Six-degree-of-freedom flexible parallel active vibration isolation platform

Abstract

The utility model discloses a six-degree-of-freedom flexible parallel active vibration isolation platform which comprises an effective load platform, a first decoupling actuation supporting leg, a second decoupling actuation supporting leg, an actuator and a lower platform arranged under the effective load platform. The three first decoupling actuation supporting legs are evenly distributed and transversely and fixedly arranged on the side wall of the effective load platform, and the tail ends of the first decoupling actuation supporting legs are fixedly connected with the corresponding positions of the lower platform. The three second decoupling actuation supporting legs are evenly distributed and transversely and fixedly arranged on the side wall of the effective load platform, and the first decoupling actuation supporting legs and the second decoupling actuation supporting legs are arranged at intervals. According to the utility model, the six groups of parallel straight plate flexible beams guide the actuator to translate and apply load to the middle rigid body, and then the middle rigid body is used for actively controlling micro vibration generated by the payload platform to the first folding flexible beams and the second folding flexible beams respectively.

Description

Technical Field

[0001] The utility model relates to the technical field of vibration isolation, in particular to a six-degree-of-freedom flexible parallel active vibration isolation platform. Background Technique

[0002] Vibration isolation technology is widely applied in various fields of life, such as precision engineering structures like household appliances, automobiles, and spacecraft. Vibration isolation technology can generally be divided into passive vibration isolation technology and active vibration isolation technology according to whether it needs to intake energy from the outside world. Passive vibration isolation technology does not need to intake any energy from the outside world and only relies on passive vibration isolation elements, such as springs, air springs, rubber, etc. to achieve vibration isolation. However, due to the particularity of precision objects, there are often higher requirements for the weight, flexibility, etc. of the vibration isolation and damping devices, and there may be problems such as multiple disturbance sources, complex vibration source conditions, uncertain disturbance directions and times. This requires the vibration isolation device to have the characteristics of wide frequency band and multiple degrees of freedom. Passive control mainly aims at vibrations with higher frequencies and is not applicable to low-frequency vibrations. Therefore, it cannot be applied to the vibrations of precision objects under variable working conditions. Content of the Utility Model

[0003] The purpose of the utility model is to provide a six-degree-of-freedom flexible parallel active vibration isolation platform for actively isolating the micro-vibrations generated in the extreme manufacturing environment when facing precision objects.

[0004] The utility model realizes the above purpose through the following technical solutions:

[0005] A six-degree-of-freedom flexible parallel active vibration isolation platform includes a payload platform, a first decoupling actuating leg, a second decoupling actuating leg, an actuator, and a lower platform. The lower platform is arranged directly below the payload platform. The three first decoupling actuating legs are evenly distributed and horizontally fixed on the side wall of the payload platform. The ends of the first decoupling actuating legs are respectively fixedly connected to the corresponding positions of the lower platform. The three second decoupling actuating legs are evenly distributed and horizontally fixed on the side wall of the payload platform, and the first decoupling actuating legs and the second decoupling actuating legs are arranged at intervals. The ends of the second decoupling actuating legs are respectively fixedly connected to the corresponding positions of the lower platform. The actuators are installed on both the first decoupling actuating legs and the second decoupling actuating legs.

[0006] Preferably, the first decoupling actuating leg includes: a first folding flexible beam, an intermediate rigid body, a fixed rigid body, and a straight plate flexible beam. One end of the first folding flexible beam is fixedly connected to the side wall of the payload platform. The other end of the first folding flexible beam is horizontally and fixedly provided with the intermediate rigid body. The straight plate flexible beams are horizontally arranged at both ends of the intermediate rigid body respectively. The fixed rigid body is vertically arranged between the ends of the straight plate flexible beams, and the fixed rigid body is fixedly connected to the corresponding positions of the lower platform respectively. Through this setting, the parallel straight plate flexible beams guide the actuator to perform translational actuation, and a load can be applied to the intermediate rigid body. The first folding flexible beam is used to precisely control the small vibration of the horizontal payload of the payload platform.

[0007] Preferably, the second decoupling actuating leg includes: a second folding flexible beam, an intermediate rigid body, and a straight plate flexible beam. One end of the second folding flexible beam is fixedly connected to the side wall of the payload platform. The other end of the second folding flexible beam is horizontally and fixedly provided with the intermediate rigid body. The straight plate flexible beams are horizontally arranged at both ends of the intermediate rigid body. The ends of the straight plate flexible beams are respectively fixedly connected to the corresponding positions of the lower platform. Through this setting, the parallel straight plate flexible beams guide the actuator to perform translational actuation, and a load can be applied to the intermediate rigid body. The second folding flexible beam is used to precisely control the small vibration of the vertical payload of the payload platform.

