Shutdown cooling device for single crystal furnace

Abstract

The embodiment of the utility model provides a single crystal furnace shut-down cooling device which comprises a heat exchanger located in a main chamber of a single crystal furnace body, and the heat exchanger is provided with a cooling medium inlet before heat exchange and a cooling medium outlet after heat exchange; the cooling medium circulating system is arranged outside the single crystal furnace body, the cooling medium circulating system comprises an after-heat-exchange cooling medium inlet and a before-heat-exchange cooling medium outlet, and the cooling medium circulating system is used for radiating the after-heat-exchange cooling medium and then outputting the after-heat-exchange cooling medium; the pipelines comprise the first pipeline and the second pipeline, the first pipeline is connected with the pre-heat-exchange cooling medium inlet and the pre-heat-exchange cooling medium outlet, and the second pipeline is connected with the post-heat-exchange cooling medium outlet and the post-heat-exchange cooling medium inlet. According to the embodiment of the invention, efficient heat exchange can be realized in a low-cost manner, and the blowing-out cooling time of the single crystal furnace can be shortened to 6-7 hours, so that the production efficiency is improved, and the single crystal production cost is reduced.

Description

Technical Field

[0001] This application relates to the technical field of single crystal production, and particularly to a cooling device for a single crystal furnace during furnace shutdown. Background Art

[0002] With the increase in the pulling crystal thermal field and the increase in the feeding amount, the time required for the single crystal furnace to cool down during furnace shutdown becomes longer, and the use efficiency of the single crystal furnace becomes lower. Currently, it takes nearly ten hours to wait for the thermal field to cool down after the furnace is shut down. If the furnace is disassembled in advance, the thermal field components such as graphite, carbon-carbon, and felt in the single crystal furnace will be damaged due to excessive temperature. In addition, it also takes about ten hours to cool down by introducing low-temperature argon gas, and the cost of argon gas is extremely high. There is still a phenomenon of local oxidation and spontaneous combustion of the thermal field components due to excessive temperature when the furnace is disassembled in advance.

[0003] Based on this, it is necessary to find a way to quickly cool down the thermal field inside the single crystal furnace to improve production efficiency and reduce the production cost of single crystals.

[0004] It should be noted that the above content is not necessarily prior art and is not used to limit the patent protection scope of this application. Utility Model Content

[0005] The embodiments of this application provide a cooling device for a single crystal furnace during furnace shutdown to solve or alleviate one or more of the above technical problems.

[0006] The embodiments of this application provide a cooling device for a single crystal furnace during furnace shutdown, including:

[0007] A heat exchanger, which is located in the main chamber of the single crystal furnace body, and the heat exchanger is provided with a pre-heat exchange cooling medium inlet and a post-heat exchange cooling medium outlet;

[0008] A cooling medium circulation system, which is arranged outside the single crystal furnace body, and the cooling medium circulation system includes a post-heat exchange cooling medium inlet and a pre-heat exchange cooling medium outlet, and the cooling medium circulation system is used to dissipate heat from the post-heat exchange cooling medium and then output it;

[0009] A pipeline, which includes a first pipeline and a second pipeline. The first pipeline connects the pre-heat exchange cooling medium inlet and the pre-heat exchange cooling medium outlet, and the second pipeline connects the post-heat exchange cooling medium outlet and the post-heat exchange cooling medium inlet.

[0010] In the embodiment of the present application, the cooling medium in the heat exchanger is used for heat exchange, and the heat stored in the furnace thermal field is quickly absorbed through gas-liquid inter-wall heat exchange, which has the effect of accelerating the cooling of the furnace body. The heat exchanger inputs the cooling medium after heat exchange into the cooling medium circulation system through the second pipeline, and after heat dissipation in the cooling medium circulation system, it enters the heat exchanger again through the first pipeline to participate in heat exchange. In the embodiment of the present application, efficient heat exchange can be achieved in a low-cost manner, and the cooling time of the single crystal furnace can be shortened to 6 to 7 hours, thereby improving production efficiency and reducing the production cost of single crystals.

[0011] Optionally, in the cooling device for stopping the single crystal furnace, the heat exchanger is suspended in the main chamber of the single crystal furnace body through the seed crystal rope in the auxiliary chamber of the single crystal furnace body. Thus, there is no need to introduce additional devices, and the heat exchanger can be installed using the devices provided by the single crystal furnace body.

