Valve structure of cavity

Abstract

The utility model discloses a valve structure of a cavity, which comprises a valve port, a valve plate and a driving device, the valve port is arranged on a cavity body of a load locking cavity, the valve plate and the valve port are oppositely arranged, one side of the valve plate close to the valve port is provided with a sealing ring, and the driving device is arranged on the cavity body; the driving device can drive the valve plate to be close to or away from the valve port in the first direction perpendicular to the valve port so that the valve port can be closed or opened. When the valve plate is far away from the valve port, the driving device can drive the valve plate to do reciprocating motion in the second direction perpendicular to the first direction, so that the orthographic projection of the valve port in the first direction does not coincide with or coincide with the valve plate; the valve further comprises a sinking table arranged on the cavity, and when the valve plate is far away from the valve port, the valve plate is partially or completely located in the sinking table. The problems existing in an existing valve structure of a load locking cavity are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer manufacturing equipment, in particular to a valve structure of a chamber. Background Art

[0002] In a chemical vapor deposition (CVD) device, in order to minimize the influence of external particles on the process, increase the service life of the reaction chamber and improve production efficiency, it is necessary to avoid frequent switching of the reaction chamber between the vacuum and atmospheric states. Therefore, a load lock chamber is essential.

[0003] The load lock chamber is a transition chamber arranged between the wafer cassette and the reaction chamber. When it is in the atmospheric state, it is connected to the wafer cassette, and the wafer handling robot arm arranged in the load lock chamber transfers the wafers in the wafer cassette into the load lock chamber; when it is in the vacuum state, it is connected to the reaction chamber, and the wafer handling robot arm transfers the wafers in the load lock chamber into the reaction chamber. The above process is the process of wafers being introduced into the reaction chamber, and its reverse process will transfer the wafers that have completed thin film deposition in the reaction chamber back into the wafer cassette.

[0004] The opening and closing of the load lock chamber are realized through a valve structure. The existing valve structures are as Figure 12 and Figure 13 shown. The valve plate E of the existing valve structure is flipped by a link mechanism F driven by a cylinder to realize opening and closing. When performing the opening action, the upper part of the sealing ring of the valve plate E of the existing valve structure first leaves the existing cavity D of the load lock chamber, which easily causes uneven force distribution of the entire sealing ring, resulting in significant deformation in a local area of the sealing ring, directly affecting the sealing effect and greatly shortening the service life of the sealing ring; at the same time, the surface where the existing cavity D of the load lock chamber cooperates with the valve plate E of the existing valve structure is an inclined surface, with a large overall processing difficulty and high processing cost. Summary of the Invention

[0005] The utility model provides a valve structure of a chamber to overcome the problems existing in the valve structure of the existing load lock chamber.

[0006] To achieve the above object, the technical solution of the utility model is:

[0007] A valve structure of a chamber includes a valve port, a valve plate and a driving device. The valve port is opened on the cavity of the load lock chamber. The valve plate is arranged opposite to the valve port. A sealing ring is provided on the side of the valve plate close to the valve port. The driving device is arranged on the cavity;

[0008] The driving device can drive the valve plate to approach or move away from the valve port along a first direction perpendicular to the valve port to realize the closing or opening of the valve port;

[0009] When the valve plate is away from the valve port, the driving device can drive the valve plate to reciprocate in a second direction perpendicular to the first direction, so that the positive projection of the valve port in the first direction does not coincide with or coincides with the valve plate;

[0010] It further includes a sunk platform arranged on the cavity. When the valve plate is away from the valve port, the valve plate is partially or entirely located in the sunk platform.

[0011] Furthermore, the two driving devices are symmetrically arranged on both sides of the cavity, and both ends of the valve plate are respectively connected to the two driving devices.

[0012] Furthermore, the valve plate includes a valve plate body and a transmission plate detachably connected to the valve plate body. Both ends of the transmission plate are respectively connected to the two driving devices;

[0013] The valve plate body is arranged opposite to the valve port. A sealing ring groove is formed on the surface of the valve plate body opposite to the valve port, and a sealing ring is installed in the sealing ring groove.

