Rapid dust removal and cleaning device for cold and hot coil pipe of fresh air conditioning unit of chip factory

Abstract

The utility model discloses a chip factory fresh air conditioning unit cold and hot coil pipe rapid dust removal and cleaning device which comprises an air switching device, a pressure difference sensor, an automatic control box, a power control box, a CDA compressed air pipeline and CDA compressed air nozzles evenly distributed on the surface of a fresh air conditioning unit cold and hot coil pipe. The gas switching device is connected with the CDA compressed air nozzle through the CDA compressed air pipeline, the pressure difference sensor feeds back the pressure difference of an inlet and an outlet of the coil pipe in real time, the automatic control box is connected with the pressure difference sensor and the gas switching device, and the power control box provides a low-voltage power source for the automatic control box. The device is used for removing dust on the air conditioning unit coil pipe, the speed is high, operation is convenient, and manpower is saved; the operation static pressure of the air conditioning unit is reduced, and the energy-saving effect is obvious; the device has sterilization and disinfection functions and does not corrode the surface of the coil pipe.

Description

Technical Field

[0001] The utility model belongs to the technical field of installation of ultra-clean workshops for integrated circuit chip manufacturing, and particularly relates to a rapid dust removal and cleaning device for cold and hot coils of a fresh air air-conditioning unit in a chip factory. Background Art

[0002] A brand-new air handling unit (MAU, Make-up Air Unit) is an effective air purification device that can circulate indoor air. On the one hand, it discharges the dirty air indoors to the outside, and on the other hand, it inputs the fresh air outside into the room after measures such as sterilization, disinfection, and filtration, so that the air in the room is fresh and clean at all times. A large integrated circuit chip manufacturing ultra-clean workshop has many process machines and a large amount of process exhaust gas. The fresh air required to supplement the clean room is large, so a MAU fresh air air-conditioning unit is specially configured. The MAU air-conditioning unit is designed with a pre-cooling coil, a re-cooling coil, a pre-heating coil, and a re-heating coil. The unit is fully supplied with fresh air throughout the year. Although coarse and medium efficiency filters are configured in the front section, there will still be particle penetration and blockage of the coils; especially in winter, the outside air is dry, and the coils are blocked very quickly. The blockage of the coils will increase the pressure loss, and the static pressure of the fan operation will increase, resulting in an increase in power consumption and energy consumption. The existing technology generally uses manual high-pressure water guns for flushing, and the disadvantages are as follows: 1. It consumes a lot of labor and has a high labor cost; 2. The dust removal speed is slow; 3. The operation is inconvenient, the dust removal frequency is low. Generally, dust removal is carried out once at the end of a cooling period. During the cooling period, the coils are blocked, the pressure loss is high, the static pressure of the fan operation is high, the power consumption is large, and it is not energy-saving; 4. It has no sterilization function, and the microorganisms reproduce quickly, easily blocking the coils; 5. Flushing the coils with tap water easily corrodes the coil frame and fins, resulting in a shortened coil life. Content of the Utility Model

[0003] In view of this, the purpose of the utility model is to provide a rapid dust removal and cleaning device for cold and hot coils of a fresh air air-conditioning unit in a chip factory to solve the deficiencies in the prior art.

[0004] To achieve the above purpose, the utility model is realized through the following technical solutions:

[0005] A rapid dust removal and cleaning device for cold and hot coils of a fresh air air-conditioning unit in a chip factory is provided. The cold and hot coils of the fresh air air-conditioning unit have coil inlets and outlets. Among them, it includes a gas switching device, a differential pressure sensor, an automatic control box, a power control box, a CDA compressed air pipeline, and CDA compressed air nozzles. The CDA compressed air nozzles are evenly distributed on the surface of the cold and hot coils of the fresh air air-conditioning unit. The gas switching device is connected to the CDA compressed air nozzles through the CDA compressed air pipeline. The differential pressure sensor real-time feeds back the differential pressure at the coil inlets and outlets. The automatic control box is connected to the differential pressure sensor and the gas switching device. The power control box provides low-voltage power to the automatic control box.

[0006] For the rapid dust removal and cleaning device of the cold and hot coils of the fresh air air conditioner unit in the chip factory, further comprising an exhaust air filtration box, a first electric control valve, and an exhaust air duct, one end of the exhaust air filtration box is communicated with the air outlet side of the cold and hot coils of the fresh air air conditioner unit, and the other end is connected to the process exhaust GEX system through the exhaust air duct, and the first electric control valve is connected to the automatic control box.

