Detachable thin film assembly and photomask plate

Abstract

The utility model provides a detachable thin film assembly and a photomask, and relates to the technical field of semiconductor processing. The detachable thin film assembly comprises a first frame, a second frame and a protective film, the first frame is used for being fixed to a mask plate body, the protective film is tightened and fixed to the second frame, and the second frame is detachably connected with the first frame. And when the second frame is connected with the first frame, the protective film is fixed above the mask plate body through the first frame and the second frame to protect the mask plate body. When the mask plate body needs to be repaired, the second frame is detached from the first frame, and the protective film can be removed, so that the in-film area of the mask plate body is exposed for repairing. And after repairing is completed, the second frame with the protective film is installed on the first frame again. According to the detachable thin film assembly, the production risk and the operation difficulty are reduced, and the error-tolerant rate is better. And meanwhile, the production efficiency can be improved, and the production cost is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor processing, and more particularly, to a detachable thin film component and a photomask template. Background Art

[0002] The lithography process is an important step in semiconductor device manufacturing. It uses exposure and development to engrave geometric graphic structures on a photoresist layer, and then transfers the patterns on the photomask template to a substrate through an etching process. The photomask template must ensure good quality in order to form perfect images through repeated exposure. However, during the use of the photomask template, there are many possible sources of damage to the photomask template, such as chromium peeling, surface scratches, electrostatic discharge, and dust particles. If these damages occur in the key areas of the photomask, it will damage the circuit and cause imaging defects.

[0003] To protect the photomask template, a protective film is usually fixed on the surface of the photomask template by gluing, so as to isolate the photomask template from external damage sources. However, after the photomask template is laminated with the film, if the photomask template needs to be repaired, a series of operations such as film removal, degumming, cleaning, measurement, and inspection are required. This not only seriously affects the product shipment, causes waste of the protective film, but also may cause the scrapping of the photomask template during film removal. Summary of the Utility Model

[0004] The purpose of the present application is to provide a detachable thin film component and a photomask template, which can improve the production capacity of the machine tool and reduce production risks and costs, aiming at the deficiencies in the above-mentioned prior art.

[0005] To achieve the above purpose, the technical solutions adopted in the embodiments of the present application are as follows:

[0006] On the one hand, an embodiment of the present application provides a detachable thin film component, which is configured on a photomask body and includes: a first frame, a second frame, and a protective film. The first frame is used to be fixed on the photomask body, the protective film is tensioned and fixed on the second frame, and the second frame is detachably connected to the first frame.

[0007] Optionally, a card slot is provided on one of the first frame and the second frame, and a buckle is provided on the other. The buckle is in snap-fit connection with the card slot.

[0008] Optionally, the buckle includes a first clamping portion and a second clamping portion. One end of the first clamping portion is connected to the first frame or the second frame, and the opposite end is connected to the second clamping portion. A baffle is provided at the notch of the card slot, and the baffle partially blocks the notch of the card slot. The second clamping portion can slide in the card slot and be completely exposed outside the baffle.

[0009] Optionally, the length of the first clamping portion is greater than or equal to the thickness of the baffle.

[0010] Optionally, the number of card slots and buckles is multiple, and the multiple card slots and multiple buckles correspond one by one. Some buckles are located on the first side of the protective film, and some buckles are located on the second side of the protective film, and the second side is opposite to the first side.

[0011] Optionally, both the first frame and the second frame are annular, and at least part of the orthographic projections of the first frame and the second frame on the mask body overlap.

[0012] Optionally, the edges of the orthographic projections of the first frame and the second frame on the mask body completely overlap.

[0013] Optionally, the edge of the orthographic projection of the first frame on the mask body coincides with the edge of the mask body or is located within the edge of the mask body.

[0014] Optionally, the surface of the second frame fits with the surface of the first frame.

[0015] On the other hand, an embodiment of the present application provides a photomask, including a mask body and a detachable film assembly as described in any one of the above, and the first frame of the detachable film assembly is fixed on the mask body.

