High-precision double-station FAC automatic coupling equipment

Abstract

The utility model relates to the technical field of semiconductor laser, in particular to high-precision double-station FAC automatic coupling equipment, which comprises a rack, and a pumping transfer mechanism, a power-up UV (ultraviolet) integration, a light spot mechanism, an FAC material rack and a six-dimensional coupling mechanism which are arranged on the rack, a pump body is arranged on the pump transfer mechanism; the pumping transfer mechanism can drive the pumping body to move in the transverse direction and the longitudinal direction. A dispensing mechanism, a visual mechanism and an FAC clamping mechanism are arranged on the six-dimensional coupling mechanism; the six-dimensional coupling mechanism can move and vertically lift among the FAC material rack, the pumping transfer mechanism and the light spot mechanism; the power-up UV assembly comprises a first sliding piece, a probe and a UV curing lamp, wherein the probe and the UV curing lamp are installed on the first sliding piece. The light spot mechanism comprises a near-field light spot mechanism and a far-field light spot mechanism which are correspondingly arranged on the two sides of the pumping transfer mechanism; the six-dimensional coupling mechanism is erected on the rack; the pumping transfer mechanism, the power-up UV integration and the light spot mechanism are arranged on the two sides of the FAC material frame in a mirroring mode.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor lasers, and particularly relates to a high-precision double-station FAC automatic coupling device. Background Art

[0002] FAC, that is, the fast-axis collimating mirror, is one of the most important lenses in a high-power semiconductor laser system. As the first optical element of the laser chip, if the beam focusing is not good, tilted, or trailing, it is very difficult for the subsequent optical path to meet the requirements, and it will cause more optical power loss and scattered light in the entire optical path, which will seriously affect the life and stability of the entire laser.

[0003] Most of the existing FAC automatic coupling devices are single-station operations, with low operation efficiency. When production needs to be expanded, usually only a simple quantity superposition is done, and the integration degree between multiple devices is low, resulting in a large space occupied by the devices. Secondly, the existing FAC automatic coupling devices usually only perform near-field detection on the light spot of the workpiece, with low detection accuracy, resulting in low coupling quality of the workpiece. Summary of the Utility Model

[0004] (1) Technical Problems to be Solved

[0005] In view of the above-mentioned shortcomings and deficiencies of the prior art, the utility model provides a high-precision double-station FAC automatic coupling device, which solves the technical problems of low operation efficiency, large space occupation, and low detection accuracy of the light spot of the workpiece of the existing FAC automatic coupling device.

[0006] (2) Technical Solutions

[0007] To achieve the above object, the high-precision double-station FAC automatic coupling device of the utility model includes a frame, as well as a pump transfer mechanism, a power-on UV integration, a light spot mechanism, a FAC rack, and a six-dimensional coupling mechanism arranged on the frame;

[0008] A pump body is arranged on the pump transfer mechanism; the pump transfer mechanism can drive the pump body to move horizontally and vertically; a dispensing mechanism, a vision mechanism, and a FAC clamping mechanism are arranged on the six-dimensional coupling mechanism; the six-dimensional coupling mechanism can move between the FAC rack, the pump transfer mechanism, and the light spot mechanism and lift vertically; the power-on UV integration includes a first sliding member, as well as a probe and a UV curing lamp installed on the first sliding member; the light spot mechanism includes a near-field light spot mechanism and a far-field light spot mechanism correspondingly arranged on both sides of the pump transfer mechanism; the six-dimensional coupling mechanism is erected on the frame; the pump transfer mechanism, the power-on UV integration, and the light spot mechanism are mirror-symmetrically arranged on both sides of the FAC rack.

[0009] Optionally, the six-dimensional coupling mechanism is slidably arranged along the longitudinal direction on the arched bracket of the frame;

[0010] The near-field light spot mechanism is arranged inside the arched bracket; the far-field light spot mechanism is arranged outside the arched bracket;

[0011] The pump transfer mechanism is arranged on the front side of the arched bracket.

