Vacuum processing equipment with temperature control system

Abstract

The utility model belongs to the technical field of vacuum treatment equipment, and particularly relates to vacuum treatment equipment with a temperature control system. In order to overcome the defects that the temperature control system of the vacuum treatment equipment only adopts a single heat conduction medium and the cooling mode is single, the utility model adopts the following technical scheme that the vacuum pump with the temperature control system comprises a pump main body, a liquid heat exchange system; a gaseous heat exchange system; a controller; wherein the liquid heat exchange system exchanges heat with the pump main body under the control of the controller, and the gaseous heat exchange system exchanges heat with the liquid heat exchange system and the environment respectively under the control of the controller. The vacuum pump with the temperature control system has the beneficial effects that the liquid heat exchange system and the gas heat exchange system are cooperated, so that the heat exchange efficiency and the temperature control precision can be obviously improved, and the vacuum pump works in a required temperature range; and the controller is arranged, so that automatic intelligent control can be realized.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum treatment equipment, and particularly relates to a vacuum treatment equipment with a temperature control system. Background Art

[0002] A vacuum pump (or a vacuum pump unit) makes the internal volume of the pump cavity change through a rotating structure to achieve gas transportation in a limited space, so that the internal air pressure in the limited space is lower than the standard atmospheric pressure, forming the required vacuum environment. Phenomena such as high temperature, high pressure, and condensed liquid generated during the gas transportation process will cause changes in the size, mating clearance, positional relationship, etc. of the rotating structure, which may lead to failure phenomena such as jamming, wear, and corrosion of the rotating structure. In order to prevent the vacuum pump from failing due to high temperature and high pressure, etc., a cooling structure is usually adopted at present to take away the heat of functional structural components such as the rotating structure, so that the functional structural components can operate for a long time and effectively under safe conditions.

[0003] For the pumping of some special media, it is also necessary to set an additional temperature control structure on the intake or outlet of the vacuum pump to achieve safe, reliable, and effective transportation of the pumped medium, so as to ensure the safe, reliable, and long-term operation of the vacuum pump.

[0004] However, the existing temperature control systems of vacuum pumps have the following problems: 1. Only a single heat conduction medium (or working medium) is used; 2. Most vacuum pumps can only cool the pump cavity and lack the heating function of the pump cavity; 3. Most vacuum pumps lack temperature control pretreatment for the intake air of special media or requirements, or the pretreatment only has the function of cooling; 4. Most vacuum pumps lack temperature control post-treatment for the outlet air of special media or requirements, or the post-treatment only has the function of cooling; 5. The adopted heating and cooling structures are not reasonable enough, such as mostly using water cooling; 6. Lack of overall consideration and control of the temperatures of intake air pretreatment, working pump cavity, and outlet air post-treatment; 7. The control is not intelligent enough. For example, the pump motor always rotates at the rated speed, making the working load of the temperature control system always large, while when the vacuum degree is low, it is not necessary for the pump motor to always rotate at the rated speed; 8. When using methods such as adding fans, etc., the equipment occupies a large space. Summary of the Invention

[0005] Aiming at the deficiencies of only using a single heat conduction medium and a single cooling method in the temperature control system of the vacuum treatment equipment, the utility model provides a vacuum treatment equipment with a temperature control system, which comprehensively utilizes liquid media and gas media to control the temperature. Further, solve other problems mentioned in the background, and realize the full-process cold and heat management of intake air pretreatment, working pump cavity, and outlet air post-treatment, etc. The utility model also provides a vacuum treatment equipment unit with a temperature control system.

[0006] To achieve the above object, the present utility model adopts the following technical solutions: a vacuum processing device with a temperature control system, and the vacuum processing device with a temperature control system includes:

[0007] A vacuum pumping main body;

[0008] A liquid heat exchange system, including a first heat exchanger for heat exchange with the vacuum pumping main body, a liquid circulation pipeline, a liquid circulation pump, and a liquid working medium;

[0009] A gaseous heat exchange system, including a second heat exchanger for heat exchange with the liquid heat exchange system, a gaseous circulation pipeline, a compressor, a gaseous working medium, and a third heat exchanger for heat exchange with the environment;

[0010] A controller;

[0011] Wherein, the liquid heat exchange system exchanges heat with the vacuum pumping main body under the control of the controller, and the gaseous heat exchange system exchanges heat with the liquid heat exchange system and the environment respectively under the control of the controller.

