Carrier plate

Abstract

The utility model provides a carrier plate and relates to the technical field of thin film deposition equipment. The carrier plate comprises a tray and a frame, the frame comprises guide rail strips, the guide rail strips comprise an integrated guide rail strip and a split guide rail strip, and the integrated guide rail strip comprises a bottom face, an outer side face and an inner side face. The split type guide rail strip can comprise a plurality of guide rail units arranged outside the integrated guide rail strip side by side, and each guide rail unit comprises a first side face abutting against the bottom face of the integrated guide rail strip. According to the guide rail strip, when the guide rail strip is arranged at the position of a transmission mechanism, the guide rail unit is in contact with the transmission mechanism, the abrasion resistance of the guide rail strip is improved, the defect caused by abrasion is avoided, vibration is further increased, the overall flatness and life cycle of a carrier plate are guaranteed, and the uniformity of film deposition is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of PECVD vacuum thin film deposition, and particularly to a carrier plate for thin film deposition. Background Art

[0002] The carrier plate structure adopted by PECVD vacuum thin film deposition equipment is mainly composed of a tray and a frame. Generally speaking, the carrier plate frame can include guide rail bars on both left and right sides, at least one rib bar parallel to the guide rail bars, and at least one cross beam perpendicular to the guide rail bars. The materials of the guide rail bars and rib bars usually adopt carbon fiber or graphite. During the actual production and processing process, a plurality of wafers to be processed are placed on the carrier plate. The guide rail bars of the carrier plate frame are then placed at the transmission mechanism and conveyed by the transmission mechanism. When the carrier plate is conveyed into the vacuum thin film deposition device, vacuum thin film deposition can be carried out. However, due to the guide rail bars of the PECVD vacuum thin film deposition carrier plate repeatedly bearing dynamic loads and mechanical vibration effects on the transfer platform, the guide rail bars of the carrier plate frame are prone to wear, resulting in out-of-tolerance flatness of the carrier plate tray. This not only seriously affects the service life of the carrier plate frame, but also causes friction between the wafer and the surface of the carrier plate tray, resulting in dust pollution and damage to the guide rails and vibration. There are serious fixture marks, black spots, pockmarks and other quality problems on the wafer products. At the same time, it will also cause poor contact between the bottom of the four sides of the carrier plate frame and the hot plate, resulting in gaps, and the conductivity will also be seriously affected, easily causing arc discharge, damaging the carrier plate and the hot plate, and seriously affecting production. Summary of the Utility Model

[0003] An object of the first aspect of the utility model is to provide a carrier plate to solve the problem that the guide rail bars of the existing carrier plate repeatedly act with the transmission mechanism and wear, resulting in poor uniformity of silicon wafer thin film deposition.

[0004] An object of the second aspect of the utility model is to solve the problem that the conductivity of the carrier plate is poor due to wear.

[0005] In particular, the utility model provides a carrier plate, which includes a frame and a tray. The tray is fixedly arranged on the frame. The frame includes guide rail bars, and the guide rail bars include:

[0006] An integrated guide rail bar, including a bottom surface, an outer side surface and an inner side surface; and

[0007] A split guide rail bar, which includes a plurality of guide rail units arranged side by side outside the integrated guide rail bar. Each guide rail unit includes a first side surface abutting against the bottom surface of the integrated guide rail bar.

[0008] Optionally, each guide rail unit further includes a second side surface abutting against the outer side surface of the integrated guide rail bar.

[0009] Optionally, each of the guide rail units further includes a third side surface, and the third side surface is connected to one end of the first side surface opposite to the second side surface.

[0010] Optionally, the third side surface is a plane, and the plane abuts against at least a part of the inner side surface of the integral guide rail strip.

[0011] Optionally, the third side surface is a bent surface, and at least a part of the bent surface abuts against at least a part of the inner side surface of the integral guide rail strip.

[0012] Optionally, a concavo-convex structure is provided between two adjacent guide rail units, so that the two adjacent guide rail units are connected by plugging through the concavo-convex structure.

[0013] Optionally, the first side surfaces of the two guide rail units at the head and the tail are formed as inclined surfaces or arc-shaped surfaces, and the height of the middle position of the first side surfaces of the two guide rail units at the head and the tail gradually increases towards the end.

[0014] Optionally, the distance between two adjacent guide rail units is 0.1 mm to 2 mm.

[0015] Optionally, the materials of the guide rail units are all metal materials, and the materials of the guide rail units are selected from at least one of aluminum, nickel, aluminum alloy, titanium alloy, Monel alloy, Invar alloy, stainless steel alloy, Hastelloy alloy, and platinum-iridium alloy materials.

