Material collecting mechanism

By using a material collection mechanism connected to the rotary disc on the silicon wafer production line, the synchronous transmission structure is used to achieve stable rotation of the material collection structure, which solves the problems of low efficiency and high space occupancy in the existing transfer method, improves material transfer efficiency and reduces production costs.

CN223140741UActive Publication Date: 2025-07-22基则曼(苏州)科技有限公司
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Patent Information

Application Number
CN202422020033.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-08-20
Publication Date
2025-07-22
Estimated Expiration
2034-08-20

AI Technical Summary

Technical Problem

The existing silicon wafer production line transfer method has the problems of low manual transfer efficiency, high labor intensity, and high space occupancy rate and complex structure of the existing transfer institutions, resulting in increased production costs.

Method used

The material collection mechanism connected to the rotary disc is adopted. The material collection structure is used to maintain a circumferential rotation of the predetermined angle on the rotary disc through a synchronous transmission structure, thereby realizing stable transportation of materials and rapid redirection of materials.

Benefits of technology

It improves the cutting and collection efficiency of silicon wafers, reduces space occupancy, and reduces labor intensity and production costs.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a material receiving mechanism which comprises a fixing plate and a rotating disc, the fixing plate and the rotating disc are connected through a middle shaft in the axis direction, and the middle shaft and the rotating disc are configured to synchronously rotate relative to the fixing plate; at least one group of the material receiving structures are rotationally arranged on the surface of one side, far away from the fixed plate, of the rotating disc, and the synchronous transmission structures are arranged on the fixed plate and the rotating disc and are used for driving the rotating disc to rotate when the material receiving structures synchronously rotate along with the rotating disc. The material receiving structure is controlled to circumferentially rotate by keeping a preset angle unchanged; according to the utility model, the problems of complex structure and high space occupancy rate of the existing silicon wafer transfer equipment can be solved.
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Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer production equipment, and particularly relates to a material receiving mechanism. Background Art

[0002] In a silicon wafer production line, it is necessary to transfer silicon wafers. At present, on most silicon wafer production lines, manual transfer of materials is adopted. The manual transfer has low efficiency, high labor intensity, and is prone to fatigue. In some other transfer mechanisms, such as the transfer method through a flower basket and a conveyor line, although the transfer efficiency of silicon wafers can be improved, the space occupancy rate is relatively high, the structure is complex, and the production cost of the enterprise is increased. Content of the Utility Model

[0003] In order to overcome the above-mentioned drawbacks, the purpose of the utility model is to provide a material receiving mechanism.

[0004] In order to achieve the above purpose, the technical solution adopted by the utility model includes:

[0005] A fixed plate and a turntable, the fixed plate and the turntable are connected by a central shaft in the axial direction, and the central shaft and the turntable are configured to rotate synchronously relative to the fixed plate;

[0006] A material receiving structure and a synchronous transmission structure, at least one group of the material receiving structures is rotatably arranged on the surface of the turntable on the side away from the fixed plate, and the synchronous transmission structure is arranged on the fixed plate and the turntable to control the material receiving structure to rotate circumferentially while keeping a predetermined angle unchanged when the material receiving structure rotates synchronously with the turntable.

[0007] In the preferred technical solution of the above material receiving mechanism, the synchronous transmission structure at least includes a first moving gear and a second moving gear that are sequentially rotatably arranged on the turntable along the radial direction of the turntable, and a fixed gear arranged on the fixed plate;

[0008] Wherein, the first moving gear meshes with the second moving gear, the first moving gear meshes with the fixed gear, the fixed gear is coaxial with the turntable and does not rotate, and the second moving gear is connected to the material receiving structure to rotate synchronously.

[0009] In the preferred technical solution of the above material receiving mechanism, the synchronous transmission structure is a first belt pulley rotatably installed on the turntable, a second belt pulley arranged on the fixed plate, and a transmission belt for connecting the first belt pulley and the second belt pulley;

[0010] Wherein, the first belt pulley is connected to the material receiving structure to rotate synchronously, and the second belt pulley is coaxial with the turntable.