[0012] The vacuum processing device with a temperature control system of the present utility model has two heat exchange systems, namely a liquid heat exchange system and a gaseous heat exchange system. The liquid heat exchange system exchanges heat with the vacuum pumping main body, and the gaseous heat exchange system exchanges heat with the liquid heat exchange system and the environment respectively, which can significantly improve the heat exchange efficiency and temperature control accuracy, so that the vacuum pump works within the required temperature range; it is provided with a controller, which can realize automatic intelligent control. In the liquid heat exchange system, the specific heat capacity of the liquid is large, and more heat can be carried away with the same volume or flow rate, having the advantages of fast heat conduction and so on. The gaseous heat exchange system can utilize the characteristic of large heat capacity during gaseous phase change (realized through a compressor, etc., and the principle is similar to that of an air conditioner), and can carry away more heat during the same volume flow cycle (compared with the same volume of gas). When the specific heat capacity of the heat exchange substance is relatively large, the structure for carrying away the same amount of heat can be made very compact and occupy less space; the layout of the liquid heat exchange system and the gaseous heat exchange system is convenient.

[0013] As an improvement, the liquid heat exchange system further includes a first heater. By setting the first heater, heating and cooling of the vacuum pumping main body can be realized, and the function is more complete. The first heater can be independently arranged from the first heat exchanger, or the first heat exchanger has heating and cooling functions and also serves as the first heater at the same time.

[0014] As an improvement, the gaseous heat exchange system further includes a second heater. By setting the second heater, heating and cooling of the liquid heat exchange system can be realized, and the function is more complete. The second heater can be independently arranged from the second heat exchanger, or the second heat exchanger has heating and cooling functions and also serves as the second heater at the same time.

[0015] As an improvement, the vacuum pumping main body includes a pump chamber, the pump chamber has an air inlet and an air outlet, the vacuum processing device with a temperature control system further includes an intake pipeline communicating with the air inlet and an exhaust pipeline communicating with the air outlet, the liquid heat exchange system includes three local heat exchange systems, and the three local heat exchange systems exchange heat with the pump chamber, the intake pipeline, and the exhaust pipeline respectively. The liquid heat exchange system includes three local heat exchange systems that exchange heat with the pump chamber, the intake pipeline, and the exhaust pipeline respectively. In addition to realizing the temperature control of the pump chamber, it can also realize the pre-control of the intake air temperature and the post-control of the exhaust air temperature.

[0016] As an improvement, the three local heat exchange systems are connected in parallel, that is, the three local heat exchange systems can be independent of each other and do not interfere with each other.

[0017] As an improvement, the liquid heat exchange system includes a main pipeline, and each of the three local heat exchange systems includes a sub-pipeline communicating with the main pipeline, a temperature sensor, and a flow control valve. The controller controls each flow control valve according to the signals of the respective temperature sensors. By setting the temperature sensors and the flow control valves, and the controller controls each flow control valve according to the signals of the respective temperature sensors, more precise automatic temperature control can be achieved.

[0018] As an improvement, the three local heat exchange systems share the same liquid circulation pump, thereby saving the use of the liquid circulation pump. The liquid circulation pump is controlled by the controller.

[0019] As an improvement, a main flow control valve is provided on the main pipeline. The main flow control valve is controlled by the controller.

[0020] As an improvement, the vacuum processing device with a temperature control system further includes a vacuum sensor provided at the air inlet of the vacuum pumping main body. The vacuum pumping main body includes a pump motor, and the controller controls the rotation speed of the pump motor according to the signal of the vacuum sensor. When the vacuum sensor detects that the vacuum degree is lower than a certain threshold, the rotation speed of the pump motor can be reduced to reduce the working load of the temperature control system.

[0021] As an improvement, the vacuum pumping main body includes a pump motor, and the compressor is driven by the pump motor.

[0022] As an improvement, the second heat exchanger is a gas-liquid heat exchanger; the gas heat exchange system further includes a gas temperature sensor; the third heat exchanger is a gaseous environment heat exchange device; the gas heat exchange system further includes a solenoid valve for material phase change. The solenoid valve for material phase change is a four-way solenoid valve, similar to the four-way valve used in an air conditioner.

