Electron microscope sample stage

Abstract

The utility model discloses an electron microscope sample stage, which comprises a bottom plate, a fixed plate fixedly arranged at the top of the bottom plate, a support rod fixedly arranged at the top of the fixed plate, a connecting ring fixedly arranged at the top of the support rod, a sliding ball slidably sleeved in the connecting ring, and a movable plate fixedly arranged at the top of the sliding ball, a driving assembly for driving the sliding ball to move is arranged on the fixed plate, and the sliding ball moves to drive the movable plate to be in different inclined directions. The bearing plate can change the inclination direction of the to-be-observed sample, so that the to-be-observed sample can be observed in different inclination directions, and an operator can use the sample conveniently.

Description

Technical Field

[0001] The utility model relates to the technical field of sample stages, in particular to an electron microscope sample stage. Background Art

[0002] An electron microscope is an indispensable and important device in experiments and detections. A microscope sample stage is used to carry and fix samples to be detected and assist the electron microscope in observing the samples.

[0003] In a Chinese patent document with the publication number of CN220821468U, a pre-tilt sample device for a scanning electron microscope is disclosed, including a sample stage; a universal joint ball is installed at the middle position of the upper end of the base, a universal joint sliding sleeve is installed at the middle of the bottom end of the adjusting plate, and the universal joint sliding sleeve is slidably installed on the upper end of the universal joint ball. The adjusting plate and the stage can be conveniently rotated through the universal joint ball and the universal joint sliding sleeve. Support rods are arranged on both sides of the upper end of the base, and the support rods are used to support the adjusting plate. The upper end of the support rod is slidably connected to the bottom end of the adjusting plate. A dial is welded to the bottom end of the support rod, and the dial can drive the support rod and the threaded rod to rotate during rotation. A threaded rod is welded to the bottom end of the dial, and after the threaded rod rotates, it can rotate into or out of the base, so as to facilitate the adjustment of the height of the support rod.

[0004] The deficiency of the above disclosed solution is that although the stage can be tilted, the stage cannot be tilted in different directions, so the sample cannot be observed at different tilting directions, which brings inconvenience to the operator. Content of the Utility Model

[0005] The technical problem to be solved by the utility model is to overcome the existing defects and provide an electron microscope sample stage, which can make the movable plate in different tilting directions, so as to change the tilting direction of the sample to be observed, and can effectively solve the problems in the background art.

[0006] To achieve the above purpose, the utility model provides the following technical scheme: an electron microscope sample stage, including a bottom plate, a fixing plate is fixedly arranged on the top of the bottom plate, a support rod is fixedly arranged on the top of the fixing plate, a connecting ring is fixedly arranged on the top of the support rod, a sliding ball is slidably sleeved in the connecting ring, a movable plate is fixedly arranged on the top of the sliding ball, and a driving component for driving the sliding ball to move is arranged on the fixing plate, and the movement of the sliding ball drives the movable plate to be in different tilting directions.

[0007] Further, a stabilizing rod is fixedly arranged on the top of the movable plate, and a bearing plate is fixedly arranged on the top of the stabilizing rod.

[0008] Furthermore, the driving assembly includes a motor which is fixedly arranged on a fixing plate. A rotating rod is fixedly arranged at the output end of the motor. The rotating rod is bent. An installation sleeve is fixedly arranged at one end of the rotating rod. A connecting rod is fixedly sleeved in the installation sleeve. The connecting rod is fixedly connected with the sliding ball.

[0009] Furthermore, the stabilizing rod is an electric telescopic rod which is fixedly arranged on the movable plate. The output end of the electric telescopic rod is fixedly connected with the bearing plate.

[0010] Furthermore, a storage box is fixedly arranged at the top of the bottom plate.

[0011] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0012] Since a driving assembly for driving the sliding ball to move is arranged on the fixing plate, the movement of the sliding ball drives the movable plate to be in different inclined positions. Therefore, when it is necessary to observe a sample to be observed from multiple directions, the driving assembly drives the sliding ball to move in the connecting ring, the sliding ball drives the movable plate to move, and the movable plate drives the bearing plate to be in different inclined positions through the stabilizing rod, so as to change the inclined position of the sample to be observed on the bearing plate, and further, the sample to be observed can be observed from different inclined positions, which is convenient for the operator to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 is a three-dimensional view of the structure of the utility model;

[0014] Figure 2 is a three-dimensional view of the movable plate and the bearing plate of the structure of the utility model;

[0015] Figure 3 is a three-dimensional view of the fixing plate and the connecting ring of the structure of the utility model.

