Anti-static structure of silicon-based MEMS capacitive sensor

Abstract

The utility model relates to the technical field of micro electromechanical systems, and discloses an anti-static structure of a silicon-based MEMS capacitive sensor, which comprises a sensor main body, a conductive port is arranged on the outer surface of the sensor main body, an anti-static component is arranged at one end of the conductive port, and the anti-static component comprises an electrified wire, a connecting plug, a connecting seat and a conductive plug. A connecting plug is installed at one end of the energizing wire, a connecting base is installed at the other end of the energizing wire, a conductive plug is arranged in the connecting base, and a disassembling assembly is arranged in the cavity. According to the utility model, through cooperative use of the electrified wire, the connecting plug, the connecting seat and the conductive plug, static electricity generated by the sensor can be transmitted to the ground for static electricity elimination, the static electricity protection is enhanced, and the service life of the sensor is prolonged; and the conductive plug can be dismounted and replaced, so that the loss of materials is reduced, and a relatively good environment-friendly effect is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of microelectromechanical systems, in particular to an anti-static structure of a silicon-based MEMS capacitive sensor. Background Technique

[0002] Microelectromechanical system (MEMS) devices have the advantages of small size, low cost, and integration with IC electronics. With the accelerating evolution of the new round of scientific and technological revolution and industrial transformation, the infrastructure such as 5G, artificial intelligence, and the Internet of Things is becoming increasingly perfect, and the commercial scale of terminal application technologies such as driverless, drones, VR / AR is growing rapidly. And the core intelligent sensor connecting the basic technology of the new generation of information technology and terminal applications is MEMS.

[0003] The existing MEMS capacitive sensors will generate static electricity during long-term use. In the case of long-term accumulation of static electricity, the generation of static electricity may cause electrostatic breakdown of the circuit and result in a short-circuit situation, which is relatively dangerous. Therefore, an anti-static structure for a silicon-based MEMS capacitive sensor is needed. Content of the Utility Model

[0004] The purpose of the utility model is to provide an anti-static structure of a silicon-based MEMS capacitive sensor to solve the problems raised in the above background technique.

[0005] To solve the above technical problems, the utility model is realized through the following technical solutions:

[0006] The utility model is an anti-static structure of a silicon-based MEMS capacitive sensor, including a sensor body. A conductive port is arranged on the outer surface of the sensor body. An anti-static component is arranged at one end of the conductive port. The anti-static component includes a power-on wire, a connection plug, a connection seat, and a conductive plug. A connection plug is installed at one end of the power-on wire, a connection seat is installed at the other end of the power-on wire, a conductive plug is arranged inside the connection seat, the connection plug is fitted and installed inside the conductive port, a cavity is opened inside the conductive plug, a disassembly component is arranged inside the cavity, the disassembly component includes a sliding plate, a first spring, and a fixed block. The sliding plate is slidably connected inside the cavity, a first spring is installed at one end of the sliding plate, a fixed block is installed at the other end of the sliding plate, the other end of the first spring is installed on the inner surface of the cavity, and the end of the fixed block away from the sliding plate penetrates through the conductive plug and the connection seat and extends outward.

[0007] Further, the anti-static component also protects a protective sleeve, and the protective sleeve is sleeved on the outer surface of the connection seat.

[0008] Further, a connecting block is provided on the outer surface of the sensor body. There are two fixed connecting blocks, which are circumferentially distributed with the conductive port as the center. A chute is provided at one end of each of the two connecting blocks. A guiding rod is installed inside the chute. A second spring is sleeved on the outer surface of the guiding rod, and a protection component is slidably connected to the outer surface of the guiding rod.

[0009] Further, the protection component includes a protective shell, a slider and a pull ring. Sliders are installed at both ends of the protective shell. A pull ring is installed on the upper surface of the protective shell. The slider is slidably connected to the outer surface of the guiding rod. A second spring is installed on the upper surface of the slider, and the other end of the second spring is installed at the inner top of the chute. The inner surface of the protective shell abuts against the outer surface of the connecting plug.