[0016] Optionally, the materials of the guide rail units are all ceramic materials, and the materials of the guide rail units are selected from at least one of talc ceramics, forsterite ceramics, cordierite ceramics, spinel ceramics, mullite ceramics, glass ceramics, sialon ceramics, yttrium fluoride ceramics, silicon nitride ceramics, magnesium oxide ceramics, beryllium oxide ceramics, cerium oxide ceramics, boron nitride ceramics, boron carbide ceramics, alumina ceramics, yttrium oxide ceramics, aluminum nitride ceramics, silicon carbide ceramics, zirconia ceramics, and bismuth oxide ceramics. Optionally, the material of the integral guide rail strip is carbon fiber.

[0017] The guide rail strip in this solution may include an integral guide rail strip and a split guide rail strip. The split guide rail strip may include a plurality of guide rail units arranged side by side. Each guide rail unit is arranged at the bottom of the integral guide rail strip, and the materials of each guide rail unit are all metal materials, so that when the guide rail strip is arranged at the transmission mechanism, the guide rail unit contacts the transmission mechanism, improving the wear resistance of the guide rail strip, avoiding further increase of vibration caused by wear defects, and thus ensuring the flatness and service life of the whole carrier plate and improving the uniformity of thin film deposition.

[0018] The guide rail unit of this solution may include a first side and a second side, so that when the frame is set at the transmission mechanism, neither the bottom nor the outside will be worn when contacting the transmission mechanism, thereby reducing the dust generated by wear and also reducing the damage caused by modulus. Furthermore, it ensures the stable transmission of the carrier plate, reduces the vibration impact caused by dynamic load, and improves the uniformity of thin film deposition.

[0019] From the following detailed description of specific embodiments of the present invention in conjunction with the accompanying drawings, those skilled in the art will become more clear about the above and other objects, advantages and features of the present invention. Brief Description of the Drawings

[0020] Some specific embodiments of the present invention will be described in detail hereinafter with reference to the accompanying drawings in an exemplary but non-limiting manner. The same reference numerals in the drawings denote the same or similar components or parts. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:

[0021] Figure 1 is a schematic structural diagram of a carrier plate placed on a transmission mechanism according to a specific embodiment of the present invention;

[0022] Figure 2 is a schematic structural diagram of a frame according to a specific embodiment of the present invention;

[0023] Figure 3 is a schematic structural diagram of an integrated guide rail strip and a split guide rail strip arranged together according to a specific embodiment of the present invention;

[0024] Figure 4 is a schematic structural diagram of an integrated guide rail strip and a split guide rail strip arranged together according to another specific embodiment of the present invention;

[0025] Figure 5 is a top view of an integrated guide rail strip and a split guide rail strip arranged together according to a specific embodiment of the present invention;

[0026] Figure 6 a is a side view of an integrated guide rail strip and a split guide rail strip arranged together according to a specific embodiment of the present invention;

[0027] Figure 6 b is a side view of an integrated guide rail strip and a split guide rail strip arranged together according to another specific embodiment of the present invention;

[0028] Figure 6 c is Figure 6 a partial enlarged schematic view of b;

[0029] Figure 7It is a top view of the split guide rails at the head and tail according to a specific embodiment of the present utility model;

[0030] Figure 8 It is a side view of the split guide rails at the head and tail and the integral guide rail connected together by fasteners according to a specific embodiment of the present utility model;

[0031] Figure 9 It is a top view of the split guide rails in the middle according to a specific embodiment of the present utility model;

[0032] Figure 10 It is a side view of the split guide rails in the middle and the integral guide rail connected together by fasteners according to a specific embodiment of the present utility model;

[0033] Figure 11 It is a schematic structural diagram of the integral guide rail and the split guide rail arranged together according to another specific embodiment of the present utility model;

[0034] Figure 12 It is a schematic structural diagram of the integral guide rail and the split guide rail arranged together according to another specific embodiment of the present utility model;

[0035] Figure 13 It is a schematic structural diagram of the integral guide rail and the split guide rail arranged together according to another specific embodiment of the present utility model;

[0036] Figure 14 It is a top view of the integral guide rail and the split guide rail arranged together according to a specific embodiment of the present utility model;

[0037] Figure 15 It is a top view of the split guide rails at the head and tail according to a specific embodiment of the present utility model;

[0038] Figure 16 It is a top view of the split guide rails in the middle according to a specific embodiment of the present utility model.

