Wafer box elevator

Abstract

The utility model relates to a wafer box elevator which comprises a frame used for supporting and connecting, an input port and an output port of a wafer box are respectively arranged in the height direction of the frame, automatic door devices are arranged at the input port and the output port, and an output conveying line used for outputting the wafer box is arranged at the output port. A lifting car is slidably mounted in the frame, a driving assembly for driving the lifting car to slide up and down is mounted at the bottom of the frame, and guide rails for supporting the lifting car to slide are further mounted in the frame. By the adoption of the technical scheme, efficient, safe and dust-free lifting and conveying of the small wafer box can be achieved, and practicability is high.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, and more specifically, to a wafer cassette elevator. Background Art

[0002] In the semiconductor manufacturing industry, the wafer cassette is an important raw material. It is provided with symmetric grooves inside for placing and transporting wafers, which can prevent the wafers from being polluted by the environment and rubbed by foreign objects.

[0003] The precise, efficient and dust-free transportation of the wafer cassette is crucial. The traditional elevator traction system mainly relies on steel wires or chains as the transmission medium. However, these structures will generate a large amount of wear particles during long-term use, which not only seriously affects the cleanliness of the clean room, but also may contaminate the wafer cassette, resulting in a decline in product quality.

[0004] In addition, the traditional elevator design often targets large wafer cassettes, and its structural size is relatively large. For transporting small wafer cassettes such as 6-inch ones, it appears too large and redundant. This not only occupies valuable clean room space, but also increases the manufacturing cost and maintenance difficulty.

[0005] Therefore, how to design an elevator with a simple and reliable structure, high cleanliness and suitable for transporting small wafer cassettes has become an urgent technical problem to be solved in the current semiconductor manufacturing industry. Summary of the Utility Model

[0006] Aiming at the deficiencies of the existing technology, the purpose of the utility model is to provide a wafer cassette elevator. By optimizing the transmission structure, using wear-resistant and low-particle-generating materials and conducting lightweight design, it aims to solve the deficiencies of the traditional elevator in terms of cleanliness and size, and realize the efficient, safe and dust-free transportation of small wafer cassettes.

[0007] The above technical purpose of the utility model is achieved through the following technical solutions: A wafer cassette elevator includes a frame for support and connection. An input port and an output port of the wafer cassette are respectively provided in the height direction of the frame. Automatic door devices are installed at both the input port and the output port. An output conveyor line for outputting the wafer cassette is installed at the output port. A lifting car is slidably installed in the frame. A driving component for driving the lifting car to slide up and down is installed at the bottom of the frame. A guide rail for supporting the sliding of the lifting car is also installed in the frame.

[0008] Furthermore, the driving component includes a motor, an intermediate synchronous pulley and a synchronous belt. Intermediate synchronous pulleys are respectively installed at the upper and lower ends of the frame. The synchronous belt is sleeved on the two intermediate synchronous pulleys. The motor is used to drive one of the intermediate synchronous pulleys to rotate.

[0009] Further, a main synchronous pulley is installed on the output shaft of the motor, an intermediate shaft is rotatably installed at one end of the motor, a driven synchronous pulley is installed at one end of the intermediate shaft, and the intermediate synchronous pulley is installed on the intermediate shaft and rotates therewith.

[0010] Further, two sets of intermediate synchronous pulleys are installed in the frame, the two sets of intermediate synchronous pulleys are installed at intervals, and a synchronous belt is sleeved outside each set of intermediate synchronous pulleys.

[0011] Further, the lifting car includes a bracket for support and connection, a transfer conveyor line for transferring the wafer cassette is installed on the bracket, and a synchronous belt fixing member for fixedly connecting with the intermediate synchronous belt is installed on the bracket, and a roller group is installed at one end of the bracket close to the guide rail.

[0012] Further, the guide rail is specifically a T-shaped guide rail, the guide rails are installed at both the left and right ends of the lifting car, the roller group is a T-shaped roller group, and two sets of roller groups are respectively installed at the left and right ends of the bracket close to the guide rail.

