Test rotary table
By designing a test turntable for marble substrates and a dual-axis rotary rotary rotary, the problem of high testing costs of MEMS chips is solved, and multi-chip batch testing and testing accuracy is improved, reducing the cost and cycle of manufacturers.
Patent Information
- Application Number
- CN202422183088.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-06
- Publication Date
- 2025-07-18
- Estimated Expiration
- 2034-09-06
AI Technical Summary
The existing MEMS chip test equipment is expensive and difficult to achieve large-scale promotion, resulting in an increase in manufacturing costs and testing cycles for MEMS chip manufacturers, affecting economic benefits.
A test turntable including a marble substrate, a dual-axis rotating turntable and an elastic indenter was designed. It can rotate multiple chips in two-axis and multi-angle angles to ensure the stability and consistency of the chip's stress, and realize multi-chip batch testing.
Multi-chip batch testing is realized, ensuring the accuracy of the test and the stability of the chip's stress, reducing the testing cost and improving economic benefits.
Smart Images
Figure CN223123084U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of chip testing, in particular to a test turntable. Background Art
[0002] In recent years, the miniaturization trend of MEMS chips has become increasingly obvious, and the detection requirements for MEMS chips are also increasing continuously. There are a wide variety of MEMS, and hundreds of millions of MEMS are consumed every year in the world, and they are widely used in fields such as smart phones, automotive electronics, and intelligent manufacturing. And the market share of MEMS chips depends more on their own quality. The quality detection of MEMS chips usually requires the use of corresponding test sockets to achieve the control of the quality of MEMS chips. However, the existing products for MEMS chip testing have too high manufacturing costs and cannot be well promoted and applied on a larger scale, thus greatly increasing the manufacturing costs and test cycles of MEMS chip manufacturers, which is not conducive to improving their own economic benefits. Summary of the Utility Model
[0003] The purpose of the utility model is to provide a test turntable, which can rotate multiple chips in two axes and at multiple angles, so as to realize batch testing of multiple chips, and can also ensure the stability and consistency of the force on the chips during the rotation process, and ensure the test accuracy.
[0004] To achieve the above purpose, the technical scheme adopted by the utility model is: a test turntable, including: a horizontally arranged marble substrate, a first support plate, a second support plate vertically installed on the upper surface of the marble substrate, and a test carrier plate arranged between the first support plate and the second support plate. The test carrier plate is installed on the rotating part of a first turntable that can rotate around a first direction. The fixed part of the first turntable is installed on a rotating base, and the other end of the rotating base, which is rotatably connected to the first support plate, is installed on the rotating part of a second turntable that can rotate around a second direction. The fixed part of the second turntable is installed on the second support plate. Above the test carrier plate, a test board communicating with a host computer and a chip carrier plate electrically connected to the test board are sequentially arranged. On the upper surface of the chip carrier plate opposite to the test board, there are a number of chip sockets. On the lower surface of a pressing plate arranged above the chip carrier plate, there are a number of pressing heads corresponding to the chip sockets. When the pressing plate that can move in the vertical direction moves to the lowest position, the pressing heads are in pressing contact with the chips in the chip sockets.
[0005] The further improved scheme in the above technical scheme is as follows:
[0006] 1. In the above scheme, both the first support plate and the second support plate are marble support plates.
[0007] 2. In the above solution, a rotary motor and a wire routing slip ring for driving the rotating part to rotate are installed on each fixing part of the first turntable and the second turntable.
[0008] 3. In the above solution, the indenter is an elastic indenter.
[0009] 4. In the above solution, the indenter is a silica gel indenter, a rubber indenter or a polyurethane indenter.
[0010] Due to the application of the above technical solution, the utility model has the following advantages compared with the prior art:
[0011] The test turntable of the utility model includes a marble substrate arranged horizontally, a first support plate, a second support plate vertically installed on the upper surface of the marble substrate, and a test carrier plate arranged between the first support plate and the second support plate. The test carrier plate is installed on the rotating part of a first turntable that can rotate around a first direction. The fixing part of the first turntable is installed on a rotating base, and the other end of the rotating base rotatably connected to the first support plate at one end is installed on the rotating part of a second turntable that can rotate around a second direction. The fixing part of the second turntable is installed on the second support plate. Above the test carrier plate, a test board communicating with the host computer and a chip carrier board electrically connected to the test board are sequentially arranged. A plurality of chip sockets are arranged on the upper surface of the chip carrier board opposite to the test board. A plurality of indenters corresponding to the chip sockets are provided on the lower surface of a pressing plate arranged above the chip carrier board. When the pressing plate that can move in the vertical direction moves to the lowest position, the indenters are in pressing contact with the chips in the chip sockets, which can not only perform biaxial multi-angle rotation on multiple chips, thereby realizing batch testing of multiple chips, but also ensure the stability and consistency of the force on the chips during the rotation process, and ensure the accuracy of the test. Description of the Drawings
[0012] Att Figure 1 is a schematic structural diagram of the test turntable of the utility model;
[0013] Att Figure 2 is a partial structural schematic diagram of the test turntable of the utility model;
[0014] Att Figure 3 is Figure 2 the enlarged partial structural diagram in
[0015] In the above drawings: 100, chips; 1, marble substrate; 2, first support plate; 3, second support plate; 4, test carrier plate; 51, first turntable; 52, second turntable; 53, rotary motor; 54, wire routing slip ring; 6, rotating base; 7, test board; 8, chip carrier board; 9, chip socket; 10, pressing plate; 11, indenter. Detailed Embodiments
[0016] The present utility model can be further clearly understood through the specific embodiments given below, but they do not limit the present utility model.
