Mask storage box scanning device and photoetching machine

Abstract

The utility model provides a mask storage box scanning device and a photoetching machine, and relates to the technical field of photoetching machines, the mask storage box scanning device comprises a mask box for storing a mask, a first scanning assembly and a second scanning assembly, the first scanning assembly is used for scanning an ID information identifier to obtain the ID information of the mask, and the second scanning assembly is used for scanning the ID information identifier to obtain the ID information of the mask; the second scanning assembly is used for obtaining mask storage information of the mask box. According to the mask storage box scanning device provided by the invention, the information of the mask is scanned and identified through the first scanning assembly, and whether the mask is stored in the mask box is scanned and identified through the second scanning assembly, so that correct access of the mask is ensured, and the subsequent exposure operation is prevented from being influenced. According to the photoetching machine provided by the invention, the mask storage box scanning device with the scanning function is used, so that the mask corresponding to the working procedure can be conveniently taken out.

Description

Technical Field

[0001] The utility model relates to the technical field of lithography machines, in particular to a mask storage box scanning device and a lithography machine. Background Art

[0002] A mask, also known as a reticle, mask plate, photomask, lithography mask plate, etc., is a graphic master used in the lithography process of microelectronics and integrated circuit manufacturing. An opaque light-shielding film forms a mask pattern on a transparent substrate, and the pattern is transferred to the wafer through exposure. Therefore, the mask is an essential part of the lithography process. And as a precision component, the mask is very sensitive to particles or contaminants. Therefore, the mask is stored in a special mask box, and it is only taken out of the mask box and placed on the mask table for exposure during the exposure process.

[0003] When performing the exposure process on the wafer, multiple exposures are often required, and masks with multiple different patterns are used for sequential exposure. Therefore, it is necessary to pre-place the required masks in the mask storage library of the lithography machine in advance or supplement them from the outside during the exposure process, and then use a manipulator for transfer according to needs. To maintain the accuracy of exposure, an ID number (usually a barcode or QR code for easy reading) consistent with the mask ID information is pasted on each mask box to confirm the mask storing specific pattern information in the mask box. However, during the actual exposure process, although the ID information on the mask box can be read by scanning the code, it is difficult to confirm whether the mask in the mask box has been transferred away, or for other reasons, a mask with a specific number is not placed in the mask box, which will result in the situation of taking an empty box or taking the wrong box, seriously affecting the progress of exposure and even having an adverse impact on the exposure process. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a mask storage box scanning device and a lithography machine to solve the above technical problems.

[0005] In a first aspect, an embodiment of the utility model provides a mask storage box scanning device, which includes: a mask box for storing masks, a first scanning component, and a second scanning component. An ID information identifier corresponding to the mask in the mask box is set on the mask box. The first scanning component is used to scan the ID information identifier to obtain the ID information of the mask, and the second scanning component emits a detection wave that can be reflected by the mask towards the inside of the mask box, and is used to obtain the mask storage information of the mask box.

[0006] Optionally, the reticle storage cassette scanning device further includes a storage rack and a lifting assembly. A plurality of reticle cassettes are arranged on the storage rack. The lifting assembly is arranged along the arrangement direction of the reticle cassettes. Both the first scanning assembly and the second scanning assembly are connected to the lifting assembly. The lifting assembly drives the first scanning assembly and the second scanning assembly to move along the arrangement direction of the reticle cassettes, so that the first scanning assembly and the second scanning assembly can scan any reticle cassette.

[0007] Optionally, the lifting assembly includes a mounting slider, a moving track, and a driving mechanism. The moving track is arranged on the storage rack. The mounting slider is slidably arranged on the moving track. Both the first scanning assembly and the second scanning assembly are arranged on the mounting slider. The driving mechanism drives the mounting slider to slide along the moving track.

[0008] Optionally, the driving mechanism includes a driving motor and a driving screw. The driving screw is rotatably arranged on the storage rack, and one end of the driving screw is connected to the rotating shaft of the driving motor. A threaded hole is formed on the mounting slider, and the driving screw passes through the threaded hole.