[0008] Preferably, the actuator is one of a flat voice coil motor, a piezoelectric stack, or a piezoelectric sheet. Through this setting, different types of actuators can be selected according to the vibration isolation frequency band of the vibration damping object. When the vibration applied to the payload platform is a high-frequency vibration, a flat voice coil motor is used for active control; when the vibration applied to the payload platform is a low-frequency vibration, a piezoelectric stack and a piezoelectric sheet are used for active control.

[0009] Preferably, the actuator is the piezoelectric sheet. Two piezoelectric sheets are in a group, and one piezoelectric sheet is oppositely mounted on the outer walls of the straight plate flexible beams at both ends of the intermediate rigid body respectively. Through this setting, it is convenient for the installation of the piezoelectric sheet. When using the piezoelectric sheet, it has a good active control effect on low-frequency vibration.

[0010] Preferably, the actuator is the flat voice coil motor or the piezoelectric stack. The flat voice coil motor or the piezoelectric stack is arranged between the straight plate flexible beams at both ends of the intermediate rigid body. Through this setting, different types of actuators can be selected according to the vibration isolation frequency band of the vibration damping object. It has strong practicability and high reliability, and can meet various usage requirements. When using the flat voice coil motor, it has a good active control effect on high-frequency vibration; when using the piezoelectric stack, it has a good active control effect on low-frequency vibration.

[0011] Preferably, actuator connectors are respectively and horizontally fixedly arranged on the intermediate rigid body on the first decoupling actuating leg and the fixed rigid body, and both ends of the flat voice coil motor or the piezoelectric stack are respectively fixedly connected to one actuator connector; actuator connectors are respectively and horizontally fixedly arranged on the intermediate rigid body on the second decoupling actuating leg and at corresponding positions of the lower platform, and both ends of the flat voice coil motor or the piezoelectric stack are respectively fixedly connected to one actuator connector. Such an arrangement facilitates the installation of the flat voice coil motor or the piezoelectric stack.

[0012] Preferably, it further includes a sensor and a controller. The sensor is installed on the payload platform, the sensor is electrically connected to the controller, and the controller is electrically connected to the actuator. Through such an arrangement, the sensor can detect the vibration condition of the payload platform and transmit the data to the controller. The controller analyzes these data, generates instructions through an active control algorithm, and transmits the instructions to the actuator. The actuator then generates opposite vibrations according to the instructions to cancel out the original vibrations received by the payload platform.

[0013] Preferably, the materials of the payload platform, the first decoupling actuating leg, the second decoupling actuating leg, and the lower platform are all made of 7075 aluminum alloy. Such an arrangement has high cost performance, is easy to process, and has high reliability.

[0014] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0015] 1. In this application, six groups of mutually parallel straight plate flexible beams guide the actuator to perform translational actuation to apply a load to the intermediate rigid body, and then the intermediate rigid body respectively performs active control on the minute vibrations generated by each first folding flexible beam and each second folding flexible beam to the payload platform.

[0016] 2. The parallel platform adopted in this application not only has multiple degrees of freedom, high stiffness, and high load-bearing capacity, but also can remain stable without external energy input.

[0017] 3. The flexible mechanism in this application transmits force and motion through the elastic deformation of the flexible unit, and has the advantages of no friction, no assembly error, and easy processing, and can be used as a precision vibration control mechanism.

[0018] 4. When the flat voice coil motor is adopted in this application, it has a good active control effect on high-frequency vibrations; when the piezoelectric stack and piezoelectric wafers are adopted, it has a good active control effect on low-frequency vibrations. Through such an arrangement, different types of actuators can be selected according to the vibration isolation frequency band of the vibration damping object, with strong practicability and high reliability, and can meet various usage requirements. Description of the Drawings

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0020] Figure 1 : It is an axonometric view of the vibration isolation platform with a flat voice coil motor as the actuator of the present invention;

[0021] Figure 2 : It is an axonometric view of the vibration isolation platform with a piezoelectric stack as the actuator of the present invention;

[0022] Figure 3 : It is an axonometric view of the vibration isolation platform with a piezoelectric sheet as the actuator of the present invention;

[0023] Figure 4 : It is a top view of the vibration isolation platform with a flat voice coil motor as the actuator of the present invention;

[0024] Figure 5 : It is a top view of the vibration isolation platform with a piezoelectric stack as the actuator of the present invention;

[0025] Figure 6 : It is a top view of the vibration isolation platform with a piezoelectric sheet as the actuator of the present invention;