[0010] Further, the protection component further includes a limiting rod and a locking block. The limiting rod is installed at the inner top of the protective shell. One end of the limiting rod penetrates through the conductive port and the connecting plug and extends downward. External threads are provided on the outer surface of the limiting rod, and the locking block is installed on the limiting rod through the external threads.

[0011] Further, anti-slip grooves are provided on the outer surface of the fixing block. The anti-slip grooves can increase the friction between the fixing block and the connecting seat and the conductive plug, and prevent the fixing block from moving during use.

[0012] Further, a wear-resistant coating is coated on the outer surface of the energized wire. By providing the wear-resistant coating, the energized wire can have a good wear-resistant effect and extend the service life of the energized wire.

[0013] The utility model has the following beneficial effects:

[0014] (1) By the combined use of the energized wire, the connecting plug, the connecting seat and the conductive plug, the static electricity generated by the sensor can be transmitted to the ground to eliminate static electricity, enhance the protection against weak static electricity, and extend the service life of the sensor. At the same time, by the combined use of the sliding plate, the first spring and the fixing block, the conductive plug can be removed and replaced, reducing material loss and achieving a good environmental protection effect.

[0015] (2) By providing the protective shell, the connection between the conductive port and the connecting plug can be protected from the erosion of water vapor. At the same time, by the combined use of the limiting rod and the locking block, the connecting plug can be prevented from disengaging from the inside of the conductive port, achieving a good fixing effect.

[0016] Of course, it is not necessary for any product implementing the utility model to achieve all the above advantages simultaneously. Description of the Drawings

[0017] To more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the attached drawings required for the description of the embodiments. Obviously, the attached drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other attached drawings can be obtained based on these drawings.

[0018] Figure 1 Schematic diagram of the overall structure of the present utility model;

[0019] Figure 2 Schematic diagram of the anti-static component structure of the present utility model;

[0020] Figure 3 Sectional view of the connection seat, conductive plug and protective sleeve of the present utility model;

[0021] Figure 4 Schematic diagram of the sensor main body and the protection component structure of the present utility model;

[0022] Figure 5 Sectional view of the sensor main body and the protection component structure of the present utility model;

[0023] Figure 6 Schematic diagram of the protection component structure of the present utility model;

[0024] In the attached drawings, the list of components represented by each reference numeral is as follows:

[0025] In the figure: 1, sensor main body; 101, conductive port; 102, connection block; 2, anti-static component; 201, energized wire; 202, connection plug; 203, connection seat; 204, conductive plug; 205, protective sleeve; 3, disassembly component; 301, sliding plate; 302, first spring; 303, fixed block; 4, guide rod; 5, second spring; 6, protection component; 601, protective shell; 602, slider; 603, pull ring; 604, limiting rod; 605, locking block. Detailed implementation manners

[0026] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model in conjunction with the attached drawings in the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, rather than all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present utility model.

[0027] Please refer to Figure 1 - Figure 6As shown in the figure, the utility model relates to an anti-static structure of a silicon-based MEMS capacitive sensor, which includes a sensor main body 1. A conductive port 101 is provided on the outer surface of the sensor main body 1. An anti-static component 2 is arranged at one end of the conductive port 101. The anti-static component 2 includes a power-on wire 201, a connection plug 202, a connection seat 203 and a conductive plug 204. A connection plug 202 is installed at one end of the power-on wire 201, and a connection seat 203 is installed at the other end of the power-on wire 201. A conductive plug 204 is arranged inside the connection seat 203. The connection plug 202 is fitted and installed inside the conductive port 101. A cavity is formed inside the conductive plug 204, and a disassembly component 3 is arranged inside the cavity. The disassembly component 3 includes a sliding plate 301, a first spring 302 and a fixing block 303. The sliding plate 301 is slidably connected inside the cavity. A first spring 302 is installed at one end of the sliding plate 301, and a fixing block 303 is installed at the other end of the sliding plate 301. The other end of the first spring 302 is installed on the inner surface of the cavity. One end of the fixing block 303 away from the sliding plate 301 penetrates through the conductive plug 204 and the connection seat 203 and extends outwardly.

