Scratching device for gallium arsenide substrate
The gallium arsenide substrate is clamped through the limit ring and the block structure, and combined with diamond pen cutting, the problem of collapse angle and edge arrhythmia during the cutting of the gallium arsenide substrate is solved, achieving a stable cutting effect.
Patent Information
- Application Number
- CN202421906527.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-08
- Publication Date
- 2025-07-11
- Estimated Expiration
- 2034-08-08
AI Technical Summary
When cutting a gallium arsenide substrate, the cutting force can easily cause the substrate sheet to collapse, rupture, irregular edges, and difficult to control the cutting direction, affecting the subsequent process.
The limit ring and block structure are adopted, and the gallium arsenide substrate is clamped through a driving device, and the diamond pen is used for cutting. After the cutting is completed, the substrate is automatically reset and removed, and the screw mechanism and diamond pen are used for cracking and cutting.
It realizes stable cutting of the substrate sheet, avoids the problems of collapsed angles and irregular edges, and is suitable for high-quality occasions.
Smart Images
Figure CN223085127U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to a scribing device for gallium arsenide substrates. Background Art
[0002] Currently, in optical chip manufacturing experiments, a whole wafer needs to be cut to form wafers with horizontal edges.
[0003] The main existing methods for cutting wafers are single-piece linear cutting using methods such as saw blades, grinding wheels, diamond wires, lasers, and high-pressure water jets; in the above processing methods, the acting force directly acts on the surface of the wafer during cutting, without any auxiliary tools added. The impact force during cutting is likely to cause chipping and cracking of the wafer, and the direction of the wafer cracking is also difficult to control, resulting in uneven edges and affecting subsequent processes. Summary of the Utility Model
[0004] The utility model aims to solve the above technical problems and provides a scribing device for gallium arsenide substrates.
[0005] To solve the above technical problems, the technical solution provided by the utility model is as follows:
[0006] A scribing device for gallium arsenide substrates, including a workbench, on which a limiting device for rotating and clamping the gallium arsenide substrate is installed;
[0007] The limiting device includes a limiting ring on the workbench, a pressing block for pressing the gallium arsenide substrate up and down is installed on the outer side of the limiting ring, the upper end surface of the pressing block is an arc structure, and a driving device for driving the pressing block to move downward and approach the gallium arsenide substrate is installed on the limiting ring;
[0008] A cutting device for rotating and cutting the gallium arsenide substrate is installed on one side of the workbench.
[0009] Preferably, an installation groove for installing the gallium arsenide substrate is opened on the workbench.
[0010] Preferably, a fixed ring and oppositely arranged guide blocks are installed on the outer side of the limiting ring, and a moving hole for cooperating with the guide blocks and the limiting ring is opened on the pressing block.
[0011] Preferably, a spring is installed between the pressing block and the fixed ring and on the outer side of the limiting ring.
[0012] Preferably, the driving device includes a driving motor arranged under the workbench, a rotating shaft is installed at the output end of the driving motor and the rotating shaft is located inside the limiting ring, a cross plate is installed on the rotating shaft, multiple groups of guide rods are installed at the lower end of the cross plate, and a movable ball is installed at the lower end of the guide rods.
[0013] Preferably, a moving groove for the movement of the movable ball is formed in the inner side of the lower end of the guiding rod.
[0014] Preferably, the scribing device includes a lead screw mechanism fixedly connected to one side of the workbench. A rolling nut of the lead screw mechanism is connected with a moving arm, and a diamond pen for scribing a gallium arsenide substrate is installed under the moving arm.
[0015] Preferably, a cutting groove for the use of the diamond pen is formed in the workbench.
[0016] After adopting the above structure, the utility model has the following advantages:
[0017] In the utility model, a driving device drives a pressing block of a limiting device to approach the gallium arsenide substrate and clamp the upper surface thereof. A cutting device cuts the edge of the gallium arsenide substrate. When the cutting is completed, the driving device resets, and the pressing block is automatically pushed to reset by a spring, so that the cut gallium arsenide substrate can be easily taken out. The structure is simple and reasonable, and it is very suitable for occasions with high quality requirements.
[0018] The above summary is only for the purpose of the specification and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the utility model will be readily apparent by reference to the drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.
[0020] Figure 1 is a schematic structural diagram of the utility model;
[0021] Figure 2 is a side view of the driving device of the utility model;
[0022] Figure 3 is a schematic structural diagram of the limiting device of the utility model.