[0013] Further, a buffer is installed at the bottom of the frame above the driving component for buffering and protecting the falling lifting car.

[0014] Further, limit members are respectively installed at the upper and lower ends of the guide rail to prevent the lifting car from disengaging from the guide rail.

[0015] Further, the buffer is specifically one of a gas shock absorber or a liquid shock absorber.

[0016] Further, a belt break monitoring device is also installed in the lifting car for monitoring the breakage of the synchronous belt.

[0017] In summary, the utility model has the following beneficial effects:

[0018] The utility model drives the lifting car to slide up and down in the frame through the driving component, realizes the rapid lifting of the wafer cassette, and improves the lifting efficiency of the wafer cassette; adopts synchronous belt and synchronous pulley drive, which has good wear resistance, low particle generation and high cleanliness; adopts T-shaped guide rail and T-shaped roller group, which makes the lifting car more stable during sliding, reduces shaking and noise; a buffer is arranged at the bottom of the frame to buffer and protect the falling lifting car, enhancing the safety and reliability of the equipment; at the same time, a belt break monitoring device is arranged in the lifting car, which can timely detect the breakage of the synchronous belt, avoid equipment failures and production accidents, and the overall structure is compact, realizing the efficient, safe and dust-free transportation of small wafer cassettes. Description of the Drawings

[0019] Figure 1It is a schematic structural diagram of a wafer cassette elevator of the present utility model;

[0020] Figure 2 It is a schematic internal structure diagram of a wafer cassette elevator of the present utility model;

[0021] Figure 3 It is a schematic structural diagram of a lifting car in a wafer cassette elevator of the present utility model;

[0022] Figure 4 It is a partial schematic structural diagram of a driving component in a wafer cassette elevator of the present utility model.

[0023] In the figure: 1, frame; 2, input port; 3, output port; 4, automatic door device; 5, output conveyor line; 6, lifting car; 61, bracket; 62, transfer conveyor line; 63, synchronous belt fixing piece; 64, roller group; 65, broken belt monitoring device; 7, driving component; 71, motor; 72, intermediate synchronous pulley; 73, synchronous belt; 74, main synchronous pulley; 75, slave synchronous pulley; 76, intermediate shaft; 8, guide rail; 9, buffer. Specific embodiments

[0024] The following combines the drawings and embodiments to describe the present utility model in detail.

[0025] As Figures 1-4 shown, the present utility model provides a wafer cassette elevator, including a frame 1 for support and connection. The frame 1 is a rectangular frame 1, and the height of the frame 1 can be set according to the requirements of the working conditions. Specifically, the frame 1 is assembled from aluminum profiles of different lengths of the same specification. The frame 1 assembled from aluminum profiles has the advantages of light weight, good load-bearing capacity, excellent corrosion resistance, easy processing and assembly, beautiful appearance, easy maintenance, environmental protection and energy saving.

[0026] A guard plate is installed in the gap of the frame 1. The guard plate mainly plays the role of dust and water prevention, protects the components installed inside the frame 1, and prevents the operator from accidentally touching the machine during work, causing personal injury. It can also add beauty and engineering design sense to the equipment, improve the overall image of the product. Further, the guard plate is mainly made of acrylic plate. Acrylic plate is also known as plexiglass or PMMA plate, which is a high-performance transparent plastic sheet. It has high transparency, excellent weather resistance and chemical resistance, and very good light transmittance, which can reach more than 92%. Therefore, it can facilitate the operator to observe the operation status of the components inside the equipment at any time, so as to maintain the equipment in time.

[0027] Specifically, casters are respectively installed at the four corners of the bottom of the frame 1, which can facilitate movement and meet the wafer cassette lifting requirements of different workstations. After fixing the position, a fixed footrest can be added for final fixing of the position. The installation is simple and convenient, and the flexibility is good.

[0028] On the height direction of the frame 1, there are respectively an input port 2 and an output port 3 for the wafer cassette. The input port 2 is below the output port 3, and the input port 2 and the output port 3 are of the same size. The specific heights of the input port 2 and the output port 3 are set according to the working conditions requirements.

