Novel energy-saving disc surface for analyzing and conveying electronic-grade sample gas

Abstract

The utility model relates to the technical field of energy-saving disc surfaces, and particularly discloses a novel energy-saving disc surface for analyzing and conveying electronic-grade sample gas, which comprises a purging pipeline assembly, a sample gas inlet assembly, a sample gas outlet assembly and a PLC (Programmable Logic Controller) capable of remotely controlling the purging pipeline assembly, the sample gas inlet assembly and the sample gas outlet assembly to work, through cooperation of the pneumatic purging valve group, the gas sample feeding valve group, the filter valve group, the one-way valve group and the sample discharging valve group, transmitted gas is transmitted in a one-way mode through the one-way valve group, the backflow phenomenon of the gas is effectively prevented, the gas transmitted in the one-way mode is filtered through the filter valve group, impurities existing in the transmitted gas can be effectively removed, and the quality of the gas is improved. Therefore, the analysis result can be prevented from being influenced by impurities and backflow mixing of the gas, and the accuracy of the gas analysis result is improved; remote operation of purging and sample injection can be realized through the PLC, and meanwhile, a large number of valves and pipelines are saved, so that the disc surface is simpler.

Description

Technical Field

[0001] The utility model belongs to the technical field of energy-saving panels, and particularly relates to a new energy-saving panel for the analysis and transportation of electronic-grade sample gas. Background Technique

[0002] The new energy-saving panel for the analysis and transportation of electronic-grade sample gas is a gas transportation system, which includes a purging component, a reserved air inlet component, an air inlet component, and an air outlet component for maintaining the cleanliness of the gas flow path and ensuring the purity of the gas. The reserved air inlet component is connected to the air inlet component and is used to introduce additional gas or adjust the pressure when needed; the air inlet component is responsible for introducing external gas into the system for subsequent analysis and transportation; the air outlet component discharges the processed or analyzed gas from the system. Through the joint operation of these components, the purity and stability of the gas during transportation are ensured.

[0003] For example, the patent document with the application number 202023337285.8 discloses a new energy-saving panel for gas transportation, which includes a purging component, a reserved air inlet component, an air inlet component, and an air outlet component. The reserved air inlet component is located on the side of the air inlet component and is connected to the air inlet component. The bottom of the air inlet component is fixedly connected to the air outlet component, and the middle of the air outlet component is connected to the purging component. The beneficial effect of this utility model is that the structure design of this utility model is reasonable and the layout is compact. By setting a valve body group to connect the air outlet components to each other, and at the same time, the valve body components are connected to each other and connected to the purging component, the simultaneous purging of multiple groups of air outlet components can be realized, saving a large number of valves and pipelines, and making the panel more concise at the same time.

[0004] However, no filter is provided on the inlet pipeline of the above new energy-saving panel. During gas transmission, impurities and backflow may exist in the gas, contaminating the sampled gas and affecting the accuracy of the sample gas analysis results. Therefore, we need to propose a new energy-saving panel for the analysis and transportation of electronic-grade sample gas to solve the above existing problems and improve the accuracy of the sample gas analysis results. Summary of the Utility Model

[0005] The purpose of the present utility model is to provide a new energy-saving panel for the analysis and transportation of electronic-grade sample gas. Through the cooperation between a pneumatic purging valve group, a gas sample injection valve group, a filter valve group, a check valve group, and a sample outlet valve group, remote operation of purging and injection can be realized while saving a large number of valves and pipelines, making the panel more concise, and preventing impurities and backflow mixing of the gas from affecting the analysis results, so as to solve the problems raised in the above background technique.

[0006] To achieve the above purpose, the present utility model adopts the following technical solutions:

[0007] A new energy-saving disk surface for the analysis and transportation of electronic-grade sample gas, including a purge pipeline assembly, a sample gas inlet assembly, a sample gas outlet assembly, and a PLC controller capable of remotely controlling the operation of the purge pipeline assembly, the sample gas inlet assembly, and the sample gas outlet assembly;

[0008] The purge pipeline assembly includes a pneumatic purge valve group and a first pressure sensor, and the pneumatic purge valve group and the first pressure sensor are connected through a pipeline;

[0009] The sample gas inlet assembly includes a gas sample injection valve group, a one-way valve group, and a filter valve group. One end of the gas sample injection valve group and the first pressure sensor away from the pneumatic purge valve group are both connected to one end of the one-way valve group, and the other end of the one-way valve group is connected to one end of the filter valve group;

[0010] The sample gas outlet assembly includes a sample outlet valve group connected to the other end of the filter valve group, and a second pressure sensor and a flow sensor are arranged on the connecting pipeline of the sample outlet valve group.