[0012] Optionally, the near-field light spot mechanism includes a near-field light spot camera, a near-field camera adjustment component, a first prism, a second prism, and a prism adjustment component;

[0013] The near-field camera adjustment component is arranged on the frame; the prism adjustment component is arranged on the near-field camera adjustment component;

[0014] The near-field light spot camera is arranged on the near-field camera adjustment component; the near-field light spot camera can drive the near-field camera adjustment component to move along the transverse, longitudinal, and vertical directions;

[0015] Both the first prism and the second prism are arranged on the prism adjustment component, and the prism adjustment component can drive the two to move synchronously along the transverse, longitudinal, and vertical directions; the first prism is arranged between the second prism and the near-field light spot camera.

[0016] Optionally, a Z-shaped connecting plate is arranged on the prism adjustment component, and the Z-shaped connecting plate includes a connecting section, a transition section, and a mounting section connected in sequence;

[0017] The connecting section is connected to the prism adjustment component; the transition section is arranged in front of the near-field light spot camera; the first prism and the second prism are mounted on the mounting section.

[0018] Optionally, the first sliding member, the prism adjustment component, and the near-field camera adjustment component are all three-dimensional motion modules.

[0019] Optionally, the far-field light spot mechanism includes a far-field light spot camera, a far-field camera adjustment component, a reflector, and a reflector adjustment component;

[0020] Both the far-field camera adjustment component and the reflector adjustment component are arranged on the frame; the reflector adjustment component is arranged between the far-field camera adjustment component and the pump transfer mechanism;

[0021] The far-field light spot camera is arranged on the far-field camera adjustment component; the far-field camera adjustment component can drive the far-field light spot camera to move synchronously along the transverse, longitudinal, and vertical directions;

[0022] The rearview mirror is arranged on the rearview mirror adjusting assembly; the rearview mirror adjusting assembly can drive the rearview mirror to lift vertically and rotate around the vertical direction.

[0023] Optionally, the rearview mirror adjusting assembly includes a sleeve, a positioning member and a support rod;

[0024] The sleeve is arranged on the frame;

[0025] The support rod is slidably connected to the inner wall of the sleeve in the vertical direction;

[0026] A connection hole is formed on the sleeve; the positioning member passes through the connection hole and is connected to the support rod.

[0027] Optionally, the six-degree-of-freedom coupling mechanism further includes a six-degree-of-freedom motion module, and the six-degree-of-freedom motion module can move synchronously in the transverse direction, the longitudinal direction and the vertical direction;

[0028] The dispensing mechanism, the vision mechanism and the FAC clamping mechanism are all arranged on one side of the frame facing the pump transfer mechanism; the six-degree-of-freedom motion module can synchronously drive the dispensing mechanism, the vision mechanism and the FAC clamping mechanism to rotate around the transverse direction, the longitudinal direction and the vertical direction.

[0029] Optionally, the pump transfer mechanism further includes a cross driving module and a drag chain;

[0030] The cross driving module is arranged on the frame;

[0031] The pump body is arranged on the cross driving module; the cross driving module can drive the pump body to move in the transverse direction and the longitudinal direction;

[0032] One end of the drag chain is connected to the frame, and the other end is bent and connected to the bottom surface of the pump body.

[0033] Optionally, the FAC rack includes a FAC bracket and a FAC placement box;

[0034] A placement groove is formed on the FAC bracket, and adsorption holes are formed in the placement groove; the FAC placement box is embedded in the placement groove and is vacuum adsorbed with the adsorption holes.

[0035] (III) Beneficial effects

[0036] The beneficial effects of the present utility model are:

[0037] The six-dimensional coupling mechanism is mounted on the frame, that is, the six-dimensional coupling mechanism is suspended on the frame, which is convenient for spatial layout of other components of the equipment on the frame to reduce the size of the equipment. The pump transfer mechanism, powered UV integration and spot mechanism are mirrored on both sides of the FAC material rack, so that the six-dimensional coupling mechanism can be turned between the double stations, optimizing the equipment structure of the double stations and reducing the space occupied by the equipment. In addition, compared with the single station, the double station FAC automatic coupling equipment has a high degree of integration. The powered UV integration, spot mechanism and six-dimensional coupling mechanism can be linked with the pump transfer mechanism to improve work efficiency; the double station can also reduce the waiting time for loading and unloading workpieces and the time for changing production lines, further improving work efficiency.

