High-density linear plasma generating device

Abstract

The utility model discloses a high-density linear plasma generating device, which comprises a box body with a cavity, a plurality of nozzle groups are arranged at the bottom of the box body, each nozzle group comprises a plurality of nozzles which are linearly arranged at intervals, a plurality of groups of ionization components corresponding to the plurality of nozzles are arranged in the box body, and the ionization components are arranged in the box body. The ionization assembly comprises a capacitor, an electrode connected with the capacitor and an electrode insulating cylinder arranged on the periphery of the electrode in a sleeving mode, an ionization port communicated with the nozzle is formed in the bottom end of the electrode insulating cylinder, and the ionization assembly further comprises a capacitor insulating cylinder arranged on the periphery of the capacitor in a sleeving mode. According to the utility model, through the arrangement of the conductive connecting piece, the two adjacent capacitors corresponding to the two adjacent nozzles on the same straight line can be in a staggered arrangement state, so that the arrangement density of the nozzles can be further improved, and the uniformity and sufficiency of plasma treatment can be further improved.

Description

Technical Field

[0001] The utility model relates to the technical field of plasma, in particular to a high-density linear plasma generating device. Background Art

[0002] During the processing of glass panels, most of them will be coated on the surface of the glass panel, such as a glass screen. To obtain a good coating effect, the glass panel is usually subjected to plasma treatment before coating to improve the surface activity and increase the surface tension. To increase the width of the plasma treatment and ensure the uniformity of the treatment, a linear plasma machine is usually selected for the treatment. The linear plasma machine usually has two sets of treatment hole groups arranged at intervals. Each treatment hole group includes a number of treatment holes arranged linearly at intervals. A high-voltage capacitor and an electrode are correspondingly arranged at each treatment hole. The plasma generated between the high-voltage electrode and the ground electrode is ejected from the treatment hole to treat the glass panel. However, the existing linear plasma machines still have the following problems: 1. To ensure that there is no mutual influence, most of the capacitors have appropriate spacing. Correspondingly, there is also an appropriate spacing between two adjacent treatment holes in the same treatment hole group. In practice, when the treatment holes are not arranged closely enough, problems such as missed treatment and uneven treatment will inevitably occur; 2. Most of the high-voltage electrodes only play a role in guiding the high voltage. The gas flows along the high-voltage electrode and is ionized at the bottom to form plasma, and then is ejected from the treatment hole. Due to the limited flow intensity of the gas, the force of the generated plasma is also limited. Summary of the Invention

[0003] The purpose of the utility model is to solve the above problems, and a high-density linear plasma generating device is designed, which can improve the density of the nozzle arrangement, and then improve the uniformity and sufficiency of the plasma treatment; it can also enhance the intensity and force of the plasma ejection.

[0004] To achieve the above purpose, the technical solution of the utility model is:

[0005] A high-density linear plasma generating device, including a box body with a cavity. A number of nozzle groups are opened at the bottom of the box body. Each nozzle group includes a number of nozzle holes arranged linearly at intervals. A number of ionization components corresponding to the number of nozzle holes are arranged in the box body. The ionization component includes a capacitor, an electrode connected to the capacitor, and an electrode insulating cylinder sleeved outside the electrode. An ionization through hole communicating with the nozzle hole is opened at the bottom end of the electrode insulating cylinder. The ionization component further includes a capacitor insulating cylinder sleeved outside the capacitor.

[0006] Further, a spiral ejection channel is arranged on the outer surface of the electrode.

[0007] Further, the ionization component further includes a conductive connecting piece connected to the capacitor. The conductive connecting piece is electrically connected to the electrode through an elastic member.

[0008] Furthermore, the conductive connecting member has a horizontal section and a vertical section connected to the inner end of the horizontal section;

[0009] The vertical segment is connected to the electrode, and the outer end of the horizontal segment is connected to the bottom end of the capacitor;

[0010] In the ionization components corresponding to the same nozzle group, the horizontal lengths of the horizontal sections of two adjacent conductive connecting members are inconsistent.

