Wafer automatic storage nitrogen bin

Abstract

The utility model discloses a nitrogen bin for automatically storing wafers, which belongs to the field of storage equipment, is used for solving the problem of low efficiency of manual wafer storage and taking in the prior art, and comprises a bin body, a goods shelf, a conveying line and a material taking mechanism, the bin body is provided with a closed storage cavity, and the bin body is provided with a feed port and a discharge port which are communicated with the storage cavity; the goods shelf is arranged in the storage cavity and is used for placing wafers; the conveying line is arranged in the storage cavity and connected with the feeding port and the discharging port. The material taking mechanism comprises a moving module and a mechanical arm which are arranged in the storage cavity and connected with each other, the moving module is used for driving the mechanical arm to move between the goods shelf and the conveying line, and the mechanical arm is used for grabbing the conveying line or the wafers on the goods shelf and placing the wafers on the goods shelf or the conveying line. According to the wafer automatic storage nitrogen bin, the conveying line, the moving module and the manipulator cooperate to realize automatic storage and taking functions of wafers, so that the efficiency and the accuracy of wafer product storage and taking operation are improved.

Description

Technical Field

[0001] The utility model relates to the field of warehousing equipment, and particularly relates to an automatic nitrogen storage bin for wafers. Background Art

[0002] Currently, many wafer products generally use small nitrogen cabinets as storage environments to maintain the required cleanliness, temperature, and humidity conditions to ensure product quality. However, this storage method has significant limitations in the access management of products. Specifically, since the access operations mainly rely on manual labor, not only is the efficiency low, increasing the labor cost, but also errors and delays are likely to occur during the access process due to human factors, which is not conducive to the effective tracking and management of wafer products. In addition, with the expansion of production scale and the increase in product types, the traditional manual access method is increasingly difficult to meet the requirements of efficient and accurate management, becoming a key factor restricting the improvement of the storage and management level of wafer products.

[0003] It should be noted that the information disclosed in the above background art section is only used to enhance the understanding of the background of the present disclosure, and therefore may include information that does not constitute the prior art known to those of ordinary skill in the art. Summary of the Invention

[0004] (I) Technical Problems to be Solved

[0005] The utility model provides an automatic nitrogen storage bin for wafers, and at least solves the technical problem of how to improve the efficiency and accuracy of the storage and retrieval operations of wafer products.

[0006] (II) Technical Solutions

[0007] To solve the above technical problems, the utility model provides the following technical solutions:

[0008] An automatic nitrogen storage bin for wafers, comprising:

[0009] A bin body, provided with a sealed storage cavity for storing wafers in a nitrogen environment. The bin body is provided with a feed port and a discharge port communicating with the storage cavity to allow wafers to enter and exit the storage cavity;

[0010] A shelf, arranged in the storage cavity and used for placing wafers;

[0011] A conveyor line, arranged in the storage cavity and connecting the feed port and the discharge port;

[0012] A material taking mechanism, including a moving module and a manipulator arranged in the storage cavity and connected to each other. The moving module is used to drive the manipulator to move between the shelf and the conveyor line. The manipulator is used to grab the wafers on the conveyor line or the shelf and place the wafers on the shelf or the conveyor line.

[0013] In some embodiments, there are two sets of the feed inlet and the discharge outlet, and there are two conveyor lines, which are respectively connected to the two sets of the feed inlet and the discharge outlet.

[0014] In some embodiments, the automatic nitrogen storage bin for wafers further includes a discharge table. The bin body is provided with a picking platform communicated with the storage cavity. The discharge table is arranged in the storage cavity and is provided with a picking channel facing one of the picking platforms. At least two groups of support plates are symmetrically arranged on opposite sides of the picking channel. The support plates in the same group are used to place single wafers, and there is a gap between them. Each group of support plates is arranged in sequence from top to bottom, and the gap gradually decreases; the manipulator is further used to place the wafers on the shelf on the support plates.

[0015] In some embodiments, the automatic nitrogen storage bin for wafers further includes a wafer fixture. The wafer fixture is movably arranged on the conveyor line and is provided with a vertically extending card slot. At least two card slots are equidistantly arranged in the length direction of the wafer fixture. Each card slot is used to hold a single wafer so that the wafer is placed vertically.

[0016] In some embodiments, the automatic nitrogen storage bin for wafers further includes a vision detection device. The vision detection device is used to detect and identify the specific position information of the wafer to be grabbed by the manipulator, and transmit the detected wafer position information to the control system in real time; after receiving the position information, the control system controls the manipulator to move to the target position according to the position information and perform the grabbing operation.