[0011] Preferably, the pneumatic purge valve group includes a first pneumatic valve for purge air intake, a first floating valve connected to the air outlet end of the first pneumatic valve, and a constant flow valve connected to the air outlet end of the first floating valve. The first pressure sensor is installed on the pipeline connecting the constant flow valve and the one-way valve group.

[0012] Preferably, the gas sample injection valve group includes a standard gas inlet valve and a plurality of sample gas injection valves. The air outlet end of each sample gas injection valve is connected to a second floating valve, and the standard gas inlet valve and the plurality of second floating valves are all connected to the air inlet end of the one-way valve group.

[0013] Preferably, the sample outlet valve group includes a tail gas outlet valve, a vacuum outlet valve, and a plurality of exhaust pneumatic valves. The plurality of exhaust pneumatic valves, the vacuum outlet valve, and the tail gas outlet valve are connected in parallel in sequence. The second pressure sensor and the flow sensor are both installed on the pipeline connecting the exhaust pneumatic valve and the vacuum outlet valve.

[0014] Preferably, the one-way valve group includes a plurality of one-way valves, and the first pressure sensor, the second floating valve, the standard gas inlet valve, the tail gas outlet valve, and the vacuum outlet valve each correspond to a one-way valve.

[0015] Preferably, the filter valve group includes a plurality of filter valves. Each one-way valve is correspondingly connected to a filter valve, and a driving gas inlet pipeline for driving gas to enter is connected to the filter valve.

[0016] Preferably, the PLC controller is equipped with a touch screen, a human-machine interface is set on the touch screen, and a standard gas button and a sample gas button are set on the human-machine interface.

[0017] A new energy-saving panel for electronic-grade sample gas analysis and transportation proposed by the present utility model has the following advantages compared with the prior art:

[0018] 1. Through the cooperation among the pneumatic purging valve group, the gas sample injection valve group, the filter valve group, the one-way valve group and the sample outlet valve group, the transmission gas is unidirectionally transmitted through the one-way valve group, effectively preventing the gas from flowing back. The gas after unidirectional transmission is filtered by the filter valve group, which can effectively remove the impurities existing in the transmission gas, thus preventing the influence of the mixture of impurities and backflow of the gas on the analysis result and improving the accuracy of the gas analysis result.

[0019] 2. Through the cooperation of the PLC controller with the purging pipeline assembly, the sample gas inlet assembly and the sample gas outlet assembly, it can realize remote operation of purging and sampling, and at the same time, a large number of valves and pipelines are saved, making the panel more concise. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 is the system block diagram of the present utility model;

[0021] Figure 2 is the system block diagram of the purging pipeline assembly, the sample gas inlet assembly and the sample gas outlet assembly of the present utility model;

[0022] Figure 3 is the schematic principle diagram of the present utility model;

[0023] In the figure: 11. The first pressure sensor; 12. The first pneumatic valve; 13. The first floating valve; 14. The constant flow valve; 21. The calibration gas inlet valve; 22. The sample gas injection valve; 23. The second floating valve; 31. The one-way valve; 41. The filter valve; 51. The tail gas outlet valve; 52. The vacuum outlet valve; 53. The exhaust pneumatic valve; 6. The second pressure sensor; 7. The flow sensor. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0024] The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. The specific embodiments described herein are only used to explain the present utility model, and are not used to limit the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0025] The present utility model provides as Figures 1-3A new energy-saving panel for electronic-grade sample gas analysis and transportation, comprising a purge pipeline assembly, a sample gas inlet assembly, a sample gas outlet assembly, and a PLC controller capable of remotely controlling the operations of the purge pipeline assembly, the sample gas inlet assembly, and the sample gas outlet assembly;

[0026] During remote control, a corresponding control program is written in the PLC controller. This program controls the purge and the inlet and outlet of the sample gas according to the set logic. The program can respond to commands from remote or automatically execute actions based on detected process parameters. The first pressure sensor, the second pressure sensor, and the flow sensor are used to monitor the system status, and different valves are used to implement the control commands. The PLC controller needs to have an interface for communicating with a remote control system (such as a SCADA system or other industrial communication networks) to receive remote instructions and transmit back the system status. Through the cooperation of the PLC controller with the purge pipeline assembly, the sample gas inlet assembly, and the sample gas outlet assembly, it is possible to achieve remote operation of purging and sampling while saving a large number of valves and pipelines, making the panel more concise.

[0027] The purge pipeline assembly includes a pneumatic purge valve group and a first pressure sensor 11, and the pneumatic purge valve group and the first pressure sensor 11 are connected through a pipeline;

[0028] The pneumatic purge valve group includes a first pneumatic valve 12 for purge inlet, a first floating valve 13 connected to the outlet end of the first pneumatic valve 12, and a constant flow valve 14 connected to the outlet end of the first floating valve 13. The first pressure sensor 11 is installed on the pipeline connecting the constant flow valve 14 and the check valve group.

