Small etching tank

Abstract

The utility model relates to the technical field of etching bath devices, and particularly discloses a small etching bath which comprises a spraying assembly and a plurality of moving assemblies, the moving assemblies are fixedly connected to the spraying assembly, and the moving assemblies are parallel to one another; the spraying assembly comprises a sprayer, a communicating pipe and an etching groove, the lower half portion of the etching groove is of an inverted-cone-shaped structure, a heating pipe is detachably arranged outside the inverted-cone-shaped structure of the etching groove, the bottom of the etching groove is fixedly connected with one end of the communicating pipe, the other end of the communicating pipe is fixedly connected with the sprayer, a water pump is fixedly arranged on the communicating pipe, and the water pump is connected with the water pump. The communicating pipe is fixedly connected with the etching groove through a fixing piece, a protection plate is fixedly arranged above the etching groove, the two ends of the multiple moving assemblies are located in grooves formed in the protection plate, and a control panel is fixedly arranged on the outer side of the etching groove. According to the utility model, the use efficiency of the etching liquid in the etching groove can be improved, and the demand on the volume of the etching liquid during etching is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of etching tank devices, and particularly relates to a small etching tank. Background Art

[0002] An etching tank generally refers to a specific structure or device used for etching metal materials during semiconductor or PCB processing. The etching tank plays a crucial role in semiconductor or PCB processes and is used to define the structure of circuits and devices during chip or circuit manufacturing.

[0003] As a key process in semiconductor manufacturing, the etching process, its etching effect is crucial for the precision and performance of chip or PCB manufacturing. A large number of research works related to the etching process need to be carried out in the laboratory, including the development of etching solutions, the simulation of etching precision, the influence of etching process parameters on the fineness of the process, etc. It is very difficult to complete these research works based on the formally mass-produced etching equipment. On the one hand, because mass-produced equipment requires harsh operating conditions: environment, electricity, exhaust, etc.; on the other hand, the etching tank volume of mass-produced equipment often requires thousands of liters of etching solution to operate normally. Most of the existing laboratory etching tanks are imitated from mass-produced equipment. Even if the overall size is reduced, due to the design factors of pipelines, pumps, and structures, often hundreds of liters of etching solution are still required to operate. This causes a large amount of waste and discharge pressure of etching solution in laboratory research.

[0004] At present, the following areas need to be improved in the existing technology: In the existing technology, the laboratory etching tank usually requires a relatively large volume of etching solution, and a large amount of etching solution is needed to reach the liquid level required for spray circulation. There will be waste in the experiments related to etching solution, and the cost is relatively high. Content of the Utility Model

[0005] To solve the above problems existing in the prior art, the utility model provides a small etching tank, which can improve the efficiency of extracting etching solution, reduce the requirement for the liquid level height, reduce the requirement for the total amount of etching solution for spray circulation, and reduce the requirement for the volume of etching solution through the improvement of the structure of the tank body.

[0006] The purpose of the utility model can be achieved by the following technical solutions:

[0007] A small etching tank includes a spray component and a plurality of moving components. The plurality of moving components are fixedly connected to the spray component, and the plurality of moving components are parallel to each other;

[0008] The spray assembly includes a sprayer, a connecting pipe, and an etching tank. The lower half of the etching tank is of an inverted conical structure. A heating pipe is detachably arranged outside the inverted conical structure of the etching tank. The bottom of the etching tank is fixedly connected to one end of the connecting pipe, and the other end of the connecting pipe is fixedly connected to the sprayer. A water pump is fixedly arranged on the connecting pipe. The connecting pipe and the etching tank are fixedly connected through a fixing member. A protective plate is fixedly arranged above the etching tank. Both ends of multiple moving assemblies are located in the slots opened on the protective plate. A control panel is fixedly arranged outside the etching tank;

[0009] The moving assembly includes a bottom frame, two support frames, and multiple rotating wheels. A central groove is formed on the bottom frame. The two support frames are respectively fixedly connected to both sides of the lower end of the bottom frame. Multiple brackets are respectively fixedly arranged on both sides of the central groove. The multiple brackets are fixedly connected to the bottom frame. Every two brackets correspond to each other, and a rotating shaft is rotatably arranged between every two brackets. A rotating wheel is sleeved on each rotating shaft.

[0010] Further, the connecting pipe is of a C-shaped structure, and the water pump is located at the lower end of the connecting pipe.

[0011] Further, a flow controller is arranged between the sprayer and the connecting pipe.