[0017] In some embodiments, the shelf includes columns and receiving trays. There are several columns, which are arranged at intervals. The receiving trays are fixed on the columns and are arranged at intervals in the height direction of the columns. Two receiving trays at the same height on adjacent columns are used to support the same wafer.

[0018] In some embodiments, at least two receiving plates are arranged at intervals from top to bottom on the receiving tray. Two receiving plates at the same height of the two receiving trays used to support the same wafer are used to place the same wafer, and there is a gap between them. Each group of receiving plates is arranged in sequence from top to bottom, and the gap gradually decreases.

[0019] In some embodiments, the bin body is provided with a nitrogen concentration detection device for detecting the nitrogen concentration in the storage cavity, and is provided with a vent for discharging the gas in the storage cavity. The vent is provided with a one-way valve.

[0020] In some embodiments, the storage body is provided with an access for personnel to enter and exit, and a safety door is provided at the access. The safety door is controlled to close or open by a control device. The storage body is provided with an oxygen concentration detection device for detecting the oxygen concentration in the storage cavity and feeding back the oxygen concentration information to the control device. When the oxygen concentration in the storage cavity is lower than a preset value, the control device controls the safety door to close; when the oxygen concentration in the storage cavity is higher than the preset value, the control device controls the safety door to open.

[0021] In some embodiments, the storage body is provided with automatic doors at the inlet and outlet.

[0022] (III) Beneficial effects

[0023] Compared with the prior art, the automatic nitrogen storage bin for wafers provided by the present utility model has the following beneficial effects:

[0024] When storing wafers in the automatic nitrogen storage bin for wafers, the wafers are placed on the conveyor line through the inlet, and then conveyed to the working range of the manipulator by the conveyor line. Subsequently, the manipulator grabs the wafers, the moving module moves the manipulator to the shelf position, and finally the manipulator places the wafers on the shelf to complete the storage operation. When taking out wafers, the manipulator first grabs the wafers on the shelf, then is driven by the moving module to move to the side of the conveyor line, places the wafers on the conveyor line, and finally conveys the wafers to the outlet through the conveyor line to complete the taking-out operation. Compared with the existing manual access method for wafers, the automatic nitrogen storage bin for wafers of the present utility model can realize the automatic storage and retrieval functions of wafers through the coordinated cooperation of the conveyor line, the moving module and the manipulator, thereby improving the efficiency and accuracy of the storage and retrieval operations of wafer products. Description of the drawings

[0025] Figure 1 It is a front three-dimensional view of the automatic nitrogen storage bin for wafers in the embodiment.

[0026] Figure 2 It is a rear view of the automatic nitrogen storage bin for wafers in the embodiment.

[0027] Figure 3 It is an internal three-dimensional view of the automatic nitrogen storage bin for wafers in the embodiment.

[0028] Figure 4 It is an internal front view of the automatic nitrogen storage bin for wafers in the embodiment.

[0029] Figure 5 For Figure 4 The schematic diagram of area A in

[0030] Figure 6 It is a three-dimensional view of the wafer fixture in the embodiment.

[0031] Figure 7 is Figure 4 a schematic diagram of area B in

[0032] Reference numerals:

[0033] storage body 1, storage cavity 11, feed inlet 12, discharge outlet 13, material taking platform 14, automatic door 15, air release port 16, entrance / exit 17, safety door 18;

[0034] shelf 2, column 21, receiving tray 22, receiving plate 23;

[0035] conveyor line 3;

[0036] material taking mechanism 4, moving module 41, manipulator 42;

[0037] discharge table 5, material taking channel 51, support plate 52;

[0038] wafer fixture 6, card slot 60;

[0039] vision camera 7, nitrogen concentration detection device 8, oxygen concentration detection device 9. Detailed implementation manners

[0040] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention.

[0041] The existing wafer access operation depends on manual labor, which not only has low efficiency, increases labor costs, but also easily causes errors and delays in the access process due to human factors, and thus is not conducive to the effective tracking and management of wafer products.

[0042] To solve the above technical problems, this embodiment provides a wafer automatic storage nitrogen chamber. Please refer to Figures 1 to 4 as shown Figure 1 is the front three-dimensional view of the wafer automatic storage nitrogen chamber in the embodiment, Figure 2 is the rear view of the wafer automatic storage nitrogen chamber in the embodiment, Figure 3 is the internal three-dimensional view of the wafer automatic storage nitrogen chamber in the embodiment, Figure 4 is the internal front view of the wafer automatic storage nitrogen chamber in the embodiment.

[0043] A wafer automatic storage nitrogen chamber of this embodiment, as Figure 1 and Figure 3 shown, includes: storage body 1, shelf 2, conveyor line 3 and material taking mechanism 4.