[0029] The sample gas inlet assembly includes a gas sample injection valve group, a check valve group, and a filter valve group. One end of the gas sample injection valve group and the first pressure sensor 11, which is far from the pneumatic purge valve group, are both connected to one end of the check valve group. The other end of the check valve group is connected to one end of the filter valve group, enabling the gas to be unidirectionally transmitted through the check valve group during transmission, effectively preventing gas backflow. The gas after unidirectional transmission is filtered by the filter valve group, which can effectively remove impurities existing in the transmitted gas, thereby preventing the influence of gas impurities and backflow mixture on the analysis result and improving the accuracy of the gas analysis result;

[0030] The gas sample injection valve group includes a standard gas inlet valve 21 and multiple sample gas injection valves 22. The outlet end of each sample gas injection valve 22 is connected to a second floating valve 23, and the standard gas inlet valve 21 and multiple second floating valves 23 are both connected to the inlet end of the check valve group.

[0031] The sampled gas outlet assembly includes a sampling valve group communicated with the other end of the filtering valve group. A second pressure sensor 6 and a flow sensor 7 are arranged on the connecting pipeline of the sampling valve group. The filtering valve group includes a plurality of filtering valves 41. The filtering valve 41 is a device used to remove impurities in the medium in the pipeline system. The filtering valve 41 generally consists of a cylinder body, a filter screen, a sewage discharge part, a transmission device, etc. It mainly uses the physical barrier method to capture solid particles in the flowing liquid or gas by using the filter screen or other filter materials, so as to achieve the purpose of cleaning the medium.

[0032] The sampling valve group includes an exhaust gas outlet valve 51, a vacuum outlet valve 52 and a plurality of exhaust pneumatic valves 53. The plurality of exhaust pneumatic valves 53, the vacuum outlet valve 52 and the exhaust gas outlet valve 51 are communicated in parallel in sequence. The second pressure sensor 6 and the flow sensor 7 are both installed on the pipeline where the exhaust pneumatic valve 53 is communicated with the vacuum outlet valve 52.

[0033] The one-way valve group includes a plurality of one-way valves 31. The first pressure sensor 11, the second floating valve 23, the standard gas inlet valve 21, the exhaust gas outlet valve 51 and the vacuum outlet valve 52 each correspond to a one-way valve 31. By using the one-way valve 31, the reverse flow of compressed air can be prevented, ensuring the stable operation of the pneumatic system and avoiding the backflow of gas and mixing with the sampled gas to affect the result of sampled gas analysis.

[0034] The filtering valve group includes a plurality of filtering valves 41. Each one-way valve 31 is correspondingly connected to a filtering valve 41. A driving gas inlet pipeline for driving gas to enter is communicated on the filtering valve 41.

[0035] The PLC controller has a touch screen. A human-machine interface is set on the touch screen. A standard gas button and a sampled gas button are set on the human-machine interface. Setting the human-machine interface enables the operator to directly monitor and operate the system in the control room without the need to operate on-site.

[0036] Before the standard gas operation or the sampled gas operation, the PLC controller first sets the pressure value of the first pressure sensor 11, and the first pneumatic valve 12 opens. When the pressure of the first pressure sensor 11 reaches the set value, the first pneumatic valve 12 automatically closes, and the exhaust gas outlet valve 51 automatically opens. When the pressure of the second pressure sensor 6 reaches 0 MPa, the exhaust gas outlet valve 51 automatically closes, and then the vacuum outlet valve 52 automatically opens. When the pressure of the second pressure sensor 6 reaches -0.1 MPa, the vacuum outlet valve 52 automatically closes to complete the purging of the gas transmission pipeline.

[0037] When the PLC controller is in the standard gas operation or sample gas operation, after repeating the gas transmission pipeline purging step 5 times, the standard gas inlet valve 21 automatically opens. When the pressure of the second pressure sensor 6 reaches the set value, the standard gas inlet valve 21 closes, and the tail gas outlet valve 51 automatically opens. When the pressure of the second pressure sensor 6 reaches 0 MPa, the tail gas outlet valve 51 closes automatically. Then the vacuum outlet valve 52 automatically opens. When the pressure of the second pressure sensor 6 reaches -0.1 MPa, the vacuum outlet valve 52 closes automatically. After repeating the above steps 5 times, the standard gas inlet valve 21 automatically opens. At this time, only the corresponding exhaust pneumatic valve 53 needs to be slowly adjusted.

