Probe arm adapter of high and low temperature probe station

Abstract

The utility model provides a probe arm adapter of a high and low temperature probe station, a first connecting block and a second connecting block are arranged at an interval, the first connecting block and the second connecting block are respectively provided with a combination part and an external connection part, and the combination parts of the first connecting block and the second connecting block are at least partially arranged oppositely and are elastically connected through an elastic sheet. The external connection part of the first connection block is provided with a probe connection hole and a cold sink connection hole, and the external connection part of the second connection block is provided with a probe arm connection hole, so that the relative position of the probe and the detected object can be kept stable when the temperature changes, and the accuracy of the detection result is ensured.

Description

Technical Field

[0001] The utility model belongs to the technical field of physics and semiconductor testing, and relates to probe station testing equipment. Specifically, it relates to a probe arm adapter for a high and low temperature probe station. Background Technique

[0002] Probe station testing equipment is a widely used non-destructive testing method, which can be used for testing in the fields of physics and semiconductors. In some cases, it is necessary to test the performance of a sample to be tested at a specific temperature to further understand the performance of the sample. At this time, it is necessary to cool or heat the sample to be tested to make its temperature reach the required temperature for testing.

[0003] In actual use, generally, after the object to be tested is fixed and the temperature of the sample is stable, the probe is moved so that the probe contacts the corresponding position of the object to be tested, and signals are transmitted to or received from the object to be tested by the probe, and then the performance of the object to be tested is analyzed. The applicant found that in the actual use process, it is desired that the sample temperature changes within a relatively wide temperature range, and the temperature of the corresponding probe arm will change accordingly. Due to thermal expansion and contraction, the shapes of the object to be tested and corresponding components such as the probe may change, and the relative position between the probe tip and the surface of the object to be tested is likely to change during the detection process, affecting the needle insertion quality of the probe and thus interfering with the detection process.

[0004] The above information disclosed in the background section is only used to enhance the understanding of the background of the present invention, and thus may include information that does not constitute the prior art known to those of ordinary skill in the art. Content of the Utility Model

[0005] In view of the problem that the variable temperature process in the prior art easily interferes with the needle insertion of the probe, the utility model provides a probe arm adapter for a high and low temperature probe station. The adapter includes a first connection block, a second connection block, and a spring piece. The first connection block and the second connection block are arranged at intervals. The first connection block and the second connection block are both provided with a combination part and an external connection part. The combination parts of the first connection block and the second connection block are at least partially oppositely arranged. The combination parts of the first connection block and the second connection block are elastically connected by the spring piece. The external connection part of the first connection block is provided with a probe connection hole and a cold sink connection hole, and the external connection part of the second connection block is provided with a probe arm connection hole.

[0006] In one possible implementation, the combination part of the first connection block is provided with a sensor connection hole.

[0007] In one possible implementation, the first connection block and the second connection block are L-shaped.

[0008] In one possible implementation, the elastic piece is symmetric along the length direction of the adapter.

[0009] In one possible implementation, the combined part of the elastic piece and the first connecting block is connected at at least two positions, and the combined part of the elastic piece and the second connecting block is connected at at least two positions.

[0010] In one possible implementation, the elastic piece is a C-shaped elastic piece. At least two C-shaped elastic pieces can be provided, and the openings of at least two of the C-shaped elastic pieces are arranged back to back.

[0011] In one possible implementation, every two C-shaped elastic pieces with their openings arranged back to back form an elastic piece group, and the adapter is provided with two groups of such elastic piece groups.

[0012] In one possible implementation, the elastic piece is a wavy elastic piece. The wavy elastic piece can be made symmetric along the length direction of the adapter.

[0013] In one possible implementation, the elastic piece is a curved elastic piece. At least 3 curved elastic pieces can be provided. The 3 curved elastic pieces as a whole can be made symmetric along the length direction of the adapter.

[0014] In one possible implementation, the outer connecting parts of the first connecting block and the second connecting block are arranged opposite to each other.

[0015] In one possible implementation, the combined parts of the first connecting block and the second connecting block are at least partially arranged facing each other.