[0038] The powered UV integrated probe and UV curing lamp improve the equipment integration, optimize the equipment structure and reduce the space occupied by the equipment.

[0039] The near-field spot mechanism and the far-field spot mechanism perform spot detection on the pre-coupling of the workpiece, realizing the corresponding detection of the near-field spot and the far-field spot of the workpiece, and improving the spot detection accuracy of the workpiece. Through the effective coordination of the spot mechanism, the FAC clamping mechanism and the pump body, the lens and the laser chip can make the first compensation adjustment of the coupling position according to the measured spot during the pre-coupling process, and directly pre-couple the light to be qualified, thereby improving the product quality after the workpiece is coupled. In addition, the powered UV integration and the spot mechanism monitor the workpiece during the entire coupling process, so that the FAC clamping mechanism can make a second compensation adjustment to the coupling position after the workpiece is glued, that is, before the coupling glue solidifies, further improving the product quality after the workpiece is coupled. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 It is a structural schematic diagram of the high-precision double-station FAC automatic coupling device of the utility model;

[0041] Figure 2 This is a structural schematic diagram of the FAC material rack of the utility model;

[0042] Figure 3 It is a structural schematic diagram of the near-field light spot mechanism of the utility model;

[0043] Figure 4 It is a structural schematic diagram of the far-field spot mechanism of the utility model;

[0044] Figure 5 This is a schematic diagram of the structure of the powered UV integration of the utility model;

[0045] Figure 6 It is a structural schematic diagram of the six-dimensional coupling mechanism of the utility model;

[0046] Figure 7This is a schematic structural diagram of the pump transfer mechanism of the present utility model.

[0047]

Explanation of the reference numerals in the drawings

[0048] 1: Frame; 11: Arch-shaped bracket;

[0049] 2: Pump transfer mechanism; 21: Pump body; 22: Cross drive module; 23: Drag chain;

[0050] 3: Power-on UV integration; 31: First sliding member; 32: Probe; 33: UV curing lamp;

[0051] 4: Spot mechanism; 41: Near-field spot mechanism; 411: Near-field spot camera; 412: Near-field camera adjustment component; 413: First prism; 414: Second prism; 415: Prism adjustment component; 4151: Z-shaped connecting plate; 42: Far-field spot mechanism; 421: Near-field spot camera; 422: Far-field camera adjustment component; 423: Reflector; 424: Reflector adjustment component; 4241: Positioning member; 4242: Support rod;

[0052] 5: FAC rack; 51: FAC bracket; 52: FAC placement box;

[0053] 6: Six-dimensional coupling mechanism; 61: Dispensing mechanism; 62: Vision mechanism; 63: FAC clamping mechanism; 64: Six-dimensional motion module. Detailed implementation manners

[0054] In order to better explain the present utility model for easier understanding, the present utility model will be described in detail below with reference to the drawings through specific implementation manners.

[0055] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present utility model are only used to explain the relative positional relationship and movement conditions between components in a specific posture (as shown in the drawings). If this specific posture changes, then the directional indications will also change accordingly.