[0011] In the preferred technical solution of the above-mentioned material receiving mechanism, the material receiving structure is a material receiving rack rotatably installed on the turntable.

[0012] In the preferred technical solution of the above-mentioned material receiving mechanism, a bearing is embedded in the turntable. A connecting shaft with opposite first and second ends is arranged on the inner ring of the bearing. The first end and the second end respectively extend out of both sides of the turntable. The first end is used to connect the material receiving structure, and the second end is used to connect the synchronous transmission structure.

[0013] In the preferred technical solution of the above-mentioned material receiving mechanism, the inclination angle of the material receiving structure relative to the connecting shaft is adjustable.

[0014] In the preferred technical solution of the above-mentioned material receiving mechanism, a housing is arranged outside the fixed plate and the turntable.

[0015] In the preferred technical solution of the above-mentioned material receiving mechanism, a baffle for covering the turntable is arranged on the outer peripheral side of the turntable, and the baffle rotates synchronously with the turntable.

[0016] In the preferred technical solution of the above-mentioned material receiving mechanism, the turntable is detachably installed on the central shaft.

[0017] In the preferred technical solution of the above-mentioned material receiving mechanism, the central shaft is driven by a driving device to rotate.

[0018] The beneficial effect of the present utility model is that by controlling the turntable to rotate clockwise, the turntable and the central shaft rotate relative to the fixed plate. Under the action of the synchronous transmission structure, the material receiving structure can always maintain upward support for the material and rotate circumferentially to change its position, so as to facilitate the staff to remove the material, improve the transfer efficiency of the material during feeding, and have practicability. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is the front view of the present utility model;

[0020] Figure 2 is the front elevation view of the present utility model;

[0021] Figure 3 is the connection relationship diagram of the fixed plate, the turntable, the material receiving structure and the synchronous transmission structure;

[0022] Figure 4 is the structural schematic diagram of the fixed plate, the fixed gear and the central shaft;

[0023] Figure 5 is the three-dimensional schematic diagram of the fixed plate, the fixed gear and the central shaft;

[0024] Figure 6 is the three-dimensional schematic diagram of the turntable and the synchronous transmission structure;

[0025] Figure 7 Front view of the turntable and the synchronous transmission structure;

[0026] Figure 8 Schematic structural diagram of the bearing, the connecting shaft and the second driving gear;

[0027] Figure 9 Schematic structural diagram of the material receiving structure;

[0028] In the figure: fixed plate 1, turntable 2, middle shaft 3, material receiving structure 4, arc-shaped waist hole 41, synchronous transmission structure 5, first driving gear 51, second driving gear 52, fixed gear 53, bearing 6, connecting shaft 7, first end 71, second end 72, driving device 8, outer housing 9, baffle 10. Specific embodiments

[0029] The following describes the preferred embodiments of the present invention with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principle of the present invention and are not intended to limit the protection scope of the present invention.

[0030] It should be noted that in the description of the present invention, the terms indicating directions or positional relationships such as "upper", "lower", "left", "right", "front", "rear", etc. are based on the directions or positional relationships shown in the drawings. This is only for convenience of description and does not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, so it cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0031] In addition, it should also be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "set", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0032] Embodiment 1:

[0033] As Figures 1 to 9 shown, the material receiving mechanism of the present invention includes: a fixed plate 1 and a turntable 2. The fixed plate 1 and the turntable 2 are connected by a middle shaft 3 in the axial direction. The middle shaft 3 and the turntable 2 are configured to rotate synchronously relative to the fixed plate 1; a material receiving structure 4 and a synchronous transmission structure 5. At least one set of the material receiving structure 4 is rotationally arranged on the surface of the turntable 2 on the side away from the fixed plate 1. The synchronous transmission structure 5 is arranged on the fixed plate 1 and the turntable 2 to control the material receiving structure 4 to rotate circumferentially while maintaining a predetermined angle unchanged when the material receiving structure 4 rotates synchronously with the turntable 2.