[0016] The present utility model has at least the following beneficial effects: By utilizing the deformation and restoration characteristics of the elastic piece, in a high and low temperature probe station device, when the object to be tested or the probe arm deforms under the influence of temperature, the elastic piece can adapt to this deformation and cause a relative position change between the connecting blocks. When the deformation subsides, the elastic piece can make the connecting blocks return to their original relative positions, so that in the high and low temperature probe station device, the probe and the object to be tested can still maintain the stability of the relative position during temperature changes, ensuring the accuracy of the detection result. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 Schematic diagram of a probe arm adapter provided by an embodiment of the present application;

[0018] Figure 2 For Figure 1 Schematic diagram of the probe arm adapter from another angle of the illustrated embodiment;

[0019] Figure 3 Schematic diagram of a probe arm adapter provided by another embodiment of the present application;

[0020] Figure 4 Schematic diagram of a probe arm adapter provided for another embodiment of the present application;

[0021] Figure 5 Schematic diagram of the usage mode of a probe arm adapter provided for an embodiment of the present application.

[0022] Description of reference numerals:

[0023] 100, the first connection block; 110, the external connection part; 120, the combined part; 130, the probe connection hole; 140, the sensor connection hole; 150, the setscrew hole; 160, the cold sink connection hole; 200, the second connection block; 210, the external connection part; 220, the combined part; 230, the probe arm connection hole; 300, the elastic piece; 310, the C-shaped elastic piece; 320, the curved elastic piece; 330, the wavy elastic piece; 400, the probe assembly; 410, the probe; 420, the data transmission lead; 500, the cold sink; 600, the temperature sensor; 700, the probe arm. Detailed implementation manners

[0024] As described above, when testing the performance of a DUT at a specific temperature, the relative position between the probe and the DUT is likely to change due to temperature variations, thereby affecting the effectiveness of the detection.

[0025] In view of this, the embodiments of the application provide a probe arm adapter for a high and low temperature probe station. This adapter is disposed in the probe arm. By utilizing the characteristics of the deformation and restoration of the elastic piece, when components such as the DUT or the probe arm generate deformation, it can accommodate this deformation and keep the relative position between the probe and the DUT unchanged. When the deformation decreases, it can also enable the connection block to return to its original relative position to ensure the accuracy of the detection.

[0026] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. It should be noted that the accompanying drawings are all in a very simplified form and use non-precise ratios, and are only used to conveniently and clearly assist in explaining the objectives of the embodiments of the present invention.

[0027] The present application provides a probe arm adapter, which can be used in a high and low temperature probe station. This adapter can be used in the probe arm to achieve the connection between the probe arm and other components, especially the connection between the probe arm and the probe assembly. Of course, it can also be the connection between probe arms, as long as one side of this adapter is connected to a probe arm and the other side is connected to a probe assembly. The connection referred to here is mainly a structural connection.

[0028] The adapter includes a first connection block 100, a second connection block 200, and a spring piece 300. The first connection block 100 and the second connection block 200 are arranged at intervals so that it is difficult for them to collide with each other when their relative positions change. The connection blocks 100 and 200 are connected by the spring piece 300 so that a certain relative position change is allowed between the connection blocks 100 and 200, and the original relative position can be restored under certain conditions. The relative position change referred to here can be caused by translation between the connection blocks 100 and 200, or by rotation between the connection blocks 100 and 200, or by the combined action of translation and rotation between the connection blocks 100 and 200. In use, the situation of the combined action of translation and rotation is relatively common, and in some setting methods, the situation of translation or rotation alone can also occur.

[0029] Please refer to Figures 1 to 5 , as a feasible implementation manner, the first connection block 100 and the second connection block 200 are both provided with a combination part and an external connection part. The combination parts 120 and 220 of the first connection block 100 and the second connection block 200 are at least partially oppositely arranged to facilitate the arrangement of the spring piece 300 between the combination parts 120 and 220. The combination parts 120 and 220 of the first connection block 100 and the second connection block 200 are elastically connected by the spring piece 300. Specifically, one spring piece 300 can be connected to the combination parts 120 and 220 of the first connection block 100 and the second connection block 200 at the same time. For the connection manner between the spring piece 300 and the connection blocks 100 and 200, it is mainly a fixed connection between the two. Specifically, it can be connected by means of screw connection, welding, clamping, plugging, riveting, bonding or fastener connection, etc.