[0026] Figure 7 : It is a front view of the vibration isolation platform with a flat voice coil motor as the actuator of the present invention;

[0027] Figure 8 : It is a front view of the vibration isolation platform with a piezoelectric stack as the actuator of the present invention;

[0028] Figure 9 : It is a front view of the vibration isolation platform with a piezoelectric sheet as the actuator of the present invention;

[0029] Figure 10 : It is an axonometric view of the payload platform of the present invention;

[0030] Figure 11 : It is an axonometric view of the first folding flexible beam of the present invention;

[0031] Figure 12 : It is an axonometric view of the second folding flexible beam of the present invention;

[0032] Figure 13 : It is an axonometric view of the flat voice coil motor of the present invention;

[0033] Figure 14 : It is the axonometric view of the piezoelectric stack described in the present utility model;

[0034] Figure 15 : It is the axonometric view of the piezoelectric sheet described in the present utility model;

[0035] Figure 16 : It is the axonometric view of the lower platform described in the present utility model;

[0036] Figure 17 : It is the axonometric view of the actuator connecting piece described in the present utility model;

[0037] Figure 18 : It is the mounting position diagram of the piezoelectric sheet and the straight plate flexible beam corresponding to the first folding flexible beam described in the present utility model;

[0038] Figure 19 : It is the mounting position diagram of the piezoelectric sheet and the straight plate flexible beam corresponding to the second folding flexible beam described in the present utility model.

[0039] The description of the reference numerals is as follows:

[0040] 1, Payload platform; 2, First folding flexible beam; 3, Second folding flexible beam; 4, Intermediate rigid body; 5, Fixed rigid body; 6, Straight plate flexible beam; 7, Actuator; 8, Lower platform; 9, Actuator connecting piece. Specific embodiments

[0041] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the present utility model, unless otherwise specified, the meaning of "a plurality" is two or more.

[0042] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be a direct connection or an indirect connection through an intermediate medium, and it may be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0043] The present utility model will be further described below with reference to the accompanying drawings:

[0044] Embodiment 1

[0045] As Figures 1 - 19 shown, a six-degree-of-freedom flexible parallel active vibration isolation platform includes a payload platform 1, a first decoupling actuator leg, a second decoupling actuator leg, an actuator 7, and a lower platform 8. The lower platform 8 is disposed directly below the payload platform 1. The three first decoupling actuator legs are evenly distributed and horizontally fixed on the side wall of the payload platform 1, and the ends of the first decoupling actuator legs are respectively fixedly connected to the corresponding positions of the lower platform 8. The three second decoupling actuator legs are evenly distributed and horizontally fixed on the side wall of the payload platform 1, and the first decoupling actuator legs and the second decoupling actuator legs are arranged at intervals. The ends of the second decoupling actuator legs are respectively fixedly connected to the corresponding positions of the lower platform 8. Actuators 7 are installed on both the first decoupling actuator legs and the second decoupling actuator legs.

[0046] Preferably, the first decoupling actuator leg includes a first folding flexible beam 2, an intermediate rigid body 4, a fixed rigid body 5, and a straight plate flexible beam 6. One end of the first folding flexible beam 2 is fixedly connected to the side wall of the payload platform 1. The other end of the first folding flexible beam 2 is horizontally fixedly provided with the intermediate rigid body 4. The straight plate flexible beams 6 are respectively horizontally arranged at both ends of the intermediate rigid body 4. A fixed rigid body 5 is vertically arranged between the ends of the straight plate flexible beams 6, and the fixed rigid body 5 is respectively fixedly connected to the corresponding positions of the lower platform 8. Through this setting, the parallel straight plate flexible beams 6 guide the actuator 7 to perform translational actuation, and a load can be applied to the intermediate rigid body 4, and the first folding flexible beam 2 is used to precisely control the minute vibration of the horizontal payload of the payload platform 1.

[0047] The second decoupling actuating leg includes: a second folding flexible beam 3, an intermediate rigid body 4, and a straight plate flexible beam 6. One end of the second folding flexible beam 3 is fixedly connected to the side wall of the payload platform 1. The other end of the second folding flexible beam 3 is horizontally fixedly provided with an intermediate rigid body 4. Straight plate flexible beams 6 are horizontally arranged at both ends of the intermediate rigid body 4. The ends of the straight plate flexible beams 6 are respectively fixedly connected to corresponding positions of the lower platform 8. Through this arrangement, the parallel straight plate flexible beams 6 guide the actuator 7 to perform translational actuation, and a load can be applied to the intermediate rigid body 4, and the second folding flexible beam 3 is used to precisely control the minute vibration of the vertical payload of the payload platform 1.

