Basket pouring device for feeding of cleaning machine

Abstract

The utility model provides a basket pouring device for feeding of a cleaning machine, relates to the technical field of semiconductor preparation technology and use equipment, and aims to solve the technical problem that silicon wafers are easily damaged due to improper operation force during operation when a silicon wafer full material basket is manually pushed into an empty material basket through a wafer basket push rod in the prior art. The device comprises a main body, a table top and a back plate, the table top is used for placing a sheet basket, and the back plate is arranged on one side of the table top; the moving assembly is used for enabling the sheet basket to translate on the table top; the bracket assembly is mounted on the back plate and used for transferring the silicon wafers in the wafer basket; and the lifting assembly can lift the silicon wafer into the bracket assembly. The utility model has the beneficial effects that the silicon wafer damage caused by improper manual operation is avoided while the basket pouring efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor preparation technology and the technical field of equipment used, in particular to an inverted basket device for loading a cleaning machine. Background Art

[0002] In the silicon wafer production process, before loading the cleaning machine, it is necessary to replace the silicon wafer basket for inverted basket operation.

[0003] For the existing inverted basket equipment, generally a wafer basket push rod is adopted, and workers push the silicon wafers from the full wafer basket into the empty wafer basket through the wafer basket push rod.

[0004] The applicant of the present invention has found that the existing technology has at least the following technical problems:

[0005] When workers push the full wafer basket into the empty wafer basket through the wafer basket push rod, the silicon wafers are easily damaged due to inappropriate operation force during the operation. Summary of the Utility Model

[0006] The purpose of the utility model is to provide an inverted basket device for loading a cleaning machine, so as to solve the technical problem in the existing technology that when workers push the full wafer basket into the empty wafer basket through the wafer basket push rod, the silicon wafers are easily damaged due to inappropriate operation force during the operation. The preferred technical solutions provided by the utility model can produce many technical effects, which will be elaborated in detail below.

[0007] To achieve the above purpose, the utility model provides the following technical solutions:

[0008] An inverted basket device for loading a cleaning machine provided by the utility model includes:

[0009] A main body, provided with a table top and a back plate, the table top is used for placing the wafer basket, and the back plate is arranged on one side of the table top;

[0010] A moving component, used for translating the wafer basket on the table top;

[0011] A bracket component, installed on the back plate, used for transferring the silicon wafers in the wafer basket;

[0012] A lifting component, capable of lifting the silicon wafers into the bracket component.

[0013] Preferably, the bracket component includes:

[0014] A first power device;

[0015] A first sliding component, including a first lead screw and a first slider sleeved on the first lead screw, the first lead screw is connected with the first power device, and link mechanisms are arranged on both sides of the first slider;

[0016] The bracket body includes two sets of symmetrically arranged "L"-shaped fixing plates. Brackets are provided on the inner sides of the fixing plates. Among them, one end of the fixing plate is fixedly connected to the back plate, one end of the bracket is movably connected to the other end of the fixing plate, the other end of the bracket passes through the back plate and is connected to the link mechanism, and a first silicon wafer groove is provided on the bracket.

[0017] Preferably, the lifting assembly includes:

[0018] A second power device;

[0019] A second sliding assembly, including a second lead screw and a second slider sleeved on the second lead screw. The second lead screw is connected to the second power device;

[0020] A platform is provided on the second slider, and a second silicon wafer groove for accommodating the silicon wafer is provided on the top of the platform.

[0021] Preferably, the platform adopts a "U"-shaped frame structure, and the second silicon wafer grooves are provided at both free ends of the "U"-shaped frame structure.

[0022] Preferably, the moving assembly includes:

[0023] A third power device;

[0024] A gear, connected to the third power device;

[0025] A rack, used to cooperate with the gear and installed on the tabletop.

[0026] Preferably, the tabletop includes a fixed part and a moving part, where:

[0027] The fixed part is located below the moving part, and a slot hole is provided on the fixed part;

[0028] The rack is installed on the moving part, and the gear passes through the slot hole and is in transmission connection with the rack.

[0029] Preferably, a photoelectric sensor is provided on the back plate for monitoring the in-place information of the silicon wafer.

[0030] Preferably, a control device is further included, and the first power device, the second power device, the third power device, and the photoelectric sensor are all electrically connected to the control device.

[0031] Preferably, a display screen and a switch are further included, and the display screen and the switch are both electrically connected to the control device.

[0032] Preferably, casters are further included, and the casters are provided at the bottom of the main body.