[0030] The combination parts 120 and 220 of the first connection block 100 and the second connection block 200 can be at least partially arranged opposite to each other so that the mutually opposite combination parts 120 and 220 are parallel to each other to facilitate the installation and arrangement of the spring piece 300.

[0031] The external connection part 110 of the first connection block 100 is provided with a probe connection hole 130 and a cold sink connection hole 160. The probe connection hole 130 is used to connect the probe assembly 400, and the cold sink connection hole 160 is used to connect the cold sink 500.

[0032] Please refer to Figure 5 , which shows a feasible implementation manner.

[0033] Between the probe connection hole 130 and the probe assembly 400, it can be a direct connection or a transfer structure can be further provided to meet the corresponding installation requirements. The probe connection hole 130 mainly connects and fixes the probe assembly 400 from a physical structure. Correspondingly, the connection between the probe connection hole 130 and the probe assembly 400 can be a threaded connection, welding, snap connection, plug connection, riveting, bonding or fastener connection. Please refer to Figures 1 to 5 , which shows a feasible implementation. Among them, the probe assembly 400 is provided with a plug-in structure, and the plug-in structure is inserted into the probe connection hole 130. At the same time, a set screw hole 150 is provided on the external connection part 110 of the first connection block 100. The set screw hole 150 penetrates from the outside of the external connection part 110 to the probe connection hole 130. When the plug-in structure of the probe assembly 400 is located in the probe connection hole 130, a set screw can be installed in the set screw hole 150 to tighten the plug-in structure of the probe assembly 400, so as to further fix the probe assembly 400 to the first connection block 100.

[0034] The cold sink 500 is a component for cold transfer, which can absorb the heat generated by an object or provide cooling for an object. In a high and low temperature probe station device, a cold source is usually provided to cool the environment and the object under test. During this process, the cold quantity can be further transferred to the probe assembly 400 through the cold sink 500 to control the temperature of the probe assembly 400 and reduce the influence of temperature change on the probe assembly 400. Specifically, in some cases, the temperature of the probe 410 in the probe assembly 400 can be controlled to be close to the temperature of the object under test, so as to prevent the temperature distribution of the probe 410 and the probe arm assembly from changing and causing thermal deformation when the probe 410 contacts the object under test. In addition, in some cases, when the temperature of the object under test is relatively high, the probe assembly may be heated by the temperature of the object under test. The cold quantity is transferred to the probe assembly 400 through the cold sink 500 to reduce the temperature of the probe assembly 400, so as to avoid damage to the probe assembly 400 due to heat.

[0035] Please refer to Figure 2 , which shows a feasible connection method of the cold sink 500. Among them, the cold sink 500 is connected through the cold sink connection hole 160. The cold sink 500 is connected to a preset cold source. The preset cold source can be either a device that provides cold quantity or other components related to temperature change in the high and low temperature probe station device. In the adapter provided by the present invention, the cold sink 500 is connected to the external connection part 110 of the first connection block 100, and the probe assembly 400 is also connected to the external connection part 110 of the first connection block 100, so that the cold sink 500 is close to the probe assembly 400, greatly reducing the temperature transfer path between the cold sink 500 and the probe assembly 400 and improving the temperature adjustment efficiency of the probe assembly 400.

[0036] The external connection part 210 of the second connection block 200 is provided with a probe arm connection hole 230, and the probe arm connection hole 230 is connected to the probe arm 700. Similarly, the connection between the probe arm connection hole 230 and the probe arm 700 can be a threaded connection, welding, snap connection, plug connection, riveting, bonding or fastener connection. In a high and low temperature probe station, the probe arm 700 can generally be connected to a probe base, and the probe base drives the movement of the probe arm 700, thereby driving the movement of the probe assembly 400.