[0038] Before the operation starts, the user inputs commands through the human-machine interface of the PLC controller to set the target pressure value of the first pressure sensor 11.

[0039] Purging stage: The PLC controller commands to open the first pneumatic valve 12, and the gas starts to flow and passes through the constant flow valve 14. When the first pressure sensor 11 detects that the preset pressure value is reached, the first pneumatic valve 12 automatically closes to complete the purging.

[0040] Exhaust stage: Subsequently, the tail gas outlet valve 51 opens to discharge the gas until the second pressure sensor 6 detects 0 MPa. Then the tail gas outlet valve 51 is closed, and the vacuum outlet valve 52 is opened for deep exhaust until -0.1 MPa to ensure that there is no residual gas in the pipeline.

[0041] Sampling stage: Before the standard gas or sample gas operation, the above purging and exhaust steps are repeated five times to ensure the cleanliness of the transmission pipeline. After that, the standard gas inlet valve 21 opens to allow the standard gas or sample gas to enter. When the second pressure sensor 6 detects the set pressure value, the sampling valve is closed, and the exhaust step is performed again to remove the excess sample gas.

[0042] Analysis stage: After multiple purgings and exhausts, the standard gas inlet valve 21 opens again. At this time, the operator can slowly adjust the exhaust pneumatic valve 53 to precisely control the flow rate and pressure of the sample gas for accurate analysis.

[0043] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A new energy-saving disk surface for the analysis and transportation of electronic-grade sample gas, characterized in that: It includes a purging pipeline assembly, a sample gas inlet assembly, a sample gas outlet assembly, and a PLC controller capable of remotely controlling the operation of the purging pipeline assembly, the sample gas inlet assembly, and the sample gas outlet assembly; The purging pipeline assembly includes a pneumatic purging valve group and a first pressure sensor (11), and the pneumatic purging valve group and the first pressure sensor (11) are connected through a pipeline; The sample gas inlet assembly includes a gas sample injection valve group, a check valve group, and a filter valve group. One end of the gas sample injection valve group and the first pressure sensor (11) away from the pneumatic purging valve group are both connected to one end of the check valve group, and the other end of the check valve group is connected to one end of the filter valve group; The sample gas outlet assembly includes a sample outlet valve group connected to the other end of the filter valve group, and a second pressure sensor (6) and a flow sensor (7) are arranged on the connecting pipeline of the sample outlet valve group.

2. The novel energy-saving disk surface for electronic-grade sample gas analysis and transportation according to claim 1, wherein: The pneumatic purging valve group includes a first pneumatic valve (12) for purging inlet air, a first floating valve (13) connected to the outlet end of the first pneumatic valve (12), and a constant flow valve (14) connected to the outlet end of the first floating valve (13). The first pressure sensor (11) is installed on the pipeline connecting the constant flow valve (14) and the check valve group.

3. The novel energy-saving disk surface for electronic-grade sample gas analysis and transportation according to claim 2 is characterized in that: The gas sample injection valve group includes a standard gas inlet valve (21) and multiple sample gas injection valves (22). The outlet end of each sample gas injection valve (22) is connected to a second floating valve (23), and the standard gas inlet valve (21) and multiple second floating valves (23) are both connected to the inlet end of the check valve group.

4. A novel energy-saving disk surface for electronic-grade sample gas analysis and transportation according to claim 3, characterized in that: The sample outlet valve group includes an exhaust gas outlet valve (51), a vacuum outlet valve (52), and multiple exhaust pneumatic valves (53). The multiple exhaust pneumatic valves (53), the vacuum outlet valve (52), and the exhaust gas outlet valve (51) are connected in parallel in sequence. The second pressure sensor (6) and the flow sensor (7) are both installed on the pipeline connecting the exhaust pneumatic valve (53) and the vacuum outlet valve (52).

5. A novel energy-saving disk surface for electronic-grade sample gas analysis and transportation according to claim 4, characterized in that: The check valve group includes multiple check valves (31), and the first pressure sensor (11), the second floating valve (23), the standard gas inlet valve (21), the exhaust gas outlet valve (51), and the vacuum outlet valve (52) each correspond to a check valve (31).

6. A novel energy-saving disk surface for electronic-grade sample gas analysis and transportation according to claim 5, characterized in that: The filter valve group includes multiple filter valves (41). Each check valve (31) is correspondingly connected to a filter valve (41), and a driving gas inlet pipeline for driving gas to enter is connected to the filter valve (41).

7. A novel energy-saving disk surface for electronic-grade sample gas analysis and transportation according to claim 6, characterized in that: The PLC controller is equipped with a touch screen, a human-machine interface is set on the touch screen, and a standard gas button and a sample gas button are set on the human-machine interface.

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