Precious metal ultrathin alloy material high-temperature tensioning and flattening device for probe

Abstract

The utility model discloses a noble metal ultrathin alloy material high-temperature tensioning and flattening device for a probe, which comprises a rectangular lower support and a rectangular upper support which are the same in size, at least two beam plates which are arranged in parallel in the length direction of the lower support and the upper support, and an accommodating groove which is adaptive to the width of the noble metal ultrathin alloy material is formed between the beam plates; the two ends of the upper support and the two ends of the lower support are fixed to beam plates through end positioning plates to form a rectangular frame, and the end positioning plates are connected through supporting rods to form a cuboid frame structure. Adjusting caulking grooves used for installing rolling shafts are correspondingly formed in the beam plates on the two sides of the containing groove, tensioning plates are fixedly arranged on the surfaces, corresponding to openings of the adjusting caulking grooves, of the beam plates, and adjusting screws in threaded connection with the tensioning plates are in threaded connection with the rolling shafts in the adjusting caulking grooves to form a rolling shaft adjusting mechanism. Fixing clamping pieces are arranged on the side faces, corresponding to the containing grooves, of the end positioning plates and used for fixing the ends, arranged in the containing grooves, of the precious metal ultra-thin alloy materials.

Description

Technical Field

[0001] The utility model belongs to the technical field of leveling treatment of noble metal ultra-thin alloy materials for probes, and particularly relates to a high-temperature tension leveling device for noble metal ultra-thin alloy materials for probes. Background Art

[0002] Semiconductor integrated circuits need to be powered on and tested respectively in the front-end process and the back-end process of their manufacturing process. The front-end process is the power-on test, which is called wafer testing; this test is performed by an automatic test device, and it is required that the interface between the tester and the chip contact pad has high reliability. This interface is provided by a probe card and probes, and the requirements for the probes are very high; due to the extremely small spacing between individual contact pads, they must be very flat and have excellent electrical conductivity; currently, all high-precision and high-reliability probes used in China rely on imports; High-end probe materials include alloys such as PdAgCu, PdAg, PtNi, and CuAg. For example, although these alloys have good target properties, the preparation method or processing technology affects the flatness of these noble metal ultra-thin alloy materials and cannot meet the flatness requirements for applications in probes.

[0003] At present, in the vast majority of existing technologies, the leveling of metal alloy materials is carried out using large roller leveling machines. On the one hand, there are high requirements for the leveling amount on the machine and it is carried out at room temperature. On the other hand, quality problems such as scratches and imprints are likely to appear on the surface of the thin strip during the rolling contact leveling process, especially not suitable for the leveling of noble metal ultra-thin alloy materials; therefore, there is an urgent need to develop a high-temperature tension leveling device for noble metal ultra-thin alloy materials for probes. Summary of the Utility Model

[0004] In order to overcome the deficiencies of the existing metal alloy material leveling equipment when applied to noble metal ultra-thin alloy materials for probes, the purpose of the utility model is to provide a high-temperature tension leveling device for noble metal ultra-thin alloy materials for probes, which realizes the tension leveling of noble metal ultra-thin alloy materials for probes in cooperation with the high-temperature method.

[0005] The object of the present utility model is achieved as follows. The high-temperature tensioning and flattening device for the probe made of precious metal ultra-thin alloy material includes a rectangular lower bracket and an upper bracket with the same size. In the length direction of the lower bracket and the upper bracket, there are at least two beam plates arranged in parallel. An accommodating groove adapted to the width of the precious metal ultra-thin alloy material is formed between the beam plates. The lower ends of the two side ends of the beam plates of the upper bracket are fixed into a rectangular frame through end positioning plates. The upper ends of the two side ends of the beam plates of the lower bracket are fixed into a rectangular frame through end positioning plates. The lower bracket and the upper bracket are combined into a cuboid frame structure by connecting the end positioning plates with support rods. On the opposite side surfaces of the two beam plates on both sides of the accommodating groove of the lower bracket and / or the upper bracket, a plurality of groups of adjusting grooves for installing the roller shaft heads are correspondingly arranged, and the adjusting grooves extend parallel to the end face of the roller towards the beam plates and form adjusting openings. The adjusting openings of the beam plates on the lower bracket face downward of the lower bracket, and the adjusting openings of the beam plates on the upper bracket face upward of the upper bracket. When only the two beam plates on both sides of the accommodating groove of the lower bracket or the upper bracket are correspondingly provided with adjusting grooves, a plurality of groups of rollers are directly installed between the two beam plates on both sides of the accommodating groove of the other bracket. Tensioning plates are fixedly arranged on the end faces of the beam plates corresponding to the adjusting openings. The adjusting screws screwed on the tensioning plates are in threaded connection with the roller shaft heads arranged in the adjusting grooves. The rollers are driven to move up and down in the adjusting grooves by the adjusting screws. Fixed clips are arranged on the side surfaces of the end positioning plates corresponding to the accommodating groove for fixing the ends of the precious metal ultra-thin alloy material arranged in the accommodating groove.