[0007] For the rapid dust removal and cleaning device of the cold and hot coils of the fresh air air conditioner unit in the chip factory, the exhaust air filtration box is a box body made of rock wool composite board with non-woven fabric coarse efficiency filter bags.

[0008] For the rapid dust removal and cleaning device of the cold and hot coils of the fresh air air conditioner unit in the chip factory, further comprising a plasma sterilizer disposed on the air inlet side of the cold and hot coils of the fresh air air conditioner unit, and the plasma sterilizer is connected to the power control box.

[0009] For the rapid dust removal and cleaning device of the cold and hot coils of the fresh air air conditioner unit in the chip factory, the gas switching device comprises a pressure sensor and two valve groups, the valve group comprises a second electric control valve, the valve group is connected to the CDA compressed air pipeline through the pressure sensor, the automatic control box is connected to the pressure sensor and the second electric control valve, and one of the two valve groups is connected to an external CDA system and the other is connected to an external GN2 system.

[0010] For the rapid dust removal and cleaning device of the cold and hot coils of the fresh air air conditioner unit in the chip factory, the CDA compressed air nozzle adopts a 1 / 2-inch internal thread 360° automatic rotating nozzle to continuously spray high-speed air at 15 m / s towards the cold and hot coils of the fresh air air conditioner unit without dead angle.

[0011] The beneficial effects of the technical solution of the present utility model are as follows:

[0012] Using this device to remove dust on the coils of the air conditioner unit is fast, convenient to operate, and labor-saving; the dust removal frequency is high, the static pressure of the air conditioner unit during operation is reduced, and the energy-saving effect is obvious; it has a sterilization and disinfection function and no corrosion to the surface of the coils. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to further illustrate the above-mentioned objects, structural features, and effects of the present utility model, the present utility model will be described in detail below with reference to the drawings.

[0014] Figure 1 It is a schematic diagram of the overall structure of a preferred embodiment of the present utility model;

[0015] Figure 2 It is a schematic diagram of the structure of the cold and hot coils of a preferred embodiment of the present utility model;

[0016] In the figure: 1. Gas switching device; 2. Differential pressure sensor; 3. Automatic control box; 4. Power control box; 5. CDA compressed air pipeline; 6. CDA compressed air nozzle; 7. Cooling and heating coil of fresh air handling unit; 8. Exhaust air filter box; 9. First electric control valve; 10. Exhaust air pipeline; 11. Plasma sterilizer; 12. Pressure sensor; 13. Second electric control valve; 14. On-site display pressure gauge; 15. Ball valve; 16. Check valve. Detailed implementation mode

[0017] The term "utility model" used in this specification, as well as "the present utility model", are intended in a broad sense to refer to all the subject matters of this specification and any of the following patent claims. Statements containing these terms should not be construed as limiting the subject matter described herein or the meaning or scope of any of the following patent claims. In addition, this specification does not attempt to describe or limit the subject matter covered by any specific component, paragraph, statement, or claim of this application. The subject matter should be understood with reference to the entire specification, all the drawings, and any of the following claims. The present utility model may have other embodiments and be practiced or implemented in other ways. Moreover, it should be understood that the wording and terms used herein are for illustrative purposes and should not be considered limiting.

[0018] The details of the present utility model will now be discussed with reference to the drawings of the present utility model, which are illustrated by way of example only. In the drawings, similar features or components may be labeled with the same reference numerals.

[0019] The use of the terms "comprising", "having", and "including" and their variants herein means including the items listed hereinafter, their equivalents, and additional items. Although directions such as above, below, upward, downward, backward, bottom, top, front, and back may be referred to in the description of the drawings for convenience with reference to the drawings. These directions are not intended to be literally accepted or limit the present utility model in any form. In addition, terms such as "first", "second", "third", etc. are used herein for illustrative purposes and are not intended to indicate or imply importance or significance.

[0020] The quick dust removal and cleaning device for the cooling and heating coils of the fresh air handling unit in the chip factory of the present utility model is used for dust removal of the MAU fresh air handling unit in the semiconductor factory, where the cooling and heating coils of the fresh air handling unit have coil inlets and outlets. Refer to Figure 1 , Figure 2As shown, in a preferred embodiment, the device includes a gas switching device 1, a differential pressure sensor 2, an automatic control box 3, a power control box 4, a CDA compressed air pipeline 5, and a CDA compressed air nozzle 6. The CDA compressed air nozzles 6 are evenly distributed on the surface of the cold and hot coils 7 of the fresh air air conditioner unit. The gas switching device 1 is connected to the CDA compressed air nozzle 6 through the CDA compressed air pipeline 5. The differential pressure sensor 2 continuously feeds back the differential pressure at the inlet and outlet of the coil. The automatic control box 3 is connected to the differential pressure sensor 2 and the gas switching device 1. The power control box 4 provides a 24V low-voltage power supply to the automatic control box 3.