[0037] Please refer to Figure 5 , and continue the description. When the probe 410 of the probe assembly 400 contacts the object under test, if components such as the object under test and the probe arm 700 are in an environment with temperature changes, when the temperature changes, the elastic piece in the adapter allows a certain relative displacement between the probe assembly 400 and the probe arm 700. That is to say, when the probe 410 contacts the object under test, at least one of the probe assembly 400, the probe arm 700 and the object under test may deform when the temperature changes, causing the elastic piece 300 to deform and the relative position between the probe 410 and the object under test to remain unchanged. At the same time, when the probe 410 is lifted or the temperature is restored, the deformation of the elastic piece 300 is restored to restore the original positional relationship between the probe assembly 400 and the probe arm 700; the interval setting between the first connection block 100 and the second connection block 200 reserves a certain moving space between the first connection block 100 and the second connection block 200, so as to keep the probe 410 in contact with the object under test, and at the same time, the contact position between the probe 410 and the object under test can be kept unchanged by setting the position of the connection block.

[0038] For the probe assembly 400, in some cases, a data transmission lead 420 can also be set to connect the probe assembly 400 to an external data transceiver device, so as to facilitate signal transmission and reception between the probe 410 and the object under test. Of course, the probe assembly 400 can also use a non-wired method for data transmission. In this case, special settings need to be made for the probe assembly 400, for example, adding corresponding power supplies, data transceiver devices, etc.

[0039] When adjusting the temperature of the probe assembly 100 through the cold sink 500, it can be achieved by controlling the temperature or heat transfer between the cold sink 500 and the probe assembly 100. In some cases, a temperature sensor 600 can be further set to monitor the adjustment or change of temperature. Please refer to Figure 1 , a sensor can also be set on the first connection block 100. Correspondingly, a sensor connection hole 140 can be set on the first connection block 100. As a feasible implementation manner, the sensor connection hole 140 can be set in the combination part 120. The sensor 600 monitors the temperature of the first connection block 100, and then obtains or calculates the temperature of the probe assembly 400.

[0040] Please refer to Figures 1 to 5 As a feasible way, the first connecting block 100 and the second connecting block 200 are L-shaped. The two L-shaped connecting blocks 100 and 200 can be placed in a centrosymmetric form so that the overall shape of the adapter is more regular. Please refer to Figures 1 to 5 In addition to using the two L-shaped connecting blocks 100 and 200, the outer connecting parts 110 of the first connecting block 100 and the second connecting block 200 can be arranged opposite to each other. Combining with the combined parts 120 and 220 arranged opposite to each other, a more regular shape can also be formed. When the shape of the adapter is more regular, it is easier to store and retrieve.

[0041] The elastic piece 300 is symmetric along the length direction of the adapter. Correspondingly, when the elastic piece 300 deforms, based on at least one symmetric plane along the length direction of the probe arm 700, the acting forces of the elastic piece 300 on the connecting blocks 100 and 200 on both sides of the symmetric plane are symmetric, avoiding causing the connecting block 300 to rotate circumferentially along the probe arm 700. In Figure 5 In the shown embodiment, it can be regarded as looking directly at the aforementioned symmetric plane. At this time, when the elastic piece 300 deforms, the adapter will not twist, ensuring the controllability of the position of the probe assembly 400.

[0042] Please refer to Figures 1 to 4 The elastic piece 300 is connected to the combined parts 120 and 220 of the first connecting block 100 and the second connecting block 200 at at least two positions. The at least two positions mentioned here are mainly two positions in the length direction of the adapter to improve the overall stability of the adapter when the elastic piece 300 deforms. In addition, the at least two positions mentioned here can also be arranged along the direction perpendicular to the length direction of the adapter. For example, the connecting positions of the elastic pieces are arranged on both sides of the adapter to avoid the adapter from twisting.

[0043] Please refer to Figures 1 to 4 which shows several shapes of the elastic piece 300. Among them, the aforementioned elastic piece 300 can be either a single elastic piece 300 or a combination of multiple elastic pieces 300, and can be selected and set accordingly according to actual needs.

[0044] Specifically, please refer to Figure 1 、 Figure 2, a solution using C-shaped shrapnel 310 is shown. Among them, at least two C-shaped shrapnels 310 are provided, and the openings of the C-shaped shrapnels 310 face the length direction of the adapter, so as to allow relative position changes between the two connecting blocks 100 and 200, and make the relative position changes as much as possible in the plane where the length direction of the adapter is located. More specifically, the two C-shaped shrapnels 310 can be arranged back to back. In some cases, the mouths of the two C-shaped shrapnels 310 can be arranged back to back, and the two are connected to form a shrapnel similar to an X shape as a shrapnel group. The shrapnels can be used in groups, or the shrapnel groups and single shrapnels can be used in any combination, or multiple shrapnels can be used in combination. Figures 1 to 2 In the shown embodiment, two X-shaped shrapnel groups are provided, and the two shrapnel groups are arranged along the length direction of the adapter.