[0029] Automatic door devices 4 are installed at both the input port 2 and the output port 3. The automatic door devices 4 can automatically open and close according to the inflow or outflow of the wafer cassette, preventing impurities such as dust from entering the interior of the frame 1 and causing pollution. Further, a high-speed air flow spraying device is installed at the automatic door, which can wash through high-speed air flow before the wafer cassette enters the clean area, effectively preventing external dust, bacteria and other pollutants from entering the clean area, so as to maintain a clean environment. The automatic door device 4 is equipped with sensors, which can detect the entry and exit of materials in real time, and start and stop the high-speed air flow as needed, reducing unnecessary energy consumption and improving energy utilization efficiency.

[0030] The automatic door device 4 mainly includes a synchronous linear motion mechanism and two door panels. The synchronous linear motion mechanism drives the two door panels to move synchronously towards or away from each other.

[0031] An output conveyor line 5 for outputting the wafer cassette is installed at the output port 3. The output conveyor line 5 is fixedly installed on the outside of the frame 1 at the output port 3. The output conveyor line 5 is a synchronous belt 73 conveyor line, which is used to convey small wafer cassettes with a size below 6 inches. The synchronous belt 73 conveyor line is a material conveying device that uses the synchronous belt 73 as a transmission element. The synchronous belt 73 conveyor line has many advantages. First, it has characteristics such as large transmission power, stable operation, low working noise, and no need for lubrication. Second, the synchronous belt 73 conveyor line has a constant transmission ratio, ensuring the accuracy and stability of the transmission. In addition, its transmission efficiency is high, the energy-saving effect is obvious, the range of speed ratio is large, and it can meet different conveying distances and process requirements. At the same time, the synchronous belt 73 conveyor line also has the advantages of simple maintenance and low cost.

[0032] A lifting car 6 is slidably installed inside the frame 1. The lifting car 6 is used to lift the wafer cassette to a specified height. The lifting car 6 includes a bracket 61 for support and connection. The bracket 61 is L-shaped and is assembled by multiple aluminum profiles of the same specification but different lengths. A reinforcing member is installed at the intersection of the L-shape to strengthen the force.

[0033] A transfer conveyor line 62 for transferring the wafer cassette and a synchronous belt fixing member 63 for fixedly connecting with the intermediate synchronous belt 73 are installed on the bracket 61. A roller group 64 is installed at one end of the bracket 61 close to the guide rail 8.

[0034] The transfer conveyor line 62 is mainly used to transfer the wafer cassette. After the wafer cassette to be lifted is conveyed into the transfer conveyor line 62, the transfer conveyor line 62 places the wafer cassette in the middle position. After being lifted to the specified height, the transfer conveyor line 62 conveys the wafer cassette to the output conveyor line 5, playing a role of transfer. The structure of the transfer conveyor line 62 is the same as that of the output conveyor line 5, except that the conveying length of the output conveyor line 5 is greater than that of the transfer conveyor line 62.

[0035] The synchronous belt fixing member 63 includes a seat body and an engaging plate. The seat body is provided with a threaded portion for connecting with the bracket 61. The seat body can be adjusted up and down to tension the synchronous belt 73. The tooth shape on the engaging plate meshes with the tooth shape of the synchronous belt 73. After the engaging plate is connected to the synchronous belt 73, it is fixedly installed on the seat body through bolts.

[0036] The main function of the roller group 64 is to support the up and down movement of the lifting car 6, ensure the overall movement balance and stability of the equipment, have a certain guiding effect, ensure the accuracy and stability of the equipment during movement, and reduce friction and wear. The roller group 64 is used in cooperation with the guide rail 8.

[0037] A driving assembly 7 for driving the lifting car 6 to slide up and down is installed at the bottom of the frame 1. The driving assembly 7 includes a motor 71, an intermediate synchronous pulley 72 and a synchronous belt 73. Intermediate synchronous pulleys 72 are respectively installed at the upper and lower ends of the frame 1. The synchronous belt 73 is sleeved on the two intermediate synchronous pulleys 72. The motor 71 is used to drive one of the intermediate synchronous pulleys 72 to rotate.