[0011] Furthermore, in the ionization assembly corresponding to the same nozzle group, the lengths of the horizontal sections of two adjacent conductive connecting members are set so that: a plurality of capacitors are linearly arranged at intervals on two straight lines, and two adjacent capacitors are respectively located on two straight lines.

[0012] Furthermore, the horizontal section is arranged to be inclined in the lateral direction, and in the ionization components corresponding to the same nozzle group, the inclination angles of the horizontal sections of two adjacent conductive connecting members are inconsistent.

[0013] Furthermore, the box body is provided with a first upper positioning plate, a first middle positioning plate and a first lower positioning plate in the cavity from top to bottom, and the first upper positioning plate, the first middle positioning plate and the first lower positioning plate are all provided with a first flow port;

[0014] The first upper positioning plate and the first middle positioning plate are used to position the upper and lower ends of the capacitor insulating cylinder respectively, and the first lower positioning plate is used to position the electrode insulating cylinder;

[0015] The first upper positioning plate is provided with a first conductive plate that can be connected to each of the capacitors and a first insulating shielding plate that covers the first conductive plate;

[0016] A first high-voltage conductive member passing through the first insulating shielding plate and connected to the first conductive plate is arranged on the box body, and a first air inlet pipe communicating with the inner cavity of the box body is also arranged on the box body.

[0017] Furthermore, the box body is provided with a second upper positioning plate, a second middle upper positioning plate, a second middle lower positioning plate and a second lower positioning plate in sequence from top to bottom in the cavity, and the second upper positioning plate, the second middle upper positioning plate, the second middle lower positioning plate and the second lower positioning plate are all provided with a second flow port;

[0018] The second upper positioning plate is used to position the capacitor insulating cylinder, the second middle upper positioning plate is used to position the horizontal section and is passed through by the vertical section, the second middle lower positioning plate and the second lower positioning plate are both used to position the electrode insulating cylinder, and the second middle lower positioning plate is also provided with a clearance opening connected to the electrode insulating cylinder;

[0019] The second upper positioning plate is provided with a second conductive plate that can be connected to each of the capacitors and a second insulating shielding plate that covers the second conductive plate;

[0020] A second high-voltage conductive member that penetrates through the box body and is connected to the second conductive plate is provided through the second insulating baffle, and a second air inlet pipe communicating with its inner cavity is also provided on the box body.

[0021] Furthermore, an outer shell is sleeved on the box body, an exhaust gas channel is formed between the inner wall of the outer shell and the outer wall of the box body, and an exhaust gas outlet is opened on the outer shell.

[0022] Furthermore, connection components with adjustable heights are provided on both sides of the outer shell.

[0023] Compared with the prior art, the advantages and positive effects of the present utility model are as follows:

[0024] 1. In the present utility model, when the nozzles are closely arranged, correspondingly, the capacitors will also be closely arranged. Through the setting of the capacitor insulating cylinder, a good isolation effect can be achieved, reducing the mutual influence between the capacitors and improving the operation stability.

[0025] 2. In the present utility model, through the setting of the conductive connecting piece, two adjacent capacitors corresponding to two adjacent nozzles on the same straight line can be in a staggered state. In this way, the density of the nozzle arrangement can be further improved, and thus the uniformity and sufficiency of the plasma treatment can be further improved.

[0026] 3. In the present utility model, the setting of the spiral injection channel can guide the ionized mixed gas to flow in a spiral shape. In this way, the plasma ionized by the electrode will also be ejected in a tornado shape, which helps to enhance the intensity and strength of the treatment. Description of the Drawings

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0028] Figures 1 - 2 It is a schematic structural diagram of Embodiment 1;

[0029] Figure 3 It is a bottom view of Embodiment 1;

[0030] Figure 4 It is for Figure 3 a cross-sectional view taken along the A-A direction in

[0031] Figures 5 - 6 It is a schematic structural diagram inside the cavity of the box body in Embodiment 1;

[0032] Figure 7 Schematic structural diagram of the ionization component in Embodiment 1;

[0033] Figure 8 Schematic structural diagram of the capacitor and the electrode in Embodiment 1;