[0012] Further, multiple nozzles are fixedly arranged at the lower end of the sprayer, and the multiple nozzles correspond to the positions of the multiple moving assemblies.

[0013] Further, the multiple support frames are of a C-shaped structure, and the multiple support frames are respectively detachably connected to the edges of the etching tank.

[0014] Further, the width of the sprayer is greater than the combined width of the multiple moving assemblies.

[0015] The beneficial effects of the present utility model are as follows:

[0016] (1) By arranging the spray assembly, the technical effect that can be achieved is that the spray assembly can improve the efficiency of extracting the etching solution through the structural improvement of the tank body, reduce the requirement for the liquid level height, reduce the requirement for the total amount of the etching solution in the spray cycle, reduce the requirement for the volume of the etching solution, and the inverted conical structure of the sprayer facilitates the inflow of the etching solution into the connecting pipe, preventing the etching solution from staying in the corners of the etching tank and being difficult to flow out.

[0017] (2) By arranging the moving assembly, the technical effect that can be achieved is that the moving assembly is used to move the workpiece to be etched. The detachable structure facilitates increasing or decreasing the moving assembly according to requirements. The central groove is used to make the etching solution flow back into the etching tank, reduce the waste of the etching solution, and reduce the cost.

[0018] (3) By setting up a flow controller, the technical effect that can be achieved is that the flow controller is used to detect the spray flow rate, which is convenient for detecting and controlling the sprayer. Description of the Drawings

[0019] For the convenience of those skilled in the art to understand, the following further describes the present utility model in conjunction with the accompanying drawings.

[0020] Figure 1 It is a front partial cross-sectional view of the present utility model;

[0021] Figure 2 It is a left partial cross-sectional view of the present utility model;

[0022] Figure 3 It is a top view of the present utility model;

[0023] Figure 4 It is a partial cross-sectional view of the present utility model;

[0024] Figure 5 It is a top view of the moving component in the present utility model;

[0025] Description of the Main Component Symbols:

[0026] In the figures: 1. Sprayer; 2. Flow controller; 3. Connecting pipe; 4. Fixing part; 5. Water pump; 6. Etching tank; 7. Support frame; 8. Rotating wheel; 9. Nozzle; 10. Bottom frame; 11. Central groove; 12. Bracket; 13. Rotating shaft; 14. Protective plate; 15. Control panel; 16. Heating pipe. Detailed Embodiment

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present application in conjunction with the accompanying drawings in the embodiments of the present application; obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0028] In the description of the present application, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "inner", "outer", "top / bottom end", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present application. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0029] In the description of the present application, it should be noted that unless otherwise clearly specified and defined, terms such as "installation", "equipped with", "sheathed / connected", "connection", etc. should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0030] Referring to Figures 1 to 5 , a small etching tank disclosed by the present utility model includes a spraying assembly and three moving assemblies. The three moving assemblies are fixedly connected to the spraying assembly, and the three moving assemblies are parallel to each other.

[0031] The spraying assembly includes a sprayer 1, a connecting pipe 3, and an etching tank 6. The upper half of the etching tank 6 is a cylindrical structure. A heating pipe 16 is detachably arranged outside the inverted conical structure of the etching tank 6. The lower half of the etching tank 6 is a conical structure. The bottom of the etching tank 6 is fixedly connected to one end of the connecting pipe 3, and the other end of the connecting pipe 3 is fixedly connected to the sprayer 1. A water pump 5 is fixedly arranged on the connecting pipe 3. The connecting pipe 3 and the etching tank 6 are fixedly connected through a fixing member 4. A protective plate 14 is fixedly arranged above the etching tank 6. Both ends of the three moving assemblies are located in the slots opened by the protective plate 14. A control panel 15 is fixedly arranged outside the etching tank 6. The control panel 15 is used to display the flow value of the spray and control the switch.

[0032] The spraying assembly can improve the efficiency of extracting the etching solution, reduce the requirement for the liquid level height, reduce the requirement for the spray flow rate, reduce the demand for the volume of the etching solution. The conical sprayer 1 is convenient for the etching solution to flow into the connecting pipe 3, preventing the etching solution from staying in the corners of the etching tank 6 and being difficult to flow out.

[0033] The moving assembly includes a bottom frame 10, two support frames 7, and a plurality of rotating wheels 8. A central groove 11 is opened on the bottom frame 10. The two support frames 7 are respectively fixedly connected to both sides of the lower end of the bottom frame 10. A plurality of brackets 12 are respectively fixedly arranged on both sides of the central groove 11. The plurality of brackets 12 are fixedly connected to the bottom frame 10. Every two brackets 12 correspond to each other. A rotating shaft 13 is rotatably arranged between every two brackets 12. A rotating wheel 8 is sleeved on each rotating shaft 13.

