Galvanometer module and laser radar

Abstract

The utility model relates to the technical field of laser radars, in particular to a galvanometer module and a laser radar. The galvanometer module comprises a shell which is provided with a containing cavity, and one end of the containing cavity is opened to form an opening; the light-transmitting plate is arranged at the opening and blocks the opening; and a galvanometer assembly, wherein the galvanometer assembly is arranged in the accommodating cavity. According to the galvanometer module provided by the embodiment of the invention, the relatively closed accommodating cavity is jointly constructed through the shell and the light-transmitting plate, and the galvanometer assembly is arranged in the accommodating cavity, so that water vapor can be separated out of the accommodating cavity to a certain extent, and a relatively dry space is provided for the galvanometer assembly. Therefore, even if the interior of the laser radar is communicated with the external atmosphere and there is much water vapor, the galvanometer assembly is not liable to be affected, so that the failure rate of the galvanometer module working in a high-humidity environment can be reduced.

Description

Technical Field

[0001] This application relates to the technical field of lidar, and particularly relates to a galvanometer module and a lidar. Background Art

[0002] A lidar is a radar system that emits laser beams to detect the position, speed, and other characteristic quantities of a target object. In recent years, applying a galvanometer module to a lidar has become a development trend. A galvanometer module is a module with a movable reflecting element, which is used to reflect a laser beam so that the laser beam forms a specific detection field of view outside the lidar. The commonly used galvanometer modules in lidars include micro-electro-mechanical system (MEMS) galvanometer modules.

[0003] The working reliability of the galvanometer module will be affected by the environmental humidity. When the lidar works in an environment with a relatively high humidity, the inside of the lidar may be an atmosphere with a relatively high humidity, and the reliability of the galvanometer module will deteriorate and it is prone to failure. Summary of the Utility Model

[0004] This application provides a galvanometer module, aiming to reduce the failure rate of the galvanometer module.

[0005] On this basis, this application also provides a lidar with the above-mentioned galvanometer module.

[0006] The specific technical solutions are as follows:

[0007] An embodiment of the first aspect of this application provides a galvanometer module, which includes: a housing, the housing is provided with a receiving cavity, and one end of the receiving cavity is open to form an opening; a light-transmitting plate, disposed at the opening and closing the opening; and a galvanometer assembly, the galvanometer assembly is disposed in the receiving cavity.

[0008] In the galvanometer module of the embodiment of this application, a relatively closed receiving cavity is jointly constructed by the housing and the light-transmitting plate, and the galvanometer assembly is disposed in the receiving cavity. In this way, water vapor can be blocked outside the receiving cavity to a certain extent, thereby providing a relatively dry space for the galvanometer assembly. Therefore, even when there is more water vapor inside the lidar due to its connection with the external atmosphere, it is not easy to affect the galvanometer assembly, which is beneficial to reducing the failure rate of the galvanometer module when it works in an environment with a relatively high humidity.

[0009] In some embodiments of this application, the galvanometer module further includes a moisture-absorbing member, and the moisture-absorbing member is disposed in the receiving cavity.

[0010] During the encapsulation process of the housing and the light-transmitting plate, some water vapor may penetrate into the accommodation cavity, and the moisture absorber can absorb this part of the water vapor to maintain the dryness of the environment in the accommodation cavity. In addition, during the long-term use of the galvanometer module or lidar, a small amount of water vapor may penetrate into the accommodation cavity, and the moisture absorber can also absorb this part of the water vapor to ensure that the accommodation cavity remains dry. Therefore, the setting of the moisture absorber can improve the working reliability of the galvanometer module.

[0011] In some embodiments of the present application, the moisture absorber is fixed to the galvanometer assembly.

[0012] In this way, the moisture absorber can maintain a stable position relative to the galvanometer assembly. Such a setting is beneficial to avoid the moisture absorber randomly moving in the accommodation cavity and blocking the laser beam entering and leaving the accommodation cavity.