[0034] Figures 9 - 10 Schematic structural diagram of Embodiment 2;

[0035] Figure 11 Bottom view of Embodiment 2;

[0036] Figure 12 For Figure 11 Cross-sectional view along the B-B direction in

[0037] Figure 13 Schematic structural diagram inside the box cavity in Embodiment 2;

[0038] Figures 14 - 15 Schematic structural diagram of the arrangement of multiple ionization components in Embodiment 2;

[0039] Figure 16 Schematic structural diagram of the ionization component in Embodiment 2;

[0040] Figure 17 Schematic structural diagram of the capacitor and the electrode in Embodiment 2.

[0041] Among them, the names of the parts corresponding to the reference numerals are as follows: 1. Box body, 2. Sprayer, 3. Capacitor, 4. Electrode, 5. Capacitor insulating cylinder, 6. Electrode insulating cylinder, 7. Ionization through-hole, 8. Conductive connecting piece, 9. Vertical section, 10. Horizontal section, 11. Elastic piece, 12. First upper positioning plate, 13. Second middle positioning plate, 14. First lower positioning plate, 15. Spraying channel, 16. First through-flow port, 17. First conductive plate, 18. First insulating shielding plate, 19. Second upper positioning plate, 20. Second middle-upper positioning plate, 21. Second middle-lower positioning plate, 22. Second lower positioning plate, 23. Second through-flow port, 24. Yielding through-hole, 25. Second conductive plate, 26. Second insulating shielding plate, 27. First high-voltage conductive piece, 28. First air inlet pipe, 29. Second high-voltage conductive piece, 30. Second air inlet, 31. Outer shell, 32. Exhaust gas channel, 33. Exhaust gas outlet, 34. Connection assembly, 35. Air passage through-hole. Detailed implementation manners

[0042] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts, any modifications, equivalent replacements, improvements, etc., shall be included in the protection scope of the present utility model.

[0043] Embodiment 1

[0044] As Figures 1 to 8 shown, a high-density linear plasma generating device includes a box body 1 having a cavity. A plurality of groups of nozzle groups are provided at the bottom of the box body 1. Each nozzle group includes a plurality of nozzles 2 arranged linearly at intervals. A plurality of ionization assemblies corresponding to the plurality of nozzles 2 are provided in the box body 1. The ionization assembly includes a capacitor 3, an electrode 4 connected to the capacitor 3, and an electrode insulating cylinder 6 sleeved outside the electrode 4. An ionization through-port 7 communicating with the nozzle 2 is provided at the bottom end of the electrode insulating cylinder 6. The ionization assembly further includes a capacitor insulating cylinder 5 sleeved outside the capacitor 3.

[0045] In this embodiment, both the capacitor insulating cylinder 5 and the electrode insulating cylinder 6 can be made of ceramic material, and the electrode 4 is made of a copper rod.

[0046] During application, a uniform ionization mixed gas is injected into the box body 1. The capacitor 3 is connected to a high-frequency high-voltage power supply. When the power supply is started to input high voltage to the capacitor 3, the ionization mixed gas flowing through the electrode insulating cylinder 6 and passing through the electrode 4 will be ionized into plasma. As the ionization mixed gas is continuously injected, the aforementioned plasma will be pushed out of the ionization through-port 7 and ejected from the nozzle 2. As Figure 4 shown, the hollow arrow indicates the flow direction of the ionization mixed gas.

[0047] Among them, when the nozzles 2 are arranged closely, correspondingly, the capacitors 3 will also be arranged closely. Through the setting of the capacitor insulating cylinder 5, a good isolation effect can be achieved, reducing the mutual influence between the capacitors 3.

[0048] As Figures 2 - 3 shown, this embodiment is provided with three groups of nozzle groups. The length of the bottom of the box body 1 is about 875 mm. Each nozzle group is linearly arranged with a plurality of nozzles 2 at intervals. The spacing between the nozzles 2 is 22 mm. Such a setting can fully ensure the sufficiency and uniformity of plasma treatment.