[0017] Embodiment 1: A test turntable, comprising: a horizontally arranged marble substrate 1, a first support plate 2, a second support plate 3 vertically installed on the upper surface of the marble substrate 1, and a test carrier plate 4 arranged between the first support plate 2 and the second support plate 3. The test carrier plate 4 is installed on the rotating part of a first turntable 51 that can rotate around a first direction. The fixed part of the first turntable 51 is installed on a rotating base 6. One end of the rotating base 6 rotatably connected to the first support plate 2 is installed on the rotating part of a second turntable 52 that can rotate around a second direction. The fixed part of the second turntable 52 is installed on the second support plate 3. Above the test carrier plate 4, a test board 7 communicating with a host computer and a chip carrier plate 8 electrically connected to the test board 7 are sequentially arranged. On the upper surface of the chip carrier plate 8 opposite to the test board 7, a plurality of chip sockets 9 are arranged. On the lower surface of a pressing plate 10 arranged above the chip carrier plate 8, there are a plurality of pressing heads 11 corresponding to the chip sockets 9. When the pressing plate 10 that can move in the vertical direction moves to the lowest position, the pressing heads 11 are in pressing contact with the chips 200 in the chip sockets 9.
[0018] Both the above-mentioned first support plate 2 and the second support plate 3 are marble support plates.
[0019] On the fixed parts of the above-mentioned first turntable 51 and the second turntable 52, a rotating motor 53 and a wire-walking slip ring 54 for driving the rotation of their rotating parts are respectively installed. The first turntable, the second turntable, the rotating motor, and the wire-walking slip ring are all obtained through outsourcing and belong to the category of prior art, so they will not be elaborated in this application.
[0020] The above-mentioned pressing heads 11 are elastic pressing heads; the above-mentioned pressing heads 11 are rubber pressing heads.
[0021] Embodiment 2: A test turntable, comprising: a marble substrate 1 arranged horizontally, a first support plate 2, a second support plate 3 vertically installed on the upper surface of the marble substrate 1, and a test carrier plate 4 arranged between the first support plate 2 and the second support plate 3. The test carrier plate 4 is installed on the rotating part of a first turntable 51 that can rotate around a first direction. The fixed part of the first turntable 51 is installed on a rotating base 6. One end of the rotating base 6 rotatably connected to the first support plate 2 is installed on the rotating part of a second turntable 52 that can rotate around a second direction. The fixed part of the second turntable 52 is installed on the second support plate 3. Above the test carrier plate 4, a test board 7 communicating with a host computer and a chip carrier plate 8 electrically connected to the test board 7 are sequentially arranged. On the upper surface of the chip carrier plate 8 opposite to the test board 7, a plurality of chip sockets 9 are arranged. On the lower surface of a pressing plate 10 arranged above the chip carrier plate 8, a plurality of pressing heads 11 corresponding to the chip sockets 9 are provided. When the pressing plate 10 that can move in the vertical direction moves to the lowest position, the pressing heads 11 are in pressing contact with the chips 200 in the chip sockets 9.
[0022] On the fixed parts of the first turntable 51 and the second turntable 52 respectively, a rotating motor 53 and a wire slip ring 54 for driving the rotation of their rotating parts are installed.
[0023] The above-mentioned pressing head 11 is a rubber pressing head.
[0024] The first turntable and the second turntable are driven to rotate by the rotating motor, so as to drive the chips to be tested in the chip sockets to rotate in two directions. During this process, the performance of the chips is tested, and the chips are classified according to the test results.
[0025] When the above-mentioned test turntable is adopted, it can not only perform multi-axis multi-angle rotation on multiple chips to realize batch testing of multiple chips, but also ensure the stability and consistency of the force on the chips during the rotation process, and ensure the accuracy of the test.
[0026] The above embodiments are only used to illustrate the technical concept and characteristics of the present invention, and the purpose is to enable those who are familiar with this technology to understand the content of the present invention and implement it accordingly, and it cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit and essence of the present invention should be covered within the protection scope of the present invention.
Claims
1. A test turntable, characterized in that: Including: A horizontally arranged marble substrate (1), a first support plate (2), a second support plate (3) vertically installed on the upper surface of the marble substrate (1), and a test carrier plate (4) arranged between the first support plate (2) and the second support plate (3). The test carrier plate (4) is installed on the rotating part of a first turntable (51) that can rotate around a first direction. The fixed part of the first turntable (51) is installed on a rotating base (6). The other end of the rotating base (6) rotatably connected to the first support plate (2) is installed on the rotating part of a second turntable (52) that can rotate around a second direction. The fixed part of the second turntable (52) is installed on the second support plate (3). Above the test carrier plate (4), a test board (7) communicating with a host computer and a chip carrier plate (8) electrically connected to the test board (7) are sequentially arranged. A plurality of chip sockets (9) are arranged on the upper surface of the chip carrier plate (8) opposite to the test board (7). A plurality of pressure heads (11) corresponding to the chip sockets (9) are provided on the lower surface of a pressure plate (10) arranged above the chip carrier plate (8). When the pressure plate (10) that can move in the vertical direction moves to the lowest position, the pressure heads (11) are in pressing contact with the chips (200) in the chip sockets (9).
2. The test turntable according to claim 1, wherein: Both the first support plate (2) and the second support plate (3) are marble support plates.
3. The test turntable according to claim 1, characterized in that: A rotary motor (53) and a slip ring (54) for driving the rotation of the rotating part are installed on the fixed parts of the first turntable (51) and the second turntable (52) respectively.
4. The test turntable according to claim 1, wherein: The pressure head (11) is an elastic pressure head.
5. The test turntable according to claim 1 or 4, characterized in that: The pressure head (11) is a silicone pressure head, a rubber pressure head or a polyurethane pressure head.