[0044] The storage body 1, as Figure 1As shown in the figure, there is a sealed storage chamber 11 for storing wafers in a nitrogen environment. The storage body 1 is provided with a feed inlet 12 and a discharge outlet 13 communicating with the storage chamber 11 to allow wafers to enter and exit the storage chamber 11 through the feed inlet 12 and the discharge outlet 13, and the feed inlet 12 and the discharge outlet 13 can be opened and closed as needed.

[0045] The shelf 2, as Figure 3 shown, is arranged in the storage chamber 11 and is used for placing wafers.

[0046] The conveyor line 3, as Figure 3 shown, is arranged in the storage chamber 11 and connects the feed inlet 12 and the discharge outlet 13, that is, the conveyor line 3 can receive the materials sent from the feed inlet 12 and at the same time can transport the materials to the discharge outlet 13.

[0047] The picking mechanism 4, as Figure 3 and Figure 4 shown, includes a moving module 41 and a manipulator 42 arranged in the storage chamber 11 and connected to each other. The moving module 41 is used to drive the manipulator 42 to move between the shelf 2 and the conveyor line 3, and the manipulator 42 is used to grasp the wafers on the conveyor line 3 or the shelf 2 and place the wafers on the shelf 2 or the conveyor line 3.

[0048] It can be understood that the coordinated operation of the conveyor line 3, the moving module 41 and the manipulator 42 can be controlled by a control system. The control system pre-sets the working modes and processes of the conveyor line 3, the moving module 41 and the manipulator 42, so that they can work automatically according to the preset program.

[0049] When the wafer automatic storage nitrogen chamber of the above technical solution stores wafers, the wafers are guided from the feed inlet 12 to the conveyor line 3, and then transported to the working area of the manipulator 42 through the conveyor line 3. With its high-precision grasping ability and the flexible movement of the moving module 41, the manipulator 42 can quickly and accurately transfer the wafers from the conveyor line 3 to the designated position on the shelf 2. The entire storage process can be controlled by the control system without direct manual intervention, greatly improving the storage efficiency and operation accuracy. Similarly, when taking out wafers, the manipulator 42 first accurately locates and grasps the wafers on the shelf 2, and then, driven by the moving module 41, smoothly moves to the side of the conveyor line 3 and safely places the wafers on the conveyor line 3. With the automatic operation of the conveyor line 3, the wafers are quickly transported to the discharge outlet 13 to complete the taking-out operation. This process not only shortens the time cycle of wafer storage and retrieval, but also greatly reduces the risk of wafer damage caused by human errors. Compared with the traditional manual way of storing and retrieving wafers, the wafer automatic storage nitrogen chamber of the above technical solution realizes the automation of storage and retrieval operations, significantly improves the operation efficiency, reduces the labor cost, and ensures the safety and accuracy of wafer products during storage and retrieval.

[0050] Exemplarily, the above-mentioned manipulator 42 uses an existing six-axis manipulator, and the moving module 41 uses existing modules such as a lead screw moving module and a chain moving module according to the moving route requirements of the manipulator 42.

[0051] The number of the above-mentioned feeding ports 12 and discharging ports 13 can be set as required. Exemplarily, refer to Figure 1 , Figure 2 and Figure 3 As shown, there are two groups of feeding ports 12 and discharging ports 13, and two conveying lines 3 are provided and are respectively connected to the two groups of feeding ports 12 and discharging ports 13. Among them, one group of feeding ports 12 and discharging ports 13 is responsible for the storage of wafers, and is respectively used for inputting the wafer fixtures 6 loaded with wafers and outputting the empty wafer fixtures 6; the other group of feeding ports 12 and discharging ports 13 is responsible for the output of wafers, and is respectively used for inputting the empty wafer fixtures 6 and the wafer fixtures 6 loaded with wafers; thus arranged, the operations of storing and taking out wafers can be carried out simultaneously.

[0052] Exemplarily, refer to Figure 1 and Figure 2 As shown, the two groups of feeding ports 12 and discharging ports 13 are respectively arranged on opposite sides of the storage body 1.

[0053] It can be understood that only one group of feeding ports 12 and discharging ports 13 can also be provided, and the operations of storing and taking out wafers are carried out in batches.

[0054] In order to facilitate the single-piece output of wafers and realize the buffering function during the output process, refer to Figure 2 , Figure 4 and Figure 5 As shown, Figure 5 is Figure 4 a schematic diagram of area A in

[0055] Exemplarily, the storage body 1 is provided with an automatic door 15 for opening and closing the material taking platform 14.