[0009] Optionally, a connecting cross arm is arranged on the mounting slider. A first support arm and a second support arm are arranged on the connecting cross arm. The first support arm and the second support arm are arranged on both sides of the reticle cassette. The first scanning assembly is arranged on the first support arm, and the second scanning assembly is arranged on the second support arm.

[0010] Optionally, both the first support arm and the second support arm are arranged in a Z-shaped structure.

[0011] Optionally, the lifting assembly further includes a position sensor and a controller. The controller is electrically connected to the position sensor and the driving mechanism respectively. The position sensor is used to detect the position information of the mounting slider in the lifting assembly. The controller is used to control the driving mechanism to drive the mounting slider to move according to the position information.

[0012] Optionally, the number of the position sensors is at least two. The two position sensors correspond to the positions of the top and bottom reticle cassettes respectively, and are used to limit the maximum moving distance of the mounting slider.

[0013] Optionally, a plurality of position identification members are arranged on the moving track. The position identification members and the positions of the reticle cassettes are in one-to-one correspondence. The position sensor can identify the position identification members to obtain the position information of the corresponding reticle cassette.

[0014] On the other hand, an embodiment of the present invention provides a lithography machine, which includes a lithography machine main body and the reticle storage cassette scanning device of any one of the above. The reticle storage cassette scanning device is arranged on the lithography machine main body. A robotic arm is arranged on the lithography machine main body, and the robotic arm is used to pick up and place the reticle in the reticle storage cassette scanning device.

[0015] The utility model provides a mask storage box scanning device, which includes: a mask box for storing a mask, a first scanning component and a second scanning component. The mask box is provided with an ID information label corresponding to the mask in the mask box. The first scanning component is used to scan the ID information label to obtain the ID information of the mask. The second scanning component emits a detection wave that can be reflected by the mask toward the mask box to obtain the mask storage information of the mask box. The first scanning component is set to scan and identify the information of the mask, and the second scanning component is used to scan and identify whether the mask is stored in the mask box, thereby ensuring the correct access of the mask to avoid affecting the subsequent exposure operation.

[0016] The embodiment of the utility model provides a photolithography machine, which uses the above-mentioned mask storage box scanning device with scanning function, and can scan the ID information of the mask box when taking out the mask, so as to read the stored mask information, and facilitate taking out the mask corresponding to the process. At the same time, when scanning the mask information, it can also scan whether the mask is stored in the mask box, so as to ensure that the mask is taken out and used correctly. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 One of the three-dimensional diagrams of the mask storage box scanning device provided by the embodiment of the utility model;

[0019] Figure 2 The second stereoscopic diagram of the mask storage box scanning device provided in the embodiment of the utility model.

[0020] Icons: 101-storage rack; 102-mask box; 200-first scanning assembly; 300-second scanning assembly; 400-lifting assembly; 401-installing slider; 402-moving track; 403-driving mechanism; 500-connecting cross arm; 600-first supporting arm; 700-second supporting arm. DETAILED DESCRIPTION

[0021] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. The components of the embodiments of the present utility model described and illustrated herein can be arranged and designed in various different configurations.

[0022] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0023] In addition, terms such as "horizontal" and "vertical" do not mean that the components are required to be absolutely horizontal or hanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0024] The following will describe in detail some embodiments of the present utility model with reference to the accompanying drawings. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0025] Embodiment 1

[0026] This embodiment provides a mask storage box scanning device, which includes: a mask box 102 for storing masks, a first scanning component 200, and a second scanning component 300. An ID information identifier corresponding to the mask in the mask box 102 is provided on the mask box 102. The first scanning component 200 is used to scan the ID information identifier to obtain the ID information of the mask, and the second scanning component 300 emits a detection wave that can be reflected by the mask into the mask box 102, and is used to obtain the mask storage information of the mask box 102.