[0056] In addition, in the present utility model, descriptions such as "first" and "second" are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, "a plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0057] In the present utility model, unless otherwise clearly defined and limited, terms such as "connection" and "fixation" shall be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral one; "connection" can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and can be the communication inside two components or the interaction relationship between two components, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0058] See Figure 1 、 Figure 5 and Figure 7 , the present utility model provides a high-precision double-station FAC automatic coupling device. The FAC automatic coupling device includes a frame 1, and a pump transfer mechanism 2, a power-on UV integration 3, a light spot mechanism 4, a FAC rack 5 and a six-dimensional coupling mechanism 6 arranged on the frame 1; a pump body 21 is arranged on the pump transfer mechanism 2; the pump transfer mechanism 2 can drive the pump body 21 to move horizontally and vertically; a dispensing mechanism 61, a vision mechanism 62 and a FAC clamping mechanism 63 are arranged on the six-dimensional coupling mechanism 6; the six-dimensional coupling mechanism 6 can move between the FAC rack 5, the pump transfer mechanism 2 and the light spot mechanism 4 and lift vertically; the power-on UV integration 3 includes a first sliding member 31, and a probe 32 and a UV curing lamp 33 installed on the first sliding member 31; the light spot mechanism 4 includes a near-field light spot mechanism 41 and a far-field light spot mechanism 42 correspondingly arranged on both sides of the pump transfer mechanism 2; the six-dimensional coupling mechanism 6 is erected on the frame 1; the pump transfer mechanism 2, the power-on UV integration 3 and the light spot mechanism 4 are mirror-symmetrically arranged on both sides of the FAC rack 5. The horizontal, vertical and longitudinal directions are the three axial directions corresponding to the three-dimensional space coordinate system.

[0059] In this embodiment, a laser chip is placed in the pump body 21, and a lens is placed in the FAC rack 5. The six-dimensional coupling mechanism 6 is used to carry the lens onto the laser chip for coupling. The power-on UV integration 3 can power on the laser chip and perform UV curing on the coupling glue. The light spot mechanism 4 is used to detect the light spot of the laser chip after power-on and coupling. The dispensing mechanism 61 is used to dispense glue at the pre-coupling workpiece, that is, the coupling position between the laser chip and the lens. The vision mechanism 62 can detect the positions of the laser chip and the lens, and then simulate and calculate the coupling position between the two. The FAC clamping mechanism 63 then clamps the lens according to the coupling position information detected by the vision mechanism 62 and moves it onto the laser chip to achieve pre-coupling of the lens and the laser chip.

[0060] The process flow of the high-precision double-station FAC automatic coupling device is as follows:

[0061] S1. Manual feeding: Manually feed the lens and the laser chip onto the FAC rack 5 and the pump body 21 respectively;

[0062] S2. Upward vision scanning: The vision mechanism 62 takes pictures of the FAC rack 5 and the pump body 21, calculates the coupling position through simulation; and guides the FAC clamping mechanism 63 to clamp the lens on the FAC rack 5;

[0063] S3. Power-on and pre-coupling: The probe 32 moves to the laser chip to power it on; the prism in the near-field light spot assembly 41 descends to the set position, and the FAC clamping mechanism 63 moves the clamped lens to the calculated coupling position. Pre-coupling to find the light to be qualified, realizing the first compensation adjustment of the coupling position;

[0064] S4. Glue dispensing: After the near-field light spot assembly 41 and the far-field light spot assembly 42 detect that the pre-coupling is qualified, the glue dispensing mechanism 61 dispenses glue at the coupling position, and at the same time the vision mechanism 62 checks the glue dispensing amount;

[0065] S5. Fine coupling and UV curing: Re-fine coupling to the best light spot, realizing the second compensation adjustment of the coupling position; Turn on the UV lamp and cure the coupling glue step by step;

[0066] S6. Manual unloading: After the coupling glue is cured, the vision mechanism 62 checks again whether the light spot is qualified; the FAC clamping mechanism 63 releases the lens, the probe 32 and the prism move away, and the workpiece is taken manually; Each axis resets to the initial position.