[0016] In the figure: 1, bottom plate; 2, fixing plate; 3, motor; 4, rotating rod; 5, installation sleeve; 6, connecting rod; 7, sliding ball; 8, movable plate; 9, stabilizing rod; 10, bearing plate; 11, support rod; 12, connecting ring. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0017] The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0018] Please refer to Figures 1 - 3, the present utility model provides a technical solution: an electron microscope sample stage, including a bottom plate 1, on the top of the bottom plate 1, two symmetrically arranged "L"-shaped plates are fixedly provided, between the two "L"-shaped plates, a fixed plate 2 is fixedly provided, on the top of the fixed plate 2, a plurality of support rods 11 are fixedly provided, and the plurality of support rods 11 are arranged in a circular array. Between the tops of the plurality of support rods 11, a connecting ring 12 is fixedly provided, a sliding ball 7 is slidably sleeved in the connecting ring 12, the sliding ball 7 is a hemispherical body, and the bottom of the arc surface of the sliding ball 7 is slidably connected with the connecting ring 12. On the top plane of the sliding ball 7, a movable plate 8 is fixedly provided, and there is a certain distance between the movable plate 8 and the connecting ring 12 to prevent the connecting ring 12 from hindering the inclination of the movable plate 8.

[0019] In other embodiments, the sliding ball 7 can also be a spherical structure.

[0020] On the top of the movable plate 8, a plurality of stabilizing rods 9 are fixedly provided, and the plurality of stabilizing rods 9 are arranged in a circular array. Between the tops of the plurality of stabilizing rods 9, a bearing plate 10 is fixedly provided. The stabilizing rods 9 are electric telescopic rods, the electric telescopic rods are fixedly provided on the movable plate 8, and the output ends of the electric telescopic rods are fixedly connected with the bearing plate 10. By controlling the telescopic movement of the plurality of electric telescopic rods, the height of the bearing plate 10 can be adjusted to facilitate the operator to observe the sample to be observed.

[0021] On the fixed plate 2, a driving assembly for driving the sliding ball 7 to move is provided, and the movement of the sliding ball 7 drives the movable plate 8 to be in different inclined positions. The driving assembly includes a motor 3, the motor 3 is fixedly provided at the middle position of the bottom surface of the fixed plate 2, the output end of the motor 3 passes upward through the fixed plate 2 and is fixedly provided with a rotating rod 4, the rotating rod 4 is bent, and at the end of the rotating rod 4 away from the motor 3, an installation sleeve 5 is fixedly provided, and there is a gap between the installation sleeve 5 and the support rod 11 to prevent the support rod 11 from hindering the movement of the installation sleeve 5. A connecting rod 6 is fixedly sleeved in the installation sleeve 5, and the connecting rod 6 is fixedly connected with the bottom of the arc surface of the sliding ball 7.

[0022] A brake device is provided on the motor 3, so that after the motor 3 stops working, the output shaft of the motor 3 is fixed to prevent the bearing plate 10 from continuing to move.

[0023] On the top of the bottom plate 1, a storage box (not shown in the figure) is fixedly provided for storing auxiliary materials for observing the sample to be observed, and the auxiliary material is a double-sided conductive adhesive for fixing the sample to be observed.

[0024] The working principle of the electron microscope sample stage provided by the present utility model is as follows:

[0025] In use, the sample to be observed is fixed on the top surface of the carrier plate 10 through a double-sided conductive adhesive. When it is necessary to observe the sample to be observed from multiple directions at an inclination, the motor 3 is started. The motor 3 drives the rotating rod 4 to rotate, the rotating rod 4 drives the mounting sleeve 5 to rotate, the mounting sleeve 5 drives the sliding ball 7 to move within the connecting ring 12 through the connecting rod 6, the sliding ball 7 drives the movable plate 8 to move, and the movable plate 8 drives the carrier plate 10 to be in different inclined positions through the stabilizing rod 9, so that the carrier plate 10 changes the inclined position of the sample to be observed, facilitating the operator to observe.

[0026] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An electron microscope sample stage, comprising a bottom plate (1), characterized in that: A fixed plate (2) is fixedly arranged at the top of the bottom plate (1). A support rod (11) is fixedly arranged at the top of the fixed plate (2). A connecting ring (12) is fixedly arranged at the top of the support rod (11). A sliding ball (7) is slidably sleeved in the connecting ring (12). A movable plate (8) is fixedly arranged at the top of the sliding ball (7). A driving assembly for driving the sliding ball (7) to move is arranged on the fixed plate (2). The movement of the sliding ball (7) drives the movable plate (8) to be in different inclined orientations.

2. The electron microscope sample stage according to claim 1, characterized in that: A stabilizing rod (9) is fixedly arranged at the top of the movable plate (8). A bearing plate (10) is fixedly arranged at the top of the stabilizing rod (9).

3. The electron microscope sample stage according to claim 1 or 2, characterized in that: The driving assembly includes a motor (3). The motor (3) is fixedly arranged on the fixed plate (2). A rotating rod (4) is fixedly arranged at the output end of the motor (3). The rotating rod (4) is bent. An installation sleeve (5) is fixedly arranged at one end of the rotating rod (4). A connecting rod (6) is fixedly sleeved in the installation sleeve (5). The connecting rod (6) is fixedly connected to the sliding ball (7).

4. The electron microscope sample stage according to claim 2, wherein: The stabilizing rod (9) is an electric telescopic rod. The electric telescopic rod is fixedly arranged on the movable plate (8). The output end of the electric telescopic rod is fixedly connected to the bearing plate (10).

5. The electron microscope sample stage according to claim 1, wherein: A storage box is fixedly arranged at the top of the bottom plate (1).

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