[0023] As an improvement, the vacuum processing equipment with a temperature control system includes a support base, and the vacuum pumping main body, the liquid heat exchange system, the gaseous heat exchange system and the controller are integrated on the support base, thereby reducing the occupied space and facilitating transportation. Some components in the gaseous heat exchange system may not be arranged on the support base. For example, in some situations where the use environment is relatively harsh (the environmental temperature is high and the heat dissipation of the installation space is poor), the gaseous environmental heat exchanger of the gaseous heat exchange system can be moved to a position where the heat dissipation conditions meet the requirements by extending the pipeline.

[0024] As an improvement, the vacuum processing equipment is a vacuum pump or a vacuum pump unit.

[0025] The beneficial effects of the vacuum processing equipment with a temperature control system of the present utility model are as follows: It has two heat exchange systems, namely a liquid heat exchange system and a gaseous heat exchange system. The liquid heat exchange system exchanges heat with the vacuum pumping main body, and the gaseous heat exchange system exchanges heat with the liquid heat exchange system and the environment respectively. Compared with a conventional vacuum pump with only a liquid heat exchange system, the liquid heat exchange system and the gaseous heat exchange system cooperate to significantly improve the heat exchange efficiency and temperature control accuracy, so that the vacuum pump operates within the required temperature range; a controller is provided, which can realize automatic intelligent control. Description of the Drawings

[0026] Figure 1 It is a schematic structural diagram of the vacuum processing equipment with a temperature control system according to Embodiment 1 of the present utility model.

[0027] Figure 2 It is a schematic structural diagram of the vacuum processing equipment with a temperature control system according to Embodiment 2 of the present utility model. Detailed Embodiments

[0028] The technical solutions of the embodiments of the present invention will be explained and described below. However, the following embodiments are only the preferred embodiments of the present invention and not all of them. Based on the embodiments in the embodiments, other embodiments obtained by those skilled in the art without creative efforts all fall within the protection scope of the present invention.

[0029] Refer to Figure 1 and Figure 2 , for the vacuum processing equipment with a temperature control system according to the embodiment of the present utility model, the vacuum processing equipment with a temperature control system includes:

[0030] A vacuum pumping main body;

[0031] A liquid heat exchange system, including a first heat exchanger for exchanging heat with the vacuum pumping main body, a liquid circulation pipeline, a liquid circulation pump and a liquid working medium;

[0032] A gaseous heat exchange system, comprising a second heat exchanger for heat exchange with the liquid heat exchange system, a gaseous circulation pipeline, a compressor, a gaseous working medium, and a third heat exchanger for heat exchange with the environment;

[0033] A controller;

[0034] Wherein, the liquid heat exchange system exchanges heat with the vacuum extraction main body under the control of the controller, and the gaseous heat exchange system exchanges heat with the liquid heat exchange system and the environment respectively under the control of the controller.

[0035] The vacuum processing equipment with a temperature control system of the present utility model has two heat exchange systems, namely a liquid heat exchange system and a gaseous heat exchange system. The liquid heat exchange system exchanges heat with the vacuum extraction main body, and the gaseous heat exchange system exchanges heat with the liquid heat exchange system and the environment respectively, which can significantly improve the heat exchange efficiency and temperature control accuracy, so that the vacuum pump operates within the required temperature range; a controller is provided, which can realize automatic intelligent control.

[0036] Embodiment 1

[0037] See Figure 1 , for the vacuum processing equipment with a temperature control system in Embodiment 1 of the present utility model, the vacuum processing equipment with a temperature control system includes:

[0038] A vacuum extraction main body;

[0039] A liquid heat exchange system, comprising a first heat exchanger for heat exchange with the vacuum extraction main body, a liquid circulation pipeline, a liquid circulation pump, and a liquid working medium;

[0040] A gaseous heat exchange system, comprising a second heat exchanger for heat exchange with the liquid heat exchange system, a gaseous circulation pipeline, a compressor, a gaseous working medium, and a third heat exchanger for heat exchange with the environment;

[0041] A controller;

[0042] Wherein, the liquid heat exchange system exchanges heat with the vacuum extraction main body under the control of the controller, and the gaseous heat exchange system exchanges heat with the liquid heat exchange system and the environment respectively under the control of the controller.