[0067] The six-dimensional coupling mechanism 6 can move between the FAC rack 5, the pump transfer mechanism 2 and the light spot mechanism 4 and lift vertically, that is, the six-dimensional coupling mechanism 6 can move in three-dimensional space. The six-dimensional coupling mechanism 6 is installed on the frame 1, that is, the six-dimensional coupling mechanism 6 is suspended on the frame 1, which is convenient for the spatial layout of other components of the equipment on the frame 1 to reduce the volume of the equipment. The pump transfer mechanism 2, the power-on UV integration 3 and the light spot mechanism 4 are mirror-symmetrically arranged on both sides of the FAC rack 5, so that the six-dimensional coupling mechanism 6 can turn around between the two workstations, optimizing the equipment structure of the two workstations and reducing the occupied space of the equipment. Moreover, compared with the single workstation, the FAC automatic coupling equipment of the two workstations has a high integration degree, and the power-on UV integration 3, the light spot mechanism 4 and the six-dimensional coupling mechanism 6 can be linked with the pump transfer mechanism 2 to improve the operation efficiency; the two workstations can also reduce the waiting time for workpiece loading and unloading and the time for changing production lines, further improving the operation efficiency.

[0068] The power-on UV integration 3 integrates the probe 32 and the UV curing lamp 33, improving the equipment integration degree, optimizing the equipment structure and reducing the occupied space of the equipment.

[0069] The spot mechanism 4 includes a near-field spot mechanism 41 and a far-field spot mechanism 42 correspondingly arranged on both sides of the pumping transfer mechanism 2. The near-field spot mechanism 41 and the far-field spot mechanism 42 correspondingly perform spot detection on the pre-coupling of the workpiece, realizing the corresponding detection of the near-field spot and the far-field spot of the workpiece, and improving the spot detection accuracy of the workpiece. Through the effective cooperation of the spot mechanism 4, the FAC clamping mechanism 63 and the pumping body 21, the lens and the laser chip can perform the first compensation adjustment of the coupling position according to the measured spot during the pre-coupling process, directly pre-coupling and finding the light to be qualified, and improving the product quality after the coupling of the workpiece. Moreover, the powered UV integration 3 and the spot mechanism 4 monitor the workpiece throughout the coupling process, enabling the FAC clamping mechanism 63 to perform the second compensation adjustment of the coupling position after the workpiece is dispensed, that is, before the coupling glue solidifies, further improving the product quality after the coupling of the workpiece.

[0070] See Figure 6 , the six-dimensional coupling mechanism 6 is slidably arranged along the longitudinal direction on the arched bracket 11 of the frame 1; the near-field spot mechanism 41 is arranged inside the arched bracket 11; the far-field spot mechanism 42 is arranged outside the arched bracket 11; the pumping transfer mechanism 2 is arranged in front of the arched bracket 11, and a protective cover of the frame 1 is arranged behind the arched bracket 11. Specifically, the arched structure enables components to be arranged both inside and outside and in the front and back of the arched bracket 11, and enables the six-dimensional coupling mechanism 6 to be suspended, with a reasonable spatial layout, effectively reducing the occupied space of the equipment.

[0071] Such as Figure 3As shown in the figure, the near-field light spot mechanism 41 includes a near-field light spot camera 411, a near-field camera adjustment component 412, a first prism 413, a second prism 414, and a prism adjustment component 415; the near-field camera adjustment component 412 is arranged on the frame 1; the prism adjustment component 415 is arranged on the near-field camera adjustment component 412; the near-field light spot camera 411 is arranged on the near-field camera adjustment component 412; the near-field light spot camera 411 can drive the near-field camera adjustment component 412 to move horizontally, vertically, and vertically; both the first prism 413 and the second prism 414 are arranged on the prism adjustment component 415, and the prism adjustment component 415 can drive the two to move synchronously horizontally, vertically, and vertically; the first prism 413 is arranged between the second prism 414 and the near-field light spot camera 411. Specifically, the prism adjustment component 415 can drive the first prism 413 and the second prism 414 to move in three-dimensional space, the near-field camera adjustment component 412 can drive the near-field light spot camera 411 to move in three-dimensional space, and the prism adjustment component 415 and the near-field camera adjustment component 412 drive the prism and the near-field light spot camera 411 to the detection station according to the coupling position information detected by the vision mechanism 62, effectively improving the flexibility of the use of the near-field light spot mechanism 41 and the adaptability of the near-field light spot mechanism 41 to the coupling position deviation of the workpiece, so as to ensure that the near-field light spot mechanism 41 can perform high-precision detection on the light spot of the workpiece.