[0012] Optionally, in the cooling device for the single crystal furnace shutdown, the cooling medium circulation system further includes: a liquid pump, a heat dissipation pipe and a liquid storage tank; the liquid pump is used to pump out the post-heat exchange cooling medium in the post-heat exchange cooling medium outlet; the heat dissipation pipe is used to dissipate the heat of the pumped post-heat exchange cooling medium to obtain cooling medium; the liquid storage tank is used to store the cooling medium; wherein the post-heat exchange cooling medium inlet is arranged on the liquid pump, and the pre-heat exchange cooling medium outlet is arranged on the liquid storage tank. In this way, the heat dissipation of the post-heat exchange cooling medium is achieved to achieve the cooling purpose.

[0013] Optionally, in the cooling device for the single crystal furnace shutdown, the cooling medium circulation system further comprises: a heat dissipation fan; the heat dissipation fan is arranged on the heat dissipation pipe, thereby accelerating the heat dissipation rate of the cooling medium after heat exchange.

[0014] Optionally, in the single crystal furnace shutdown cooling device, the cooling medium circulation system further comprises: an expansion valve, which is arranged on the first pipeline, thereby playing the role of throttling, reducing pressure and regulating flow.

[0015] Optionally, in the cooling device for cooling the single crystal furnace during shutdown, the cooling medium includes at least one of water and salt water, thereby controlling the cooling cost.

[0016] Optionally, in the single crystal furnace shutdown cooling device, the first pipe and the second pipe are made of 316 stainless steel or fluororubber respectively, thereby having high temperature stability.

[0017] Optionally, in the cooling device for the single crystal furnace shutdown, the heat exchanger further includes an argon gas channel, thereby cooperating with the cooling medium to achieve a double cooling effect.

[0018] Optionally, in the single crystal furnace shutdown cooling device, the heat exchanger comprises a cylindrical gas-liquid heat exchanger, thereby facilitating entry into the single crystal furnace.

[0019] Optionally, in the single crystal furnace shutdown cooling device, the heat exchanger includes a finned tube heat exchanger or a spiral tube heat exchanger. Thereby, efficient heat exchange can be achieved. Description of the Drawings

[0020] In the drawings, unless otherwise specified, the same reference numerals throughout the several views represent the same or similar components or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings only depict some embodiments disclosed in the present application and should not be regarded as limiting the scope of the present application.

[0021] Figure 1 is a schematic structural view of the single crystal furnace shutdown cooling device provided by an embodiment of the present application;

[0022] Figure 2 is a schematic structural view of the heat exchanger provided by some embodiments of the present application;

[0023] Figure 3 is a schematic structural view of the heat exchanger provided by some other embodiments of the present application.

[0024] Description of the Reference Numerals: 1 - heat exchanger; 2 - single crystal furnace body; 3 - pipeline; 4 - expansion valve; 5 - liquid storage tank; 6 - heat dissipation pipe; 7 - heat dissipation fan; 8 - liquid extraction pump; 101 - cooling medium inlet; 102 - cooling medium outlet; 103 - argon channel; 104 - fin. Detailed Embodiments

[0025] In order to make the objectives, technical solutions and advantages of the present application more clear and understandable, the present application will be further described in detail below with reference to the drawings and embodiments. It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments may be combined with each other. The present application will be described in detail below with reference to the drawings and embodiments.

[0026] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above drawings are used to distinguish similar objects and do not necessarily need to describe a specific order or sequence. It should be understood that such terms can be interchanged under appropriate circumstances so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0027] In this application, when it comes to numerical intervals (i.e., numerical ranges), unless otherwise specified, the distribution of the selectable numerical values within the numerical interval is considered continuous, and includes the two numerical endpoints of the numerical interval (i.e., the minimum value and the maximum value), as well as each numerical value between these two numerical endpoints. Unless otherwise specified, when the numerical interval only refers to the integers within the numerical interval, it includes the two endpoint integers of the numerical range, as well as each integer between the two endpoints, which is equivalent to directly listing each integer. When providing multiple numerical ranges to describe features or characteristics, these numerical ranges can be combined. In other words, unless otherwise specified, the numerical ranges disclosed in this application should be understood to include any and all sub-ranges subsumed therein. The "numerical values" in this numerical interval can be any quantitative values, such as numbers, percentages, ratios, etc. The "numerical interval" is allowed to broadly include quantitative intervals such as percentage intervals, ratio intervals, ratio value intervals, etc.