[0014] Furthermore, the driving device includes a first cylinder, a second cylinder, a cylinder seat and a housing;

[0015] The housing is fixedly connected to the cavity. The second cylinder is fixedly connected to the housing. The piston rod of the second cylinder is fixedly connected to the cylinder seat. The first cylinder is fixedly connected to the cylinder seat. The piston rod of the first cylinder is fixedly connected to the valve plate;

[0016] The first cylinder can drive the valve plate to reciprocate in the first direction, and the second cylinder can drive the cylinder seat to reciprocate in the second direction.

[0017] Furthermore, it further includes two positioning sunk platforms, which are respectively arranged on both sides of the cavity;

[0018] The shape of the positioning sunk platform is adapted to the housing, and the housing is arranged in the positioning sunk platform.

[0019] Furthermore, a magnetic switch is installed on the first cylinder.

[0020] Furthermore, an air pipe joint is provided on the housing. The first cylinder and the second cylinder are connected to the air source through the air pipe joint and the air pipe connected to the air pipe joint.

[0021] Furthermore, a positioning protrusion is provided on the valve plate body, and a corresponding positioning groove is provided on the transmission plate.

[0022] Furthermore, the cross-section of the sealing ring groove is an inverted trapezoid.

[0023] Beneficial effects:

[0024] Different from the existing valve structure that realizes opening and closing through a linkage mechanism, a valve structure for a chamber provided by the present utility model drives a valve plate to reciprocate in a first direction through a driving device to realize the opening and closing of a valve port, enabling the load-locking chamber to communicate with or be isolated from the atmosphere. By driving the valve plate to reciprocate in a second direction through the driving device, the valve plate can avoid the wafer handling robot and not block the wafer handling robot, enabling the wafer handling robot to smoothly transfer wafers;

[0025] By making the valve plate move vertically relative to the valve port through the driving device, the sealing ring on the valve plate can be simultaneously away from the cavity, ensuring uniform force on the sealing ring, avoiding significant deformation in a local area, and enabling the surface of the cavity that cooperates with the valve plate to be processed into a flat surface instead of an inclined surface, reducing the processing difficulty of the cavity and saving processing costs;

[0026] In view of the fact that the load-locking chamber is adjacent to related components such as a wafer cassette in a chemical vapor deposition device, to reduce the influence of the valve structure on the internal layout of components such as the wafer cassette in the chemical vapor deposition device, a valve structure for a chamber provided by the present utility model significantly improves the space utilization efficiency by adding a counterbore on the cavity, ensuring that the valve plate can be partially or fully received in the counterbore, thereby effectively avoiding potential interference between the valve structure and components such as the wafer cassette. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0028] Figure 1 It is a schematic structural diagram of a valve structure for a chamber disclosed by the present utility model;

[0029] Figure 2 It is a schematic structural diagram of the cavity of a valve structure for a chamber disclosed by the present utility model;

[0030] Figure 3 It is a schematic structural diagram of a valve structure for a chamber disclosed by the present utility model with the cavity removed Figure 1 ;

[0031] Figure 4 It is a schematic structural diagram of a valve structure for a chamber disclosed by the present utility model with the cavity removed Figure 2 ;

[0032] Figure 5 It is a schematic structural diagram of a valve structure for a chamber disclosed by the present utility model with the cavity and cover removed;

[0033] Figure 6 Side view of the valve structure of a chamber of the present utility model, removing the cavity and the cover plate;

[0034] Figure 7 Schematic structural view of the valve plate of the valve structure of a chamber of the present utility model;

[0035] Figure 8 Top view of the valve plate of the valve structure of a chamber of the present utility model;

[0036] Figure 9 Schematic structural view of the drive plate of the valve structure of a chamber of the present utility model;

[0037] Figure 10 is Figure 8 C-C cross-sectional view of;

[0038] Figure 11 is Figure 8 B-B cross-sectional view of;

[0039] Figure 12 Schematic structural view of the existing valve structure;

[0040] Figure 13 Schematic structural view of the existing valve structure removing the existing cavity.