[0043] In this embodiment, the liquid heat exchange system further includes a first heater. By providing the first heater, the heating of the vacuum extraction main body is realized, and the function is more complete. The first heater is independently arranged from the first heat exchanger. The first heat exchanger also has a heating function.

[0044] In this embodiment, the liquid heat exchange system further includes a switching pipeline and a liquid heating and cooling switching component. The liquid heating and cooling switching component includes a plurality of solenoid valves. When heating is not required, the liquid working medium flows through the pipeline parallel to the first heater. When heating is required, the first heater operates, and through the liquid heating and cooling switching component, the liquid working medium flows through the first heater. In other embodiments, the liquid heating and cooling switching component may not be provided either.

[0045] In this embodiment, the vacuum pumping main body includes a pump chamber, the pump chamber has an air inlet and an air outlet, the vacuum processing device with a temperature control system further includes an intake pipeline communicating with the air inlet and an outlet pipeline communicating with the air outlet, and the liquid heat exchange system includes three local heat exchange systems, and the three local heat exchange systems respectively exchange heat with the pump chamber, the intake pipeline and the outlet pipeline. The liquid heat exchange system includes three local heat exchange systems that respectively exchange heat with the pump chamber, the intake pipeline and the outlet pipeline. In addition to realizing the temperature control of the pump chamber, it can also realize the pre-control of the intake air temperature and the post-control of the outlet air temperature. The pre-control of the intake air temperature and the post-control of the outlet air temperature are of great significance for some specific occasions or requirements, such as avoiding crystallization, condensation, etc.

[0046] In this embodiment, there are three first heat exchangers.

[0047] In this embodiment, the three local heat exchange systems are connected in parallel, that is, the three local heat exchange systems can operate independently of each other without interference.

[0048] In this embodiment, the liquid heat exchange system includes a main pipeline, and the three local heat exchange systems all include sub-pipelines communicating with the main pipeline, temperature sensors and flow control valves, and the controller controls each flow control valve according to the signals of each temperature sensor. By setting the temperature sensors and flow control valves, and the controller controls each flow control valve according to the signals of each temperature sensor, more precise automatic temperature control can be achieved. The local heat exchange system automatically controls the flow (including opening and closing) between the sub-pipeline and the main pipeline through the temperature sensors and flow control valves.

[0049] In this embodiment, the three local heat exchange systems share the same liquid circulation pump, that is, the entire liquid heat exchange system is powered by the same liquid circulation pump, thereby saving the use of the liquid circulation pump. The liquid circulation pump is controlled by the controller.

[0050] In this embodiment, a main flow regulating valve is provided on the main pipeline. The main flow regulating valve is controlled by the controller.

[0051] In this embodiment, the vacuum processing equipment with a temperature control system further includes a vacuum sensor disposed at the air inlet of the vacuum pumping main body. The vacuum pumping main body includes a pump motor, and the controller controls the rotation speed of the pump motor according to the signal of the vacuum sensor. Usually at the beginning, the vacuum pump operates at the rated power. After operating for a period of time, when the vacuum sensor detects that the vacuum degree is lower than a certain threshold, the rotation speed of the pump motor can be reduced to reduce the working load of the temperature control system. The relationship function between the rotation speed of the pump motor and the vacuum degree detected by the vacuum sensor is pre-stored in the controller.

[0052] In this embodiment, the vacuum pumping main body includes a pump motor, and the compressor is driven by the pump motor.

[0053] In this embodiment, the second heat exchanger is a gas-liquid heat exchanger.

[0054] In this embodiment, the third heat exchanger is a gaseous environment heat exchanger.

[0055] In this embodiment, the gaseous heat exchange system further includes a gas temperature sensor, and the gas temperature sensor sends the detected gaseous temperature to the controller.

[0056] In this embodiment, the gaseous heat exchange system further includes a solenoid valve for material phase change.

[0057] In this embodiment, the gaseous heat exchange system further includes a forced convection component such as a fan, and the fan blows air on the third heat exchanger.