[0039] Explanation of reference numerals:

[0040] Carrier plate - 10; Tray - 20; Frame - 100; Guide rail - 200; Integral guide rail - 210; Bottom surface - 211, Outer side surface - 212; Inner side surface - 213; Split guide rail - 220; Guide rail unit - 221; First side surface - 222; Second side surface - 223; Third side surface - 224; Concave-convex structure - 225; Rib - 300; Cross beam - 400; Transmission mechanism - 500; Fastener - 600. Detailed implementation manners

[0041] In the description of this embodiment, it should be understood that the orientation or positional relationship indicated by terms such as "length", "width", "height", "upper", "lower", "left", "right", "vertical", "horizontal", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation on the present invention.

[0042] As a specific embodiment of the present invention, as Figure 1 shown, this embodiment provides a carrier plate 10, which may include a frame 100 and a tray 20. The tray 20 is fixedly arranged on the frame 100. The carrier plate 100 is arranged on a transmission mechanism 500. As Figure 2 shown, the frame 100 of this embodiment includes two guide rail bars 200, rib bars 300 and cross beams 400. The two guide rail bars 200 of the frame 100 are placed on the transmission mechanism 500, and the rotation of the transmission mechanism 500 drives the movement of the frame 100. Specifically, as Figure 3 shown, the guide rail bar 200 of this embodiment may include an integral guide rail bar 210 and a split guide rail bar 220. Among them, the integral guide rail bar 210 may include a bottom surface 211, an outer side surface 212 and an inner side surface 213. The split guide rail bar 220 may include a plurality of guide rail units 221 arranged side by side outside the integral guide rail bar 210. Each guide rail unit 221 may include a first side surface 222 that abuts against the bottom surface 211 of the integral guide rail bar 210.

[0043] Specifically, the guide rail bar 200 in this embodiment may include an integral guide rail bar 210 and a split guide rail bar 220. The split guide rail bar 220 may include a plurality of guide rail units 221 arranged side by side. Each guide rail unit 221 is arranged at the bottom of the integral guide rail bar 210, and the material of each guide rail unit 221 is a metal material. When the guide rail bar 200 is arranged at the transmission mechanism, the guide rail unit 221 contacts the transmission mechanism, improving the wear resistance of the guide rail bar 200, avoiding the further increase of vibration caused by wear defects, and thus ensuring the flatness and service life of the overall carrier plate and improving the uniformity of thin film deposition.

[0044] As a specific embodiment of the present invention, the material of each guide rail unit 221 of this embodiment is a metal material, and the material of the guide rail unit 221 is selected from at least one of aluminum, nickel, aluminum alloy, titanium alloy, Monel alloy, Invar alloy, stainless steel alloy, Hastelloy alloy and platinum-iridium alloy.

[0045] The material of the guide rail unit 221 in this embodiment is metal. Metal can increase the electrical conductivity of the guide rail strip 200, avoid grounding problems caused by poor electrical conductivity, and reduce the damage of the carrier plate 100 and the heating plate caused by arc discharge. In addition, the material of the guide rail unit 221 being a metal material also has good wear resistance, avoiding further increase in vibration caused by defects formed by wear, thereby ensuring the flatness and service life of the overall carrier plate and improving the uniformity of thin film deposition.

[0046] As a specific embodiment of the present utility model, the materials of the guide rail units 221 in this embodiment are all ceramic materials. The materials of the guide rail units 221 are selected from at least one of talc ceramics, forsterite ceramics, cordierite ceramics, spinel ceramics, mullite ceramics, glass ceramics, sialon ceramics, yttrium fluoride ceramics, silicon nitride ceramics, magnesium oxide ceramics, beryllium oxide ceramics, cerium oxide ceramics, boron nitride ceramics, boron carbide ceramics, alumina ceramics, yttrium oxide ceramics, aluminum nitride ceramics, silicon carbide ceramics, zirconia ceramics, and bismuth oxide ceramics.

[0047] If the material of the guide rail unit 221 in this embodiment is selected as a ceramic material, it can well increase the wear resistance of the guide rail unit, avoid further increase in vibration caused by defects formed by wear, thereby ensuring the flatness and service life of the overall carrier plate and improving the uniformity of thin film deposition.

[0048] As a specific embodiment of the present utility model, as Figure 4 shown, each guide rail unit 221 in this embodiment may further include a second side surface 223 that abuts against the outer side surface 212 of the integral guide rail strip 210.