[0041] In the figure:

[0042] 1. Valve port;

[0043] 2. Valve plate; 201. Sealing ring groove; 202. Valve plate body; 203. Drive plate; 204. Positioning protrusion; 205. Positioning groove;

[0044] 3. Driving device; 301. First cylinder; 302. Second cylinder; 303. Cylinder seat; 304. Outer shell; 3041. Housing; 3042. Cover plate; 305. Magnetic switch; 306. Air pipe joint; 307. Electrical connector;

[0045] 4. Sealing ring;

[0046] 5. Positioning counterbore;

[0047] 6. Counterbore;

[0048] 7. Cylindrical pin;

[0049] A. Cavity; D. Existing cavity; E. Valve plate of the existing valve structure; F. Linkage mechanism. Specific implementation mode

[0050] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Apparently, the described embodiments are some but not all of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0051] This embodiment provides a valve structure for a chamber. As Figure 1 shown, it includes a valve port 1, a valve plate 2, and a driving device 3. The valve port 1 is opened on the cavity A of the load lock chamber. The valve plate 2 is disposed opposite to the valve port 1. As shown in 7, a sealing ring 4 is provided on the side of the valve plate 2 close to the valve port 1. The driving device 3 is disposed on the cavity A;

[0052] The driving device 3 can drive the valve plate 2 to approach or move away from the valve port 1 along a first direction perpendicular to the valve port 1 to achieve the closing or opening of the valve port 1. In actual use, the size of the sealing ring 4 needs to ensure that the orthographic projection of the valve port 1 along the first direction can be completely located within the sealing ring 4;

[0053] When the valve plate 2 moves away from the valve port 1, the driving device 3 can drive the valve plate 2 to reciprocate along a second direction perpendicular to the first direction, so that the orthographic projection of the valve port 1 along the first direction does not coincide with or coincides with the valve plate 2;

[0054] As Figure 2 shown, it further includes a counterbore 6 provided on the cavity A. When the valve plate 2 moves away from the valve port 1, the valve plate 2 is partially or entirely located within the counterbore 6;

[0055] In view of the fact that the load lock chamber is adjacent to related components such as a wafer cassette in a chemical vapor deposition device, to reduce the influence of the valve structure on the internal layout of components such as the wafer cassette in the chemical vapor deposition device, a valve structure for a chamber provided in this embodiment significantly improves the space utilization efficiency by adding a counterbore 6 on the cavity A, ensuring that the valve plate 2 can be partially or entirely received within the counterbore 6, thereby effectively avoiding potential interference between the valve structure and components such as the wafer cassette.

[0056] In actual use, when a wafer transfer is required between the wafer cassette and the load lock chamber, the driving device 3 drives the valve plate 2 to move away from the valve port 1 along the first direction, making the load lock chamber communicate with the atmosphere. Then, the driving device 3 drives the valve plate 2 to move downward along the second direction to avoid the wafer handling robot for transferring wafers;

[0057] When the load lock chamber needs to be isolated from the atmosphere, the driving device 3 drives the valve plate 2 to move upward in the second direction, and then the driving device 3 drives the valve plate 2 to approach the valve port 1 in the first direction, so that the load lock chamber is isolated from the atmosphere;

[0058] Different from the existing valve structure that realizes opening and closing through the link mechanism F, a valve structure of a chamber provided by the present invention realizes the opening and closing of the valve port 1 by driving the valve plate 2 to reciprocate in the first direction, so that the load lock chamber can be communicated with or isolated from the atmosphere. By driving the valve plate 2 to reciprocate in the second direction, the positive projection of the valve port 1 in the first direction does not coincide with the valve plate 2, so that the valve plate 2 can avoid the wafer handling robot and does not block the wafer handling robot, enabling the wafer handling robot to smoothly transfer the wafer;

[0059] By driving the driving device 3 to make the valve plate 2 move vertically relative to the valve port 1, the sealing ring 4 on the valve plate 2 can be simultaneously away from the cavity A, ensuring that the sealing ring 4 is uniformly stressed, avoiding significant deformation in a local area, and at the same time enabling the surface of the cavity A that cooperates with the valve plate 1 to be processed into a flat surface instead of an inclined surface, reducing the processing difficulty of the cavity A and saving processing costs.

[0060] In a specific embodiment, as Figure 1 and Figure 3 shown, the two driving devices 3 are symmetrically arranged on both sides of the cavity A, and both ends of the valve plate 2 are respectively connected to the two driving devices 3;

[0061] The two symmetrically arranged driving devices 3 drive the valve plate 2 at the same time, making the force on the valve plate 2 more uniform and the sealing effect of the sealing ring 4 better.