[0034] The moving assembly is used to move the workpiece to be etched. The detachable structure is convenient for increasing or decreasing the moving assembly according to requirements. The central groove 11 is used to make the etching solution flow back into the etching tank 6, reducing the waste of the etching solution and lowering the cost.

[0035] The connecting pipe 3 is of a C-shaped structure, and the water pump 5 is located at the lower end of the connecting pipe 3. A flow controller 2 is provided between the sprayer 1 and the connecting pipe 3. The flow controller 2 is used to detect the spray flow rate, which is convenient for detecting and controlling the sprayer 1.

[0036] Three nozzles 9 are fixedly arranged at the lower end of the sprayer 1, and the positions of the three nozzles 9 correspond to those of the three moving components. The sprayer 1 is located above the three moving components, and the width of the sprayer 1 is greater than the combined width of the three moving components.

[0037] The six support frames 7 are of a C-shaped structure, and the six support frames 7 are respectively detachably connected to the edges of the etching tank 6. The three bottom frames 10 are of a rectangular structure, the central groove 11 is of a rectangular structure, and the length of the bottom frame 10 is greater than the length of the etching tank 6.

[0038] The working principle and usage process of the present utility model: The three moving components are installed on the etching tank 6 through the support frames 7. The flow controller 2 is adjusted through the control panel 15 to make the sprayer 1 reach the specified spray flow rate. The heating pipe 16 is turned on for heating, and the water pump 5 is turned on. The etching solution in the etching tank 6 flows into the sprayer 1 through the connecting pipe 3 and is sprayed downward through the three nozzles 9. After the rotating wheel 8 drives the workpiece to be etched through the etching solution spray of the sprayer 1, it moves to the next step.

[0039] The above is only a preferred embodiment of the present utility model and does not impose any form of limitation on the present utility model. Although the present utility model has been disclosed above with the preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to form an equivalent embodiment with equivalent changes within the scope of the technical solution of the present utility model. However, as long as it does not depart from the content of the technical solution of the present utility model, any brief modification, equivalent change and modification made to the above embodiment based on the technical essence of the present utility model still fall within the scope of the technical solution of the present utility model.

Claims

1. A small etching tank, characterized in that: It includes a spraying assembly and a plurality of moving assemblies. The plurality of moving assemblies are fixedly connected to the spraying assembly, and the plurality of moving assemblies are parallel to each other. The spraying assembly includes a sprayer, a connecting pipe, and an etching tank. The lower half of the etching tank is of an inverted conical structure. A heating pipe is detachably arranged outside the inverted conical structure of the etching tank. The bottom of the etching tank is fixedly connected to one end of the connecting pipe, and the other end of the connecting pipe is fixedly connected to the sprayer. A water pump is fixedly arranged on the connecting pipe. The connecting pipe and the etching tank are fixedly connected through a fixing member. A protective plate is fixedly arranged above the etching tank. Both ends of the plurality of moving assemblies are located in the slots opened in the protective plate. A control panel is fixedly arranged outside the etching tank. The moving assembly includes a bottom frame, two support frames, and a plurality of rotating wheels. A central groove is opened in the bottom frame. The two support frames are respectively fixedly connected to both sides of the lower end of the bottom frame. A plurality of brackets are respectively fixedly arranged on both sides of the central groove. The plurality of brackets are fixedly connected to the bottom frame. Every two brackets correspond to each other, and a rotating shaft is rotatably arranged between every two brackets. A rotating wheel is sleeved on each rotating shaft.

2. The small etching tank according to claim 1, wherein: The connecting pipe is of a C-shaped structure, and the water pump is located at the lower end of the connecting pipe.

3. A small etching tank according to claim 1, characterized in that: A flow controller is arranged between the sprayer and the connecting pipe.

4. A small etching tank according to claim 1, characterized in that: A plurality of nozzles are fixedly arranged at the lower end of the sprayer, and the plurality of nozzles correspond to the positions of the plurality of moving assemblies.

5. The small etching tank according to claim 1, characterized in that: The plurality of support frames are of a C-shaped structure, and the plurality of support frames are respectively detachably connected to the edge of the etching tank.

6. The small etching tank according to claim 1, wherein: The width of the sprayer is greater than the width of the combination of the plurality of moving assemblies.

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