[0049] Specifically, the guide rail unit 221 in this embodiment may include a first side surface 222 and a second side surface 223, such that when the frame 100 is disposed at the transmission mechanism 500, neither the bottom nor the outer side will be worn when contacting the transmission mechanism 500, thereby reducing the dust generated by wear and also reducing the damage caused by modulus, thereby ensuring the smooth transmission of the carrier plate, reducing the vibration influence brought by dynamic load, and improving the uniformity of thin film deposition.

[0050] Specifically, one end of the first side surface 222 in this embodiment is connected to the second side surface 223, and the first side surface 222 and the second side surface 223 form a preset angle.

[0051] Specifically, the preset angle between the first side surface 222 and the second side surface 223 in this embodiment generally matches the structure of the integral guide rail strip 210. Generally, the cross-section of the integral guide rail strip 210 is square, then the first side surface 222 is disposed at the bottom of the integral guide rail strip 210, the second side surface 223 is disposed on the outer side surface 212 of the integral guide rail strip 210, and the included angle between the first side surface 222 and the second side surface 223 is basically 90 degrees.

[0052] Specifically, when each guide rail unit 221 includes a first side surface 222 and a second side surface 223, the side where it is connected to the integrated guide rail strip 210 is as Figure 5 shown. Specifically, as Figure 5 shown is a top view of the guide rail unit 221 having the second side surface 223. Figure 6 Figure a shows a schematic diagram of guide rail units of an embodiment connected together; Figure 6 Figure b shows a schematic diagram of guide rail units 221 of another embodiment connected together; Figure 6 Figure c shows Figure 6 a partial enlarged view of b; wherein, Figure 6 in b and Figure 6 c, it is shown that a concave-convex structure 225 is provided between two adjacent guide rail units 221 of this embodiment. By inserting and connecting with each other through the concave-convex structure 225, it is easier to connect two adjacent guide rail units 221, and the bottom surfaces are easier to align after connection, making the bottom flatter.

[0053] Figure 7 and Figure 8 show a schematic diagram of the guide rail units 221 at the head and tail connected to the integrated guide rail strip 210 through fasteners. Figure 9 and Figure 10 show a schematic structural diagram of the guide rail unit 221 in the middle connected to the integrated guide rail strip 210 through fasteners.

[0054] As a specific embodiment of the present invention, as Figure 6 and Figure 8 shown, the first side surfaces 222 of the two guide rail units 221 at the head and tail of this embodiment are formed as inclined surfaces or arc surfaces, and the height of the middle position of the first side surfaces 222 of the two guide rail units 221 at the head and tail gradually rises towards the end direction. As Figure 6 shown, the first side surface 222 of the guide rail unit 221 in the middle is formed as a flat surface.

[0055] Specifically, as Figure 5 and Figure 7 shown, the second side surfaces 223 of the two guide rail units 221 at the head and tail of this embodiment are also inclined surfaces, and are inclined towards the integrated guide rail strip 210 gradually from the middle to the end direction.

[0056] Specifically, as Figure 6 and Figure 7As shown, the first side 222 and the second side 223 of the two guide rail units 221 at the head and tail of this embodiment are inclined planes, so that the guide rail bars of the frame can move more smoothly when being driven by the transmission mechanism, avoiding jumping or damage caused by collisions at the ends. As a specific embodiment of the present utility model, as Figure 11 , Figure 12 and Figure 13 shown, each guide rail unit 221 of this embodiment may further include a third side 224, and the third side 224 is connected to one end of the first side 222 opposite to the second side 223.

[0057] Specifically, the setting of the third side 224 of this embodiment is to facilitate the mutual clamping of the integral guide rail bar 210 and the guide rail unit 221, and further facilitate the subsequent fastening connection.

[0058] As a specific embodiment of the present utility model, as Figure 11 and Figure 12 shown, the third side 224 of this embodiment is a plane, and the plane abuts against at least part of the inner side 213 of the integral guide rail bar 210.

[0059] Specifically, the third side 224 of this embodiment is a plane, and the third side 224 can abut against a part of the inner side 213 of the integral guide rail bar 210. For example Figure 11 shown, the third side 224 abuts against the inner side 213 of the integral guide rail bar 210. As other embodiments, as Figure 12 shown, the third side 224 of this embodiment can abut against all positions of the inner side 213 of the integral guide rail bar 210.

[0060] As a specific embodiment of the present utility model, as Figure 13 shown, the third side 224 of this embodiment is a bent surface, and at least part of the bent surface abuts against at least part of the inner side 213 of the integral guide rail bar 210.