[0013] In some embodiments of the present application, the galvanometer assembly includes: a mounting base installed in the accommodation cavity; and a galvanometer including a fixing part and a reflecting mirror. The fixing part is installed on the mounting base, the reflecting mirror is connected to the fixing part, and the reflecting mirror can swing relative to the fixing part; wherein, the moisture absorber is fixed to the mounting base.

[0014] During the working process of the galvanometer module, the mounting base remains fixed relative to the housing, and the moisture absorber is fixed to the mounting base, so that the moisture absorber also remains fixed relative to the housing. In this way, it is beneficial to keep the connection firmness between the moisture absorber and the galvanometer assembly, and prevent the connection firmness of the moisture absorber from deteriorating due to long-term vibration or movement.

[0015] In some embodiments of the present application, the housing includes: a housing body provided with the accommodation cavity; and a first convex portion extending from a first end face of the housing body. The first end face is the end face of the housing body where the opening is provided. The first convex portion protrudes relative to the first end face and is arranged around the opening; wherein, the light-transmitting plate is installed on the housing body, and the first convex portion is arranged around the light-transmitting plate.

[0016] The first convex portion is arranged around the light-transmitting plate. In this way, in the direction parallel to the light-transmitting plate, the first convex portion has a limiting effect on the light-transmitting plate. Thus, during the assembly process of the light-transmitting plate and the housing, the first convex portion can be used to pre-position the light-transmitting plate first, and then the light-transmitting plate is connected to the housing body. In this way, the installation accuracy between the light-transmitting plate and the housing can be improved. In addition, during the long-term use of the galvanometer module, the first convex portion can play a role in protecting the edge of the light-transmitting plate from impact, wear, etc., thereby being beneficial to improving the working reliability of the galvanometer module.

[0017] In some embodiments of the present application, the light-transmitting plate is connected to the housing body through a first adhesive; the housing further includes a second protruding portion; the second protruding portion extends from the first end surface, the second protruding portion protrudes relative to the first end surface and is disposed around the opening, and the first protruding portion is disposed around the second protruding portion; the light-transmitting plate is carried on the second protruding portion, and at least a part of the first adhesive is filled between the first protruding portion and the second protruding portion.

[0018] During the process of assembling the light-transmitting plate and the housing, when the glue used to form the first adhesive has not been completely cured, the second protruding portion can play a role in blocking the flow, so that the glue is restricted between the second protruding portion and the first protruding portion, and the glue can be prevented from overflowing into the accommodation cavity.

[0019] In some embodiments of the present application, the galvanometer module further includes a flexible circuit board, the housing is provided with a mounting opening communicating the accommodation cavity with the outer surface of the housing, the flexible circuit board passes through the mounting opening, and one end of the flexible circuit board is electrically connected to the galvanometer assembly; wherein, a part of the first adhesive is filled in the mounting opening to block the mounting opening, or, the galvanometer module further includes a second adhesive, and at least a part of the second adhesive is filled in the mounting opening to block the mounting opening.

[0020] The mounting opening on the housing provides a channel for the flexible circuit board to penetrate into the housing. On this basis, in order to maintain the sealing performance of the accommodation cavity, after the flexible circuit board passes through the mounting opening, the mounting opening needs to be blocked. One of the blocking methods is to fill a part of the first adhesive in the mounting opening to block the mounting opening, and another blocking method also provides a second adhesive, and at least a part of the second adhesive is filled in the mounting opening to block the mounting opening. No matter which method is adopted, the sealing performance of the accommodation cavity can be ensured.

[0021] In some embodiments of the present application, the housing further includes a mounting portion; the mounting portion extends from the outer surface of the housing, and the mounting portion is provided with a mounting hole. The mounting portion is used for connecting with an external structure, so as to facilitate the assembly of the galvanometer module and the external structure.

[0022] In some embodiments of the present application, the housing is a metal housing or a ceramic housing.

[0023] Utilizing the characteristics of metal and ceramic being impermeable to water and airtight is beneficial to maintaining good sealing performance in the accommodation cavity.

[0024] In some embodiments of the present application, the housing includes a first housing portion and a second housing portion embedded in the first housing portion, the second housing portion is provided with the accommodation cavity, the material of the first housing portion is metal, and the material of the second housing portion is plastic.

