Clamp for inclined turning of wafer dicing blade

Abstract

The utility model provides a clamp for inclined turning of a wafer scribing knife. The clamp comprises a knife rest rod; the tool rest base is arranged at one end of the tool rest rod, an opening groove is formed in one side of the outer surface of the tool rest rod, and fixing plates are fixedly installed on the two sides of the interior of the opening groove; the elastic device is fixedly installed on one side of the outer surface of the fixing plate. According to the clamp for inclined turning machining of the wafer scribing knife, an operator can directly sleeve the scribing knife on the surface of the knife rest rod conveniently through the extrusion inclined face, the movable block is pushed through the restoring elastic force of the spring, the extrusion block is moved out of the opening groove to limit the scribing knife, the scribing knife is clamped and limited by the extrusion block and the protection plate, and the clamp is simple in structure, convenient to operate and high in practicability. The device is simple in structure, high in practicability, simple and convenient in scribing blade mounting steps, convenient to dismount and mount the scribing blade, free of complex dismounting and mounting techniques, capable of reducing the labor intensity of operators and capable of improving the practicability.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing equipment, in particular to a fixture for bevel turning of a wafer dicing blade. Background Technique

[0002] A wafer refers to a silicon wafer used to fabricate silicon semiconductor circuits. Its raw material is silicon. High-purity polysilicon is dissolved and doped with a silicon crystal seed, and then slowly pulled out to form a cylindrical single-crystal silicon. After the silicon ingot is ground, polished, and sliced, a silicon wafer is formed, that is, a wafer.

[0003] At present, when dicing a wafer using a dicing machine, it is necessary to alternately replace the dicing blade to perform the grooving and cutting operations on the wafer. For example, a special tool holder for a wafer dicing machine with the publication number CN217597498U. When assembling the dicing blade, first, the dicing blade is sleeved on the outside of the tool holder rod and placed on the left side of the threaded limit tube. Then, the limit motor is started, and the rotating shaft is driven to rotate by the limit motor. The rotating shaft drives the driving wheel to rotate. The driving wheel meshes with the driven wheel and drives the driven wheel to rotate. The driven wheel drives the limit threaded shaft to rotate. When the limit threaded shaft rotates, it drives the two threaded limit tubes to move away from each other and extend out of the through hole. Thus, the threaded limit tube can be stuck on the right side of the dicing blade. Finally, the telescopic motor is started, and the telescopic threaded shaft is driven to rotate by the telescopic motor. When the telescopic threaded shaft rotates, it drives the tool holder rod to move leftward through the cooperation with the threaded hole. The tool holder rod drives the dicing blade to move leftward under the cooperation of the threaded limit tube, so that the dicing blade is stuck between the tool holder base and the threaded limit tube, thereby completing the fixation of the dicing blade. The replacement process of the dicing blade is cumbersome and complex, so it will cause waste of time and affect the dicing efficiency of the wafer.

[0004] Therefore, it is necessary to provide a fixture for bevel turning of a wafer dicing blade to solve the above technical problems. Content of the Utility Model

[0005] The utility model provides a fixture for bevel turning of a wafer dicing blade, which solves the problem that the replacement process of the dicing blade is cumbersome and complex, so it will cause waste of time and affect the dicing efficiency of the wafer.

[0006] To solve the above technical problems, a fixture for bevel turning of a wafer dicing blade provided by the utility model includes: a tool holder rod;

[0007] A tool holder base, the tool holder base is arranged at one end of the tool holder rod, a slot is opened on one side of the outer surface of the tool holder rod, and fixing plates are fixedly installed on both sides inside the slot;

[0008] An elastic device, the elastic device is fixedly installed on one side of the outer surface of the fixing plate, and the elastic device includes a fixed rod, a limit block and a spring;

[0009] A limiting device, the limiting device is slidably installed on one side of the outer surface of the elastic device, and the limiting device includes a moving block, a setting hole, a limiting cavity, a pressing block and a pressing slope;

[0010] A dicing blade, the dicing blade is arranged in the middle of the outer surface of the tool holder rod, and a protective plate is fixedly installed on the other side of the outer surface of the tool holder rod.

[0011] Preferably, a motor box is fixedly installed on one side of the outer surface of the tool holder base, and a servo motor is fixedly installed inside the motor box.