[0056] In order to improve the stability and efficiency of wafer conveying, refer to Figure 3 and Figure 6 As shown,Figure 6 It is a perspective view of the wafer fixture in the embodiment. The wafer automatic storage nitrogen chamber further includes a wafer fixture 6. The wafer fixture 6 is movably arranged on the conveyor line 3 and is provided with a vertically extending card slot 60. At least two card slots 60 are equidistantly arranged in the length direction of the wafer fixture 6. Each card slot 60 is used to hold a single wafer so that the wafer is placed vertically.

[0057] Exemplarily, a position sensor (not shown in the figure) for sensing the position of the wafer fixture 6 is arranged on the conveyor line 3. The position sensor feeds back the position information of the wafer fixture 6 to the control system. When the wafer fixture 6 reaches the preset position, the control system controls the conveyor line 3 to stop, and after the manipulator 42 takes out or places the wafer in the wafer fixture 6, the control system controls the conveyor line 3 to continue conveying.

[0058] Exemplarily, the card slots 60 are opened on the opposite sides of the wafer fixture 6.

[0059] To improve the accuracy of the manipulator 42 in grasping the wafer, refer to Figure 4 and Figure 5 As shown, the wafer automatic storage nitrogen chamber further includes a vision detection device. Exemplarily, the vision detection device is a vision camera 7 or an existing intelligent camera and is fixed on the manipulator 42. The vision detection device is used to detect and identify the specific position information of the wafer to be grasped by the manipulator 42 and transmit the detected wafer position information to the control system in real time; after receiving the position information, the control system controls the manipulator 42 to move to the target position according to the position information and perform the grasping operation.

[0060] Exemplarily, the vision detection device is used in cooperation with the above-mentioned wafer fixture 6 to further improve the accuracy of grasping the wafer.

[0061] In one implementation manner of the above-mentioned shelf 2, refer to Figure 7 As shown, Figure 7 It is Figure 4 a schematic diagram of area B in

[0062] The shelf 2 includes columns 21 and receiving trays 22. There are several columns 21 which are arranged at intervals. The receiving trays 22 are fixed on the columns 21 and are arranged at intervals in the height direction of the columns 21. Two receiving trays 22 at the same height on adjacent columns 21 are used to support the same wafer.

[0063] To facilitate the control of the nitrogen concentration in the chamber 1, refer to Figure 1As shown in the figure, the bin body 1 is provided with a nitrogen concentration detection device 8 for detecting the nitrogen concentration in the storage cavity 11, and a vent 16 for discharging the gas in the storage cavity 11. A one-way valve is provided at the vent 16. When the nitrogen concentration in the bin body 1 exceeds the preset value, the one-way valve is opened, and the excess nitrogen is discharged outwards through the vent 16; or when personnel need to enter the bin body 1, the nitrogen is completely discharged through the vent 16 to ensure the safety of personnel.

[0064] It can be understood that when the nitrogen concentration in the bin body 1 is too low, nitrogen can be supplemented into it through a nitrogen source.

[0065] Exemplarily, refer to Figure 2 As shown in the figure, the bin body 1 is provided with an entrance and exit 17 for personnel to enter and exit, and a safety door 18 is provided at the entrance and exit 17. The safety door 18 is controlled to close or open by a control device; the bin body 1 is provided with an oxygen concentration detection device 9 for detecting the oxygen concentration in the storage cavity and feeding back the oxygen concentration information to the control device. When the oxygen concentration in the storage cavity is lower than the preset value, the control device controls the safety door 18 to close, and when the oxygen concentration in the storage cavity is higher than the preset value, the control device controls the safety door 18 to open.

[0066] Exemplarily, the control of the oxygen concentration is also achieved by the above-mentioned control method of the nitrogen concentration, which will not be elaborated here.

[0067] Exemplarily, the safety door 18 is an existing electric door or pneumatic door with a control device.

[0068] In the above sealing methods of the feeding port 12 and the discharging port 13, refer to Figure 1 and Figure 2 As shown in the figure, the bin body 1 is provided with automatic doors 15 at the feeding port 12 and the discharging port 13, such as electric automatic doors or pneumatic automatic doors, to seal and open the feeding port 12 and the discharging port 13 through the automatic doors 15.