[0025] The material of the first housing part is metal, which can make the overall housing have good sealing performance. In addition, compared with the case of using a metal housing as a whole, this embodiment adopts a combination of plastic and metal, which can reduce the usage amount of metal materials. Thus, both the manufacturing cost can be reduced and the weight can be reduced.

[0026] An embodiment of the second aspect of the present application provides a lidar, which includes: a light source module for generating a laser beam; and a galvanometer module in any of the above embodiments, where the galvanometer module is configured to receive and deflect the laser beam to change the emission angle of the laser beam.

[0027] In the lidar in the embodiment of the present application, the galvanometer module and the light-transmitting plate jointly construct a relatively closed accommodation cavity through the housing. The galvanometer assembly is arranged in the accommodation cavity. In this way, water vapor can be to a certain extent blocked outside the accommodation cavity, thereby providing a relatively dry space for the galvanometer assembly. Thus, even when there is a lot of water vapor inside the lidar due to its connection with the external atmosphere, it is not easy to affect the galvanometer assembly. Therefore, it is beneficial to reduce the failure rate of the galvanometer module when working in an environment with high humidity. Description of the Drawings

[0028] Figure 1 It is a schematic structural diagram of a galvanometer module provided by an embodiment of the present application;

[0029] Figure 2 It is an exploded schematic diagram of a galvanometer module provided by an embodiment of the present application;

[0030] Figure 3 It is a schematic structural diagram of a housing provided by an embodiment of the present application;

[0031] Figure 4 It is a schematic diagram of a cross-section of a housing provided by an embodiment of the present application;

[0032] Figure 5 It is a schematic structural diagram of a galvanometer assembly provided by an embodiment of the present application.

[0033] The reference numerals are as follows:

[0034] 10. Galvanometer module;

[0035] 100. Housing; 101. Installation port; 102. Accommodation cavity; 1021. Opening;

[0036] 110. Housing main body; 111. First end face; 112. Second convex part;

[0037] 120. First convex part;

[0038] 130. Installation part; 131. Installation hole;

[0039] 160. First housing part;

[0040] 170. Second housing part;

[0041] 200. Translucent plate;

[0042] 300. Galvanometer assembly;

[0043] 310. Mounting base;

[0044] 320. Galvanometer; 321. Fixing part; 322. Reflecting mirror;

[0045] 400. First adhesive;

[0046] 500. Moisture absorber;

[0047] 600. Flexible circuit board;

[0048] 700. Second adhesive. Detailed implementation manner

[0049] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0050] In the description of the present application, it should be understood that if there are terms such as "upper", "lower", "left", "right", etc. indicating the orientation or positional relationship, they are based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms describing the positional relationship in the drawings are only for illustrative purposes and cannot be understood as a limitation of this patent. For those of ordinary skill in the art, the specific meanings of the above terms can be understood according to specific circumstances.

[0051] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as implying or indicating relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present application, "a plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0052] In the description of the present application, unless otherwise clearly specified and limited, terms such as "installation", "connection", "connection", "fixation" shall be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components or the interaction relationship between two components, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0053] A lidar is a radar system that emits laser beams to detect the position, speed and other characteristic quantities of target objects. In recent years, applying a galvanometer module to lidar has become a development trend. A galvanometer module is a module with a movable reflecting element, which is used to reflect laser beams so that the laser beams form a specific detection field of view outside the lidar. The commonly used galvanometer modules in lidar include MEMS galvanometer modules.

[0054] The working reliability of the galvanometer module will be affected by the environmental humidity. When the lidar works in an environment with a relatively high humidity, the atmosphere inside the lidar may be a relatively high humidity atmosphere, and the reliability of the galvanometer module will deteriorate and it is easy to malfunction.

[0055] Based on the above situation, an embodiment of the first aspect of the present application provides a galvanometer module, aiming to reduce the failure rate of the galvanometer module.