[0006] For the high-temperature tensioning and flattening device for the probe made of precious metal ultra-thin alloy material of the present utility model, the precious metal ultra-thin alloy strip material is arranged in the accommodating groove on the cuboid frame structure formed by the lower bracket, the upper bracket and the support rods. While fixing the ends of the strip material by the fixed clips, the vertical position of the roller is adjusted by the adjusting screw on the tensioning plate, so as to realize the tensioning of the strip material. The device for arranging the strip material and completing the tensioning is sent into a vacuum furnace, and the flattening of the strip material is realized by controlling the vacuum degree, temperature, etc. Compared with the single extrusion method for flattening heat treatment in the prior art, applying the high-temperature tensioning and flattening method of the present utility model not only is applicable to strip materials of various lengths, but also has an ideal flattening effect after high-temperature tensioning and flattening, has no influence on the surface quality of the strip material, and at the same time has the advantages of simple operation and continuous production, and can improve the flattening quality and production efficiency of the precious metal ultra-thin alloy material for the probe. Brief Description of the Drawings

[0007] Figure 1 is a three-dimensional schematic diagram of the device of the present utility model;

[0008] In the figure, 1 - lower bracket, 2 - end positioning plate, 3 - support rod, 4 - upper bracket, 5 - fixed clip, 6 - roller, 7 - tensioning plate, 8 - adjusting screw, 9 - intermediate positioning plate, 10 - beam plate, 11 - adjusting groove. Detailed Description of the Preferred Embodiments

[0009] The present utility model will be further described below in conjunction with the accompanying drawings, but it is not limited in any way. Any transformation or replacement based on the teachings of the present utility model falls within the protection scope of the present utility model.

[0010] As shown Figure 1 in the figure, the high-temperature tensioning and leveling device for the noble metal ultra-thin alloy material used in the probe of the present utility model includes a rectangular lower bracket 1 and an upper bracket 4 with the same size. There are at least two beam plates 10 arranged in parallel in the length direction of the lower bracket 1 and the upper bracket 4. An accommodation groove adapted to the width of the noble metal ultra-thin alloy material is formed between the beam plates 10. The two ends of the beam plates 10 on both sides of the upper bracket 4 are fixed into a rectangular frame through the end positioning plates 2. The two ends of the beam plates 10 on both sides of the lower bracket 1 are fixed into a rectangular frame through the end positioning plates 2. The lower bracket 1 and the upper bracket 4 are combined into a cuboid frame structure by connecting the end positioning plates 2 through the support rods 3. On the opposite side surfaces of the two beam plates 10 on both sides of the accommodation groove of the lower bracket 1 and / or the upper bracket 4, a plurality of groups of adjustment slots 11 for installing the shaft heads of the rollers 6 are correspondingly arranged, and the adjustment slots 11 extend parallel to the end face of the roller 6 towards the beam plates 10 to form adjustment openings. The adjustment openings of the beam plates 10 on the lower bracket 1 face downwards of the lower bracket 1, and the adjustment openings of the beam plates 10 on the upper bracket 4 face upwards of the upper bracket 4. When only the two beam plates 10 on both sides of the accommodation groove of the lower bracket 1 or the upper bracket 4 are correspondingly provided with the adjustment slots 11, a plurality of groups of rollers 6 are directly installed between the two beam plates 10 on both sides of the accommodation groove of the other bracket. Tensioning plates 7 are fixedly arranged on the end faces of the beam plates 10 corresponding to the adjustment openings. The adjustment screws 8 screwed on the tensioning plates 7 are in threaded connection with the shaft heads of the rollers 6 arranged in the adjustment slots 11. The rollers 6 are driven to move up and down in the adjustment slots 11 through the adjustment screws 8. Fixed clips 5 are arranged on the side surfaces of the end positioning plates 2 corresponding to the accommodation groove for fixing the ends of the noble metal ultra-thin alloy material arranged in the accommodation groove.