[0058] In this embodiment, the vacuum processing equipment with a temperature control system includes a support base, and the vacuum pumping main body, the liquid heat exchange system, the gaseous heat exchange system and the controller are integrated on the support base. Integrating the components together can reduce the space occupied by the equipment. The part within the dashed line in the figure is the vacuum processing equipment. Figure 1 In the figure, the entire vacuum processing equipment is integrated in one place.

[0059] In this embodiment, the vacuum processing equipment is a single vacuum pump. In other embodiments, the vacuum processing equipment can also be a vacuum pump unit. When it is a vacuum pump unit, the vacuum pumping main body includes multiple pump chambers, and the vacuum pumping main body has a total air inlet and a total air outlet. The temperature control system controls the temperatures of the inlet pipeline at the total air inlet and the outlet pipeline at the total air outlet.

[0060] In this embodiment, water is used as the liquid working medium. In other embodiments, other liquid working media such as refrigerant and ethanol can also be used.

[0061] In this embodiment, each component such as heat exchangers and sensors and other hardware devices can all adopt existing devices. Each electrically-operated working component is connected to the controller.

[0062] The vacuum processing equipment with a temperature control system in the first embodiment of the utility model has two functions or modes: heating and heat dissipation. In the heat dissipation mode, the liquid heat exchange system operates. The temperature sensors of the three local heat exchange systems of the liquid heat exchange system respectively detect the temperatures at three locations. The controller starts the liquid circulation pump, adjusts the main flow regulating valve and the three sub-flow control valves according to the received temperature signals and a preset program (the preset temperature value, etc. are stored in the program, or it can also be manual), and adjusts the temperatures of the three local areas. When the liquid heat exchange system cannot meet the requirements, the gaseous heat exchange system also operates (or the liquid heat exchange system and the gaseous heat exchange system operate simultaneously). The gaseous heat exchange system exchanges heat with the liquid heat exchange system and the environment. The environment can be the atmospheric environment outside the vacuum processing equipment or other refrigeration equipment, etc. The gaseous environment heat exchanger of the gaseous heat exchange system can adjust its position through an extended pipeline, such as being placed in a place with a lower temperature, so as to utilize the temperature there.

[0063] In the heating mode, the liquid heat exchange system operates, and the liquid heating and cooling switching component acts to connect the liquid heating component (the first heater) to the liquid circulation system. The temperature sensors of the three local heat exchange systems of the liquid heat exchange system respectively detect the temperatures at three locations. The controller starts the liquid circulation pump, adjusts the main flow regulating valve and the three sub-flow control valves according to the received temperature signals and a preset program (the preset temperature value, etc. are stored in the program, or it can also be manual), and adjusts the temperatures of the three local areas; when it is detected that the external environmental temperature is higher than the set value, the gaseous heat exchange system also starts to operate. The gaseous environment heat exchanger of the gaseous heat exchange system can adjust its position through an extended pipeline, such as being placed in a place with a higher temperature, so as to utilize the temperature there.

[0064] The heat dissipation mode and the heating mode can be automatically switched according to the temperature detected by the temperature sensor.

[0065] The beneficial effects of the vacuum processing equipment with a temperature control system in Embodiment 1 of the present utility model are as follows: It has two heat exchange systems, namely a liquid heat exchange system and a gas heat exchange system. The liquid heat exchange system exchanges heat with the vacuum pumping main body, and the gas heat exchange system exchanges heat with the liquid heat exchange system and the environment respectively. Compared with a conventional vacuum pump with only a liquid heat exchange system, it can significantly improve the heat exchange efficiency and temperature control accuracy, so that the vacuum pump operates within the required temperature range; it is equipped with a controller, which can achieve automatic intelligent control; both the liquid heat exchange system and the gas heat exchange system have cold and heat sources, which can achieve heating and cooling, and the functions are more complete; the liquid heat exchange system has three local heat exchange systems. In addition to controlling the temperature of the pump chamber, it can also achieve pre-control of the inlet air temperature and post-control of the outlet air temperature. Pre-control of the inlet air temperature and post-control of the outlet air temperature; the three local heat exchange systems can operate independently; a vacuum sensor for detecting the vacuum degree in the container to be evacuated is provided, and the controller controls the rotational speed of the pump motor according to the vacuum sensor signal, and can reduce the rotational speed of the pump motor at an appropriate time, thereby reducing the load of the temperature control system; the vacuum processing equipment with a temperature control system in this embodiment realizes control of heat and cold, three different parts, and the rotational speed of the pump stator, and the functions are complete and comprehensive.