[0056] As Figure 1 Shown in Figure 2 As shown, the galvanometer module 10 includes a housing 100, a light-transmitting plate 200 and a galvanometer assembly 300. The housing 100 is provided with a receiving cavity 102, and one end of the receiving cavity 102 is open to form an opening 1021. The light-transmitting plate 200 is arranged at the opening 1021 and seals the opening 1021. The galvanometer assembly 300 is arranged in the receiving cavity.

[0057] Exemplarily, the light-transmitting plate 200 is a glass plate or other plates with high light transmittance, so that laser beams can enter the receiving cavity through the light-transmitting plate 200 and be received by the galvanometer assembly 300. At the same time, the reflected beam formed by the galvanometer assembly 300 reflecting the laser beam can also exit through the light-transmitting plate 200. It should be noted that the embodiment of the present application takes the galvanometer module 10 applied to lidar as an example for illustration. Therefore, the "light transmission" mentioned in the present application document means transmitting laser; for example, the "light transmittance" mentioned in the present application document means the transmittance of laser.

[0058] The light-transmitting plate 200 is disposed at the opening 1021. The light-transmitting plate 200 can be connected to the housing 100 through the first adhesive 400 so that the light-transmitting plate 200 is fixed at the opening 1021. Among them, the first adhesive 400 can be formed by curing a liquid glue. Exemplarily, the glue can be a UV glue, also known as an ultraviolet light-curing glue, which is cured by irradiating ultraviolet light; of course, the glue can also be other types of glue such as a thermosetting glue, and the thermosetting glue is cured by heating.

[0059] In the galvanometer module 10 of the embodiments of the present application, a relatively closed accommodation cavity 102 is jointly constructed by the housing 100 and the light-transmitting plate 200, and the galvanometer assembly 300 is disposed in the accommodation cavity 102. In this way, water vapor can be separated from the accommodation cavity 102 to a certain extent, thereby providing a relatively dry space for the galvanometer assembly 300. Thus, even when the humidity inside the lidar is relatively high due to communication with the external atmosphere, it is not easy to affect the galvanometer assembly 300, so it is beneficial to reduce the failure rate of the galvanometer module 10 caused by working in a high-humidity environment.

[0060] In some embodiments of the present application, such as Figure 2 and Figure 3 As shown, the housing 100 includes a housing main body 110 and a first convex portion 120. The first convex portion 120 extends from the first end face 111 of the housing main body 110. The first end face 111 is the end face of the housing main body 110 where the opening 1021 is provided. The first convex portion 120 protrudes relative to the first end face 111 and is disposed around the opening 1021. Among them, the light-transmitting plate 200 is installed on the housing main body 110, and the first convex portion 120 is disposed around the light-transmitting plate 200.

[0061] The first convex portion 120 is disposed around the light-transmitting plate 200. In this way, in the direction parallel to the light-transmitting plate 200, the first convex portion 120 has a limiting effect on the light-transmitting plate 200. Thus, during the process of assembling the light-transmitting plate 200 and the housing 100, the first convex portion 120 can be used to pre-position the light-transmitting plate 200 first, and then the light-transmitting plate 200 is connected to the housing main body 110. In this way, the installation accuracy between the light-transmitting plate 200 and the housing 100 can be improved.

[0062] In addition, during the long-term use of the galvanometer module 10, the first convex portion 120 can play a role in protecting the edge of the light-transmitting plate 200 against impact, wear, etc., which is beneficial to improving the working reliability of the galvanometer module 10.

[0063] In one of the embodiments, such as Figure 3As shown, the outer shell 100 further includes a second protruding portion 112, which extends from the first end face 111, protrudes relative to the first end face 111 and is disposed around the opening 1021, and is disposed around the second protruding portion 112. The light-transmitting plate 200 is carried on the second protruding portion 112 and is connected to the shell body 110 through the first adhesive 400. Preferably, the height of the second protruding portion 112 is lower than the height of the peripheral first protruding portion 111, so as to prevent the light-transmitting plate 200 from protruding from the first protruding portion 111 or reduce the protruding height of the light-transmitting plate 200 relative to the first protruding portion 111.