[0023] As shown in the figure: 1, workbench; 2, limiting device; 201, limiting ring; 202, pressing block; 203, fixed ring; 204, guiding block; 205, moving hole; 206, spring; 3, driving device; 301, rotating shaft; 302, cross plate; 303, guiding rod; 304, movable ball; 4, diamond pen; 5, installation groove; 6, cutting groove. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0024] Embodiments of the present application will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present application and should not be construed as a limitation of the present application.
[0025] In the description of the present application, it should be noted that unless otherwise clearly specified and defined, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.
[0026] The following further elaborates on the present utility model in conjunction with the full text.
[0027] Combined with the attached Figures 1 - 3 , a scribing device for a gallium arsenide substrate, comprising a workbench 1. A limiting device 2 for rotating and clamping the gallium arsenide substrate is installed on the workbench 1. The limiting device 2 includes a limiting ring 201 on the workbench 1. A pressing block 202 for pressing the gallium arsenide substrate up and down is installed on the outer side of the limiting ring 201. The upper end surface of the pressing block 202 is an arc structure. A driving device 3 for driving the pressing block 202 to move downward close to the gallium arsenide substrate is installed on the limiting ring 201. A fixing ring 203 and oppositely arranged guiding blocks 204 are installed on the outer side of the limiting ring 201. A moving hole 205 for cooperating with the guiding blocks 204 and the limiting ring 201 is formed on the pressing block 202. A spring 206 is installed between the pressing block 202 and the fixing ring 203 and on the outer side of the limiting ring 201. When the pressing block 202 is stressed, it will move on the outer side of the limiting ring 201 through the moving hole 205 under the guidance of the guiding blocks 204, and at the same time, the spring 206 automatically adjusts its expansion and contraction. The pressing block 202 approaches the gallium arsenide substrate and presses the gallium arsenide substrate tightly.
[0028] An installation groove 5 for cooperating with the installation of the gallium arsenide substrate is formed on the workbench 1. Specifically, the gallium arsenide substrate is installed in the installation groove 5 to complete the limiting and installation.
[0029] When the present utility model is specifically implemented, such as Figure 1 , Figure 2 and Figure 3As shown in the figure, the driving device 3 includes a driving motor arranged under the workbench 1. The output end of the driving motor is equipped with a rotating shaft 301, and the rotating shaft 301 is located within the limiting ring 201. Specifically, the driving motor is fixedly connected to the bottom of the workbench 1 through bolts and brackets. The workbench 1 and the rotating shaft 301 are connected by bearings, enabling the rotating shaft 301 to rotate on the workbench 1 through the bearings. The rotating shaft 301 passes through the limiting ring 201. A cross plate 302 is installed on the rotating shaft 301. Multiple groups of guide rods 303 are installed at the lower end of the cross plate 302. The lower end of the guide rod 303 is equipped with a movable ball 304. A moving groove for the movement of the movable ball 304 is opened on the inner side of the lower end of the guide rod 303. The driving motor is a rotating motor in the prior art. When the driving motor operates, it drives the rotating shaft 301 to rotate, and the cross plate 302 and the guide rods 303 rotate. The upper end surface of the pressing block 202 is of an arc structure. When the guide rod 303 rotates, the movable ball 304 moves within the moving groove. When the guide rod 303 rotates, it will push the pressing block 202 to move downward, causing the pressing block 202 to approach the gallium arsenide substrate and pressing the gallium arsenide substrate tightly.
[0030] When the present utility model is specifically implemented, as Figure 1 shown, the scribing device includes a lead screw mechanism fixedly connected to one side of the workbench 1. The rolling nut of the lead screw mechanism is connected to a moving arm. A diamond pen 4 for scribing the gallium arsenide substrate is installed under the moving arm. Specifically, the lead screw mechanism includes a lead screw motor and a lead screw at the output end of the lead screw motor. The lead screw motor is connected to the workbench 1 through a bracket. The lead screw is connected to a fixed bracket through a bearing. Limiting rods are installed on both sides of the lead screw on the fixed bracket. A rolling nut for cooperation is installed on the lead screw, and the limiting rod passes through the rolling nut to limit it. The moving arm is connected to the rolling nut. A cutting groove 6 for the use of the diamond pen 4 is opened on the workbench 1. The diamond pen 4 moves to cut the gallium arsenide substrate. When the lead screw motor operates, it drives the lead screw to rotate. Under the limitation of the limiting rod, the rolling nut moves on the outer side of the lead screw, thereby driving the diamond pen 4 to move and scribe the gallium arsenide substrate.