[0033] An inverting basket device for a washer loader provided by the present utility model includes a main body, a moving component, a bracket component, and a lifting component. The main body is provided with a tabletop and a backboard. The tabletop is for placing the wafer basket, and the backboard is for installing the bracket component. The moving component is used to translate the wafer basket on the tabletop. The bracket component is used to transfer the wafers in the wafer basket. The lifting component can lift the wafers into the bracket component. Through the cooperation of the moving component, the lifting component and the bracket component, the inverting basket efficiency can be improved while avoiding damage to the wafers caused by improper manual operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0035] Figure 1 is a schematic structural diagram of an embodiment of the inverting basket device for a washer loader of the present utility model;

[0036] Figure 2 is Figure 1 the front view structural diagram of

[0037] Figure 3 is the working flow chart of the inverting basket device for a washer loader of the present utility model;

[0038] Figure 4 is a schematic structural diagram of the bracket component of the inverting basket device for a washer loader of the present utility model at an angle;

[0039] Figure 5 is a schematic structural diagram of the bracket component of the inverting basket device for a washer loader of the present utility model at another angle;

[0040] Figure 6 is a schematic structural diagram of the lifting component of the inverting basket device for a washer loader of the present utility model;

[0041] Figure 7 is Figure 6 the enlarged structural diagram at A in

[0042] Figure 8 is a schematic structural diagram of the moving component of the inverting basket device for a washer loader of the present utility model;

[0043] Figure 9 is the control schematic diagram of the inverting basket device for a washer loader of the present utility model.

[0044] In the figure: 1. Main body; 11. Tabletop; 111. Fixed part; 1110. Slot hole; 112. Movable part; 12. Back plate;

[0045] 2. Moving assembly; 21. Third power device; 22. Gear; 23. Rack;

[0046] 3. Bracket assembly; 31. First power device; 32. First sliding assembly; 321. First lead screw; 322. First slider; 323. Link mechanism; 3231. First link; 3232. Second link; 33. Bracket main body; 331. Fixed plate; 332. Bracket; 3320. First silicon wafer slot;

[0047] 4. Lifting assembly; 41. Second power device; 42. Second sliding assembly; 421. Second lead screw; 422. Second slider; 43. Support table; 430. Second silicon wafer slot;

[0048] 5. Wafer basket; 51. Inverted wafer basket; 52. Wafer basket to be poured; 6. Silicon wafer;

[0049] 7. Photoelectric sensor; 8. Control device; 9. Display screen; 10. Switch; 100. Caster. Detailed implementation mode

[0050] To make the objectives, technical solutions and advantages of the present utility model clearer, the technical solutions of the present utility model will be described in detail below. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other implementation manners obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the scope protected by the present utility model.

[0051] Figure 1 is the structural schematic diagram of this embodiment, Figure 2 is Figure 1 the front view structural schematic diagram of, as Figure 1 and Figure 2 shown, this embodiment provides a basket-inverting device for a washer loading, including a main body 1, a moving assembly 2, a bracket assembly 3 and a lifting assembly 4.

[0052] Among them, the main body 1 is provided with a tabletop 11 and a back plate 12. The tabletop 11 is used for placing the wafer basket 5. The wafer basket 5 includes an inverted wafer basket 51 and a wafer basket 52 to be poured. The back plate 12 is arranged on one side of the tabletop 11. In this embodiment, the back plate 12 is used for installing the bracket assembly 3, and the back plate 12 is set perpendicular to the tabletop 11 and connected to the back side of the tabletop 11.

[0053] A moving component 2 is used to translate the wafer basket 5 on the table 11. A bracket component 3 is installed on the back plate 12 and is used to transfer the wafers 6 in the wafer basket 5. A lifting component 4 can lift the wafers 6 into the bracket component 3.

[0054] Figure 3 is the working flow chart of this embodiment. As Figure 3 shown, through the cooperation of the moving component 2, the lifting component 4 and the bracket component 3, when the basket-inverting device for the loader of the cleaning machine works, it specifically includes the following steps:

[0055] The first step is to place the inverted wafer basket 51 and the wafer basket 52 to be poured into on the table 11. The second step is to move the inverted wafer basket 51 to the transfer position, that is, below the bracket component 3, through the moving component 2. The third step is that the lifting component 4 rises to lift the wafers 6 in the inverted wafer basket 51. The fourth step is that the lifting component 4 lifts the wafers 6 to the wafer-supporting height of the bracket component 3. The fifth step is that the bracket component 3 holds the wafers 6, and the lifting component 4 descends below the table 11 to avoid interference when the moving component 2 moves the wafer basket 52 to be poured into. The sixth step is to move the wafer basket 52 to be poured into to the transfer position through the moving component 2, and the lifting component 4 rises to the wafer-supporting height of the bracket component 3. The seventh step is that after the bracket component 3 transfers the wafers 6 to the lifting component 4, the lifting component 4 descends, and the wafers 6 enter the wafer basket 52 to be poured into. The eighth step is to remove the wafer basket 5 to complete the basket-inverting operation.