[0064] During the process of assembling the light-transmitting plate 200 and the outer shell 100, at least a part of the first adhesive 400 is filled between the first protruding portion 111 and the second protruding portion 112. When the glue used to form the first adhesive 400 is not completely cured, the second protruding portion 112 can play a role in blocking the flow, so that the glue is restricted between the second protruding portion 112 and the first protruding portion 120, and the glue can be prevented from overflowing into the accommodating cavity 102.

[0065] In one embodiment, as Figure 2 、 Figure 3 shown, the galvanometer module 10 further includes a flexible circuit board 600. Correspondingly, the outer shell 100 is provided with an installation opening 101 communicating the accommodating cavity 102 with the outer surface of the outer shell 100. The flexible circuit board 600 passes through the installation opening 101. One end of the flexible circuit board 600 is electrically connected to the galvanometer assembly 300, and the other end extends outside the outer shell 100 to be electrically connected to the electronic control module of the galvanometer module 10. The flexible circuit board 600 can be fixedly connected to the outer shell 100 through the first adhesive 400; that is, a part of the first adhesive 400 is filled in the installation opening 101 to fix the flexible circuit board 600, and at the same time, the installation opening 101 can be blocked. Of course, in some other embodiments of the present application, the glue layer for bonding the flexible circuit board 600 can also be a second adhesive 700 independent of the first adhesive 400; specifically, as Figure 2 shown, the galvanometer module 10 may further include a second adhesive 700. At least a part of the second adhesive 700 is filled in the installation opening 101 to block the installation opening 101 and at the same time fix the flexible circuit board 600. The second adhesive 700 can be filled and cured after the first adhesive 400 is cured.

[0066] The installation opening 101 on the housing 100 provides a passage for the flexible circuit board 600 to penetrate into the housing 100. On this basis, in order to maintain the sealing of the accommodation cavity 102, after the flexible circuit board 600 passes through the installation opening 101, it is necessary to block the installation opening 101. One of the blocking methods is to partially fill the installation opening 101 with the first adhesive 400 to block the installation opening 101; another blocking method also provides a second adhesive 700, and at least a part of the second adhesive 700 fills the installation opening 101 to block the installation opening 101. No matter which method is adopted, the sealing of the accommodation cavity 102 can be ensured. Among them, the second adhesive 700 can also be formed by curing glue, and the glue type can be UV glue, thermosetting glue, etc.

[0067] In one embodiment, as Figure 3 shown, the housing 100 further includes an installation part 130, which extends from the outer surface of the housing 100, and the installation part 130 is provided with an installation hole 131. The installation part 130 is used to connect with an external structure, so as to facilitate the assembly of the galvanometer module 10 and the external structure. Exemplarily, the installation part 130 can be connected with the external structure through fasteners such as screws and rivets passing through the installation hole 131.

[0068] In one embodiment, the housing 100 is a metal housing or a ceramic housing. Utilizing the impermeable and airtight characteristics of metals and ceramics is conducive to maintaining a good dry atmosphere in the accommodation cavity 102.

[0069] In another embodiment, as Figure 4 shown, the housing 100 may include a first housing part 160 and a second housing part 170 embedded in the first housing part 160, and the second housing part 170 is provided with the above-mentioned accommodation cavity 102. Among them, the material of the first housing part 160 is metal, and the material of the second housing part 170 is plastic. The material of the first housing part 160 being metal can make the whole housing 100 have good waterproof performance. In addition, compared with the case of using a metal housing as a whole, this embodiment adopts a combination of plastic and metal, which can reduce the usage of metal materials. Thus, both the manufacturing cost can be reduced and the weight can be reduced.