[0045] For the way of forming a shrapnel group from shrapnels, it can either be fixed by other devices or directly connected between the two, and can be selected according to actual needs.

[0046] Please refer to Figure 4 , a specific way of using a single shrapnel 300 to connect the connecting blocks 100 and 200 is shown. Among them, the shrapnel 300 is a wavy shrapnel 330. The high and low positions of the wavy shrapnel 330 are respectively connected to the first connecting block 100 and the second connecting block 200, so as to realize a relatively controllable position change between the two connecting blocks 100 and 200 by using one shrapnel 300. Of course, in order to further ensure the controllability of the position change, the wavy shrapnel 330 can be symmetric along the length direction of the adapter, and at least two connection positions are respectively arranged between the wavy shrapnel 330 and the connecting blocks 100 and 200.

[0047] Please refer to Figure 3 , a form of using shrapnels 300 of other shapes is shown. Among them, the shrapnel 300 is a curved shrapnel 320. One end of the curved shrapnel 320 is connected to the combination part 120 of the first connecting block 100, and the other end is connected to the combination part 220 of the second connecting block 200. Of course, in order to further ensure the controllability of the position change, at least three curved shrapnels 320 can be provided, the curved shrapnels 320 are symmetric along the length direction of the adapter, and at least two connection positions are respectively arranged between the curved shrapnels 320 and the connecting blocks 100 and 200.

[0048] The basic principles, main features and advantages of the present utility model have been shown and described above. Therefore, the above description is only an embodiment of the present utility model. Those skilled in the art should understand that the present utility model is not limited by the above embodiments. What is described in the above embodiments and the specification is only the principle of the present utility model. Without departing from the spirit and scope of the present utility model, the present utility model also includes various equivalent changes and improvements, and these changes and improvements will all fall within the scope of the present utility model claimed.

Claims

1. A probe arm adapter for a high and low temperature probe station, characterized in that: The adapter includes a first connection block, a second connection block, and a spring piece. The first connection block and the second connection block are arranged at intervals. The first connection block and the second connection block are both provided with a combination part and an external connection part. The combination parts of the first connection block and the second connection block are at least partially oppositely arranged. The combination parts of the first connection block and the second connection block are elastically connected by the spring piece. The external connection part of the first connection block is provided with a probe connection hole and a cold sink connection hole. The external connection part of the second connection block is provided with a probe arm connection hole.

2. The probe arm adapter of a high and low temperature probe station according to claim 1, characterized in that: The combination part of the first connection block is provided with a sensor connection hole.

3. The probe arm adapter of a high and low temperature probe station according to claim 1, characterized in that: The first connection block and the second connection block are L-shaped.

4. The probe arm adapter of a high and low temperature probe station according to claim 1, characterized in that: The spring piece is symmetric along the length direction of the adapter.

5. The probe arm adapter of a high and low temperature probe station according to claim 1, characterized in that: The spring piece is connected to the combination part of the first connection block at at least two positions, and the spring piece is connected to the combination part of the second connection block at at least two positions.

6. The probe arm adapter of a high and low temperature probe station according to claim 5, characterized in that: The spring piece is a C-shaped spring piece, and at least two C-shaped spring pieces are provided.

7. The probe arm adapter of a high and low temperature probe station according to claim 6, characterized in that: Every two C-shaped spring pieces with opposite openings are used as a spring piece group, and two groups of spring piece groups are provided on the adapter.

8. The probe arm adapter of a high and low temperature probe station according to claim 5, characterized in that: The spring piece is a corrugated spring piece.

9. The probe arm adapter of a high and low temperature probe station according to claim 1, characterized in that: The external connection parts of the first connection block and the second connection block are oppositely arranged.

10. The probe arm adapter of a high and low temperature probe station according to claim 1, characterized in that: The combination parts of the first connection block and the second connection block are at least partially directly opposite.

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