[0016] The beneficial effects of the present application include:

[0017] The present application provides a detachable film assembly configured on a mask body, including: a first frame, a second frame and a protective film. The first frame is used to be fixed on the mask body, the protective film is tensioned and fixed on the second frame, and the second frame is detachably connected to the first frame. When the second frame is connected to the first frame, the protective film is fixed above the mask body through the first frame and the second frame to protect the mask body. When the area (the area inside the film) on the mask body that is protected by the protective film needs to be repaired, the second frame is detached from the first frame, and then the protective film can be removed, so that the area inside the film of the mask body is exposed for repair. After the repair is completed, the second frame with the protective film is installed back on the first frame again. When removing the protective film of the detachable film assembly, only the second frame needs to be removed from the first frame, and there is no need to perform a series of operations such as degumming, cleaning, measuring, and inspecting, which reduces the production risk and operation difficulty and has a better error tolerance rate. At the same time, it can also improve production efficiency and reduce production costs. Description of the Drawings

[0018] To more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required for the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and thus should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0019] Figure 1 One of the structural schematic diagrams of the photomask template provided by the embodiments of the present application;

[0020] Figure 2 Another structural schematic diagram of the photomask template provided by the embodiments of the present application;

[0021] Figure 3 The structural schematic diagram of the mask body and the first frame provided by the embodiments of the present application;

[0022] Figure 4 The structural schematic diagram of the second frame and the protective film provided by the embodiments of the present application;

[0023] Figure 5 The disassembly schematic diagram of the detachable film assembly provided by the embodiments of the present application.

[0024] Icons: 10 - detachable film assembly; 11 - first frame; 12 - second frame; 13 - protective film; 14 - card slot; 15 - buckle; 151 - first clamping portion; 152 - second clamping portion; 16 - baffle; 20 - mask body; 30 - photomask template; A - first direction; B - second direction. Detailed implementation manners

[0025] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. Usually, the components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the present application to be protected, but only represents the selected embodiments of the present application. It should be noted that, without conflict, the various features in the embodiments of the present application can be combined with each other, and the combined embodiments are still within the protection scope of the present application.

[0027] It should be noted that: similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0028] In the description of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of this application is usually placed during use. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application. In addition, the terms "first", "second", "third", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0029] In the description of the present application, it should also be noted that unless otherwise clearly specified and limited, the terms "arranged", "installed", "connected", "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0030] On the one hand of the embodiments of the present application, please refer to Figure 1 and Figure 2 , a detachable film assembly 10 is provided, which is configured on the mask version body 20 for protecting the mask version body 20. The detachable film assembly 10 includes: a first frame 11, a second frame 12, and a protective film 13. The first frame 11 is used to be fixed on the mask version body 20, the protective film 13 is tensioned and fixed on the second frame 12, and the second frame 12 is detachably connected to the first frame 11.

[0031] The surface of the mask version body 20 is divided into a graphic area and a non-graphic area, and the pattern to be transferred by the lithography process is located in the graphic area. In order to improve the protection effect, the protective film 13 should completely cover the graphic area on the mask version body 20. In addition, in order to avoid the first frame 11 and the second frame 12 affecting the transfer of the pattern on the mask version body 20 during lithography, the edges of the orthographic projections of the first frame 11 and the second frame 12 on the mask version body 20 should be located outside the graphic area respectively, that is, located in the non-graphic area.

[0032] It should be noted that the orthographic projection of the first frame 11 on the mask body 20 refers to taking the surface of the mask body 20 where the first frame 11 is set as the projection plane, and using parallel projection rays to project the first frame 11 onto the projection plane along the direction perpendicular to the projection plane. The orthographic projection of the second frame 12 on the mask body 20 refers to taking the surface of the mask body 20 where the first frame 11 is set as the projection plane, and using parallel projection rays to project the second frame 12 onto the projection plane along the direction perpendicular to the projection plane. It can be understood that the projection plane is also the surface on the mask body 20 where the pattern is engraved.

[0033] The above-mentioned detachable film assembly 10 includes a first frame 11 and a second frame 12 that are detachably connected. The first frame 11 is fixed on the mask body 20, and a protective film 13 is provided on the second frame 12. When the second frame 12 is connected to the first frame 11, the protective film 13 is fixed above the mask body 20 through the first frame 11 and the second frame 12 to protect the mask body 20. When the area (the area inside the film) on the mask body 20 protected by the protective film 13 needs to be repaired, the second frame 12 is detached from the first frame 11, and then the protective film 13 can be removed, so that the area inside the film of the mask body 20 is exposed for repair. After the repair is completed, the second frame 12 with the protective film 13 is installed back on the first frame 11 again.

[0034] When the above-mentioned detachable film assembly 10 removes the protective film 13, only the second frame 12 needs to be removed from the first frame 11, without performing a series of operations such as degumming, cleaning, measuring, and inspecting, reducing the production risk and operation difficulty, and having a better error tolerance rate. At the same time, it can also improve production efficiency and reduce production costs.

[0035] In order to improve the sealing performance of the detachable film assembly 10, optionally, when the second frame 12 is fixed on the first frame 11, the surface of the second frame 12 fits with the surface of the first frame 11. Thereby preventing external damage sources from damaging the mask body 20 through the gap between the second frame 12 and the first frame 11.