[0070] In some embodiments of the present application, as Figure 2As shown, the galvanometer module 10 further includes a moisture absorber 500, which is disposed in the accommodation cavity. The moisture absorber 500 is a structure with moisture absorption function, capable of absorbing water vapor in the air, thereby maintaining the dryness of the environment. During the encapsulation process of the housing 100 and the light-transmitting plate 200, some water vapor may penetrate into the accommodation cavity 102, and the moisture absorber 500 can absorb this part of the water vapor to maintain the dryness of the environment in the accommodation cavity 102. In addition, during the long-term use of the galvanometer module 10 or the lidar, a small amount of water vapor may penetrate into the accommodation cavity 102, and the moisture absorber 500 can also absorb this part of the water vapor to ensure that the inside of the accommodation cavity 102 remains dry. Therefore, the setting of the moisture absorber 500 can improve the working reliability of the galvanometer module 10.

[0071] Exemplarily, the moisture absorber 500 may include a moisture-absorbing material and a bag body. The moisture-absorbing material is located inside the bag body, and the bag body can be made of a material with good water permeability and air permeability, such as a water-permeable and breathable membrane, cloth, etc. The moisture-absorbing material is a material that has an adsorption effect on water vapor, such as silica gel desiccant, activated alumina desiccant, montmorillonite desiccant, fiber desiccant, etc. The moisture-absorbing material can absorb water vapor in the air, thereby achieving the purpose of reducing the humidity of the air.

[0072] In one of the embodiments, as Figure 2 、 Figure 5 shown, the moisture absorber 500 is fixed to the galvanometer assembly 300. Exemplarily, the moisture absorber 500 can be fixed to the galvanometer assembly 300 by glue. In this way, the moisture absorber 500 can maintain a stable position relative to the galvanometer assembly 300. Such a setting is beneficial to avoid the moisture absorber 500 randomly moving in the accommodation cavity 102 and blocking the laser beam entering and exiting the accommodation cavity 102.

[0073] In addition, if the moisture absorber 500 is fixed to the housing 100, the galvanometer assembly 300 may be interfered with during the process of being inserted into or removed from the housing 100. Therefore, corresponding avoidance structures need to be designed for the housing 100 and the galvanometer assembly 300, which will complicate the structure of the galvanometer module 10. Therefore, fixing the moisture absorber 500 to the galvanometer assembly 300 can make the galvanometer assembly 300 unobstructed during the process of being inserted into or removed from the housing 100, and is beneficial to simplifying the structure of the galvanometer module 10.

[0074] Furthermore, as Figure 5As shown, the galvanometer assembly 300 includes a mounting base 310 and a galvanometer 320. The mounting base 310 is installed in the accommodation cavity 102. The galvanometer 320 includes a fixing portion 321 and a reflecting mirror 322. The fixing portion 321 is installed on the mounting base 310, and the reflecting mirror 322 is connected to the fixing portion 321. The reflecting mirror 322 can swing relative to the fixing portion 321. Among them, the moisture absorbent member 500 is fixed to the mounting base 310.

[0075] The mounting base 310 is located in the accommodation cavity 102 and is connected to the housing 100. At the same time, the mounting base 310 can provide an installation foundation for the fixing portion 321 of the galvanometer 320. In this way, both the mounting base 310 and the fixing portion 321 have a stable positional relationship relative to the housing 100. On this basis, the reflecting mirror 322 is connected to the fixing portion 321, and the reflecting mirror 322 can swing relative to the fixing portion 321. Thus, the reflecting mirror 330 can move relative to the mounting base 310. During the movement of the reflecting mirror 330, the laser beam can be deflected, so as to scan each position in the field of view.

[0076] During the operation of the galvanometer module 10, the mounting base 100 is fixed relative to the housing 100, and the moisture absorbent member 500 is fixed to the mounting base 310, so that the moisture absorbent member 500 is also fixed relative to the housing 100. In this way, it is beneficial to keep the connection firmness between the moisture absorbent member 500 and the galvanometer assembly 300, and prevent the connection firmness of the moisture absorbent member 500 from deteriorating due to long-term vibration or movement.

[0077] Exemplarily, the galvanometer 320 can be a one-dimensional galvanometer or a two-dimensional galvanometer. Since both the one-dimensional galvanometer and the two-dimensional galvanometer are existing structures, the structure and working principle thereof will not be elaborated in this application.