[0056] As an optional implementation manner, Figure 4 is a schematic structural diagram of the bracket component at one angle in this embodiment. Figure 5 is a schematic structural diagram of the bracket component at another angle in this embodiment. As Figure 4 and Figure 5 shown, the bracket component 3 in this embodiment includes a first power device 31, a first sliding component 32 and a bracket main body 33.

[0057] Among them, the first power device 31 uses a servo motor. The first sliding component 32 includes a first lead screw 321 and a first slider 322 sleeved on the first lead screw 321. The first lead screw 321 is connected to the first power device 31, and link mechanisms 323 are arranged on both sides of the first slider 322.

[0058] As Figure 4 shown, the bracket main body 33 includes two groups of symmetrically arranged "L"-shaped fixing plates 331. Brackets 332 are arranged on the inner sides of the fixing plates 331. One end of the fixing plate 331 is fixedly connected to the back plate 12, one end of the bracket 332 is movably connected to the other end of the fixing plate 331, the other end of the bracket 332 passes through the back plate 12 and is connected to the link mechanism 323, and a first wafer groove 3320 is arranged on the bracket 332. The first wafer groove 3320 can accommodate the wafers 6.

[0059] The link mechanism 323 in this embodiment includes a first link 3231 and a second link 3232 movably connected to one end of the first link 3231. The other end of the first link 3231 is connected to the first slider 322. Moreover, in this embodiment, two sets of link mechanisms 323 are symmetrically arranged on both sides of the first slider 322. When the first power device 31 operates and the first slider 322 moves up and down along the first lead screw 321, the link mechanisms 323 on both sides of the first slider 322 move, thereby driving the bracket 332 connected to the link mechanism 323 to rotate. When the bracket 332 rotates, it can hold the silicon wafer 6 inside to hold the silicon wafer 6, or release the silicon wafer 6 so that it can fall onto the lifting assembly 4.

[0060] As an alternative implementation Figure 6 is a schematic structural diagram of the lifting assembly in this embodiment, as Figure 6 shown, the lifting assembly 4 includes a second power device 41, a second sliding assembly 42, and a platform 43.

[0061] Among them, the second power device 41 uses a servo motor. The second sliding assembly 42 includes a second lead screw 421 and a second slider 422 sleeved on the second lead screw 421. The second lead screw 421 is connected to the second power device 41. The platform 43 is arranged on the second slider 422, and a second silicon wafer groove 430 for accommodating the silicon wafer 6 is arranged on the top of the platform 43.

[0062] Specifically, Figure 7 is Figure 6 the enlarged structural schematic diagram at A in Figure 7 shown. In this embodiment, the platform 43 adopts a "U"-shaped frame structure, and second silicon wafer grooves 430 are arranged at both free ends of the "U"-shaped frame structure. When in use, the second power device 41 controls the second slider 422 to rise, so that the second silicon wafer groove 430 at the top of the platform 43 contacts the silicon wafer 6, playing a role in supporting the silicon wafer 6 during the rising process of the lifting assembly 4.

[0063] As an alternative implementation Figure 8 is a schematic structural diagram of the moving assembly in this embodiment, as Figure 8 shown, the moving assembly 2 includes a third power device 21, a gear 22, and a rack 23.

[0064] Among them, the third power device 21 uses a servo motor, the gear 22 is connected to the third power device 21; the rack 23 is used to cooperate with the gear 22 and is installed on the tabletop 11.

[0065] Specifically, the tabletop 11 includes a fixed part 111 and a movable part 112. Among them, the fixed part 111 is located below the movable part 112. In this embodiment, the length of the movable part 112 is greater than that of the fixed part 111. The fixed part 111 is provided with a slot hole 1110, the rack 23 is installed on the movable part 112, and the gear 22 passes through the slot hole 1110 and is in transmission connection with the rack 23.

[0066] During use, the third power device 21 drives the gear 22 to rotate, and then drives the rack 23 and the movable part 112 connected to the rack 23 to move, so as to realize the movement of the wafer basket 5.

[0067] As an alternative embodiment, as Figure 4 shown, in this embodiment, a photoelectric sensor 7 is provided on the back plate 12 for monitoring the in-place information of the silicon wafer 6.