[0027] Please refer to Figure 1 and Figure 2As shown, in this embodiment, the mask cassette 102 is a rectangular or square box with a hollow interior and an opening on one side, and the mask can be accessed through the opening. The outer side of the mask cassette 102 is provided with an ID information label, which records the relevant information of the mask. The first scanning component 200 is used to scan the ID information label and read the relevant information, so as to quickly query the information of the stored mask and facilitate the selection of the required mask. The second scanning component 300 is arranged at the opening of the mask cassette 102. The second scanning component 300 emits a detection wave that can be reflected by the mask. When there is a mask stored inside the mask cassette 102, the mask reflects the detection wave and is received by the second scanning component 300, and the control system receives the signal and judges that there is a mask stored in the mask cassette 102. On the contrary, when there is no mask stored in the mask cassette 102, the detection wave emitted by the second scanning component 300 enters the interior of the mask cassette 102, and the second scanning component 300 cannot receive the reflected signal, so it can be judged that there is no mask stored in the mask cassette 102. When performing the exposure process on the wafer, it is usually necessary to correctly use the mask in a certain order for exposure. When the mask is not used in the correct order or a certain mask is missing, it may cause the entire wafer to be scrapped. The mask storage box scanning device provided in this embodiment can quickly identify the relevant information of the mask in the mask cassette 102 through the first scanning component 200 to ensure the consistency of the mask to be taken out with the process. Even if the placement position and order of the mask cassettes 102 are changed, the required mask can be quickly selected through the first scanning component 200. After the first scanning component 200 selects the corresponding mask cassette 102, the second scanning component 300 emits a detection wave to the mask cassette 102, and judges whether there is a mask stored in the mask cassette 102 through the returned detection wave signal. Only when the ID information on the mask cassette 102 meets the process requirements and there is a mask correctly stored in the mask cassette 102, the external transportation device (such as a robotic arm) takes the mask from the mask cassette 102 for subsequent exposure operations. On the contrary, if no mask cassette 102 consistent with the processing process is found or there is no mask stored in the corresponding mask cassette 102, the mask taking operation is paused, and other alarm devices are used to remind the staff to verify. Under the action of the first scanning component 200 and the second scanning component 300, the accuracy of taking the mask can be guaranteed to the greatest extent, avoiding affecting the subsequent exposure process and improving production safety.

[0028] Optionally, in some implementation manners of this embodiment, the second scanning component includes a reflective photoelectric sensor. The second scanning component emits a detection light ray, and the light ray is reflected back to the photoelectric sensor after irradiating the mask. The photoelectric sensor performs detection according to the received reflected light, so as to obtain the storage information of the mask in the mask cassette.

[0029] Optionally, in some other embodiments, the second scanning component may also adopt an acoustic wave detection sensor or any other existing detection structure, as long as it can achieve the object detection effect, and there is no limitation here.

[0030] Optionally, in some implementation manners of this embodiment, the ID information identifier may be signs such as barcodes and two-dimensional codes, and the information of the reticle is recorded through the barcode or two-dimensional code. The first scanning component 200 is an image recognition device for recognizing the information in the barcode or two-dimensional code.

[0031] Optionally, in some implementation manners of this embodiment, the reticle storage box scanning device further includes a storage rack 101 and a lifting component 400. A number of reticle boxes 102 are arranged on the storage rack 101. The lifting component 400 is arranged along the arrangement direction of the reticle boxes 102. Both the first scanning component 200 and the second scanning component 300 are connected to the lifting component 400. The lifting component 400 drives the first scanning component 200 and the second scanning component 300 to move along the arrangement direction of the reticle boxes 102, so that the first scanning component 200 and the second scanning component 300 can scan any reticle box 102.

[0032] Please refer to Figure 1 and Figure 2 As shown, in this embodiment, the storage rack 101 can be fixedly connected to external devices such as a storage box or a lithography machine main body. Multiple layers of reticle boxes 102 are arranged at intervals in the vertical direction on the storage rack 101. Each reticle box 102 stores a reticle separately. The stored reticle corresponds to the information in the ID information identifier on the reticle box 102, which is convenient for subsequent retrieval of the correct reticle. Multiple reticle boxes 102 are stacked on the placement rack, which can make full use of space, store multiple reticles, improve the storage capacity, and also facilitate the first scanning component 200 and the second scanning component 300 to quickly scan multiple reticle boxes 102, improving the working efficiency. The lifting component 400 is arranged on the storage rack 101. The lifting component 400 is used to lift the first scanning component 200 and the second scanning component 300, so that the first scanning component 200 and the second scanning can move along the arrangement direction of the reticle boxes 102 to scan each reticle box 102, which not only realizes the synchronous detection of the storage situation and ID information of a certain layer of reticles, but also optimizes the structure, reduces the number of scanning components, and reduces the production cost.