[0078] An embodiment of the second aspect of the present application provides a lidar, which includes a light source module and a galvanometer module. Among them, the light source module is used to generate a laser beam, and the galvanometer module is the galvanometer module 10 in any of the above embodiments. The galvanometer module 10 is used to receive and deflect the laser beam to change the emission angle of the laser beam, so that the laser beam can form a specific detection field of view outside the lidar.

[0079] In the lidar in the embodiment of the present application, the galvanometer module 10 and the transparent plate 200 jointly construct a relatively closed accommodation cavity 102 through the housing 100. The galvanometer assembly 300 is arranged in the accommodation cavity 102. In this way, the water vapor can be separated from the accommodation cavity 102 to a certain extent, so as to provide a relatively dry space for the galvanometer assembly 300. Thus, even when there is a lot of water vapor inside the lidar due to its connection with the external atmosphere, it is not easy to affect the galvanometer assembly 300. Therefore, it is beneficial to reduce the failure rate of the galvanometer module 10 when working in a high humidity environment.

[0080] The above content is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application can easily think of changes or substitutions, which should all be covered within the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A galvanometer module, characterized in that, Comprising: A housing, the housing is provided with a receiving cavity, and one end of the receiving cavity is open to form an opening; A light-transmitting plate, which is arranged at the opening and seals the opening; And A galvanometer assembly, which is arranged in the receiving cavity.

2. The galvanometer module according to claim 1, wherein The galvanometer module further includes a moisture-absorbing member, and the moisture-absorbing member is arranged in the receiving cavity.

3. The galvanometer module according to claim 2, wherein The moisture-absorbing member is fixed to the galvanometer assembly.

4. The galvanometer module according to claim 3, wherein The galvanometer assembly includes: A mounting base, which is mounted in the receiving cavity; and A galvanometer, including a fixing portion and a reflecting mirror, the fixing portion is mounted on the mounting base, the reflecting mirror is connected to the fixing portion, and the reflecting mirror can swing relative to the fixing portion; Wherein, the moisture-absorbing member is fixed to the mounting base.

5. The galvanometer module according to claim 1, characterized in that, The housing includes: A housing body, which is provided with the receiving cavity; and A first convex portion, which extends from the first end face of the housing body, the first end face is the end face of the housing body where the opening is provided, the first convex portion protrudes relative to the first end face and is arranged around the opening; Wherein, the light-transmitting plate is mounted on the housing body, and the first convex portion is arranged around the light-transmitting plate.

6. The galvanometer module according to claim 5, wherein The light-transmitting plate is connected to the housing body through a first adhesive; The housing further includes a second convex portion, the second convex portion extends from the first end face, the second convex portion protrudes relative to the first end face and is arranged around the opening, and the first convex portion is arranged around the second convex portion; The light-transmitting plate is carried on the second convex portion, and at least part of the first adhesive is filled between the first convex portion and the second convex portion.

7. The galvanometer module according to claim 6, wherein, The galvanometer module further includes a flexible circuit board; The housing is provided with a mounting opening communicating the receiving cavity with the outer surface of the housing, the flexible circuit board passes through the mounting opening, and one end of the flexible circuit board is electrically connected to the galvanometer assembly; Wherein, part of the first adhesive is filled in the mounting opening to seal the mounting opening, or, the galvanometer module further includes a second adhesive, and at least part of the second adhesive is filled in the mounting opening to seal the mounting opening.

8. The galvanometer module according to any one of claims 1 to 6, characterized in that, The housing further includes a mounting portion; The mounting portion extends from the outer surface of the housing, and the mounting portion is provided with a mounting hole.

9. The galvanometer module according to any one of claims 1 to 6, characterized in that, The housing satisfies one of the following conditions: a) The housing is a metal housing or a ceramic housing; b) The housing includes a first housing portion and a second housing portion embedded in the first housing portion, the second housing portion is provided with the receiving cavity, the material of the first housing portion is metal, and the material of the second housing portion is plastic.

10. A lidar, characterized in that, Comprising: A light source module for generating a laser beam; And The galvanometer module according to any one of claims 1 to 9, which is used to receive and deflect the laser beam to change the emission angle of the laser beam.

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