[0034] See Figure 3 As shown in the figure, the fixed plate 1 is parallel to the turntable 2. The turntable 2 is rotatably mounted on the fixed plate 1 through the central shaft 3. At least one set of material receiving structures 4 arranged on the surface of the turntable 2 away from the fixed plate 1 can rotate relative to the turntable 2. The synchronous transmission structure 5 is arranged on the fixed plate 1 and the turntable 2. When the turntable 2 rotates, the synchronous transmission structure 5 can restrict the rotation of the material receiving structure 4, ensuring that when the turntable 2 rotates, the material receiving structure 4 rotates synchronously, so that the material receiving structure 4 can always hold the material upward.

[0035] See Figures 1 to 7 As shown in the figure, when conveying plate-shaped or sheet-shaped materials (silicon wafers), the silicon wafers are fed onto the material receiving structure 4. The central shaft 3 is controlled to drive the turntable 2 to rotate clockwise, so that the turntable 2 and the central shaft 3 rotate relative to the fixed plate 1. Under the action of the synchronous transmission structure 5, the material receiving structure 4 can always support the material upward and rotate circumferentially to change its position. It should be noted that the left side of the turntable 2 can be regarded as the loading position, and the right side of the turntable 2 can be regarded as the unloading position. When the material receiving structure 4 at the loading position receives the material, after the above operation, the material receiving structure 4 rotates clockwise to the unloading position, and then the material can be taken off by the staff or the manipulator. The material receiving mechanism of the present application can be used as a transfer device between the silicon wafer production line and the storage device to realize rapid loading and unloading operations, improve the loading and unloading efficiency of materials, and has practicability.

[0036] In other possible embodiments, the material receiving structure 4 can be configured with two groups, three groups, four groups, etc., without specific limitation; correspondingly, the number of the synchronous transmission structures 5 arranged between the fixed plate 1 and the turntable 2 corresponds to the material receiving structure 4 one by one.

[0037] In one or more embodiments, the synchronous transmission structure 5 at least includes a first driving gear 51 and a second driving gear 52 that are sequentially and rotatably arranged on the turntable 2 along the radial direction of the turntable 2, and a fixed gear 53 arranged on the fixed plate 1; wherein, the first driving gear 51 meshes with the second driving gear 52, the first driving gear 51 meshes with the fixed gear 53, the fixed gear 53 is coaxial with the turntable 2 and does not rotate, and the second driving gear 52 is connected to the material receiving structure 4 to rotate synchronously.

[0038] See Figures 1 to 7 As shown in the figure, the first driving gear 51 and the second driving gear 52 are sequentially arranged on the surface of the turntable 2 facing the fixed plate 1 along the radial direction of the turntable 2. The first driving gear 51 meshes with the second driving gear 52, the second driving gear 52 is connected to the material receiving structure 4 and rotates synchronously. The fixed plate 1 is fixedly installed with a fixed gear 53 on the surface facing the turntable 2. The fixed gear 53 meshes with the first driving gear 51. The fixed gear 53 is coaxial with the turntable 2 and the central shaft 3, and the central shaft 3 is located inside the fixed gear 53.

[0039] See Figure 3 When the material receiving structure 4 is rotated clockwise from the feeding position to the discharging position for conveying, first, the central shaft 3 is controlled to rotate clockwise so that the turntable 2 drives the material receiving structure 4 to rotate clockwise. When the material receiving structure 4 passes through the feeding position, it can receive and hold the material. As the turntable 2 rotates clockwise, the first driving gear 51 rotates clockwise relative to the fixed gear 53, and the second driving gear 52 rotates counterclockwise relative to the fixed gear 53, so that the material receiving structure 4 can rotate in the opposite direction to the turntable 2 while rotating and rising clockwise, thereby ensuring the stability of the material receiving structure 4 for rotating and conveying the material. At the same time, by increasing the number of the material receiving structures 4, the feeding and material receiving rates of the present application can be further improved.

