature detection component 6 and the pressure result detected by the pressure detection component 7 through electrical connection with the temperature detection component 6 and the pressure detection component 7, how the controller controls the first valve member 11 and the second valve member 81 to close when the temperature result exceeds the preset temperature range or the pressure result exceeds the preset pressure range, and how the controller controls the alarm mechanism to emit an alarm signal when the temperature result exceeds the preset range or the pressure result exceeds the preset pressure range. To save space, it will not be elaborated here.

[0052] The above is only the preferred embodiment of the present application. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present application, several improvements and refinements can still be made, and these improvements and refinements should also be regarded as the protection scope of the present application.

Claims

1. A silane tail gas treatment device, characterized in that, It includes a first pipeline (1), a driving pump (2), a second pipeline (3) and an exhaust gas combustion part (4) which are connected in sequence; The second pipeline (3) is provided with a temperature detection component (6) and a pressure detection component (7); The first pipeline (1) is provided with a first valve member (11).

2. The silane tail gas treatment device according to claim 1, wherein, Two of the temperature detection components (6) are provided on the second pipeline (3).

3. The silane tail gas treatment device according to claim 1, characterized in that, It further includes a gas supply pipeline (8). One end of the gas supply pipeline (8) is communicated with the second pipeline (3), the other end of the gas supply pipeline (8) is communicated with an inert gas source, and the gas supply pipeline (8) is provided with a second valve member (81).

4. The silane tail gas treatment device according to claim 3, characterized in that, Both the temperature detection component (6) and the pressure detection component (7) are located on the downstream side of the connection between the gas supply pipeline (8) and the second pipeline (3).

5. The silane tail gas treatment device according to claim 3, characterized in that, The inert gas source is a nitrogen gas storage tank.

6. The silane tail gas treatment device according to any one of claims 1-5, characterized in that, The second pipeline (3) includes at least two connection segments, and adjacent two connection segments are connected by a connection flange (33) and sealed circumferentially by a sealing member.

7. The silane tail gas treatment device according to any one of claims 1-5, characterized in that, It further includes a controller which is electrically connected to the temperature detection component (6), the pressure detection component (7) and the first valve member (11) respectively. When the temperature result detected by the temperature detection component (6) exceeds the preset temperature range, or the pressure result detected by the pressure detection component (7) exceeds the preset pressure range, the controller controls the first valve member (11) to close.

8. The silane tail gas treatment device according to claim 7, wherein It further includes an alarm mechanism which is electrically connected to the controller. When the temperature result exceeds the preset temperature range, or the pressure result exceeds the preset pressure range, the controller controls the alarm mechanism to emit an alarm signal.

9. A coating system, characterized in that, It includes a coating device (5) and the silane tail gas treatment device according to any one of claims 1-8. One end of the first pipeline (1) of the silane tail gas treatment device, which is far from the driving pump (2), is communicated with the tail gas outlet of the coating device (5).

Images