[0062] In a specific embodiment, as Figure 7 and Figure 8 shown, the valve plate 2 includes a valve plate body 202 and a transmission plate 203 detachably connected to the valve plate body 202, and both ends of the transmission plate 203 are respectively connected to the two driving devices 3;

[0063] The valve plate body 202 is arranged opposite to the valve port 1. As Figure 10 shown, a sealing ring groove 201 is formed on the surface of the valve plate body 202 opposite to the valve port 1, and a sealing ring 4 is installed in the sealing ring groove 201;

[0064] To ensure the sealing effect, the sealing ring 4 needs to be replaced regularly. The operating space between the valve plate 2 and the valve port 1 is small. To facilitate the replacement of the sealing ring 4, the valve plate body 202 and the transmission plate 203 are detachably connected by bolts, so that the sealing ring 4 can be disassembled together with the valve plate body 202.

[0065] In a specific embodiment, as Figure 5and Figure 6 As shown in Figure 6 , the driving device 3 includes a first cylinder 301, a second cylinder 302, a cylinder base 303 and a housing 304. In this embodiment, as Figure 4 shown in Figure 4 , the housing 304 includes a housing body 3041 and a cover plate 3042. The housing body 3041 and the cover plate 3042 are detachably connected by bolts. By removing the cover plate 3042, the first cylinder 301 and the second cylinder 302 arranged in the housing 304 can be overhauled;

[0066] The housing 304 is fixedly connected to the cavity A through a threaded fastener. The second cylinder 302 is fixedly connected to the housing 304 through a threaded fastener. The piston rod of the second cylinder 302 is fixedly connected to the cylinder base 303 through a threaded fastener. The first cylinder 301 is fixedly connected to the cylinder base 303 through a threaded fastener. The piston rod of the first cylinder 301 is fixedly connected to the transmission plate 203 of the valve plate 2 through a threaded fastener;

[0067] The first cylinder 301 can drive the valve plate 2 to reciprocate in the first direction, and the second cylinder 302 can drive the cylinder base 303 to reciprocate in the second direction;

[0068] In actual use, corresponding pin holes are provided on the housing 304 and the cavity A. As Figure 4 shown in Figure 4 , by inserting both ends of the cylindrical pin 7 with an interference fit with the pin holes into the two corresponding pin holes on the housing 304 and the cavity A respectively, the position accuracy of the housing 304 can be ensured.

[0069] The existing valve structure as Figure 12 and Figure 13 shown has a long transmission route for the link mechanism F, and the dimensional errors of each component and the clearances in the kinematic pairs will generate a large cumulative error, which is likely to cause insufficient motion accuracy. The wear and fatigue of each component during long-term use will greatly increase the cumulative error, resulting in the valve structure not closing tightly;

[0070] A valve structure for a chamber provided by the present utility model replaces the link mechanism F with the first cylinder 301 and the second cylinder 302, so that the cumulative error is only affected by the stroke errors of the first cylinder 301 and the second cylinder 302. The error source is single and controllable, and the motion accuracy of the driving device 3 is higher, and it is not easy to have the problem that the valve structure does not close tightly; when a failure occurs, the problem is easy to troubleshoot and the maintenance is more convenient. The repair can be completed by directly replacing the first cylinder 301 and / or the second cylinder 302.

[0071] In a specific embodiment, as Figure 2 shown in Figure 2 , it further includes two positioning sinks 5, and the two positioning sinks 5 are respectively arranged on both sides of the cavity A;

[0072] The shape of the positioning sunk platform 5 is adapted to the outer shell 304. The outer shell 304 is arranged in the positioning sunk platform 5. By providing the positioning sunk platform 5, the outer shell 304 can be quickly positioned on the cavity A, facilitating the disassembly, assembly and maintenance of the driving device 3.

[0073] In a specific embodiment, as Figure 5 and Figure 6 shown, a magnetic switch 305 is installed on the first cylinder 301;

[0074] In practical applications, an electrical connector 307 is provided on the outer shell 304. The driving device 3 is externally connected to a controller through an electric wire and the electrical connector 307. By providing the magnetic switch 305, the position of the first cylinder 301 can be accurately detected, enabling the controller to precisely control the stroke of the first cylinder 301.

[0075] In a specific embodiment, as Figure 5 and Figure 6 shown, an air pipe joint 306 is provided on the outer shell 304. The first cylinder 301 and the second cylinder 302 are connected to a gas source through the air pipe joint 306 and an air pipe connected to the air pipe joint 306 to ensure the normal use of the first cylinder 301 and the second cylinder 302.