[0072] Furthermore, a Z-shaped connecting plate 4151 is arranged on the prism adjustment component 415. The Z-shaped connecting plate 4151 includes a connecting section, a transition section, and a mounting section connected in sequence; the connecting section is connected to the prism adjustment component 415; the transition section is arranged in front of the near-field light spot camera 411; the first prism 413 and the second prism 414 are mounted on the mounting section. Specifically, the Z-shaped connecting plate 4151 can suspend the first prism 413 and the second prism 414 in front of the near-field light spot camera 411, effectively optimizing the occupied space of the equipment and facilitating the prism to receive the laser emitted after the laser chip is powered on, so as to realize the near-field detection of the light spot of the workpiece.

[0073] Secondly, the first sliding member 31, the prism adjustment component 415, and the near-field camera adjustment component 412 are all three-dimensional motion modules. In this embodiment, the far-field camera adjustment component 422 is also set as a three-dimensional motion module. The three-dimensional motion module includes a horizontal sliding component, a vertical sliding component, and a vertical sliding component. The sliding component can be a cylinder, a hydraulic cylinder, or an electric push rod. The three sliding components are integrated to realize the movement in three-dimensional space.

[0074] See Figure 4, the far-field spot mechanism 42 includes a far-field spot camera 421, a far-field camera adjustment component 422, a reflector 423, and a reflector adjustment component 424; both the far-field camera adjustment component 422 and the reflector adjustment component 424 are arranged on the frame 1; the reflector adjustment component 424 is arranged between the far-field camera adjustment component 422 and the pump transfer mechanism 2; the far-field spot camera 421 is arranged on the far-field camera adjustment component 422; the far-field camera adjustment component 422 can drive the far-field spot camera 421 to move synchronously in the horizontal, vertical, and longitudinal directions; the reflector 423 is arranged on the reflector adjustment component 424; the reflector adjustment component 424 can drive the reflector 423 to lift vertically and rotate around the vertical direction. Specifically, the far-field camera adjustment component 422 adjusts the reflector 423 so that the reflector 423 can reflect the laser emitted by the laser chip to the far-field spot camera 421 for reception, realizing the far-field detection of the workpiece spot. The reflector adjustment component 424 can be integrated by a turntable and a telescopic cylinder to correspondingly realize the rotation and vertical lifting of the reflector 423.

[0075] Furthermore, the reflector adjustment component 424 includes a sleeve, a positioning member 4241, and a support rod 4242; the sleeve is arranged on the frame 1; the support rod 4242 is slidably connected to the inner wall of the sleeve in the vertical direction; a connection hole is provided on the sleeve; the positioning member 4241 passes through the connection hole and is connected to the support rod 4242. Specifically, the positioning member 4241 can be a pin or a screw, and the connection hole is correspondingly set as a through hole or a threaded hole. After passing through the connection hole, the positioning member 4241 can abut against or be inserted into the support rod 4242, as long as it can realize the rotation, vertical lifting, and positioning of the reflector 423. In this embodiment, the reflector adjustment component 424 can be manually adjusted, and the adjustment method is simple and practical.

[0076] As Figure 6 shown, the six-dimensional coupling mechanism 6 further includes a six-dimensional motion module 64, and the six-dimensional motion module 64 can move synchronously in the horizontal, vertical, and longitudinal directions; the dispensing mechanism 61, the vision mechanism 62, and the FAC clamping mechanism 63 are all arranged on one side of the frame 1 facing the pump transfer mechanism 2; the six-dimensional motion module 64 can synchronously drive the dispensing mechanism 61, the vision mechanism 62, and the FAC clamping mechanism 63 to rotate around the horizontal, vertical, and longitudinal directions. Specifically, the six-dimensional motion module 64 can freely move and rotate in three-dimensional space, improving the position accuracy of the dispensing mechanism 61 and the FAC clamping mechanism 63 relative to the laser chip, and further improving the coupling accuracy. Arranging the dispensing mechanism 61, the vision mechanism 62, and the FAC clamping mechanism 63 on one side of the frame 1 facing the pump transfer mechanism 2 enables the six-dimensional coupling mechanism 6 to move and operate above the pump body 21, optimizing the spatial structure of the equipment.