[0049] Preferably, a spiral injection channel 15 is provided on the outer surface of the electrode 4. As Figure 8As shown, the spiral injection channel 15 is arranged to guide the ionized mixed gas to flow spirally. In this way, the plasma ionized by the electrode 4 will also be ejected in a tornado shape, which helps to enhance the intensity and strength of the treatment.

[0050] Preferably, the ionization component further includes a conductive connecting piece 8 connected to the capacitor 3, and the conductive connecting piece 8 is electrically connected to the electrode 4 through an elastic piece 11.

[0051] In this embodiment, both the conductive connecting piece 8 and the elastic piece 11 are made of conductive materials, such as copper. The elastic piece 11 can be in the shape of a spring. The setting of the elastic piece 11 can position the electrode 4 in the electrode insulating cylinder 6 to prevent it from moving accidentally under the action of the ionized mixed gas.

[0052] Preferably, in the cavity of the box body 1, a first upper positioning plate 12, a first middle positioning plate 13 and a first lower positioning plate 14 are sequentially arranged from top to bottom. First through holes 16 are provided at the ends of the first upper positioning plate 12, the first middle positioning plate 13 and the first lower positioning plate 14;

[0053] The first upper positioning plate 12 and the first middle positioning plate 13 are respectively used to position the upper and lower ends of the capacitor insulating cylinder 5, and the first lower positioning plate 14 is used to position the electrode insulating cylinder 6;

[0054] A first conductive plate 17 capable of connecting to each capacitor 3 and a first insulating shielding plate 18 covering the first conductive plate 17 are arranged on the first upper positioning plate 12;

[0055] A first high-voltage conductive part 27 passing through the first insulating shielding plate 18 and connected to the first conductive plate 17 is arranged through the box body 1, and a first air inlet pipe 28 communicating with its inner cavity is also arranged on the box body 1.

[0056] In this embodiment, the first conductive plate 17 is made of a conductive material, such as a copper plate; the first insulating shielding plate 18 is made of an insulating material, such as a fluorine-containing resin material.

[0057] Among them, in addition to the positioning function, the first upper positioning plate 12, the first middle positioning plate 13 and the first lower positioning plate 14 can also divide the cavity of the box body 1 into multiple mixing chambers to fully mix the ionized mixed gas. The ionized mixed gas reaches the electrode insulating cylinder 6 through each first through hole 16 to receive the ionization effect.

[0058] During application, to facilitate the connection of the first air inlet pipe 28, a first air inlet (not shown in the figure) for communicating with the first air inlet pipe 28 is provided at the top end of the box body 1. The first air inlet pipe 28 is used to connect the ionized mixed gas; the first high-voltage conductive part 27 is used to connect to a high-frequency high-voltage power supply.

[0059] Preferably, an outer shell 31 is also sleeved on the box body 1. An exhaust gas passage 32 is formed between the inner wall of the outer shell 31 and the outer wall of the box body 1, and an exhaust gas outlet 33 is formed on the outer shell 31.

[0060] During application, the exhaust gas outlet 33 is communicated with an air extraction device. When plasma treatment is carried out, the air extraction device is started, and then the treated exhaust gas can be discharged from the exhaust gas passage 32 and the exhaust gas outlet 33. As Figure 4 shown, the thin line arrow indicates the flowing direction of the exhaust gas.

[0061] Preferably, for facilitating the installation of this embodiment, connection components 34 with adjustable heights can be arranged on both sides of the outer shell 31.

[0062] Embodiment 2

[0063] As Figures 9 to 17 shown, a high-density linear plasma generating device includes a box body 1 with a cavity. A plurality of groups of nozzle groups are formed at the bottom of the box body 1. Each nozzle group includes a plurality of nozzles 2 arranged linearly at intervals. A plurality of ionization components corresponding to the plurality of nozzles 2 are arranged in the box body 1. The ionization component includes a capacitor 3, an electrode 4 connected to the capacitor 3, and an electrode insulating cylinder 6 sleeved on the periphery of the electrode 4. An ionization through port 7 communicated with the nozzle 2 is formed at the bottom end of the electrode insulating cylinder 6. The ionization component further includes a capacitor insulating cylinder 5 sleeved on the periphery of the capacitor 3.