[0040] See Figures 2 to 7 When the material receiving structure 4 is rotated clockwise from the discharging position to the feeding position for conveying, the central shaft 3 is also controlled to drive the turntable 2 to rotate clockwise. The first driving gear 51 rotates clockwise relative to the fixed gear 53, and the second driving gear 52 rotates counterclockwise relative to the fixed gear 53, so that while the turntable 2 rotates clockwise, the material receiving structure 4 rotates counterclockwise on the turntable 2, ensuring that the side of the material receiving structure 4 for holding the material is always upward, so as to facilitate receiving the material at the feeding position and discharging the material at the discharging position, which has practicability.

[0041] It should be noted that the central shaft 3 can also be controlled to drive the turntable 2 to rotate counterclockwise. At this time, the first driving gear 51 rotates counterclockwise and the second driving gear 52 rotates clockwise, so that the material receiving structure 4 that rotates synchronously with the second driving gear 52 rotates clockwise relative to the turntable 2; by reversing the operation of the turntable 2, the feeding and discharging of the material can also be realized.

[0042] In one or more embodiments, a bearing 6 is embedded in the turntable 2. A connecting shaft 7 with opposite first end 71 and second end 72 is arranged on the inner ring of the bearing 6. The first end 71 and the second end 72 respectively extend out of both sides of the turntable 2. The first end 71 is used to connect the material receiving structure 4, and the second end 72 is used to connect the synchronous transmission structure 5; the material receiving structure 4 is a receiving frame rotatably installed on the turntable 2.

[0043] See Figures 6 to 8 As shown in, the outer peripheral circle of the bearing 6 is embedded in the turntable 2, the connecting shaft 7 is fixedly connected to the inner side of the bearing 6, the connecting shaft 7 has opposite first end 71 and second end 72, the first end 71 is used to connect the receiving frame, and the second end 72 is used to connect the second driving gear 52. Through this setting, the synchronous rotation of the second driving gear 52 and the receiving frame can be realized. At the same time, the second driving gear 52 and the receiving frame are connected to the turntable 2 through the bearing 6, which can improve the stability and smoothness of the receiving frame during rotation and improve the use effect of the present application.

[0044] In one or more embodiments, the inclination angle of the material receiving structure 4 relative to the connecting shaft 7 is adjustable.

[0045] See Figure 2 、 Figure 9 , an arc-shaped waist-shaped hole 41 is formed on the material receiving frame, and a threaded hole corresponding to the arc-shaped waist-shaped hole 41 is arranged at the first end 71 of the connecting shaft 7. The material receiving frame is connected to the threaded hole by passing a bolt through the arc-shaped waist-shaped hole 41, so as to realize the angle adjustment of the material receiving frame. By inclining the material receiving frame, it is convenient for the material to be placed more stably, and the stability of the material conveying in this application is improved.

[0046] In one or more embodiments, the central shaft 3 is driven by a driving device 8 to rotate; an outer housing 9 is arranged outside the fixed plate 1 and the turntable 2, and the driving device 8 is covered by the outer housing 9.

[0047] See Figure 1 、 Figure 2 、 Figure 3 , the driving device 8 can be a servo motor; by covering the fixed plate 1, the turntable 2, the driving device 8 and the synchronous transmission structure 5 with the outer housing 9, the protection of the components can be formed, and at the same time, the aesthetic degree of the material receiving mechanism can be improved.

[0048] In one or more embodiments, a baffle 10 for covering the turntable 2 is arranged on the outer peripheral side of the turntable 2, and the baffle 10 rotates synchronously with the turntable 2. By this setting, the covering of the turntable 2 can be further formed, and the aesthetic degree of the overall appearance of the material receiving mechanism is improved.

[0049] In one or more embodiments, the turntable 2 is detachably mounted on the central shaft 3. See Figure 2 、 Figure 7 , the turntable 2 is detachably mounted on the central shaft 3 by bolts. By this setting, the assembly of the turntable 2 and the synchronous transmission structure 5 can be facilitated, and the replacement of components can be facilitated.