[0077] See Figure 7, the pumping transfer mechanism 2 further includes a cross drive module 22 and a drag chain 23; the cross drive module 22 is arranged on the frame 1; the pumping body 21 is arranged on the cross drive module 22; the cross drive module 22 can drive the pumping body 21 to move horizontally and vertically; one end of the drag chain 23 is connected to the frame 1, and the other end is bent and connected to the bottom surface of the pumping body 21. Among them, the cross drive module 22 is integrated by a horizontal driver and a vertical driver, and the driver can be a cylinder, a hydraulic cylinder or an electric push rod. The drag chain 23 is supported under the pumping body 21, improving the stability of the sliding of the pumping body 21.

[0078] As Figure 2 shown, the FAC rack 5 includes an FAC bracket 51 and an FAC placement box 52; a placement groove is formed in the FAC bracket 51, and adsorption holes are formed in the placement groove; the FAC placement box 52 is embedded in the placement groove and is vacuum-adsorbed through the adsorption holes. The placement groove can limit the FAC placement box 52 in the horizontal and vertical directions, and the vacuum adsorption structure can limit the FAC placement box 52 in the vertical direction, with high limiting strength, thereby improving the picking accuracy of the lens on the FAC clamping mechanism 63. Moreover, the vacuum adsorption method also facilitates the quick disassembly and assembly of the FAC bracket 51 and the FAC placement box 52.

[0079] It should be understood that the above description of the specific embodiments of the present invention is only for explaining the technical route and features of the present invention, and its purpose is to enable those skilled in the art to understand the content of the present invention and implement it accordingly. However, the present invention is not limited to the above specific embodiments. Any changes or modifications made within the scope of the claims of the present invention should be covered by the protection scope of the present invention.

Claims

1. A high-precision double-station FAC automatic coupling device, characterized in that The FAC automatic coupling device includes a frame (1), and a pump transfer mechanism (2), a power-on UV integration (3), a spot mechanism (4), an FAC rack (5), and a six-axis coupling mechanism (6) arranged on the frame (1); A pump body (21) is arranged on the pump transfer mechanism (2); the pump transfer mechanism (2) can drive the pump body (21) to move horizontally and vertically; a dispensing mechanism (61), a vision mechanism (62), and an FAC clamping mechanism (63) are arranged on the six-axis coupling mechanism (6); the six-axis coupling mechanism (6) can move between the FAC rack (5), the pump transfer mechanism (2), and the spot mechanism (4) and lift vertically; the power-on UV integration (3) includes a first sliding member (31), and a probe (32) and a UV curing lamp (33) installed on the first sliding member (31); the spot mechanism (4) includes a near-field spot mechanism (41) and a far-field spot mechanism (42) correspondingly arranged on both sides of the pump transfer mechanism (2); the six-axis coupling mechanism (6) is mounted on the frame (1); the pump transfer mechanism (2), the power-on UV integration (3), and the spot mechanism (4) are mirror-symmetrically arranged on both sides of the FAC rack (5).

2. The high-precision double-station FAC automatic coupling device according to claim 1, characterized in that, The six-axis coupling mechanism (6) is slidably arranged along the longitudinal direction on the arched bracket (11) of the frame (1); The near-field spot mechanism (41) is arranged inside the arched bracket (11); the far-field spot mechanism (42) is arranged outside the arched bracket (11); The pump transfer mechanism (2) is arranged on the front side of the arched bracket (11).