[0021] Continue to refer to Figure 1 As shown, the device further includes an exhaust air filtration box 8, a first electric control valve 9, and an exhaust air pipeline 10. One end of the exhaust air filtration box 8 communicates with the air outlet side of the cold and hot coils of the fresh air air conditioner unit, and the other end is connected to the process exhaust GEX system through the exhaust air pipeline 10. The first electric control valve 9 is connected to the automatic control box 3.

[0022] The exhaust air filtration box 8 is a box made of rock wool composite board with non-woven coarse filter bags, which is used to filter the polluted air on the air outlet side of the coil. After being filtered by the exhaust air filtration box 8, it is discharged to the outside through the GEX general exhaust system. The first electric control valve 9 is an electric proportional control valve, which is used to adjust the exhaust air volume. The exhaust air pipeline 10 is a galvanized steel circular air duct, which serves as an exhaust air duct, connecting the dust removal exhaust outlets of the coils of each MAU air conditioner unit to the exhaust air filtration box, and then connecting to the exhaust system.

[0023] The device further includes a plasma sterilizer 11 provided on the air inlet side of the cold and hot coils of the fresh air air conditioner unit, which is used to sterilize and disinfect the microorganisms on the surface of the coil fins. The plasma sterilizer 11 is connected to the power control box 4.

[0024] Furthermore, the gas switching device 1 includes a pressure sensor 12 and two valve groups. The valve group includes a second electric control valve 13. The valve group is connected to the CDA compressed air pipeline 5 through the pressure sensor 12. The automatic control box 3 is connected to the pressure sensor 12 and the second electric control valve 13. One of the two valve groups is connected to the external CDA system, and the other is connected to the external GN2 system. The gas switching device 1 further includes a field display pressure gauge 14. The valve group includes a ball valve 15 and a check valve 16. The main functions of the gas switching device 1 are: a. Maintain continuous supply of dust removal gas. When the CDA compressed air stops, the automatic switching device opens the GN2 electric control valve for gas supply; b. The signal of the pressure sensor 12 is fed back to the automatic control box 3, and the second electric control valve 13 automatically adjusts the opening degree to maintain the pressure of the gas supply pipeline. The CDA compressed air pipeline 5 is a stainless steel gas pipeline, specifically made of SUS304BA oil-free material, with a main pipe diameter of DN50 and a branch pipe diameter of DN20, continuously supplying gas to the CDA compressed air nozzle 6.

[0025] The CDA compressed air nozzle 6 adopts a 1 / 2-inch internal thread 360° automatic rotating nozzle to continuously spray high-speed air at 15 m / s onto the cold and hot coils of the fresh air air-conditioning unit without dead angles, uniformly removing dust. Specifically, the Yihu brand can be selected. The differential pressure sensor 2 adopts Siemens S55720-S246\QBM2030-30, which can continuously feedback the differential pressure at the inlet and outlet of the coil in real time. If the differential pressure is higher than the set value of the automatic control box 3, the alarm device will be automatically activated to remind that the coil differential pressure exceeds the limit, and dust will be removed and the pressure will be reduced in time.

[0026] The automatic control box 3 includes electrical components such as a PLC controller, input and output modules, a stainless-steel automatic control box body, and an alarm speaker. It is used to display the differential pressure at the inlet and outlet of the coil, the CDA compressed air pressure, control the opening and closing of the plasma sterilizer 11, control the opening of the second electric control valve 13, control the opening and closing of the first electric control valve 9 of the exhaust system, and can set the opening time of the above equipment. The power control box 4 includes electrical components such as an air switch, a contactor, and a low-voltage transformer. The power supply is connected from the power control cabinet of the nearby air-conditioning unit and is used to control the opening and closing of the plasma sterilizer 11.