[0038] The motor 71 is a motor 71 with a reducer. For occasions where the wafer cassette needs to be accurately lifted to a specified height, the motor 71 is specifically selected as a stepping motor 71, which can accurately control the lifting position and has a high control accuracy.

[0039] Further, a main synchronous pulley 74 is installed on the output shaft of the motor 71. One end of the motor 71 is rotatably installed with an intermediate shaft 76. One end of the intermediate shaft 76 is installed with a slave synchronous pulley 75. The outer sides of the main synchronous pulley 74 and the slave synchronous pulley 75 are sleeved with a synchronous belt 73. The rotation of the main synchronous pulley 74 drives the slave synchronous pulley 75 to rotate accordingly. The intermediate synchronous pulley 72 is installed on the intermediate shaft 76 and rotates accordingly. Both ends of the intermediate shaft 76 are installed with bearing seats for supporting the rotation of the intermediate shaft 76.

[0040] Specifically, two sets of intermediate synchronous pulleys 72 are installed inside the frame 1. The two sets of intermediate synchronous pulleys 72 are installed at intervals, and a synchronous belt 73 is sleeved outside each set of intermediate synchronous pulleys 72. The two intermediate synchronous pulleys 72 are fixedly installed between two bearing seats on the intermediate shaft 76. The setting of the two synchronous belts 73 can disperse the load of a single synchronous belt 73 and reduce the risk of the synchronous belt 73 breaking due to excessive load. At the same time, the setting of the double synchronous belts 73 also has an insurance effect. After one of the synchronous belts 73 breaks, the other can still function to prevent the sudden drop of the lifting car 6 caused by the breakage of the synchronous belt 73, and the safety is good.

[0041] A guide rail 8 for supporting the sliding of the lifting car 6 is also installed inside the frame 1. The guide rail 8 is used to support the rolling of the roller group 64. Specifically, the guide rail 8 is a T-shaped guide rail 8. Guide rails 8 are installed at both the left and right ends of the lifting car 6. Correspondingly, the roller group 64 is a T-shaped roller group 64 that matches the T-shaped guide rail 8. Each set of T-shaped roller groups 64 is provided with 3 rollers, and the 3 rollers roll on the 3 surfaces of the T-shaped guide rail 8 respectively. Two sets of roller groups 64 are installed at both ends of the bracket 61 near the guide rail 8. Through the setting of multiple rollers, the movement support is more stable and reliable. Through the cooperative movement of the roller group 64 and the guide rail 8, the up and down movement of the lifting car 6 is smoother and more stable.

[0042] Furthermore, limit pieces are installed at the upper and lower ends of the guide rail 8 to prevent the lifting car 6 from disengaging from the guide rail 8. The function of the limit pieces is to further prevent the lifting car 6 from disengaging from the guide rail 8 and causing danger when the motor 71 has a problem and loses synchronization during the up and down movement.

[0043] A buffer 9 for buffering and protecting the falling lifting car 6 is installed above the driving component 7 at the bottom of the frame 1. It can play a role in buffering the falling impact force when the double synchronous belt 73 breaks or when the lifting car 6 decelerates during descent. When the lifting car 6 descends, inertia will be generated due to its own gravity, resulting in unstable braking of the motor 71. Therefore, a buffer 9 is further installed to offset this influence.

[0044] Furthermore, two buffers 9 are installed. The buffer 9 is specifically one of a gas shock absorber or a liquid shock absorber. Since the wafer cassette needs to be in a relatively clean environment, a gas shock absorber is preferred. It can effectively absorb and slow down mechanical vibrations and impacts, and has the characteristics of being adjustable. The damping force or compression degree of the shock absorber can be adjusted according to actual needs and usage conditions to adapt to different working environments. It has good corrosion resistance and wear resistance and can work stably for a long time.

[0045] A belt break monitoring device 65 is also installed in the lifting car 6 to monitor the breakage of the synchronous belt 73. When the lifting car 6 is moving up and down normally, the synchronous belt 73 is in a tensioned state. At this time, the belt break monitoring device 65 does not emit an alarm signal; when the synchronous belt 73 breaks, the tension force applied to the synchronous belt 73 disappears immediately. At this time, the belt break monitoring device 65 triggers an alarm signal to remind the operator to respond in time.