3. The high-precision double-station FAC automatic coupling device according to claim 1, characterized in that The near-field spot mechanism (41) includes a near-field spot camera (411), a near-field camera adjustment component (412), a first prism (413), a second prism (414), and a prism adjustment component (415); The near-field camera adjustment component (412) is arranged on the frame (1); the prism adjustment component (415) is arranged on the near-field camera adjustment component (412); The near-field spot camera (411) is arranged on the near-field camera adjustment component (412); the near-field spot camera (411) can drive the near-field camera adjustment component (412) to move horizontally, vertically, and longitudinally; Both the first prism (413) and the second prism (414) are arranged on the prism adjustment component (415), and the prism adjustment component (415) can drive the two to move synchronously horizontally, vertically, and longitudinally; the first prism (413) is arranged between the second prism (414) and the near-field spot camera (411).

4. The high-precision double-station FAC automatic coupling device according to claim 3, characterized in that, A Z-shaped connecting plate (4151) is arranged on the prism adjustment component (415), and the Z-shaped connecting plate (4151) includes a connecting section, a transition section, and a mounting section connected in sequence; The connecting section is connected to the prism adjusting assembly (415); the transition section is arranged in front of the near-field light spot camera (411); the first prism (413) and the second prism (414) are mounted on the mounting section.

5. The high-precision double-station FAC automatic coupling device according to claim 4, wherein The first sliding member (31), the prism adjusting assembly (415) and the near-field camera adjusting assembly (412) are all three-dimensional motion modules.

6. The high-precision double-station FAC automatic coupling device according to claim 1, characterized in that, The far-field light spot mechanism (42) includes a far-field light spot camera (421), a far-field camera adjusting assembly (422), a reflector (423) and a reflector adjusting assembly (424); The far-field camera adjusting assembly (422) and the reflector adjusting assembly (424) are both arranged on the frame (1); the reflector adjusting assembly (424) is arranged between the far-field camera adjusting assembly (422) and the pump transfer mechanism (2); The far-field light spot camera (421) is arranged on the far-field camera adjusting assembly (422); the far-field camera adjusting assembly (422) can drive the far-field light spot camera (421) to move synchronously along the transverse, longitudinal and vertical directions; The reflector (423) is arranged on the reflector adjusting assembly (424); the reflector adjusting assembly (424) can drive the reflector (423) to lift along the vertical direction and rotate around the vertical direction.

7. The high-precision double-station FAC automatic coupling device according to claim 6, characterized in that The reflector adjusting assembly (424) includes a sleeve, a positioning member (4241) and a support rod (4242); The sleeve is arranged on the frame (1); The support rod (4242) is slidably connected to the inner wall of the sleeve along the vertical direction; A connection hole is formed in the sleeve; the positioning member (4241) passes through the connection hole and is connected to the support rod (4242).

8. The high-precision double-station FAC automatic coupling device according to any one of claims 1-5, characterized in that The six-dimensional coupling mechanism (6) further includes a six-dimensional motion module (64), and the six-dimensional motion module (64) can move synchronously along the transverse, longitudinal and vertical directions; The dispensing mechanism (61), the vision mechanism (62) and the FAC clamping mechanism (63) are all arranged on one side of the frame (1) facing the pump transfer mechanism (2); the six-dimensional motion module (64) can synchronously drive the dispensing mechanism (61), the vision mechanism (62) and the FAC clamping mechanism (63) to rotate around the transverse, longitudinal and vertical directions.

9. The high-precision double-station FAC automatic coupling device according to any one of claims 1-5, characterized in that, The pump transfer mechanism (2) further includes a cross drive module (22) and a drag chain (23); The cross drive module (22) is arranged on the frame (1); The pump body (21) is arranged on the cross drive module (22); the cross drive module (22) can drive the pump body (21) to move along the transverse and longitudinal directions; One end of the drag chain (23) is connected to the frame (1), and the other end is bent and connected to the bottom surface of the pump body (21).

10. The high-precision double-station FAC automatic coupling device according to any one of claims 1-5, characterized in that, The FAC rack (5) includes a FAC bracket (51) and a FAC placement box (52); A placement groove is formed in the FAC bracket (51), and adsorption holes are formed in the placement groove; The FAC placement box (52) is embedded in the placement groove and is vacuum adsorbed with the adsorption holes.

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