[0031] Example 1:
[0032] When the present utility model is in use, first, the gallium arsenide substrate is placed into the installation groove 5. The driving motor operates, driving the rotating shaft 301 to rotate, and the cross plate 302 and the guide rods 303 rotate. The upper end surface of the pressing block 202 is of an arc structure. When the guide rod 303 rotates, the movable ball 304 moves within the moving groove. When the guide rod 303 rotates, it will push the pressing block 202 to move downward. When the pressing block 202 is stressed, it will be guided by the guide block 204, causing the pressing block 202 to move on the outer side of the limiting ring 201 through the moving hole 205. At the same time, the spring 206 is compressed, and the pressing block 202 approaches the gallium arsenide substrate and presses the gallium arsenide substrate tightly.
[0033] Example 2:
[0034] When cutting a gallium arsenide substrate, the lead screw motor operates to drive the lead screw to rotate. Under the limitation of the limit rod, the rolling nut moves on the outside of the lead screw, thereby driving the diamond pen 4 to move and crack the gallium arsenide substrate for cutting. After the cutting is completed, the drive motor resets, the drive motor rotates in the reverse direction, the guide rod 303 resets, the movable ball 304 moves away from the pressing block 202, the spring 206 expands, driving the pressing block 202 to move upward, and the cut gallium arsenide substrate can be manually removed.
[0035] The above describes the present invention and its implementation manners. Such description is not restrictive, and only one of the implementation manners of the present invention is shown throughout the text. The actual structure is not limited thereto. In short, if those of ordinary skill in the art are inspired by it and, without departing from the gist of the creation of the present invention, design structurally similar ways and embodiments to this technical solution without creative efforts, they shall fall within the protection scope of the present invention.
Claims
1. A scribing device for a gallium arsenide substrate, comprising a workbench (1), characterized in that, A limiting device (2) for rotating and clamping a gallium arsenide substrate is installed on the workbench (1); The limiting device (2) includes a limiting ring (201) on the workbench (1). A pressing block (202) for pressing the gallium arsenide substrate up and down is installed on the outer side of the limiting ring (201). The upper end face of the pressing block (202) is an arc structure. A driving device (3) for driving the pressing block (202) to move downward and approach the gallium arsenide substrate is installed on the limiting ring (201); A scribing device for rotating and cutting the gallium arsenide substrate is installed on one side of the workbench (1).
2. The scribing device for a gallium arsenide substrate according to claim 1, wherein: An installation groove (5) for fitting the installation of the gallium arsenide substrate is opened on the workbench (1).
3. The dicing device for a gallium arsenide substrate according to claim 1, wherein: A fixing ring (203) and oppositely arranged guide blocks (204) are installed on the outer side of the limiting ring (201). A moving hole (205) for cooperating with the guide blocks (204) and the limiting ring (201) is opened on the pressing block (202).
4. The scribing device for a gallium arsenide substrate according to claim 3, characterized in that: A spring (206) is installed between the pressing block (202) and the fixing ring (203) and on the outer side of the limiting ring (201).
5. The dicing device for a gallium arsenide substrate according to claim 1, characterized in that: The driving device (3) includes a driving motor arranged under the workbench (1). A rotating shaft (301) is installed at the output end of the driving motor and the rotating shaft (301) is located inside the limiting ring (201). A cross plate (302) is installed on the rotating shaft (301). A plurality of groups of guide rods (303) are installed at the lower end of the cross plate (302). A movable ball (304) is installed at the lower end of the guide rod (303).
6. The dicing device for a gallium arsenide substrate according to claim 5, wherein: A moving groove for cooperating with the movement of the movable ball (304) is opened in the inner side of the lower end of the guide rod (303).
7. The dicing device for a gallium arsenide substrate according to claim 1, characterized in that: The scribing device includes a lead screw mechanism fixedly connected to one side of the workbench (1). A rolling nut of the lead screw mechanism is connected with a moving arm. A diamond pen (4) for scribing the gallium arsenide substrate is installed under the moving arm.
8. The dicing device for a gallium arsenide substrate according to claim 7, characterized in that: A cutting groove (6) for cooperating with the diamond pen (4) is opened on the workbench (1).