[0061] Specifically, the third side 224 of this embodiment forms a bent surface, and the bent surface clamps the integral guide rail bar 210 in the gap between the third side 224 and the second side 223, and then the guide rail unit 221 and the integral guide rail bar 210 are fastened by fasteners.

[0062] Specifically, this embodiment Figure 14 shows a top view of the guide rail unit 221 having the first side 222, the second side 223 and the third side 224 clamped together with the integral guide rail bar 210. Figure 15It is a top view of the two guide rail units 221 at the head and tail of this embodiment. In this embodiment, the second side surface 223 and the third side surface 224 of the two guide rail units 221 at the head and tail are both designed to be arc-shaped. Figure 16 It is a top view of the guide rail unit 221 in the middle of this embodiment.

[0063] As a specific embodiment of the present utility model, the distance between two adjacent guide rail units 221 in this embodiment is 0.3 mm to 1 mm. Specifically, the distance between two adjacent guide rail units 221 in this embodiment can be 0.3 mm, 0.6 mm or 1 mm. A certain gap is provided between the two guide rail units 221 in this embodiment for thermal expansion and contraction when the frame is heated or cooled.

[0064] Specifically, the material of the integral guide rail strip 210 in this embodiment is carbon fiber.

[0065] As a specific embodiment of the present utility model, the guide rail unit 221 and the integral guide rail strip 210 in this embodiment are connected together by fasteners.

[0066] Specifically, this embodiment can also perform sandblasting on the outside of the guide rail unit 221. Sandblasting can increase the surface roughness of the guide rail unit 221, thereby increasing the adhesion of yellow powder and reducing powder shedding.

[0067] At this point, those skilled in the art should recognize that although multiple exemplary embodiments of the present utility model have been shown and described in detail herein, many other variations or modifications that conform to the principles of the present utility model can still be directly determined or derived from the content disclosed in the present utility model without departing from the spirit and scope of the present utility model. Therefore, the scope of the present utility model should be understood and determined to cover all these other variations or modifications.

Claims

1. A carrier board, characterized in that, The carrier board includes a frame and a tray, the tray is fixedly arranged on the frame, the frame includes guide rail strips, and the guide rail strips include: An integral guide rail strip, including a bottom surface, an outer side surface and an inner side surface; and A split guide rail strip, the split guide rail strip includes a plurality of guide rail units arranged side by side outside the integral guide rail strip, and each guide rail unit includes a first side surface abutting against the bottom surface of the integral guide rail strip.

2. The carrier board according to claim 1, wherein Each guide rail unit further includes a second side surface abutting against the outer side surface of the integral guide rail strip.

3. The carrier board according to claim 2, wherein Each guide rail unit further includes a third side surface, and the third side surface is connected to one end of the first side surface opposite to the second side surface.

4. The carrier board according to claim 3, wherein The third side surface is a plane, and at least part of the plane abuts against at least part of the inner side surface of the integral guide rail strip.

5. The carrier board according to claim 3, wherein The third side surface is a bent surface, and at least part of the bent surface abuts against at least part of the inner side surface of the integral guide rail strip.

6. The carrier board according to claim 1, wherein An uneven structure is arranged between two adjacent guide rail units, so that the two adjacent guide rail units are connected by plugging through the uneven structure.

7. The carrier board according to claim 1, wherein The first side surfaces of the two guide rail units at the head and the tail are formed as inclined surfaces or arc surfaces, and the height of the middle position of the first side surfaces of the two guide rail units at the head and the tail gradually rises towards the end.

8. The carrier board according to claim 1, wherein The distance between two adjacent guide rail units is 0.1 mm to 2 mm.

9. The carrier board according to claim 1, wherein The materials of the guide rail units are all metal materials, and the materials of the guide rail units are selected from one of aluminum, nickel, aluminum alloy, titanium alloy, Monel alloy, Invar alloy, stainless steel alloy, Hastelloy alloy and platinum-iridium alloy materials.

10. The carrier board according to claim 1, wherein The materials of the guide rail units are all ceramic materials, and the materials of the guide rail units are selected from one of talc ceramics, forsterite ceramics, cordierite ceramics, spinel ceramics, mullite ceramics, glass ceramics, sialon ceramics, yttrium fluoride ceramics, silicon nitride ceramics, magnesium oxide ceramics, beryllium oxide ceramics, cerium oxide ceramics, boron nitride ceramics, boron carbide ceramics, alumina ceramics, yttrium oxide ceramics, aluminum nitride ceramics, silicon carbide ceramics, zirconia ceramics and bismuth oxide ceramics.

11. The carrier board according to claim 1, wherein The material of the integral guide rail strip is carbon fiber.

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