[0076] In a specific embodiment, as Figure 8 shown, a positioning protrusion 204 is provided on the valve plate body 202. As Figure 9 shown, a corresponding positioning groove 205 is provided on the transmission plate 203;

[0077] In actual use, as Figure 10 shown, a pin hole is provided on the valve plate body 202. A positioning pin that is in interference fit with the pin hole is provided in the pin hole. The part of the positioning pin exposed from the pin hole forms the positioning protrusion 204;

[0078] The positioning protrusion 204 of the valve plate body 202 is inserted into the positioning groove 205 of the transmission plate 203 from above to achieve the quick positioning of the valve plate body 202 and the transmission plate 203.

[0079] In a specific embodiment, as Figure 11 shown, the cross-section of the sealing ring groove 201 is an inverted trapezoid, and the inverted trapezoid can ensure that the sealing ring 4 is firmly installed on the valve plate 2.

[0080] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A valve structure for a chamber, characterized in that, It includes a valve port (1), a valve plate (2) and a driving device (3). The valve port (1) is opened on the cavity (A) of the load locking chamber. The valve plate (2) is arranged opposite to the valve port (1). A sealing ring (4) is provided on the side of the valve plate (2) close to the valve port (1). The driving device (3) is arranged on the cavity (A). The driving device (3) can drive the valve plate (2) to approach or move away from the valve port (1) along a first direction perpendicular to the valve port (1) to realize the closing or opening of the valve port (1). When the valve plate (2) moves away from the valve port (1), the driving device (3) can drive the valve plate (2) to reciprocate along a second direction perpendicular to the first direction, so that the positive projection of the valve port (1) along the first direction does not coincide with or coincides with the valve plate (2). It further includes a sunk platform (6) arranged on the cavity (A). When the valve plate (2) moves away from the valve port (1), the valve plate (2) is partially or wholly located in the sunk platform (6).

2. The valve structure of a chamber according to claim 1, characterized in that, The two driving devices (3) are symmetrically arranged on both sides of the cavity (A). The two ends of the valve plate (2) are respectively connected to the two driving devices (3).

3. The valve structure of a chamber according to claim 1, wherein The valve plate (2) includes a valve plate body (202) and a transmission plate (203) detachably connected to the valve plate body (202). The two ends of the transmission plate (203) are respectively connected to the two driving devices (3). The valve plate body (202) is arranged opposite to the valve port (1). A sealing ring groove (201) is opened on the surface of the valve plate body (202) opposite to the valve port (1). The sealing ring (4) is installed in the sealing ring groove (201).

4. The valve structure of a chamber according to claim 2, characterized in that, The driving device (3) includes a first air cylinder (301), a second air cylinder (302), an air cylinder seat (303) and a housing (304). The housing (304) is fixedly connected to the cavity (A). The second air cylinder (302) is fixedly connected to the housing (304). The piston rod of the second air cylinder (302) is fixedly connected to the air cylinder seat (303). The first air cylinder (301) is fixedly connected to the air cylinder seat (303). The piston rod of the first air cylinder (301) is fixedly connected to the valve plate (2). The first air cylinder (301) can drive the valve plate (2) to reciprocate along the first direction. The second air cylinder (302) can drive the air cylinder seat (303) to reciprocate along the second direction.

5. The valve structure of a chamber according to claim 4, characterized in that, It further includes two positioning sunk platforms (5). The two positioning sunk platforms (5) are respectively arranged on both sides of the cavity (A). The shape of the positioning sunk platform (5) is adapted to the housing (304). The housing (304) is arranged in the positioning sunk platform (5).

6. The valve structure of a chamber according to claim 4, characterized in that, A magnetic switch (305) is installed on the first air cylinder (301).

7. The valve structure of a chamber according to claim 4, characterized in that, An air pipe joint (306) is provided on the housing (304). The first air cylinder (301) and the second air cylinder (302) are connected to the air source through the air pipe joint (306) and an air pipe connected to the air pipe joint (306).

8. The valve structure of a chamber according to claim 3, characterized in that, A positioning protrusion (204) is provided on the valve plate body (202). A corresponding positioning groove (205) is provided on the transmission plate (203).

9. The valve structure of a chamber according to claim 3, characterized in that, The cross-section of the sealing ring groove (201) is an inverted trapezoid.

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