[0011] Intermediate positioning plates 9 are respectively arranged in the middle regions of the upper and lower opposite sides of the two beam plates 10 on both sides of the lower bracket 1 and the upper bracket 4, and the upper and lower intermediate positioning plates 9 are connected together through the support rods 3. With such a setting, it can effectively avoid the bending deformation of the upper bracket 1 and the lower bracket 4 due to the tension force during high-temperature leveling.

[0012] The roller 6 includes a core shaft and a sleeve. The end of the core shaft is arranged in the adjustment slot 11 and is in threaded connection with the adjustment screw 8, or the end of the core shaft is arranged in the two beam plates 10 on both sides of the accommodation groove. Since sliding will occur during the tensioning or leveling process of the noble metal ultra-thin alloy strip material, with such a setting, the friction between the roller 6 and the material surface can be reduced.

[0013] Fixing clips 5 are respectively arranged on the side surfaces of the end positioning plates 2 on both sides of the upper bracket 4 or the lower bracket 1; alternatively, fixing clips 5 are arranged on the side surface of the end positioning plate 2 on one side of the upper bracket 4 or the lower bracket 1; alternatively, fixing clips 5 are respectively arranged on the side surfaces of the end positioning plates 2 on the same side of the upper bracket 4 and the lower bracket 1; the fixing clips 5 all correspond to the accommodating grooves; with such a setting, multiple ways are provided for fixing the end of the precious metal ultra-thin alloy strip-shaped material during winding and laying, and it is also beneficial to adapt to strip-shaped materials of different lengths.

[0014] The fixing clip 5 fixes the end of the precious metal ultra-thin alloy material through a locking screw.

[0015] The device adopts a lower bracket 1, an end positioning plate 2, a support rod 3, an upper bracket 4, a fixing clip 5, a roller 6, a tensioning plate 7, and an adjusting screw 8 made of heat-resistant steel. The heat-resistant temperature range of the heat-resistant steel is from normal temperature to 1500 °C. With such a setting, it can be avoided that the device deforms in the high-temperature environment of the vacuum furnace and affects the leveling operation.

[0016] An auxiliary roller with an axial direction parallel to the roller 6 is arranged at the end of the non-fixing clip 5 installation side of the lower bracket 1 or the upper bracket 4, and the axial surface of the auxiliary roller extends beyond the end surface of the end positioning plate 2; with such a setting, it is beneficial for the precious metal ultra-thin alloy strip-shaped material to avoid sharp structures during winding and laying, and prevent the strip-shaped material from being damaged.

[0017] The support rod 3 has a telescopic structure with adjustable and lockable length; with such a setting, a spatial structure suitable for laying precious metal ultra-thin alloy strip-shaped materials of different lengths can be obtained by adjusting the length of the support rod 3.

[0018] Working principle:

[0019] The device of the present utility model forms a cuboid frame structure through the lower bracket 1, the upper bracket 4, and the support rod 3. The surfaces of the lower bracket 1 and the upper bracket 4 form an accommodating groove for laying the precious metal ultra-thin alloy strip-shaped material through the beam plate 10. The precious metal ultra-thin alloy strip-shaped material winds around the cuboid frame structure and is laid on the roller 6 in the accommodating groove, and the end is fixed by the fixing clip 5; the position of the roller 6 in the adjusting groove 11 is adjusted by the adjusting screw 8 on the tensioning plate 7, so as to tension the strip-shaped material to the target degree; then the device after laying the precious metal ultra-thin alloy strip-shaped material and completing the tensioning adjustment is sent into the vacuum furnace, and the leveling of the strip-shaped material is realized by controlling the vacuum degree, temperature, etc.