[0066] Embodiment 2

[0067] See Figure 2 , in this embodiment, the gas ambient heat exchanger (the third heat exchanger) and the forced convection component of the gas heat exchange system are moved to other positions through an extended pipeline, such as being placed in a place with a lower or higher temperature for heat exchange, so that the temperature of this place can be utilized.

[0068] As mentioned above, the above is only the specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that the present invention includes but is not limited to the content described in the above specific implementation manner. Any modification that does not deviate from the functional and structural principles of the present invention will be included in the scope of the claims.

Claims

1. A vacuum processing device with a temperature control system, characterized in that: The vacuum processing equipment with a temperature control system includes: A vacuum pumping main body; A liquid heat exchange system, including a first heat exchanger for heat exchange with the vacuum pumping main body, a liquid circulation pipeline, a liquid circulation pump, and a liquid working medium; A gaseous heat exchange system, including a second heat exchanger for heat exchange with the liquid heat exchange system, a gaseous circulation pipeline, a compressor, a gaseous working medium, and a third heat exchanger for heat exchange with the environment; A controller; Wherein, the liquid heat exchange system exchanges heat with the vacuum pumping main body under the control of the controller, and the gaseous heat exchange system exchanges heat with the liquid heat exchange system and the environment respectively under the control of the controller.

2. The vacuum processing equipment with a temperature control system according to claim 1, characterized in that: The liquid heat exchange system further includes a first heater, and / or, the gaseous heat exchange system further includes a second heater.

3. The vacuum processing equipment with a temperature control system according to claim 1, characterized in that: The vacuum pumping main body includes a pump chamber, the pump chamber has an air inlet and an air outlet, the vacuum processing equipment with a temperature control system further includes an intake pipeline connecting the air inlet and an exhaust pipeline connecting the air outlet, and the liquid heat exchange system includes three local heat exchange systems, and the three local heat exchange systems exchange heat with the pump chamber, the intake pipeline, and the exhaust pipeline respectively.

4. The vacuum processing equipment with a temperature control system according to claim 3, characterized in that: The three local heat exchange systems are in parallel.

5. The vacuum processing equipment with a temperature control system according to claim 4, characterized in that: The liquid heat exchange system includes a main pipeline, and each of the three local heat exchange systems includes a sub-pipeline connected to the main pipeline, a temperature sensor, and a flow control valve, and the controller controls each flow control valve according to the signals of the respective temperature sensors.

6. The vacuum processing equipment with a temperature control system according to claim 5, characterized in that: The three local heat exchange systems share the same liquid circulation pump; A main flow control valve is provided on the main pipeline.

7. The vacuum processing equipment with a temperature control system according to claim 1, characterized in that: The vacuum processing equipment with a temperature control system further includes a vacuum sensor provided at the air inlet of the vacuum pumping main body, the vacuum pumping main body includes a pump motor, and the controller controls the rotation speed of the pump motor according to the signal of the vacuum sensor.

8. The vacuum processing equipment with a temperature control system according to claim 1, characterized in that: The vacuum pumping main body includes a pump motor, and the compressor is driven by the pump motor.

9. The vacuum treatment equipment with a temperature control system according to claim 1, characterized in that: The second heat exchanger is a gas-liquid heat exchanger; and / or, The third heat exchanger is a gaseous environment heat exchanger; and / or, The gaseous heat exchange system further includes a gas temperature sensor; and / or, The gaseous heat exchange system further includes a solenoid valve for substance phase change; and / or, The gaseous heat exchange system further includes an extension pipeline.

10. The vacuum treatment equipment with a temperature control system according to claim 1, characterized in that: The vacuum processing equipment is a vacuum pump or a vacuum pump unit; and / or, The vacuum processing equipment with a temperature control system includes a support base, and the vacuum pumping main body, the liquid heat exchange system, the gaseous heat exchange system, and the controller are integrated on the support base.

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