[0028] An embodiment of this application provides a technical solution for a cooling device for shutting down a single crystal furnace. Based on this, the cooling time of the single crystal furnace can be shortened. See the following for details.

[0029] Next, exemplary embodiments according to this application will be described in more detail with reference to the accompanying drawings. It should be noted that these exemplary embodiments can be implemented in many different forms and should not be construed as being limited only to the embodiments set forth herein.

[0030] In some embodiments, as Figure 1 shown, the cooling device for shutting down the single crystal furnace includes: a heat exchanger 1, a cooling medium circulation system, and a pipeline 3.

[0031] The heat exchanger 1, the heat exchanger 1 is located inside the single crystal furnace body 2 to be cooled. Specifically, the heat exchanger 1 is located in the main chamber of the single crystal furnace body 2. The heat exchanger 1 is provided with a pre-heat exchange cooling medium inlet 101 and a post-heat exchange cooling medium outlet 102. Thus, by introducing a cooling medium into the heat exchanger 1, the heat stored in the furnace body thermal field can be quickly absorbed through gas-liquid wall heat exchange, achieving the effect of accelerating the cooling of the furnace body.

[0032] In some specific embodiments, the heat exchanger 1 can be a spiral tube heat exchanger. As Figure 2As shown, the heat exchanger 1 is a spiral tube heat exchanger, which is an efficient heat exchange device. It consists of a shell, a spiral tube, a cooling medium inlet 101 and a cooling medium outlet 102 located on the spiral tube, and a hollow argon channel 103. Its working principle is to use two media inside and outside the spiral tube for heat exchange, so that heat is transferred from one medium to the other. The spiral tube in the heat exchanger is formed by two concentric cylindrical surfaces. The helical lines of the inner and outer cylindrical surfaces are arranged in a staggered manner at a certain angle, forming a mutually intersecting spiral channel. When the two media enter the inner and outer channels of the spiral tube respectively, they start to transfer heat. The heat transfer process can be divided into two ways: one is forced convection heat transfer in the spiral channel, that is, when the medium passes through the spiral channel, it must flow through a certain angle and bend under the action of external force, so strong convection will be generated, enabling rapid heat transfer. The other is natural convection heat transfer in the spiral channel, that is, after the medium enters the spiral channel, vortices and eddies will be formed under the action of flow resistance, and heat will also be transferred accordingly. During the working process, due to the different flow velocities of the two media, cross-flow in the channel will be generated, which can improve the exchange efficiency. In addition, the spiral tube heat exchanger can also adjust the inlet and outlet positions and angles according to different medium flow rates and temperatures to achieve the best heat transfer effect. In summary, the working principle of the spiral tube heat exchanger is to utilize the convection and heat exchange between two media inside and outside the spiral tube to achieve heat transfer while maintaining flow, thereby realizing the heating or cooling of the medium. Its advantages are high thermal efficiency, good heat exchange effect, and convenient use, and it is very suitable for heat transfer and processing in various industries such as chemical industry, pharmacy, and food industry.

[0033] In some other specific embodiments, the heat exchanger 1 can be a tube-fin heat exchanger. As Figure 3 shown, fins 104 are distributed on the heat exchange tubes. The fins 104 can increase the heat dissipation area and accelerate the heat dissipation speed. One end of each heat exchange tube is arranged on the top cover. The top cover is provided with a cooling medium inlet 101 and a cooling medium outlet 102. A hollow channel is provided in the center of the top cover as the argon channel 103. When the tube-fin heat exchanger is used for heat exchange, it has a large heat exchange area, which is beneficial to the heat exchange between the media inside and outside the heat exchange tubes. Further, the cooling medium flowing in the heat exchanger 1 includes water and brine, whereby rapid heat exchange can be achieved at low cost.