[0048] The actuator 7 is one of a flat voice coil motor, a piezoelectric stack, or a piezoelectric sheet. Through this arrangement, different types of actuators 7 can be selected according to the vibration isolation frequency band of the vibration isolation object. When the vibration applied to the payload platform 1 is a high-frequency vibration, a flat voice coil motor is used for active control; when the vibration applied to the payload platform 1 is a low-frequency vibration, a piezoelectric stack and a piezoelectric sheet are used for active control.

[0049] The actuator 7 is a piezoelectric sheet. Two piezoelectric sheets are in a group, and a piezoelectric sheet is respectively mounted oppositely on the outer walls of the straight plate flexible beams 6 at both ends of the intermediate rigid body 4. Through this arrangement, it is convenient for the installation of the piezoelectric sheet. When using the piezoelectric sheet, it has a good active control effect on low-frequency vibration.

[0050] The actuator 7 is a flat voice coil motor or a piezoelectric stack. The flat voice coil motor or the piezoelectric stack is arranged between the straight plate flexible beams 6 at both ends of the intermediate rigid body 4. Through this arrangement, different types of actuators 7 can be selected according to the vibration isolation frequency band of the vibration isolation object, with strong practicability and high reliability, and can meet various usage requirements. When using the flat voice coil motor, it has a good active control effect on high-frequency vibration; when using the piezoelectric stack, it has a good active control effect on low-frequency vibration.

[0051] Actuator connectors 9 are respectively horizontally fixedly provided on the intermediate rigid body 4 and the fixed rigid body 5 of the first decoupling actuating leg. Both ends of the flat voice coil motor or the piezoelectric stack are respectively fixedly connected to an actuator connector 9; actuator connectors 9 are respectively horizontally fixedly provided at corresponding positions of the intermediate rigid body 4 and the lower platform 8 of the second decoupling actuating leg. Both ends of the flat voice coil motor or the piezoelectric stack are respectively fixedly connected to an actuator connector 9. Through this arrangement, it is convenient for the installation of the flat voice coil motor or the piezoelectric stack.

[0052] It also includes a sensor and a controller. The sensor is installed on the payload platform 1, electrically connected to the controller, and the controller is electrically connected to the actuator 7. With this setup, the sensor can detect the vibration of the payload platform 1 and transmit the data to the controller. The controller analyzes this data, generates instructions through an active control algorithm, and transmits them to the actuator 7. The actuator then generates opposite vibrations according to the instructions to cancel out the original vibrations received by the payload platform.

[0053] The payload platform 1, the first decoupling actuating leg, the second decoupling actuating leg, and the lower platform 8 are all made of 7075 aluminum alloy. With this setup, it has high cost performance, is easy to process, and has high reliability.

[0054] Working principle: This application adopts the active vibration isolation technology, also known as active vibration isolation, which is a technology that cancels out the original vibration by applying a force or vibration in the opposite direction.

[0055] This application relies on external energy to drive the actuator, i.e., the actuator 7, to generate opposite vibrations. The active vibration isolation system also includes three main parts: a sensor, a controller, and an actuator. The sensor uses an RS-485 spectrum type vibration transmitter, and the controller uses a TMS320F28132 type DSP chip of Texas Instruments as the control core. Both the sensor and the controller are purchased as off-the-shelf products, and their specific parameters are not described in detail here. The sensor can detect the vibration of the payload platform 1 and transmit the data to the controller. The controller analyzes this data, generates instructions through an active control algorithm, and transmits them to the actuator 7. The actuator 7 then generates opposite vibrations according to the instructions.

[0056] At the same time, six groups of mutually parallel straight plate flexible beams 6 guide the actuator 7 to perform translational actuation and apply loads to the middle rigid body 4. Then, through the middle rigid body 4, active control can be carried out on the minute vibrations generated by each first folding flexible beam 2 and each second folding flexible beam 3 on the payload platform 1, so as to cancel out the original vibrations received by the payload platform 1 and achieve the purpose of vibration reduction.

[0057] Moreover, this application can select different types of actuators 7 according to the vibration isolation frequency band of the vibration reduction object, with strong practicability and high reliability, and can meet various usage requirements. When the vibration applied to the payload platform 1 is a high-frequency vibration, a flat voice coil motor is used for active control, and the flat voice coil motor has a relatively good active control effect on high-frequency vibrations. When the vibration applied to the payload platform 1 is a low-frequency vibration, a piezoelectric stack and piezoelectric wafers are used for active control, and the piezoelectric stack and piezoelectric wafers have a relatively good active control effect on low-frequency vibrations.