[0068] Figure 9 is the control schematic diagram of this embodiment. As Figure 9 shown, this inverting basket device for the loader of the cleaning machine further includes a control device 8. The first power device 31, the second power device 41, the third power device 21, and the photoelectric sensor 7 are all electrically connected to the control device 8. The photoelectric sensor 7 is used for monitoring the in-place information of the silicon wafer 6 and transmitting the monitored in-place information of the silicon wafer 6 to the control device 8, so as to intelligently control the operation of the power device through the control device 8.

[0069] Specifically, this inverting basket device for the loader of the cleaning machine further includes a display screen 9 and a switch 10. The display screen 9 and the switch 10 are both electrically connected to the control device 8. The display screen 9 can be a touch control screen, which can display the parameters during work and is convenient for touch setting operations. The switch 10 is used to start and stop this inverting basket device for the loader of the cleaning machine.

[0070] The control device 8 in this embodiment uses a PLC, specifically Mitsubishi FX5U. By controlling three servo motors to operate through the PLC, automatic intelligent operation can be realized. Preferably, this inverting basket device for the loader of the cleaning machine can perform network communication with the cleaning machine to realize automatic inverting of the basket during the loader of the cleaning machine, improving the production efficiency and reducing the damage to the silicon wafers caused by improper manual operation.

[0071] As an alternative embodiment, it further includes casters 100. The casters 100 are arranged at the bottom of the main body 1 so that this inverting basket device for the loader of the cleaning machine can move.

[0072] In this embodiment, the casters 100 adopt a universal caster structure, a total of four, which are respectively installed at the corners of the bottom of the main body 1 to make the force more balanced.

[0073] The above are only the specific embodiments of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model can easily think of changes or substitutions, which should all be covered within the protection scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims described above.

Claims

1. An inverted basket device for loading a cleaning machine, characterized in that, Comprising: A main body, provided with a tabletop and a backboard, the tabletop being used for placing a wafer basket, and the backboard being arranged on one side of the tabletop; A moving assembly, used for translating the wafer basket on the tabletop; A bracket assembly, installed on the backboard, used for transferring wafers in the wafer basket; A lifting assembly, capable of lifting the wafers into the bracket assembly.

2. The inverted basket device for the loader of the washing machine according to claim 1, characterized in that, The bracket assembly includes: A first power device; A first sliding assembly, including a first lead screw and a first slider sleeved on the first lead screw, the first lead screw being connected to the first power device, and link mechanisms being arranged on both sides of the first slider; A bracket main body, including two groups of symmetrically arranged "L"-shaped fixing plates, brackets being arranged on the inner sides of the fixing plates. Wherein, one end of the fixing plate is fixedly connected to the backboard, one end of the bracket is movably connected to the other end of the fixing plate, the other end of the bracket passes through the backboard and is connected to the link mechanism, and a first wafer groove is arranged on the bracket.

3. The inverted basket device for feeding a cleaning machine according to claim 2, characterized in that: The lifting assembly includes: A second power device; A second sliding assembly, including a second lead screw and a second slider sleeved on the second lead screw, the second lead screw being connected to the second power device; A support table, arranged on the second slider, and a second wafer groove for accommodating the wafers being arranged on the top of the support table.

4. The inverted basket device for feeding a cleaning machine according to claim 3, characterized in that: The support table adopts a "U"-shaped frame structure, and the second wafer grooves are arranged at both free ends of the "U"-shaped frame structure.

5. The basket-inverting device for the loader of the washing machine according to claim 3, characterized in that: The moving assembly includes: A third power device; A gear, connected to the third power device; A rack, used for cooperating with the gear, and installed on the tabletop.

6. The basket-inverting device for the loading of a cleaning machine according to claim 5, characterized in that: The tabletop includes a fixed part and a moving part, wherein: The fixed part is located below the moving part, and the fixed part is provided with slot holes; The rack is installed on the moving part, and the gear passes through the slot holes and is in transmission connection with the rack.

7. The basket-inverting device for a washer loading according to claim 5, characterized in that: An optoelectronic sensor is arranged on the backboard, used for monitoring the in-place information of the wafers.

8. The basket - inverting device for the feeding of a cleaning machine according to claim 7, characterized in that: It further includes a control device, and the first power device, the second power device, the third power device, and the optoelectronic sensor are all electrically connected to the control device.

9. A basket-inverting device for feeding a washing machine according to claim 8, characterized in that: It further includes a display screen and a switch, and the display screen and the switch are both electrically connected to the control device.

10. A basket-inverting device for feeding a cleaning machine according to any one of claims 1-9, characterized in that: It further includes casters, and the casters are arranged at the bottom of the main body.

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