[0034] In a specific embodiment, during application, the heat exchanger 1 can be hoisted into the main chamber of the furnace body through the seed crystal rope lifting function of the single crystal furnace secondary chamber (hanging parts, etc. can directly use the feeding cylinder accessories). The cooling medium is introduced into the heat exchanger 1, and the heat stored in the furnace body heat field is quickly absorbed through gas-liquid partition heat exchange. After heat exchange, the heat exchanger 1 is taken out through the seed crystal rope and the secondary chamber opening function. Thus, the installation and disassembly of the heat exchanger 1 are convenient.

[0035] In some embodiments, the cooling medium circulation system is arranged outside the single crystal furnace body 2. The cooling medium circulation system includes an inlet for the cooled cooling medium after heat exchange and an outlet for the cooling medium before heat exchange. The cooling medium circulation system is used to dissipate heat from the cooled cooling medium after heat exchange and then output it. Thus, the recycling of the cooling medium is achieved. In particular, the transformation from the high temperature of the cooled cooling medium after heat exchange to the normal temperature of the cooling medium before heat exchange can be realized.

[0036] In some specific embodiments, the cooling medium circulation system further includes: a liquid extraction pump 8, a heat dissipation pipe 6, and a liquid storage tank 5. The liquid extraction pump 8 is used to suck out the cooled cooling medium after heat exchange. The heat dissipation pipe 6 is used to dissipate heat from the cooled cooling medium after heat exchange to obtain the cooling medium. The liquid storage tank 5 is used to store the cooling medium. Among them, the inlet for the cooled cooling medium after heat exchange is arranged on the liquid extraction pump 8, and the outlet for the cooling medium before heat exchange is arranged on the liquid storage tank 5. Thus, the cooled cooling medium after heat exchange enters the heat dissipation pipe 6 through the liquid extraction pump 8, dissipates heat in the heat dissipation pipe 6, and then enters the liquid storage tank 5. In the liquid storage tank 5, it can be output to enter the heat exchanger 1 to participate in the cycle again.

[0037] Furthermore, the cooling medium circulation system may further include a cooling fan 7 and an expansion valve 4. The cooling fan 7 is arranged on the heat dissipation pipe 6 to accelerate heat dissipation. The expansion valve 4 is arranged on the outlet for the cooling medium before heat exchange of the liquid storage tank 5 to play a role in throttling control.

[0038] In some embodiments, the pipeline 3 includes a first pipeline and a second pipeline. The first pipeline connects the inlet 101 for the cooling medium before heat exchange and the outlet for the cooling medium before heat exchange. The second pipeline connects the outlet 102 for the cooled cooling medium after heat exchange and the inlet for the cooled cooling medium after heat exchange. Thus, the heat exchanger 1 and the cooling medium circulation system are connected to realize the transportation of the cooling medium.

[0039] Furthermore, the materials of the first pipeline and the second pipeline are independently 316 stainless steel or fluororubber respectively. Thus, it can have high-temperature stability and can withstand temperatures above 1400 °C.

[0040] It should be noted that the terms used here are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used here, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should also be understood that when the terms "include" and / or "comprise" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or their combinations.

[0041] For ease of description, the orientation or positional relationship indicated by orientation terms such as "front, rear, top, bottom, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom", etc. is usually based on the orientation or positional relationship shown in the drawings. This is only for the convenience of describing the present application and simplifying the description. Without contrary explanation, these orientation terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation on the protection scope of the present application; the orientation terms "inside, outside" refer to the inside and outside relative to the contour of each component itself. For example, if the device in the drawing is inverted, the device described as "above other devices or structures" or "on top of other devices or structures" will then be positioned as "below other devices or structures" or "beneath other devices or structures". Thus, the exemplary term "above" can include both the orientation of "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and corresponding explanations are made for the relative spatial descriptions used here.

[0042] Unless otherwise clearly specified and defined, terms such as "install", "connect", "join", "fix", etc. shall be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection, an electrical connection, or a communication connection; it can be directly connected, or indirectly connected through an intermediate medium, and can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0043] Unless otherwise clearly specified and defined, the first feature being "above" or "below" the second feature can include the direct contact between the first and second features, or can also include the situation where the first and second features are not in direct contact but in contact through other features between them. Moreover, the first feature being "above", "over" and "on top of" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the horizontal height of the first feature is higher than that of the second feature. The first feature being "beneath", "under" and "below" the second feature includes the first feature being directly below and obliquely below the second feature, or simply indicating that the horizontal height of the first feature is lower than that of the second feature.