[0058] The above has shown and described the basic principles, main features, and advantages of the present utility model. Those skilled in the art should understand that the present utility model is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principles of the present utility model. Without departing from the spirit and scope of the present utility model, the present utility model will have various changes and improvements, and these changes and improvements all fall within the scope of the present utility model claimed.

Claims

1. A six-degree-of-freedom flexible parallel active vibration isolation platform, comprising a payload platform (1), a first decoupling actuator leg, a second decoupling actuator leg, an actuator (7) and a lower platform (8), characterized in that: The lower platform (8) is arranged directly below the payload platform (1). The three first decoupling actuating legs are evenly distributed and horizontally fixed on the side wall of the payload platform (1), and the ends of the first decoupling actuating legs are respectively fixedly connected to the corresponding positions of the lower platform (8); the three second decoupling actuating legs are evenly distributed and horizontally fixed on the side wall of the payload platform (1), and the first decoupling actuating legs and the second decoupling actuating legs are arranged at intervals. The ends of the second decoupling actuating legs are respectively fixedly connected to the corresponding positions of the lower platform (8); the actuators (7) are installed on both the first decoupling actuating legs and the second decoupling actuating legs.

2. The six-degree-of-freedom flexible parallel active vibration isolation platform according to claim 1, wherein: The first decoupling actuating leg includes: a first folding flexible beam (2), an intermediate rigid body (4), a fixed rigid body (5) and a straight plate flexible beam (6). One end of the first folding flexible beam (2) is fixedly connected to the side wall of the payload platform (1), the other end of the first folding flexible beam (2) is horizontally fixedly provided with the intermediate rigid body (4), the straight plate flexible beams (6) are respectively horizontally arranged at both ends of the intermediate rigid body (4), and the fixed rigid body (5) is vertically arranged between the ends of the straight plate flexible beams (6), and the fixed rigid body (5) is respectively fixedly connected to the corresponding positions of the lower platform (8).

3. A six-degree-of-freedom flexible parallel active vibration isolation platform according to claim 2, characterized in that: The second decoupling actuating leg includes: a second folding flexible beam (3), an intermediate rigid body (4) and a straight plate flexible beam (6). One end of the second folding flexible beam (3) is fixedly connected to the side wall of the payload platform (1), the other end of the second folding flexible beam (3) is horizontally fixedly provided with the intermediate rigid body (4), the straight plate flexible beams (6) are horizontally arranged at both ends of the intermediate rigid body (4), and the ends of the straight plate flexible beams (6) are respectively fixedly connected to the corresponding positions of the lower platform (8).

4. A six-degree-of-freedom flexible parallel active vibration isolation platform according to claim 3, characterized in that: The actuator (7) is one of a flat voice coil motor, a piezoelectric stack or a piezoelectric sheet.

5. A six-degree-of-freedom flexible parallel active vibration isolation platform according to claim 4, characterized in that: The actuator (7) is the piezoelectric sheet. Two piezoelectric sheets are in a group, and one piezoelectric sheet is respectively mounted on the outer walls of the straight plate flexible beams (6) at both ends of the intermediate rigid body (4) relatively.

6. A six-degree-of-freedom flexible parallel active vibration isolation platform according to claim 4, characterized in that: The actuator (7) is the flat voice coil motor or the piezoelectric stack. The flat voice coil motor or the piezoelectric stack is arranged between the straight plate flexible beams (6) at both ends of the intermediate rigid body (4).

7. A six-degree-of-freedom flexible parallel active vibration isolation platform according to claim 6, characterized in that: Actuator connectors (9) are respectively horizontally fixedly arranged on the intermediate rigid body (4) and the fixed rigid body (5) on the first decoupling actuating leg. Both ends of the flat voice coil motor or the piezoelectric stack are respectively fixedly connected to an actuator connector (9); actuator connectors (9) are respectively horizontally fixedly arranged at the corresponding positions of the intermediate rigid body (4) and the lower platform (8) on the second decoupling actuating leg. Both ends of the flat voice coil motor or the piezoelectric stack are respectively fixedly connected to an actuator connector (9).

8. A six-degree-of-freedom flexible parallel active vibration isolation platform according to claim 1, characterized in that: It further includes a sensor and a controller. The sensor is installed on the payload platform (1), the sensor is electrically connected to the controller, and the controller is electrically connected to the actuator (7).

9. A six-degree-of-freedom flexible parallel active vibration isolation platform according to claim 1, characterized in that: The materials of the payload platform (1), the first decoupling actuating leg, the second decoupling actuating leg, and the lower platform (8) are all made of 7075 aluminum alloy.

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