[0046] The utility model drives the lifting car 6 to slide up and down in the frame 1 through the driving assembly 7, realizing the rapid lifting of the wafer cassette and improving the lifting efficiency of the wafer cassette; the synchronous belt 73 and synchronous pulley are adopted for driving, with good wear resistance, low particle generation and high cleanliness; the T-shaped guide rail 8 and T-shaped roller group 64 are adopted, making the lifting car 6 more stable during the sliding process, reducing shaking and noise; a buffer 9 is arranged at the bottom of the frame 1 to buffer and protect the falling lifting car 6, enhancing the safety and reliability of the equipment; at the same time, a belt break monitoring device 65 is arranged in the lifting car 6, which can timely detect the breakage of the synchronous belt 73, avoid equipment failures and production accidents, and the overall structure is compact, realizing the efficient, safe and dust-free transportation of small wafer cassettes.

[0047] The above description is only the preferred embodiment of the utility model, and the protection scope of the utility model is not limited to the above embodiments. All technical solutions within the idea of the utility model belong to the protection scope of the utility model. It should be pointed out that for those of ordinary skill in the art in this technical field, several improvements and retouches made without departing from the principle of the utility model should also be regarded as the protection scope of the utility model.

Claims

1. A wafer cassette lifter, characterized in that, It includes a frame for support and connection. An input port and an output port of a wafer cassette are respectively provided in the height direction of the frame. Automatic door devices are installed at the input port and the output port. An output conveyor line for outputting the wafer cassette is installed at the output port. A lifting car is slidably installed in the frame. A driving component for driving the lifting car to slide up and down is installed at the bottom of the frame. A guide rail for supporting the sliding of the lifting car is also installed in the frame.

2. The wafer cassette elevator according to claim 1, wherein The driving component includes a motor, an intermediate synchronous pulley and a synchronous belt. Intermediate synchronous pulleys are respectively installed at the upper and lower ends of the frame. The synchronous belt is sleeved on the two intermediate synchronous pulleys. The motor is used to drive one of the intermediate synchronous pulleys to rotate.

3. The wafer cassette lifter according to claim 2, wherein, A main synchronous pulley is installed on the output shaft of the motor. An intermediate shaft is rotatably installed at one end of the motor. A driven synchronous pulley is installed at one end of the intermediate shaft. The intermediate synchronous pulley is installed on the intermediate shaft and rotates therewith.

4. The wafer cassette elevator according to claim 3, characterized in that, Two groups of intermediate synchronous pulleys are installed in the frame. The two groups of intermediate synchronous pulleys are installed at intervals. A synchronous belt is sleeved on the outside of each group of intermediate synchronous pulleys.

5. The wafer cassette lifter according to claim 2, wherein, The lifting car includes a bracket for support and connection. A transfer conveyor line for transferring the wafer cassette and a synchronous belt fixing member for fixedly connecting with the synchronous belt are installed on the bracket. A roller group is installed at one end of the bracket close to the guide rail.

6. The wafer cassette elevator according to claim 5, characterized in that, The guide rail is specifically a T-shaped guide rail. The guide rails are installed at both the left and right ends of the lifting car. The roller group is a T-shaped roller group. Two groups of roller groups are respectively installed at the left and right ends of the bracket close to the guide rail.

7. A wafer cassette elevator according to claim 1, characterized in that, A buffer is installed above the driving component at the bottom of the frame for buffering and protecting the falling lifting car.

8. The wafer cassette elevator according to claim 1, characterized in that, Limiters are respectively installed at the upper and lower ends of the guide rail to prevent the lifting car from disengaging from the guide rail.

9. The wafer cassette elevator according to claim 7, characterized in that, The buffer is specifically one of a gas shock absorber or a liquid shock absorber.

10. A wafer cassette elevator according to claim 5, characterized in that, A belt break monitoring device is also installed in the lifting car for monitoring the breakage of the synchronous belt.

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