[0012] Preferably, the moving block is slidably installed on the outer surface of the fixed rod, the setting hole is opened in the middle of one side of the outer surface of the moving block, the limiting cavity is opened inside the moving block, the pressing block is fixedly installed on the other side of the outer surface of the moving block, and the pressing slope is arranged on one side of the outer surface of the moving block.

[0013] Preferably, the fixed rod is fixedly installed on the surface of the fixing plate, the limiting block is fixedly installed at one end of the fixed rod, and the spring is sleeved on one side of the outer surface of the fixed rod.

[0014] Preferably, one side of the opening groove communicates with an activity groove, and both sides of the inner cavity wall of the activity groove communicate with moving grooves.

[0015] Preferably, one side of the moving block is fixedly connected with a connecting block, one side of the connecting block is fixedly connected with an extending block, and one side of the extending block is fixedly connected with a clamping block.

[0016] Preferably, a sleeve hole is opened in the middle of one side of the dicing blade, and clamping holes are opened on both sides inside the sleeve hole.

[0017] Compared with the related art, a fixture for oblique turning processing of a wafer dicing blade provided by the present utility model has the following beneficial effects:

[0018] The present utility model provides a fixture for oblique turning processing of a wafer dicing blade. Through the pressing slope, it is convenient for the operator to directly sleeved the dicing blade on the surface of the tool holder rod, and the restoring elastic force of the spring pushes the moving block, so that the pressing block moves out of the opening groove to limit the dicing blade. The dicing blade is clamped and limited by the pressing block and the protective plate. The structure of the device is simple, the practicability is strong, the steps for installing the dicing blade are simple and convenient, it is convenient to disassemble and assemble the dicing blade, no complicated disassembly and assembly methods are required, the labor intensity of the operating workers is reduced, and the practicability of the device is improved. Description of the Drawings

[0019] Figure 1 It is a schematic structural diagram of the first embodiment of a fixture for oblique turning processing of a wafer dicing blade provided by the present utility model;

[0020] Figure 2 is Figure 1 the schematic cross-sectional view of the tool rest base shown;

[0021] Figure 3 is Figure 2 the enlarged schematic view of part A shown;

[0022] Figure 4 is Figure 3 the schematic structural view of the limit device shown;

[0023] Figure 5 is Figure 3 the schematic structural view of the elastic device shown;

[0024] Figure 6 is the schematic structural view of the second embodiment of the fixture for oblique turning processing of a wafer dicing blade provided by the present utility model;

[0025] Figure 7 is Figure 6 the enlarged schematic view of part B shown.

[0026] Reference numerals in the figure: 1, tool rest rod; 2, tool rest base; 3, motor box; 4, dicing blade; 5, servo motor; 6, protective plate; 7, opening groove; 8, fixing plate; 9, limit device, 91, moving block, 92, setting hole, 93, limit cavity, 94, extrusion block, 95, extrusion inclined surface; 10, elastic device, 101, fixed rod, 102, limit block, 103, spring; 11, clamping hole; 12, movable groove; 13, moving groove; 14, connecting block; 15, extension block; 16, clamping block. Specific embodiments

[0027] The present utility model will be further described below in conjunction with the accompanying drawings and embodiments.

[0028] First embodiment

[0029] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 , wherein, Figure 1 is the schematic structural view of the first embodiment of the fixture for oblique turning processing of a wafer dicing blade provided by the present utility model; Figure 2 is Figure 1 the schematic cross-sectional view of the tool rest base shown; Figure 3 is Figure 2 the enlarged schematic view of part A shown; Figure 4 is Figure 3 the schematic structural view of the limit device shown; Figure 5 is Figure 3Schematic diagram of the structure of the elastic device shown. A fixture for oblique turning machining of a wafer dicing blade, comprising: a tool rest rod 1;

[0030] A tool rest base 2, the tool rest base 2 is arranged at one end of the tool rest rod 1, a slot 7 is opened on one side of the outer surface of the tool rest rod 1, and fixing plates 8 are fixedly installed on both sides inside the slot 7;

[0031] An elastic device 10, the elastic device 10 is fixedly installed on one side of the outer surface of the fixing plate 8, and the elastic device 10 includes a fixing rod 101, a limiting block 102 and a spring 103;

[0032] A limiting device 9, the limiting device 9 is slidably installed on one side of the outer surface of the elastic device 10, and the limiting device 9 includes a moving block 91, a setting hole 92, a limiting cavity 93, a pressing block 94 and a pressing inclined surface 95;

[0033] A dicing blade 4, the dicing blade 4 is arranged in the middle of the outer surface of the tool rest rod 1, and a protective plate 6 is fixedly installed on the other side of the outer surface of the tool rest rod 1.