[0036] Optionally, please refer to Figure 3 and Figure 4 , both the first frame 11 and the second frame 12 are annular, and at least part of the orthographic projections of the first frame 11 and the second frame 12 on the mask body 20 overlap.

[0037] The first frame 11 is annular and can surround and enclose the graphic area on the mask body 20 for protection. The second frame 12 is annular to be adapted to the first frame 11, facilitating connection and fixation with the first frame 11, and easily forming a seal between the first frame 11 and the second frame 12.

[0038] The orthographic projection of the first frame 11 on the mask body 20 completely coincides or partially coincides with the orthographic projection of the second frame 12 on the mask body 20. Thus, a detachable connection and sealing between the two can be achieved within the region where the projections of the first frame 11 and the second frame 12 coincide.

[0039] Furthermore, the edges of the orthographic projections of the first frame 11 and the second frame 12 on the mask body 20 completely coincide to improve the stability and sealing performance of the connection between the first frame 11 and the second frame 12.

[0040] Optionally, please refer to Figure 3 , the edge of the orthographic projection of the first frame 11 on the mask body 20 coincides with the edge of the mask body 20 or is located within the edge of the mask body 20. Thus, it is possible to prevent the edge of the first frame 11 from exceeding the edge of the mask body 20 and further occupying more space.

[0041] Optionally, please refer to Figure 3 and Figure 4 , a clamping groove 14 is provided on one of the first frame 11 and the second frame 12, and a clamping buckle 15 is provided on the other. The clamping buckle 15 is in clamping engagement with the clamping groove 14.

[0042] When the clamping buckle 15 is engaged with the clamping groove 14, the second frame 12 is fixed on the first frame 11, and the protective film 13 on the second frame 12 protects the mask body 20. When the clamping buckle 15 is disengaged from the clamping groove 14, the second frame 12 is separated from the first frame 11, and the protective film 13 is removed, so that the mask body 20 can be repaired. The detachable connection between the second frame 12 and the first frame 11 is realized by the cooperation of the clamping buckle 15 and the clamping groove 14, and the operation is simple and fast.

[0043] Figure 3 and Figure 4 In the embodiments shown in

[0044] Furthermore, the clamping groove 14 and the clamping buckle 15 are respectively arranged on the surfaces of the first frame 11 and the second frame 12 that are close to each other, so as to facilitate the clamping and fixing of the first frame 11 and the second frame 12.

[0045] Optionally, the buckle 15 includes a first clamping portion 151 and a second clamping portion 152. One end of the first clamping portion 151 is connected to the first frame 11 or the second frame 12, and the opposite end is connected to the second clamping portion 152, thereby forming an L-shaped buckle 15. A baffle 16 is provided at the notch of the slot 14. The baffle 16 blocks part of the notch of the slot 14, and the second clamping portion 152 can slide in the slot 14 and be completely exposed from the baffle 16.

[0046] It can be understood that when the buckle 15 is provided on the first frame 11, the end of the first clamping portion 151 is connected to the first frame 11; when the buckle 15 is provided on the second frame 12, the end of the first clamping portion 151 is connected to the second frame 12.

[0047] The surface of the mask body 20 where the first frame 11 is provided is the first surface. After the second frame 12 is connected to the first frame 11, the second clamping portion 152 is located in the slot 14, and at least part of the second clamping portion 152 is blocked by the baffle 16. The baffle 16 restricts the movement of the second clamping portion 152 in the direction perpendicular to the first surface of the mask body 20, so that the second frame 12 cannot be separated from the first frame 11. When it is necessary to disassemble the second frame 12 from the first frame 11, please refer to Figure 5 and slide the second frame 12 in the first direction A until the second clamping portion 152 is completely exposed from the baffle 16. At this time, lift the second frame 12 in the direction away from the first frame 11, and the second frame 12 can be separated from the first frame 11. When it is necessary to install the second frame 12 again, just put the second clamping portion 152 into the slot 14 exposed by the baffle 16 and slide the second frame 12 in the second direction B opposite to the first direction A until the second clamping portion 152 is blocked by the baffle 16. It should be noted that both the first direction A and the second direction B are parallel to the first surface of the mask body 20. The first direction A points from the end of the second clamping portion 152 far from the first clamping portion 151 to the end of the second clamping portion 152 close to the first clamping portion 151, and the second direction B points from the end of the second clamping portion 152 close to the first clamping portion 151 to the end of the second clamping portion 152 far from the first clamping portion 151.