[0069] In one implementation manner of the above control system, it includes an existing MES system. The MES system sets parameters according to actual storage needs. On this basis, the process of storing and retrieving wafers is as follows:

[0070] Warehousing: Incoming materials for warehousing arrive at the feeding port 12 → The MES system assigns a location → The outer automatic door 15 of the feeding port 12 is opened, and the product is placed on the conveyor line 3 → The outer automatic door 15 of the warehousing area is closed, and the manipulator 42 picks up the material at the material picking station and places it at the designated storage location → Report to the MES system, and the warehousing is completed;

[0071] Outbound: The system dispatches an outbound task → The manipulator 42 arrives at the specified storage location to pick up materials → The inner automatic door 15 in the outbound area opens → The manipulator 42 places the product on the transfer table → The inner automatic door 15 at the discharge port 13 closes, and the outer automatic door 15 opens → The product is taken away, and the outer automatic door 15 in the outbound area closes → Report to the MES system, and the outbound is completed.

[0072] Although the embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An automatic storage nitrogen gas chamber for wafers, characterized in that, Comprising: A silo body, provided with a sealed storage cavity for storing wafers in a nitrogen environment. The silo body is provided with a feed inlet and a discharge outlet communicating with the storage cavity to allow wafers to enter and exit the storage cavity; A shelf, arranged in the storage cavity and used for placing wafers; A conveyor line, arranged in the storage cavity and connecting the feed inlet and the discharge outlet; A wafer picking mechanism, including a moving module and a manipulator arranged in the storage cavity and connected to each other. The moving module is used to drive the manipulator to move between the shelf and the conveyor line. The manipulator is used to pick up wafers on the conveyor line or the shelf and place the wafers on the shelf or the conveyor line.

2. The automatic nitrogen storage bin for wafers according to claim 1, wherein There are two groups of the feed inlet and the discharge outlet, and there are two conveyor lines, which are respectively connected to the two groups of the feed inlet and the discharge outlet.

3. The automatic nitrogen storage bin for wafers according to claim 2, characterized in that, The automatic wafer storage nitrogen silo further includes a discharge table. The silo body is provided with a picking platform communicating with the storage cavity. The discharge table is arranged in the storage cavity and is provided with a picking channel facing one of the picking platforms. At least two groups of support plates are symmetrically arranged on opposite sides of the picking channel. The support plates in the same group are used to place single wafers, and there is a gap between them. The support plates in each group are arranged in sequence from top to bottom, and the gap gradually decreases; the manipulator is also used to place the wafers on the shelf on the support plates.

4. The automatic nitrogen storage bin for wafers according to claim 1, characterized in that, The automatic wafer storage nitrogen silo further includes a wafer fixture. The wafer fixture is movably arranged on the conveyor line and is provided with a vertically extending slot. At least two slots are equidistantly arranged in the length direction of the wafer fixture. Each slot is used to clamp a single wafer to place the wafer vertically.

5. The automatic nitrogen storage bin for wafers according to claim 1 or 4, characterized in that, The automatic wafer storage nitrogen silo further includes a vision detection device. The vision detection device is used to detect and identify the specific position information of the wafer to be picked up by the manipulator and transmit the detected wafer position information to the control system in real time; after receiving the position information, the control system controls the manipulator to move to the target position according to the position information and perform the picking operation.

6. The automatic storage nitrogen gas chamber for wafers according to claim 1, characterized in that, The shelf includes a plurality of columns arranged at intervals and a receiving plate fixed on the columns. The receiving plates are arranged at intervals in the height direction of the columns to form a multi-layer support structure; wherein, two receiving plates located on adjacent columns and at the same height are used to jointly support the same wafer.

7. The automatic nitrogen storage bin for wafers according to claim 6, characterized in that, At least two receiving plates are arranged at intervals from top to bottom on the receiving plate. The two receiving plates at the same height of the two receiving plates used to jointly support the same wafer are used to place the same wafer, and there is a gap between them. The receiving plates in each group are arranged in sequence from top to bottom, and the gap gradually decreases.

8. The wafer automatic storage nitrogen gas chamber according to claim 1, wherein, The silo body is provided with a nitrogen concentration detection device for detecting the nitrogen concentration in the storage cavity, and is provided with a vent for discharging the gas in the storage cavity. The vent is provided with a one-way valve.

9. The automatic nitrogen storage bin for wafers according to claim 1, wherein The storage body is provided with an entrance and exit for personnel to enter and exit, and a safety door is provided at the entrance and exit. The safety door is controlled to close or open by a control device; the storage body is provided with an oxygen concentration detection device, which is used to detect the oxygen concentration in the storage cavity and feed back the oxygen concentration information to the control device. When the oxygen concentration in the storage cavity is lower than the preset value, the control device controls the safety door to close, and when the oxygen concentration in the storage cavity is higher than the preset value, the control device controls the safety door to open.

10. The nitrogen gas storage bin for automatic wafer storage according to claim 1, characterized in that, The storage body is provided with automatic doors at the feeding port and the discharging port.

Images