[0034] A motor box 3 is fixedly installed on one side of the outer surface of the tool rest base 2, and a servo motor 5 is fixedly installed inside the motor box 3.

[0035] The moving block 91 is slidably installed on the outer surface of the fixing rod 101, the setting hole 92 is opened in the middle of one side of the outer surface of the moving block 91, the limiting cavity 93 is opened inside the moving block 91, the pressing block 94 is fixedly installed on the other side of the outer surface of the moving block 91, and the pressing inclined surface 95 is arranged on one side of the outer surface of the moving block 91.

[0036] The fixing rod 101 is fixedly installed on the surface of the fixing plate 8, the limiting block 102 is fixedly installed at one end of the fixing rod 101, and the spring 103 is sleeved on one side of the outer surface of the fixing rod 101.

[0037] The working principle of a fixture for oblique turning machining of a wafer dicing blade provided by the present utility model is as follows:

[0038] During work, first, the user sleeved the dicing blade 4 on the outer surface of the tool rest rod 1, the dicing blade 4 moved along the pressing block 94, and the pressing block 94 was pressed into the inside of the slot 7 through the pressing inclined surface 95, and the pressing block 94 drove the moving block 91 to move and compress the spring 103.

[0039] When the dicing blade 4 moves to fit the protective plate 6 and no longer restricts the pressing block 94, the restoring elastic force of the spring 103 pushes the moving block 91, the moving block 91 drives the pressing block 94 to move, so that the pressing block 94 moves out of the outer surface of the tool rest rod 1 and abuts against the dicing blade 4.

[0040] When disassembling, the user presses the two extrusion blocks 94, and presses the extrusion blocks 94 into the inside of the opening groove 7, which is convenient for the operator to slide the scribing knife 4 out along the surface of the tool rest rod 1.

[0041] Compared with the related technology, a fixture for oblique turning processing of a wafer scribing knife provided by the present utility model has the following beneficial effects:

[0042] The present utility model provides a fixture for oblique turning processing of a wafer scribing knife. Through the extrusion inclined surface 95, it is convenient for the operator to directly sleeved the scribing knife 4 on the surface of the tool rest rod 1, and the restoring elastic force of the spring 103 pushes the moving block 91, so that the extrusion block 94 moves out of the opening groove 7 to limit the scribing knife 4. The scribing knife 4 is clamped and restricted by the extrusion block 94 and the protection plate 6. The structure of this device is simple, with strong practicability. The steps for installing the scribing knife 4 are simple and convenient, facilitating the disassembly and assembly of the scribing knife 4, without complex disassembly and assembly techniques, reducing the labor intensity of the operating workers, and improving the practicability of this device.

[0043] Second Embodiment

[0044] Please refer to Figure 6 and Figure 7 Based on a fixture for oblique turning processing of a wafer scribing knife provided in the first embodiment of the present application, a second embodiment of the present application proposes another fixture for oblique turning processing of a wafer scribing knife. The second embodiment is only a preferred manner of the first embodiment, and the implementation of the second embodiment will not affect the independent implementation of the first embodiment.

[0045] Specifically, the difference of a fixture for oblique turning processing of a wafer scribing knife provided in the second embodiment of the present application is that, for a fixture for oblique turning processing of a wafer scribing knife, one side of the opening groove 7 is communicated with a movable groove 12, and both sides of the inner cavity wall of the movable groove 12 are communicated with a moving groove 13.

[0046] One side of the moving block 91 is fixedly connected with a connecting block 14, one side of the connecting block 14 is fixedly connected with an extension block 15, and one side of the extension block 15 is fixedly connected with a clamping block 16.

[0047] A sleeve hole 17 is opened in the middle of one side of the scribing knife 4, and clamping holes 11 are opened on both sides inside the sleeve hole 17.