[0028] The anti-static component 2 also protects a protective sleeve 205, and the protective sleeve 205 is sleeved on the outer surface of the connection seat 203.

[0029] Connection blocks 102 are provided on the outer surface of the sensor main body 1. There are two connection blocks 102 fixed and circumferentially distributed with the conductive port 101 as the center of the circle. Chutes are formed at one ends of the two connection blocks 102, a guiding rod 4 is installed inside the chutes, a second spring 5 is sleeved on the outer surface of the guiding rod 4, and a protection component 6 is slidably connected to the outer surface of the guiding rod 4.

[0030] The protection component 6 includes a protection shell 601, a slider 602 and a pull ring 603. Sliders 602 are installed at both ends of the protection shell 601, a pull ring 603 is installed on the upper surface of the protection shell 601. The sliders 602 are slidably connected to the outer surface of the guiding rod 4. A second spring 5 is installed on the upper surface of the slider 602, and the other end of the second spring 5 is installed at the inner top of the chute. The inner surface of the protection shell 601 abuts against the outer surface of the connection plug 202.

[0031] The protection component 6 also includes a limiting rod 604 and a locking block 605. The limiting rod 604 is installed at the inner top of the protection shell 601. One end of the limiting rod 604 penetrates through the conductive port 101 and the connection plug 202 and extends downward. External threads are formed on the outer surface of the limiting rod 604, and a locking block 605 is installed on the limiting rod 604 through the external threads.

[0032] Anti-slip lines are formed on the outer surface of the fixing block 303. The formed anti-slip lines can increase the friction between the fixing block 303 and the connection seat 203 and the conductive plug 204, and avoid the position of the fixing block 303 from moving during use.

[0033] The outer surface of the energized wire 201 is coated with a wear-resistant coating. By providing the wear-resistant coating, the energized wire 201 can have a good wear-resistant effect and extend the service life of the energized wire 201.

[0034] During use, first remove the locking block 605 from the limiting rod 604, then place a finger inside the pull ring 603, and then pull the pull ring 603 upward, so that the slider 602 moves upward on the guide rod 4, the second spring 5 gradually contracts, and at the same time the protective shell 601 moves upward synchronously, so that the conductive port 101 is exposed. Then fit and install the connecting plug 202 inside the conductive port 101. After installation, release the finger pulling the pull ring 603, so that the second spring 5 restores its elasticity and pushes the slider 602 and the protective shell 601 to reset, so that the protective shell 601 protects the connection between the conductive port 101 and the connecting plug 202. At the same time, the limiting rod 604 passes through the conductive port 101 and the connecting plug 202, and then install the locking block 605 and the limiting rod 604. By the combined use of the limiting rod 604 and the locking block 605, it is possible to prevent the connecting plug 202 from detaching from the inside of the conductive port 101, achieving a good fixing effect. After installation, insert the conductive plug 204 into the ground. By the combined use of the energized wire 201, the connecting plug 202, the connecting seat 203 and the conductive plug 204, the static electricity generated by the sensor main body 1 can be transmitted to the ground to eliminate static electricity, enhance the protection against weak static electricity, and extend the service life of the sensor main body 1. When the conductive plug 204 needs to be replaced, first remove the conductive plug 204 from the ground, then pinch the protective sleeve 205 with a finger and pull the protective sleeve 205 downward to remove the protective sleeve 205 from the connecting seat 203. Then push the fixing block 303 so that the fixing block 303 pushes the sliding plate 301 to move into the cavity, and at the same time the first spring 302 gradually contracts. When the outer surface of the fixing block 303 is flush with the outer surface of the conductive plug 204, at this time, the conductive plug 204 can be pulled downward to remove the conductive plug 204 from the connecting seat 203 for replacement. By the wear-resistant coating coated on the outer surface of the energized wire 201, the energized wire 201 can have a good wear-resistant effect and extend the service life of the energized wire 201.