[0033] Optionally, in some implementation manners of this embodiment, the lifting component 400 includes a mounting slider 401, a moving track 402, and a driving mechanism 403. The moving track 402 is arranged on the storage rack 101. The mounting slider 401 is slidably arranged on the moving track 402. Both the first scanning component 200 and the second scanning component 300 are arranged on the mounting slider 401. The driving mechanism 403 drives the mounting slider 401 to slide along the moving track 402.

[0034] Please refer to Figure 1 and Figure 2 As shown in Figure 1 and Figure 2 , in this embodiment, the moving track 402 is vertically arranged in the same direction as the arrangement direction of the mask boxes 102. The mounting slider 401 is slidably arranged on the moving track 402. At the same time, the first scanning assembly 200 and the second scanning assembly 300 are both arranged on the mounting slider 401. When the driving mechanism 403 drives the mounting slider 401 to move along the moving track 402, the first scanning assembly 200 and the second scanning assembly 300 arranged on the mounting slider 401 move along the arrangement direction of the mask boxes 102, so as to scan the storage conditions and ID information of the mask boxes 102. The moving scheme of the moving track 402 and the slider has a simple structure, low production cost, is easy to maintain, and during the moving process, the slider has high stability.

[0035] Optionally, in some embodiments of this embodiment, the driving mechanism 403 includes a driving motor and a driving screw. The driving screw is rotatably arranged on the storage rack 101, and one end of the driving screw is connected to the rotating shaft of the driving motor. A threaded hole is formed in the mounting slider 401, and the driving screw is inserted into the threaded hole.

[0036] In this embodiment, the driving screw meshes with the threaded hole on the mounting slider 401. When the driving motor drives the driving screw to rotate forward or backward, the lifting movement of the mounting slider 401 can be realized. The driving mechanism 403 adopts the method of cooperating the driving screw with the threaded hole, which has a simple structure and good self-locking property, so that the mounting slider 401 can hover at the position of any mask box 102, which is convenient for the first scanning assembly 200 and the second scanning assembly 300 to scan the mask boxes 102 on this layer.

[0037] Optionally, in some embodiments of this embodiment, a connecting cross arm 500 is arranged on the mounting slider 401. A first support arm 600 and a second support arm 700 are arranged on the connecting cross arm 500. The first support arm 600 and the second support arm 700 are arranged on both sides of the mask box 102. The first scanning assembly 200 is arranged on the first support arm 600, and the second scanning assembly 300 is arranged on the second support arm 700.

[0038] Please refer to Figure 1 and Figure 2As shown, in this embodiment, the mounting slider 401 is arranged beside the mask box 102, the connecting cross arm 500 is arranged on the mounting slider 401, and the connecting cross arm 500 extends along the length direction of the mask box 102. The first support arm 600 and the second support arm 700 are respectively arranged at both ends of the connecting cross arm 500, and the first scanning assembly 200 and the second scanning assembly 300 are respectively mounted on the first support arm 600 and the second support arm 700. After installation, the first scanning assembly 200 and the second scanning assembly 300 are respectively located on the front and back sides of the mask box 102, and the second scanning assembly 300 is opposite to the opening of the mask box 102. One end of the mask box 102 is open, and it is not suitable to set the ID information label at the opening. Therefore, the ID information label can be set on the outer side wall of the back of the mask box 102. At the same time, the first scanning assembly 200 is correspondingly arranged on the back of the mask box 102. On the contrary, the second scanning assembly 300 corresponds to the opening of the mask box 102, which is convenient for scanning the storage condition of the mask plate in the mask box 102.

[0039] Optionally, in some embodiments of this embodiment, both the first support arm 600 and the second support arm 700 are arranged in a Z-shaped structure.