[0050] Embodiment 2:

[0051] As the second embodiment of the present utility model, the components that are the same or corresponding to those in the first embodiment adopt the corresponding reference numerals in the first embodiment, and only the differences between the second embodiment and the first embodiment will be described below.

[0052] The difference between the second embodiment and the first embodiment lies in the synchronous transmission structure 5. In the second embodiment, the synchronous transmission structure 5 is a first belt pulley rotatably mounted on the turntable 2, a second belt pulley arranged on the fixed plate 1, and a transmission belt for connecting the first belt pulley and the second belt pulley; wherein, the first belt pulley is connected to the material receiving structure 4 to rotate synchronously, and the second belt pulley is coaxial with the turntable 2.

[0053] It should be noted that the second pulley does not rotate, the first pulley can rotate relative to the turntable 2, and the first pulley rotates synchronously with the material receiving structure 4. When the turntable 2 rotates clockwise, under the action of the transmission belt, the first pulley can rotate counterclockwise relative to the turntable 2, that is, the first pulley and the material receiving structure 4 reverse relative to the turntable 2 to keep the material receiving structure 4 always receiving the material.

[0054] The above implementation modes are only for illustrating the technical concept and features of the utility model, and their purpose is to allow people familiar with this technology to understand the content of the utility model and implement it. It cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A material receiving mechanism, characterized in that, Including: A fixed plate and a turntable, the fixed plate and the turntable are connected by a central axis in the axial direction, and the central axis and the turntable are configured to rotate synchronously relative to the fixed plate; A material collecting structure and a synchronous transmission structure, at least one group of the material collecting structures are rotationally arranged on the surface of the turntable on the side far from the fixed plate, and the synchronous transmission structure is arranged on the fixed plate and the turntable, so as to control the material collecting structure to rotate circumferentially while maintaining a predetermined angle unchanged when the material collecting structure rotates synchronously with the turntable.

2. The material collecting mechanism according to claim 1, wherein: The synchronous transmission structure at least includes a first moving gear and a second moving gear that are sequentially rotationally arranged on the turntable along the radial direction of the turntable, and a fixed gear arranged on the fixed plate; Wherein, the first moving gear meshes with the second moving gear, the first moving gear meshes with the fixed gear, the fixed gear is coaxial with the turntable and does not rotate, and the second moving gear is connected to the material collecting structure to rotate synchronously.

3. The material collecting mechanism according to claim 1, wherein: The synchronous transmission structure is a first pulley rotationally installed on the turntable, a second pulley arranged on the fixed plate, and a transmission belt for connecting the first pulley and the second pulley; Wherein, the first pulley is connected to the material collecting structure to rotate synchronously, and the second pulley is coaxial with the turntable.

4. The receiving mechanism according to claim 1, wherein: The material collecting structure is a material collecting frame rotationally installed on the turntable.

5. The receiving mechanism according to claim 1 or 4, characterized in that: A bearing is embedded in the turntable, and a connecting shaft with opposite first and second ends is arranged on the inner ring of the bearing. The first and second ends respectively extend out of both sides of the turntable. The first end is used to connect the material collecting structure, and the second end is used to connect the synchronous transmission structure.

6. The receiving mechanism according to claim 5, wherein: The inclination angle of the material collecting structure relative to the connecting shaft is adjustable.

7. The receiving mechanism according to claim 1, characterized in that: An outer housing is arranged outside the fixed plate and the turntable.

8. The receiving mechanism according to claim 1 or 7, characterized in that: A baffle for covering the turntable is arranged on the outer peripheral side of the turntable, and the baffle rotates synchronously with the turntable.

9. The receiving mechanism according to claim 1, wherein: The turntable is detachably installed on the central axis.

10. The receiving mechanism according to claim 1, characterized in that: The central axis is driven by a driving device to rotate.