[0020] Application method:

[0021] Layout and tension adjustment of noble metal ultra-thin alloy strip materials: Taking the fixed clips 5 respectively arranged on the side surfaces of the positioning plates 2 at both ends of the upper support 4 as an example, adjust the width of the receiving groove and the lengths of the beam plate 10 and the support rod 3 according to the width and length of the noble metal ultra-thin alloy strip material, so as to obtain a receiving groove with an appropriate width and a frame suitable for winding with a suitable length; Fix one end of the strip material through the fixed clip 5 on one side of the upper support 4, and the strip material descends sequentially to the end of the lower support 1, enters the receiving groove, is placed on the roller 6, comes out from the other end of the lower support 1 and ascends to the fixed clip 5 on the other side of the upper support 4 for fixation, thus completing the layout of the noble metal ultra-thin alloy strip material; Adjust the adjusting screw 8 on the tensioning plate 7 to change the position of the roller 6 in the adjusting groove 11, so as to obtain the target tension degree of the strip material.

[0022] If the fixed clips 5 are respectively arranged on the side surfaces of the positioning plates 2 at both ends of the lower support 1, or the fixed clips 5 are arranged on the side surfaces of the positioning plates 2 on one side of the upper support 4 or the lower support 1, or the fixed clips 5 are respectively arranged on the side surfaces of the positioning plates 2 on the same side of the upper support 4 and the lower support 1, the initial and final fixing points and the winding layout method of the noble metal ultra-thin alloy strip material can be determined according to the setting position of the fixed clips 5. By cooperating with the length adjustment of the beam plate 10 and the support rod 3, the adaptability to noble metal ultra-thin alloy strip materials with different lengths can be improved.

[0023] Straightening treatment by high-temperature method: Select appropriate heat treatment temperature, holding time, heating and cooling rates, and vacuum degree according to the product performance. The device after layout and tension adjustment is sent into a vacuum furnace for straightening treatment:

[0024] Example 1: The strip material to be processed is a PdAgCu alloy strip material with a thickness of 0.05 mm, a width of 30 mm, and a length of 2860 cm. The strip material has wavy edges and is twisted and curled in the length direction, and is significantly concave in the width direction; After adjusting the device structure according to the width and length of the strip material, the layout and tension adjustment of the strip material are completed, and then it is sent into a vacuum furnace. The vacuum degree of the vacuum furnace is 0.45 Pa. The furnace temperature rises from room temperature to 400 °C within 20 min and is held for 1 h. After the holding is completed, it is cooled with the furnace. When the furnace temperature drops to near room temperature, the atmosphere is filled, the furnace door is opened, and the device is taken out; By using the device of the present utility model to layout the strip material and straighten it by the high-temperature method, the strip material is very flat, the wavy edges, twisting and curling in the length direction and the concavity in the width direction are eliminated, and the surface quality is no different from that before straightening.

[0025] Example 2: The strip material to be processed is a PdAgCu alloy strip material with a thickness of 0.04 mm, a width of 30 mm, and a length of 1430 cm. The flatness problem is the same as in Example 1. After the layout is completed, it is sent to a vacuum furnace with a vacuum degree of 0.5 Pa. The furnace temperature is raised from room temperature to 350°C within 15 minutes and kept warm for 1 hour. The strip material after leveling is very flat, eliminating the above defects and having no effect on the surface quality.

[0026] Example 3: The strip material to be processed is a CuAg alloy strip material with a thickness of 0.04 mm, a width of 30 mm, and a length of 2860 cm. The flatness problem is the same as in Example 1. After the layout is completed, it is sent to a vacuum furnace with a vacuum degree of 0.4 Pa. The furnace temperature is raised from room temperature to 260°C within 10 minutes and kept warm for 1 hour. The strip material after leveling is very flat, eliminating the above defects and having no effect on the surface quality.

[0027] Example 4: The strip material to be processed is a CuAg alloy strip material with a thickness of 0.04 mm, a width of 30 mm, and a length of 1430 cm. The flatness problem is the same as in Example 1. After the layout is completed, it is sent to a vacuum furnace with a vacuum degree of 0.4 Pa. The furnace temperature is raised from room temperature to 230°C in 10 minutes and kept warm for 1 hour. The strip material after leveling is very flat, eliminating the above defects and having no effect on the surface quality.