[0064] Preferably, the ionization component further includes a conductive connecting piece 8 connected to the capacitor 3. The conductive connecting piece 8 is electrically connected to the electrode 4 through an elastic member 11. The conductive connecting piece 8 has a horizontal section 10 and a vertical section 9 connected to the inner end of the horizontal section 10;

[0065] The vertical section 9 is connected to the electrode 4, and the outer end of the horizontal section 10 is connected to the bottom end of the capacitor 3;

[0066] In the ionization components corresponding to the same nozzle group, the transverse lengths of the horizontal sections 10 of two adjacent conductive connecting pieces 8 are inconsistent.

[0067] In this embodiment, both the capacitor insulating cylinder 5 and the electrode insulating cylinder 6 can be made of ceramic material, and the electrode 4 is made of a copper rod. The conductive connecting piece 8 and the elastic member 11 are both made of conductive material, such as copper material. The elastic member 11 can be in the shape of a spring. The arrangement of the elastic member 11 can position the electrode 4 in the electrode insulating cylinder 6 to prevent it from moving accidentally under the action of the ionized mixed gas.

[0068] During application, a uniform ionized mixed gas is injected into the box body 1. The capacitor 3 is connected to a high-frequency high-voltage power supply, and when this power supply is started to input high voltage to the capacitor 3, the ionized mixed gas flowing through the electrode insulating cylinder 6 and passing through the electrode 4 will be ionized into plasma. With the continuous injection of the ionized mixed gas, the aforementioned plasma will be pushed out of the ionization port 7 and ejected from the nozzle 2. As Figure 12 shown, the hollow arrow indicates the flow direction of the ionized mixed gas.

[0069] When the nozzles 2 are closely arranged, correspondingly, the capacitors 3 will also be closely arranged. Through the setting of the capacitor insulating cylinder 5, a good isolation effect can be achieved, reducing the mutual influence between the capacitors 3.

[0070] In addition, the setting of the conductive connecting piece 8 can optimize the arrangement of multiple capacitors 3. Specifically, it can make the two adjacent capacitors 3 corresponding to the two adjacent nozzles located on the same straight line (linear) in a staggered state. In this way, the density of the arrangement of the nozzles 2 can be further increased, and further, the uniformity and sufficiency of plasma treatment can be improved.

[0071] As Figures 10 - 11 shown, this embodiment is provided with two groups of nozzle groups, and each nozzle group is linearly arranged at intervals with a plurality of nozzles 2, and the distance between the nozzles 2 can be shortened to 14 mm. Among them, in the ionization component corresponding to the same nozzle group, the setting of the length of the horizontal section 10 of the two adjacent conductive connecting pieces 8 makes: a plurality of the capacitors 3 are linearly arranged at intervals on two straight lines, and the two adjacent capacitors 3 are respectively located on the two straight lines. Due to the existence of the conductive connecting piece 8, the two straight lines are longitudinally staggered with the same nozzle group, as Figure 14 shown, where a is the straight line where the same nozzle group is located, and b and c are respectively the two straight lines where the corresponding plurality of capacitors 3 are located.

[0072] Preferably, the horizontal section 10 is inclined in the transverse direction, and in the ionization component corresponding to the same nozzle group, the inclination angles of the horizontal sections 10 of the two adjacent conductive connecting pieces 8 are inconsistent. In this way, it is convenient to closely arrange each capacitor insulating cylinder 5, as Figures 14 - 15 shown.

[0073] Preferably, a spiral injection channel 15 is provided on the outer surface of the electrode 4. As Figure 17 shown, the setting of the spiral injection channel 15 can guide the ionized mixed gas to flow in a spiral shape. In this way, the plasma ionized by the electrode 4 will also be ejected in a tornado shape, which helps to strengthen the intensity and force of the treatment.