[0040] Please refer to Figure 1 and Figure 2 As shown, in this embodiment, the mask box 102 is arranged in a square structure, and both the first support arm 600 and the second support arm 700 are arranged in a Z-shaped structure, which fully adapts to the shape structure of the mask box 102, ensuring that the first scanning assembly 200 and the second scanning are correctly arranged at the front and back connections of the mask box 102. At the same time, the Z-shaped support arms can make full use of the space, ensuring the smooth lifting of the first support arm 600 and the second support arm 700, avoiding the collision of the first support arm 600 and the second support arm 700 with other structures, and at the same time avoiding the over-large volume of the entire mask plate storage box scanning device and occupying other spaces.

[0041] Optionally, in some embodiments of this embodiment, the lifting assembly 400 further includes a position sensor and a controller. The controller is electrically connected to the position sensor and the driving mechanism 403 respectively. The position sensor is used to detect the position information of the mounting slider 401 in the lifting assembly 400, and the controller is used to control the driving mechanism 403 to drive the mounting slider 401 to move according to the position information.

[0042] In this embodiment, the number of position sensors can be set to two, and the two position sensors are respectively arranged at the upper and lower limit positions of the moving track 402. The two position sensors respectively correspond to the positions of the uppermost mask box 102 and the lowermost mask box 102. The distance between the upper and lower limit positions is the scanning stroke space of the first scanning assembly 200 and the second scanning assembly 300. Additionally, the lower limit position or the upper limit position can be used as the initial position of the scanning module.

[0043] Optionally, in some embodiments of this embodiment, a plurality of position identification members are provided on the moving track 402, and the position identification members correspond one-to-one to the positions of the mask box 102.

[0044] In this embodiment, position identification or scales are provided on the moving track to facilitate quickly determining the horizontal height of each layer of mask during assembly. Since the second scanning module is used to scan whether there is a mask in the mask box, and the mask is horizontally placed in the mask box with a thickness of only about 6 mm, when setting, the scanning point of the second scanning module needs to be set at the central position in the corresponding mask thickness direction to prevent the mask in the box from not being scanned when it is too high or too low. Correspondingly, after the mask box is assembled and the mask plate is placed in the mask box, at this time, the center of each mask in the thickness direction is used as the detection point of the mask, and the horizontal height where the center of the mask thickness direction is located is corresponded to the scale of the track or the position identification of the mark, and the height where the center of each layer of mask is located is preset in the controller. When the motor rotates, the number of rotation turns and the rotation angle are calculated through its existing encoder device to determine the position where the slider rises to each layer height.

[0045] Embodiment 2

[0046] This embodiment provides a lithography machine, which includes a lithography machine main body and the above-mentioned mask plate storage box scanning device. The mask plate storage box scanning device is arranged inside the lithography machine main body, and a robotic arm is arranged on the lithography machine main body, and the robotic arm is used to pick up the mask plate placed in the mask plate storage box.

[0047] In this embodiment, the lithography machine is provided with the above-mentioned mask plate storage box scanning device with a scanning function. When taking the mask plate, it can scan the ID information identifier of the mask box 102, so as to read the stored mask plate information, which is convenient for taking out the mask plate corresponding to the process. At the same time, when scanning the mask plate information, it can also scan whether there is a mask plate stored in the mask box 102, so as to ensure the correct taking out and use of the mask plate and avoid omission.

[0048] In summary, the present invention provides a mask plate storage box scanning device, which includes: a mask box 102 for storing mask plates, a first scanning component 200, and a second scanning component 300. An ID information identifier corresponding to the mask plate in the mask box 102 is provided on the mask box 102. The first scanning component 200 is used to scan the ID information identifier to obtain the ID information of the mask plate, and the second scanning component 300 emits a detection wave that can be reflected by the mask plate into the mask box 102, and is used to obtain the mask plate storage information of the mask box 102. By setting the first scanning component 200 to scan and identify the information of the mask plate, and by setting the second scanning component 300 to scan and identify whether there is a mask plate stored in the mask box 102, the correct access of the mask plate is ensured, and the subsequent exposure operation is prevented from being affected.