[0028] Comparative Example 1: The strip material to be processed is a PdAgCu alloy strip material with a thickness of 0.05 mm, a width of 30 mm, and a length of 30 cm. The flatness problem is the same as in Example 1. A single extrusion method is used for flattening heat treatment:

[0029] (1) Place a heat-resistant steel plate on a horizontal table and use 400# sandpaper to clean the surface of the heat-resistant steel plate to prevent impurities from scratching the surface of the thin strip;

[0030] (2) Place the strip material on the heat-resistant steel plate treated in step (1), and press another heat-resistant steel plate whose surface has been polished clean with 400# sandpaper on the strip material;

[0031] (3) The heat-resistant steel flat plate assembly holding the strip material is sent into a vacuum furnace. The vacuum degree of the vacuum furnace is 0.5 Pa. The heating program and the insulation time are the same as those in Example 1. After the treatment, the flatness of the strip material is improved. However, there are still local wavy edges and twists in the length direction. The middle of the width direction is convex and slightly concave, and there are many extrusion lines on the surface.

[0032] Comparative Example 2: The material and flatness of the strip material to be processed are the same as those in Comparative Example 1, the thickness of the strip material is 0.04mm, the width is 30mm, and the length is 30cm; when the single extrusion method is used for the flattening heat treatment, 10 strip materials are overlapped and set between the heat-resistant steel plates that have been cleaned by 400# sandpaper; they are sent into a vacuum heat furnace, the vacuum degree of the vacuum furnace is 0.45Pa, and the heating program and insulation time are the same as those in Comparative Example 1; after treatment, the flatness of the strip material is improved, but there are still local wavy edges and twists in the length direction, the middle of the width direction is convex and slightly concave, the surface of the strip material close to the heat-resistant steel plate has more extrusion lines, and the extrusion lines of the strip material in the middle are lighter.

[0033] Comparative Example 3: The material of the strip material to be processed is CuAg alloy, and the specifications and flatness issues are the same as those of Comparative Example 1; when a single extrusion method is used for flattening heat treatment, the method of clamping the strip material with a heat-resistant steel flat plate assembly is the same as that of Comparative Example 1; it is sent into a vacuum hot furnace with a vacuum degree of 0.4 Pa, and the furnace temperature is raised from room temperature to 260°C within 10 minutes and kept warm for 1 hour; the flatness effect of the strip material after treatment is similar to that of Comparative Example 1.

[0034] Comparative Example 4: The material, specification and flatness of the strip material to be processed are the same as those of Comparative Example 3. When the flattening heat treatment is carried out by single extrusion, the method of clamping the strip material with a heat-resistant steel flat plate assembly is the same as that of Comparative Example 2; it is sent into a vacuum hot furnace with a vacuum degree of 0.5 Pa, and the furnace temperature is raised from room temperature to 230°C within 10 minutes and kept warm for 1 hour; the flatness effect of the strip material after treatment is similar to that of Comparative Example 2.

[0035] It can be seen that the strip material is also processed in a vacuum furnace. Even though the vacuum degree, heating program, temperature and holding time in the comparative example are close to or the same as those in the embodiment, due to the different structures of the device carrying the strip material and the different controls on the layout of the strip material, there are significant differences in the flatness treatment effect after the high-temperature leveling treatment. The device described in the utility model has significant advantages in the high-temperature leveling effect and surface quality maintenance of ultra-thin precious metal alloy materials for probes.