[0074] Preferably, the box body 1 is provided with a second upper positioning plate 19, a second middle upper positioning plate 20, a second middle lower positioning plate 21 and a second lower positioning plate 22 in the cavity from top to bottom, and the second upper positioning plate 19, the second middle upper positioning plate 20, the second middle lower positioning plate 21 and the second lower positioning plate 22 are all provided with a second flow port 23;

[0075] The second upper positioning plate 19 is used to position the capacitor insulating cylinder 5, the second middle upper positioning plate 20 is used to position the horizontal section 10 and is passed through by the vertical section 9, the second middle lower positioning plate 21 and the second lower positioning plate 22 are both used to position the electrode insulating cylinder 6, and the second middle lower positioning plate 21 is also provided with a clearance opening 24 connected to the electrode insulating cylinder 6;

[0076] The second upper positioning plate 19 is provided with a second conductive plate 25 that can be connected to each of the capacitors 3 and a second insulating shielding plate 26 that covers the second conductive plate 25;

[0077] The box body 1 is provided with a second high-voltage conductor 29 penetrating through the second insulating shielding plate 26 and connected to the second conductive plate 25 . The box body 1 is also provided with a second air inlet pipe communicating with its inner cavity.

[0078] In this embodiment, the second conductive plate 25 is made of a conductive material, such as a copper plate; the second insulating shielding plate 26 is made of an insulating material, such as a fluorocarbon material.

[0079] Among them, the second upper positioning plate 19, the second middle upper positioning plate 20, the second middle lower positioning plate 21 and the second lower positioning plate 22 not only have a positioning function, but can also divide the cavity of the box body 1 into multiple mixing chambers to fully mix the ionized mixed gas. After passing through each second flow port 23, the ionized mixed gas reaches the electrode insulating tube 6 to receive ionization.

[0080] When in use, in order to facilitate the connection of the second air inlet pipe, the top of the box body 1 is provided with a second air inlet 30 connected to the second air inlet pipe. The second air inlet pipe is used to connect the ionized mixed gas; the second high-voltage conductive member 29 is used to connect the high-frequency high-voltage power supply.

[0081] Preferably, the box body 1 is further sleeved with a shell 31 , an exhaust gas passage 32 is formed between the inner wall of the shell 31 and the outer wall of the box body 1 , and an exhaust gas exhaust port 33 is opened on the shell 31 .

[0082] When used, the exhaust port 33 is connected to the exhaust device. When the plasma treatment is performed, the exhaust device is started, and the treated exhaust gas can be discharged from the exhaust channel 32 and the exhaust port 33. Figure 12 In addition, the housing 31 may be provided with an air outlet 35 , and the second air inlet pipe may be made of a hose material, and the second air inlet pipe may pass through the air outlet 35 and communicate with the second air inlet 30 .

[0083] Preferably, for the convenience of implementing the installation of this embodiment, connection components 34 with adjustable heights can be provided on both sides of the outer shell 31.

[0084] The above content is a further detailed description of the present utility model in combination with specific preferred implementation manners. It cannot be determined that the specific implementation manners of the present utility model are only limited to these descriptions. For those of ordinary skill in the technical field to which the present utility model belongs, other implementation manners obtained without departing from the technical solution of the present utility model should all be included within the protection scope of the present utility model.

Claims

1. A high-density linear plasma generating device, comprising a box body (1) with a cavity, wherein a plurality of groups of nozzle groups are formed at the bottom of the box body (1), each nozzle group includes a plurality of nozzles (2) arranged linearly at intervals, a plurality of ionization assemblies corresponding to the plurality of nozzles (2) are arranged in the box body (1), the ionization assembly includes a capacitor (3), an electrode (4) connected to the capacitor (3), and an electrode insulating cylinder (6) sleeved around the electrode (4), an ionization through hole (7) communicating with the nozzle (2) is formed at the bottom end of the electrode insulating cylinder (6), and is characterized in that: The ionization component further includes a capacitor insulating cylinder (5) sleeved around the capacitor (3).

2. The high-density linear plasma generating device according to claim 1, wherein: The outer surface of the electrode (4) is provided with a spiral injection channel (15).