[0048] The working principle of a fixture for oblique turning processing of a wafer scribing knife provided by the present utility model is as follows:

[0049] During operation, first, the dicing blade 4 is sleeved on the outer surface of the tool rest rod 1 through the sleeving hole 17. The dicing blade 4 moves to the surface of the extrusion block 94 to extrude the extrusion block 94. The extrusion block 94 drives the moving block 91 to move and drives the connecting block 14 to move together. The connecting block 14 drives the extension block 15 and the clamping block 16 to move together, and the clamping block 16 moves into the inside of the moving groove 13.

[0050] When the dicing blade 4 completely disengages from the extrusion block 94, the restoring elastic force of the spring 103 pushes the moving block 91 to move. The moving block 91 drives the connecting block 14, the extension block 15 and the clamping block 16 to move together, and the clamping block 16 is inserted into the clamping hole 11 of the dicing blade 4 to restrict the dicing blade 4.

[0051] Compared with the related art, a fixture for oblique turning machining of a wafer dicing blade provided by the present utility model has the following beneficial effects:

[0052] The present utility model provides a fixture for oblique turning machining of a wafer dicing blade. By installing the clamping block 16 on the surface of the moving block 91, the clamping block 16 moves along with the moving block 91. Thus, when installing the dicing blade 4, the clamping block 16 is inserted into the inside of the clamping hole 11 to restrict the dicing blade 4, so that the dicing blade 4 rotates together with the output shaft of the servo motor 5 and the tool rest rod 1. The device has a simple structure and strong practicability, improves the restricting effect on the dicing blade 4, and maintains the cutting stability of the dicing blade 4.

[0053] The above are only the embodiments of the present utility model, and thus do not limit the patent scope of the present utility model. All equivalent structural or equivalent process transformations made by using the content of the specification and drawings of the present utility model, or directly or indirectly applied in other related technical fields, are equally included in the patent protection scope of the present utility model.

Claims

1. A fixture for oblique turning machining of a wafer dicing blade, characterized in that, Including: Tool rest rod; Tool rest base, the tool rest base is arranged at one end of the tool rest rod, a slot is opened on one side of the outer surface of the tool rest rod, and fixing plates are fixedly installed on both sides inside the slot; Elastic device, the elastic device is fixedly installed on one side of the outer surface of the fixing plate, and the elastic device includes a fixed rod, a limit block and a spring; Limit device, the limit device is slidably installed on one side of the outer surface of the elastic device, and the limit device includes a moving block, a setting hole, a limit cavity, a pressing block and a pressing slope; Scribing knife, the scribing knife is arranged in the middle of the outer surface of the tool rest rod, and a protective plate is fixedly installed on the other side of the outer surface of the tool rest rod.

2. The fixture for oblique turning machining of a wafer dicing blade according to claim 1, characterized in that, A motor box is fixedly installed on one side of the outer surface of the tool rest base, and a servo motor is fixedly installed inside the motor box.

3. A fixture for oblique turning machining of a wafer dicing blade according to claim 1, characterized in that, The moving block is slidably installed on the outer surface of the fixed rod, the setting hole is opened in the middle of one side of the outer surface of the moving block, the limit cavity is opened inside the moving block, the pressing block is fixedly installed on the other side of the outer surface of the moving block, and the pressing slope is arranged on one side of the outer surface of the moving block.

4. A fixture for oblique turning machining of a wafer dicing blade according to claim 1, characterized in that, The fixed rod is fixedly installed on the surface of the fixing plate, the limit block is fixedly installed at one end of the fixed rod, and the spring is sleeved on one side of the outer surface of the fixed rod.

5. A fixture for oblique turning machining of a wafer dicing blade according to claim 1, characterized in that, One side of the slot communicates with an activity slot, and both sides of the inner cavity wall of the activity slot communicate with moving slots.

6. A fixture for oblique turning machining of a wafer dicing blade according to claim 1, characterized in that, One side of the moving block is fixedly connected with a connecting block, one side of the connecting block is fixedly connected with an extension block, and one side of the extension block is fixedly connected with a clamping block.

7. A fixture for oblique turning machining of a wafer dicing blade according to claim 1, characterized in that, A sleeve hole is opened in the middle of one side of the scribing knife, and clamping holes are opened on both sides inside the sleeve hole.

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