[0049] The present utility model further provides a lithography machine, which includes a lithography machine main body and the above-mentioned mask storage box scanning device. The mask storage box scanning device is arranged inside the lithography machine main body, and a robotic arm is arranged on the lithography machine main body. The robotic arm is used to pick up and place the mask in the mask storage box. By using the above-mentioned mask storage box scanning device, when retrieving the mask, the ID information identifier of the mask box 102 can be scanned, so as to read the stored mask information, which is convenient for taking out the mask corresponding to the process. At the same time, when scanning the mask information, it can also scan whether there is a mask stored in the mask box 102, so as to ensure that the mask is correctly taken out and used, and avoid omission.

[0050] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present utility model, rather than limiting them; although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: it is still possible to modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present utility model.

Claims

1. A mask storage box scanning device, characterized in that, Including: A mask box (102) for storing a mask plate, a first scanning component (200) and a second scanning component (300). An ID information identifier corresponding to the mask plate in the mask box (102) is provided on the mask box (102). The first scanning component (200) is configured to scan the ID information identifier to obtain the ID information of the mask plate. The second scanning component (300) emits a detection wave that can be reflected by the mask plate towards the inside of the mask box (102) for obtaining the mask plate storage information of the mask box (102).

2. The mask storage box scanning device according to claim 1, wherein The mask plate storage box scanning device further includes a storage rack (101) and a lifting component (400). A plurality of the mask boxes (102) are arranged on the storage rack (101). The lifting component (400) is arranged along the arrangement direction of the mask boxes (102). Both the first scanning component (200) and the second scanning component (300) are connected to the lifting component (400). The lifting component (400) drives the first scanning component (200) and the second scanning component (300) to move along the arrangement direction of the mask boxes (102) so that the first scanning component (200) and the second scanning component (300) can scan any one of the mask boxes (102).

3. The mask storage box scanning device according to claim 2, wherein The lifting component (400) includes a mounting slider (401), a moving track (402) and a driving mechanism (403). The moving track (402) is arranged on the storage rack (101). The mounting slider (401) is slidably arranged on the moving track (402). Both the first scanning component (200) and the second scanning component (300) are arranged on the mounting slider (401). The driving mechanism (403) drives the mounting slider (401) to slide along the moving track (402).

4. The mask storage box scanning device according to claim 3, wherein, The driving mechanism (403) includes a driving motor and a driving screw. The driving screw is rotatably arranged on the storage rack (101), and one end of the driving screw is connected to the rotating shaft of the driving motor. A threaded hole is formed in the mounting slider (401), and the driving screw passes through the threaded hole.

5. The mask storage box scanning device according to claim 3, wherein, A connecting cross arm (500) is arranged on the mounting slider (401). A first support arm (600) and a second support arm (700) are arranged on the connecting cross arm (500). The first support arm (600) and the second support arm (700) are arranged on both sides of the mask box (102). The first scanning component (200) is arranged on the first support arm (600), and the second scanning component (300) is arranged on the second support arm (700).

6. The mask storage box scanning device according to claim 5, wherein Both the first support arm (600) and the second support arm (700) are arranged in a Z-shaped structure.

7. The mask storage box scanning device according to claim 3, characterized in that, The lifting assembly (400) further includes a position sensor and a controller. The controller is electrically connected to the position sensor and the driving mechanism (403) respectively. The position sensor is used to detect the position information of the mounting slider (401) in the lifting assembly (400), and the controller is used to control the driving mechanism (403) to drive the mounting slider (401) to move according to the position information.

8. The mask storage box scanning device according to claim 7, wherein The number of the position sensors is at least two. The two position sensors correspond to the positions of the mask boxes at the top and the bottom respectively, and are used to limit the maximum moving distance of the mounting slider.

9. The mask storage box scanning device according to claim 8, wherein, A plurality of position identification members are arranged on the moving track (402), and the position identification members correspond to the positions of the mask boxes (102) one by one.

10. A lithography machine, characterized in that, It includes a lithography machine main body and a mask box scanning device as described in any one of claims 1-9. The mask box scanning device is arranged inside the lithography machine main body.

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