3. The high-density linear plasma generating device according to claim 2, wherein: The ionization component further includes a conductive connecting piece (8) connected to the capacitor (3), and the conductive connecting piece (8) is electrically connected to the electrode (4) through an elastic piece (11).

4. The high-density linear plasma generating device according to claim 3, wherein: The conductive connecting piece (8) has a horizontal section (10) and a vertical section (9) connected to the inner end of the horizontal section (10); The vertical section (9) is connected to the electrode (4), and the outer end of the horizontal section (10) is connected to the bottom end of the capacitor (3); In the ionization components corresponding to the same nozzle group, the transverse lengths of the horizontal sections (10) of two adjacent conductive connecting pieces (8) are inconsistent.

5. The high-density linear plasma generating device according to claim 4, wherein: In the ionization components corresponding to the same nozzle group, the lengths of the horizontal sections (10) of two adjacent conductive connecting pieces (8) are set such that: a plurality of the capacitors (3) are linearly arranged at intervals on two straight lines, and two adjacent capacitors (3) are respectively located on two straight lines.

6. The high-density linear plasma generating device according to claim 4, wherein: The horizontal section (10) is inclined in the transverse direction, and in the ionization components corresponding to the same nozzle group, the inclination angles of the horizontal sections (10) of two adjacent conductive connecting pieces (8) are inconsistent.

7. The high-density linear plasma generating device according to claim 3, characterized in that: In the cavity of the box body (1), a first upper positioning plate (12), a first middle positioning plate (13), and a first lower positioning plate (14) are sequentially arranged from top to bottom. First through holes (16) are provided on the first upper positioning plate (12), the first middle positioning plate (13), and the first lower positioning plate (14); The first upper positioning plate (12) and the first middle positioning plate (13) are respectively used to position the upper and lower ends of the capacitor insulating cylinder (5), and the first lower positioning plate (14) is used to position the electrode insulating cylinder (6); The first upper positioning plate (12) is provided with a first conductive plate (17) capable of being connected to each capacitor (3) and a first insulating shielding plate (18) covering the first conductive plate (17); A first high-voltage conductive part (27) passing through the first insulating shielding plate (18) and connected to the first conductive plate (17) is provided on the box body (1) in a penetrating manner, and a first air inlet pipe (28) communicating with its inner cavity is further provided on the box body (1).

8. The high-density linear plasma generating device according to claim 4, characterized in that: In the cavity of the box body (1), a second upper positioning plate (19), a second middle-upper positioning plate (20), a second middle-lower positioning plate (21), and a second lower positioning plate (22) are sequentially arranged from top to bottom. Second through holes (23) are provided on the second upper positioning plate (19), the second middle-upper positioning plate (20), the second middle-lower positioning plate (21), and the second lower positioning plate (22); The second upper positioning plate (19) is used to position the capacitor insulating cylinder (5), the second middle-upper positioning plate (20) is used to position the horizontal section (10) and is penetrated by the vertical section (9), both the second middle-lower positioning plate (21) and the second lower positioning plate (22) are used to position the electrode insulating cylinder (6), and a relief through hole (24) communicating with the electrode insulating cylinder (6) is further provided on the second middle-lower positioning plate (21); A second upper positioning plate (19) is provided with a second conductive plate (25) capable of being connected to each of the capacitors (3) and a second insulating shielding plate (26) covering the second conductive plate (25); The box body (1) is provided with a second high-voltage conductive member (29) passing through the second insulating shielding plate (26) and connected to the second conductive plate (25), and the box body (1) is further provided with a second air inlet pipe communicating with its inner cavity.

9. The high-density linear plasma generating device according to claim 7 or 8, characterized in that: The box body (1) is further sleeved with an outer shell (31), an exhaust gas passage (32) is formed between the inner wall of the outer shell (31) and the outer wall of the box body (1), and an exhaust gas outlet (33) is opened on the outer shell (31).

10. The high-density linear plasma generating device according to claim 9, characterized in that: Adjustable-height connection components (34) are arranged on both sides of the outer shell (31).

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