[0027] The working process and principle of this device are as follows:

[0028] a. When the coils of the fresh air air-conditioning unit are blocked and the differential pressure at the inlet and outlet continuously increases, the differential pressure sensor 2 sends a signal to the automatic control box 3. After the automatic control box 3 issues an alarm for the coil differential pressure exceeding the limit, it reminds that the differential pressure of the cold and hot coils is large, reaching the dust removal set point value, and dust removal and cleaning are required;

[0029] b. When the operator sees the differential pressure alarm, the air-conditioning unit with the differential pressure alarm for coil dust removal is closed through the automatic control system (simultaneously closing the first electric control valve 9 at the inlet and outlet of the air-conditioning unit), and the standby air-conditioning unit is started;

[0030] c. Place the plasma sterilizer 11 in the air-conditioning unit that needs dust removal, connect the control line, and operate on the automatic control box 3 to send a signal to start the plasma sterilizer to the power control box 4 to start the plasma sterilizer 11 for sterilization and disinfection of the surface of the coil fins;

[0031] d. While the plasma sterilizer 11 is operating, the automatic control box 3 simultaneously opens the second electric control valve 13 of the CDA compressed air. The CDA pipeline supplies gas, and the CDA compressed air nozzle 6 sprays high-pressure compressed air to blow the dust and pollutants on the surface of the cold and hot coils;

[0032] e. While the plasma sterilizer 11 and the second electric control valve 13 are operating, the first electric control valve 9 on the exhaust pipe 10 is opened. The contaminated air with entrained dust blown off from the coil outlet is discharged to the GEX general exhaust system through the exhaust pipe 10 and the exhaust filter box 8, and then discharged to the atmosphere;

[0033] f. After 30 minutes of sterilization, disinfection, and dust removal operations, the dust on the surface of the cold and hot coils is blown clean.

[0034] g. After the coil dust removal and cleaning are completed, take out the plasma sterilizer 11.

[0035] h. Start the air-conditioning unit with the cleaned coils and turn off the standby air-conditioning unit.

[0036] Using this device to remove dust on the coils of the air-conditioning unit has the advantages of fast speed, convenient operation, labor saving, high dust removal frequency, and a sterilization and disinfection function. The static pressure during the operation of the air-conditioning unit is reduced, and the energy-saving effect is good.

[0037] The above are only the preferred embodiments of the present utility model, and do not limit the implementation manners and protection scope of the present utility model. For those skilled in the art, it should be realized that all equivalent replacements and obvious changes made by using the description and illustrations of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A rapid dust removal and cleaning device for the cold and hot coils of a fresh air air-conditioning unit in a chip factory. The cold and hot coils of the fresh air air-conditioning unit have coil inlets and outlets, and are characterized in that, It includes a gas switching device, a differential pressure sensor, an automatic control box, a power control box, a CDA compressed air pipeline and a CDA compressed air nozzle. The CDA compressed air nozzles are evenly distributed on the surfaces of the cold and hot coils of the fresh air air conditioner unit. The gas switching device is connected to the CDA compressed air nozzles through the CDA compressed air pipeline. The differential pressure sensor real-time feeds back the differential pressure at the inlet and outlet of the coils. The automatic control box is connected to the differential pressure sensor and the gas switching device. The power control box provides low-voltage power to the automatic control box.

2. The rapid dust removal and cleaning device for the cold and hot coils of the fresh air air conditioner unit in the chip factory according to claim 1, wherein, It further includes an exhaust air filtration box, a first electric control valve and an exhaust air pipeline. One end of the exhaust air filtration box communicates with the air outlet side of the cold and hot coils of the fresh air air conditioner unit, and the other end is connected to the process exhaust GEX system through the exhaust air pipeline. The first electric control valve is connected to the automatic control box.

3. The rapid dust removal and cleaning device for the cold and hot coils of the fresh air air conditioner unit in the chip factory according to claim 2, characterized in that, The exhaust air filtration box is a box made of rock wool composite board with non-woven fabric coarse efficiency filter bags.

4. The rapid dust removal and cleaning device for the cold and hot coils of the fresh air air conditioner unit in the chip factory according to claim 1, wherein, It further includes a plasma sterilizer and disinfector provided on the air inlet side of the cold and hot coils of the fresh air air conditioner unit. The plasma sterilizer and disinfector is connected to the power control box.

5. The quick dust removal and cleaning device for the cold and hot coils of the fresh air air conditioner unit in the chip factory according to claim 1, characterized in that, The gas switching device includes a pressure sensor and two valve groups. The valve group includes a second electric control valve. The valve group is connected to the CDA compressed air pipeline through the pressure sensor. The automatic control box is connected to the pressure sensor and the second electric control valve. One of the two valve groups is connected to an external CDA system, and the other is connected to an external GN2 system.

6. The rapid dust removal and cleaning device for the cold and hot coils of the fresh air air conditioner unit in the chip factory according to claim 1, characterized in that, The CDA compressed air nozzle uses a 1 / 2-inch internal thread 360° automatic rotating nozzle to continuously spray high-speed air at 15 m / s without dead angles to the cold and hot coils of the fresh air air conditioner unit.

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