[0044] Unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present application. At the same time, it should be understood that, for the sake of convenience of description, the dimensions of the various parts shown in the drawings are not drawn in actual proportional relationships. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such technologies, methods, and devices should be regarded as part of the authorization specification. In all the examples shown and discussed here, any specific value should be construed as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that like reference numerals and letters denote like items in the following drawings, and thus, once an item is defined in one drawing, further discussion thereof is not required in subsequent drawings.

[0045] It should also be noted that the "one embodiment", "another embodiment", "embodiment", etc. mentioned in this specification refer to the specific features, structures, or characteristics described in connection with that embodiment being included in at least one embodiment generally described in the present application. The same expression appearing in multiple places in the specification does not necessarily refer to the same embodiment. Further, when describing a specific feature, structure, or characteristic in connection with any one embodiment, it is intended that the implementation of such feature, structure, or characteristic in combination with other embodiments also fall within the scope of the present application.

[0046] In the above embodiments, the descriptions of the various embodiments each have their own emphasis. For parts not detailed in a certain embodiment, reference may be made to the relevant descriptions of other embodiments.

[0047] It should also be noted that the above are only the preferred embodiments of the present application, and do not limit the scope of patent protection of the present application. Any equivalent structure or equivalent process transformation made by using the content of the specification and drawings of the present application, or directly or indirectly applied in other related technical fields, shall be similarly included in the scope of patent protection of the present application.

Claims

1. A cooling device for a single crystal furnace during furnace shutdown, characterized in that, Comprising: A heat exchanger (1), which is located in the main chamber of the single crystal furnace body (2). The heat exchanger (1) is provided with a pre-heat exchange cooling medium inlet (101) and a post-heat exchange cooling medium outlet (102). A cooling medium circulation system, which is arranged outside the single crystal furnace body (2). The cooling medium circulation system includes a post-heat exchange cooling medium inlet and a pre-heat exchange cooling medium outlet, and is used for outputting the post-heat exchange cooling medium after heat dissipation. A pipeline (3), which includes a first pipeline and a second pipeline. The first pipeline connects the pre-heat exchange cooling medium inlet (101) and the pre-heat exchange cooling medium outlet, and the second pipeline connects the post-heat exchange cooling medium outlet (102) and the post-heat exchange cooling medium inlet.

2. The single crystal furnace shutdown cooling device according to claim 1, wherein, The heat exchanger (1) is suspended in the main chamber of the single crystal furnace body (2) by a seed crystal rope in the auxiliary chamber of the single crystal furnace body (2).

3. The single crystal furnace shutdown cooling device according to claim 1, characterized in that The cooling medium circulation system further includes: A liquid extraction pump (8), a heat dissipation pipe (6) and a liquid storage tank (5); The liquid extraction pump (8) is used for pumping out the post-heat exchange cooling medium in the post-heat exchange cooling medium outlet (102). The heat dissipation pipe (6) is used for dissipating heat from the pumped post-heat exchange cooling medium to obtain a cooling medium. The liquid storage tank (5) is used for storing the cooling medium. Wherein, the post-heat exchange cooling medium inlet is arranged on the liquid extraction pump (8), and the pre-heat exchange cooling medium outlet is arranged on the liquid storage tank (5).

4. The single crystal furnace shutdown cooling device according to claim 3, wherein The cooling medium circulation system further includes: A heat dissipation fan (7), which is arranged on the heat dissipation pipe (6).

5. The single crystal furnace shutdown cooling device according to claim 3, wherein, The cooling medium circulation system further includes: An expansion valve (4), which is arranged on the first pipeline.

6. The single crystal furnace shutdown cooling device according to claim 1, wherein, The cooling medium is water or brine.

7. The single crystal furnace shutdown cooling device according to claim 1, characterized in that, The materials of the first pipeline and the second pipeline are independently 316 stainless steel or fluororubber.

8. The single crystal furnace shutdown cooling device according to claim 1, characterized in that The heat exchanger (1) further includes an argon channel (103).

9. The single crystal furnace shutdown cooling device according to claim 8, wherein, The heat exchanger (1) includes a cylindrical gas-liquid heat exchanger.

10. The single crystal furnace shutdown cooling device according to claim 9, characterized in that, The heat exchanger (1) includes a finned tube heat exchanger or a spiral tube heat exchanger.

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