[0048] Optionally, the length of the first clamping portion 151 is greater than or equal to the thickness of the baffle 16, so that the second clamping portion 152 can smoothly extend under the baffle 16 and avoid interference between the second clamping portion 152 and the baffle 16.

[0049] It should be noted that the length of the first clamping portion 151 refers to the dimension of the first clamping portion 151 in the direction perpendicular to the first surface of the mask body 20. The thickness of the baffle 16 refers to the dimension of the baffle 16 in the direction perpendicular to the first surface of the mask body 20.

[0050] Optionally, when the buckle 15 is snap-fitted with the slot 14, the side surface of the first snap-fitting portion 151 is attached to the side surface of the baffle 16, so that the baffle 16 can better limit the second snap-fitting portion 152.

[0051] Optionally, the thickness of the second snap-fitting portion 152 is equal to the distance between the lower surface of the baffle 16 and the bottom of the slot 14, thereby preventing the second snap-fitting portion 152 from shaking in the slot 14 in a direction perpendicular to the first surface of the mask body 20.

[0052] It should be noted that the thickness of the second snap-fitting portion 152 refers to the dimension of the second snap-fitting portion 152 in a direction perpendicular to the first surface of the mask body 20. The lower surface of the baffle 16 refers to the surface of the baffle 16 facing the bottom of the slot 14.

[0053] Optionally, the number of the slots 14 and the buckles 15 are both multiple, and the multiple slots 14 and the multiple buckles 15 correspond to each other one by one. Some of the buckles 15 are located on the first side of the protective film 13, and some of the buckles 15 are located on the second side of the protective film 13, and the second side is opposite to the first side.

[0054] Setting the multiple slots 14 to be snap-fitted with the buckles 15 on both opposite sides of the protective film 13 simultaneously can improve the reliability of the connection between the second frame 12 and the first frame 11.

[0055] Furthermore, the buckles 15 located on the first side of the protective film 13 and the buckles 15 located on the second side of the protective film 13 are symmetrically distributed in pairs, so that the first frame 11 and the second frame 12 are stressed more evenly.

[0056] This embodiment also provides a photomask 30. Please refer to Figure 1 and Figure 2 , which includes a mask body 20 and a detachable film assembly 10 as described in any one of the above. The first frame 11 of the detachable film assembly 10 is fixed on the mask body 20.

[0057] This photomask 30 has the same structure and beneficial effects as the detachable film assembly 10 in the foregoing embodiment. The structure and beneficial effects of the detachable film assembly 10 have been described in detail in the foregoing embodiment and will not be elaborated herein.

[0058] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A detachable film component, which is configured on a mask body, and is characterized in that, Comprising: A first frame, a second frame, and a protective film. The first frame is used to be fixed on the mask body. The protective film is tensioned and fixed on the second frame. The second frame is detachably connected to the first frame.

2. The detachable film assembly according to claim 1, wherein One of the first frame and the second frame is provided with a clamping groove, and the other is provided with a clamping buckle. The clamping buckle is in clamping fit with the clamping groove.

3. The detachable thin film component according to claim 2, wherein, The clamping buckle includes a first clamping portion and a second clamping portion. One end of the first clamping portion is connected to the first frame or the second frame, and the opposite end is connected to the second clamping portion. A baffle is provided at the notch of the clamping groove. The baffle partially shields the notch of the clamping groove. The second clamping portion can slide in the clamping groove and be completely exposed from the baffle.

4. The detachable thin film component according to claim 3, characterized in that, The length of the first clamping portion is greater than or equal to the thickness of the baffle.

5. The detachable film assembly according to claim 2, wherein, The number of the clamping grooves and the clamping buckles is multiple. The multiple clamping grooves and the multiple clamping buckles correspond to each other one by one. Some of the clamping buckles are located on the first side of the protective film, and some of the clamping buckles are located on the second side of the protective film. The second side is opposite to the first side.

6. The detachable thin film component according to claim 1, wherein, Both the first frame and the second frame are annular. At least part of the orthographic projections of the first frame and the second frame on the mask body overlap.

7. The detachable film assembly according to claim 6, wherein, The edges of the orthographic projections of the first frame and the second frame on the mask body completely overlap.

8. The detachable film assembly according to claim 1, characterized in that The edge of the orthographic projection of the first frame on the mask body coincides with the edge of the mask body or is located within the edge of the mask body.

9. The detachable film assembly according to claim 1, characterized in that, The surface of the second frame is in contact with the surface of the first frame.

10. A photomask, characterized in that, Comprising a mask body and the detachable film assembly according to any one of claims 1 to 9, wherein the first frame of the detachable film assembly is fixed on the mask body.

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