[0035] The above-disclosed preferred embodiments of the present invention are only used to help illustrate the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the present invention to the specific embodiments described. Obviously, according to the content of this specification, many modifications and changes can be made. These embodiments are selected and specifically described in this specification to better explain the principle and practical application of the present invention, so that those skilled in the relevant technical field can well understand and utilize the present invention. The present invention is only limited by the claims and their full scope and equivalents.

Claims

1. An anti-static structure for a silicon-based MEMS capacitive sensor, comprising a sensor main body (1), characterized in that: The outer surface of the sensor body (1) is provided with a conductive port (101), and an anti-static component (2) is arranged at one end of the conductive port (101); The anti-static component (2) includes a power-on wire (201), a connecting plug (202), a connecting seat (203) and a conductive plug (204). One end of the power-on wire (201) is installed with the connecting plug (202), the other end of the power-on wire (201) is installed with the connecting seat (203), a conductive plug (204) is arranged inside the connecting seat (203), the connecting plug (202) is fitted and installed inside the conductive port (101), a cavity is formed inside the conductive plug (204), and a disassembly component (3) is arranged inside the cavity; The disassembly component (3) includes a sliding plate (301), a first spring (302) and a fixing block (303). The sliding plate (301) is slidably connected inside the cavity. One end of the sliding plate (301) is installed with the first spring (302), the other end of the sliding plate (301) is installed with the fixing block (303), the other end of the first spring (302) is installed on the inner surface of the cavity, and one end of the fixing block (303) away from the sliding plate (301) penetrates through the conductive plug (204) and the connecting seat (203) and extends outward.

2. The anti-static structure of a silicon-based MEMS capacitive sensor according to claim 1, wherein: The anti-static component (2) also protects a protective sleeve (205), and the protective sleeve (205) is sleeved on the outer surface of the connecting seat (203).

3. The anti-static structure of a silicon-based MEMS capacitive sensor according to claim 1, characterized in that: The outer surface of the sensor body (1) is provided with connecting blocks (102). There are two connecting blocks (102) fixed and circumferentially distributed with the conductive port (101) as the center. One end of each of the two connecting blocks (102) is provided with a chute, a guiding rod (4) is installed inside the chute, a second spring (5) is sleeved on the outer surface of the guiding rod (4), and a protective component (6) is slidably connected to the outer surface of the guiding rod (4).

4. The anti-static structure of a silicon-based MEMS capacitive sensor according to claim 3, characterized in that: The protective component (6) includes a protective shell (601), a slider (602) and a pull ring (603). Sliders (602) are installed at both ends of the protective shell (601), a pull ring (603) is installed on the upper surface of the protective shell (601), the slider (602) is slidably connected to the outer surface of the guiding rod (4), a second spring (5) is installed on the upper surface of the slider (602), the other end of the second spring (5) is installed on the inner top of the chute, and the inner surface of the protective shell (601) abuts against the outer surface of the connecting plug (202).

5. The anti-static structure of a silicon-based MEMS capacitive sensor according to claim 4, characterized in that: The protective component (6) also includes a limiting rod (604) and a locking block (605). The limiting rod (604) is installed on the inner top of the protective shell (601). One end of the limiting rod (604) penetrates through the conductive port (101) and the connecting plug (202) and extends downward. External threads are formed on the outer surface of the limiting rod (604), and the locking block (605) is installed on the limiting rod (604) through the external threads.

6. The anti-static structure of a silicon-based MEMS capacitive sensor according to claim 1, characterized in that: Anti-slip patterns are formed on the outer surface of the fixing block (303).

7. The anti-static structure of a silicon-based MEMS capacitive sensor according to claim 1, characterized in that: The outer surface of the energized wire (201) is coated with a wear-resistant coating.

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