Claims

1. A high-temperature tensioning and leveling device for noble metal ultra-thin alloy materials for probes, characterized in that, It includes rectangular lower brackets (1) and upper brackets (4) with the same size. In the length direction of the lower bracket (1) and the upper bracket (4), there are at least two beam plates (10) arranged in parallel. An accommodation groove adapted to the width of the precious metal ultra-thin alloy material is formed between the beam plates (10). The lower ends of the two side ends of the beam plates (10) of the upper bracket (4) are fixed into a rectangular frame through end positioning plates (2). The upper ends of the two side ends of the beam plates (10) of the lower bracket (1) are fixed into a rectangular frame through end positioning plates (2). The lower bracket (1) and the upper bracket (4) are combined into a cuboid frame structure by connecting the end positioning plates (2) with a support rod (3). On the opposite side surfaces of the two side beam plates (10) of the accommodation groove of the lower bracket (1) and / or the upper bracket (4), a plurality of groups of adjusting grooves (11) for installing the shaft heads of the rollers (6) are correspondingly arranged. And the adjusting grooves (11) extend towards the end face of the beam plates (10) parallel to the rollers (6) and form an adjusting opening. The adjusting opening of the beam plates (10) on the lower bracket (1) faces the lower part of the lower bracket (1), and the adjusting opening of the beam plates (10) on the upper bracket (4) faces the upper part of the upper bracket (4). When only the two side beam plates (10) of the accommodation groove of the lower bracket (1) or the upper bracket (4) are correspondingly provided with adjusting grooves (11), a plurality of groups of rollers (6) are directly installed between the two side beam plates (10) of the accommodation groove of the other bracket. A tensioning plate (7) is fixedly arranged on the end face of the beam plate (10) corresponding to the adjusting opening. An adjusting screw rod (8) screwed on the tensioning plate (7) is in threaded connection with the shaft head of the roller (6) arranged in the adjusting groove (11). The roller (6) is driven to move up and down in the adjusting groove (11) by the adjusting screw rod (8). Fixed clips (5) are arranged on the side surfaces of the end positioning plates (2) corresponding to the accommodation groove, for fixing the ends of the precious metal ultra-thin alloy material arranged in the accommodation groove.

2. The high-temperature tension and leveling device for the noble metal ultra-thin alloy material for probes according to claim 1, wherein, Intermediate positioning plates (9) are respectively arranged in the middle areas of the upper and lower opposite sides of the two side beam plates (10) of the lower bracket (1) and the upper bracket (4), and the upper and lower intermediate positioning plates (9) are connected together by a support rod (3).

3. The high-temperature tension and leveling device for the noble metal ultra-thin alloy material for probes according to claim 1, characterized in that, The roller (6) includes a core shaft and a sleeve. The end of the core shaft is arranged in the adjusting groove (11) and is in threaded connection with the adjusting screw rod (8), or the end of the core shaft is arranged in the two side beam plates (10) of the accommodation groove.

4. The high-temperature tension and leveling device for the noble metal ultra-thin alloy material for probes according to claim 1, wherein, Fixed clips (5) are respectively arranged on the side surfaces of the end positioning plates (2) on both sides of the upper bracket (4) or the lower bracket (1) and correspond to the accommodation groove.

5. The high-temperature tension leveling device for the noble metal ultra-thin alloy material for probes according to claim 1, characterized in that, Fixed clips (5) are arranged on the side surface of the end positioning plate (2) on one side of the upper bracket (4) or the lower bracket (1) and correspond to the accommodation groove.

6. The high-temperature tension leveling device for the noble metal ultra-thin alloy material for probes according to claim 1, wherein Fixed clips (5) are respectively arranged on the side surfaces of the end positioning plates (2) on the same side of the upper bracket (4) and the lower bracket (1) and correspond to the accommodation groove.

7. The high-temperature tension and leveling device for the noble metal ultra-thin alloy material for probes according to claim 1, 4, 5 or 6, characterized in that, The fixed clip (5) fixes the end of the precious metal ultra-thin alloy material through a locking screw.

8. The high-temperature tension leveling device for the noble metal ultra-thin alloy material for probes according to claim 1, characterized in that, The device is made of a lower bracket (1), an end positioning plate (2), a support rod (3), an upper bracket (4), a fixed clip (5), a roller (6), a tensioning plate (7), and an adjusting screw rod (8) made of heat-resistant steel. The heat-resistant temperature range of the heat-resistant steel is from normal temperature to 1500 °C.

9. The high-temperature tension leveling device for the noble metal ultra-thin alloy material for probes according to claim 1, 4, 5, 6 or 8, characterized in that An auxiliary roller with an axial direction parallel to that of the roller (6) is arranged at the end of the lower bracket (1) or the upper bracket (4) on the side where the non-fixed clip (5) is installed, and the axial surface of the auxiliary roller extends beyond the end face of the end positioning plate (2).

10. The high-temperature tension leveling device for the noble metal ultra-thin alloy material for probes according to claim 1, 2 or 8, characterized in that, The support rod (3) is a telescopic structure with adjustable length and lockable function.

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