X-ray source

Abstract

An X-ray source (1) is provided with: an X-ray tube (7) having a valve part (7A) for holding a target (7C), and a high-voltage application part (7G) protruding from the valve part (7A) and electrically connected to the target (7C); a power supply unit (2) having a high-voltage generation unit (2B) which is molded in the insulating block (2A) and which supplies a voltage to the X-ray tube (7), a socket (2D) which supplies a voltage to the high-voltage application unit (7G), and a wall part (2E) which surrounds the periphery of the socket (2D); and a metal cover (6) which houses the valve part (7A) and in which an insulating oil (100) that immerses the valve part (7A) is sealed, and in which a concavo-convex part (10) having a lower height than the wall part (2E) is formed on at least a portion of a member that is in contact with the insulating oil (100).

Description

Technical Field

[0001] The utility model relates to an X-ray source. Background Art

[0002] Japanese Patent Laid-Open No. 2004-213974 discloses a structure in which an insulating wall is provided so as to surround a voltage supply unit for an X-ray tube, and a discharge countermeasure between the power supply unit and the metal cover is implemented.

[0003] Here, in addition to the above discharge countermeasure, for example, in a product in which the heat generation amount of the X-ray tube is larger than before due to high output, improvement of cooling performance is required. Summary of the Utility Model

[0004] The utility model is achieved in view of the above actual situation, and its object is to provide an X-ray source capable of improving cooling performance.

[0005] (1) The X-ray source according to one aspect of the utility model includes: an X-ray tube having a valve portion that holds at least one of a target and an electron gun, and a power supply portion that protrudes from the valve portion and is electrically connected to at least one of the target and the electron gun; a power supply unit having a voltage generation portion that is molded in an insulating block and supplies voltage to the X-ray tube, a voltage supply portion that supplies voltage to the power supply portion, and an insulating wall that surrounds at least a part of the periphery of the voltage supply portion; and a metal cover that houses the valve portion and is filled with a liquid insulating material that impregnates the valve portion, and uneven portions having a height lower than that of the insulating wall are formed on at least a part of the member in contact with the liquid insulating material.

[0006] In such a structure, since uneven portions smaller than the insulating wall are formed at the interface between the liquid insulating material and the member, the heat conductivity can be improved in each of the liquid insulating material and the member via the uneven portions. Thereby, an X-ray source capable of improving the heat exchange efficiency between the liquid insulating material and the member and capable of improving the cooling performance can be provided.

[0007] (2) In the X-ray source of the above (1), the uneven portion may also have a first uneven portion provided on the outer peripheral surface of the valve portion in contact with the liquid insulating material. According to such a structure, the area of the interface between the valve portion that holds a structure with a large heat generation such as a target or an electron gun and the liquid insulating material can be increased, and the heat conductivity of this region can be improved. Thereby, an X-ray source capable of improving the heat dissipation efficiency from the valve portion to the liquid insulating material and further improving the cooling performance can be provided.

[0008] (3) In the X-ray source of the above (1) or (2), the uneven portion may also have a second uneven portion provided on the inner peripheral surface of the metal cover that contacts the liquid insulating material. According to such a structure, the area of the interface between the liquid insulating material and the metal cover can be increased, and the thermal conductivity of this region can be improved. Thereby, an X-ray source can be provided that improves the heat dissipation efficiency from the liquid insulating material to the metal cover and further improves the cooling performance.

[0009] (4) In the X-ray source of the above (3), the second uneven portion may also be formed in a spiral shape. According to such a structure, when injecting the liquid insulating substance, the flow of the liquid insulating material can be easily formed along the spiral second uneven portion, and the ease of defoaming can be improved.

[0010] (5) In any of the X-ray sources of the above (1) to (4), the uneven portion may also have a third uneven portion provided on the surface of the power supply unit that contacts the liquid insulating material. According to such a structure, the area of the interface between the liquid insulating material and the power supply unit can be increased, and the thermal conductivity of this region can be improved. Thereby, an X-ray source can be provided that improves the heat dissipation efficiency from the power supply unit to the liquid insulating material and further improves the cooling performance.

[0011] (6) In any of the X-ray sources of the above (1) to (5), the uneven portion may also have a fourth uneven portion provided on the outer peripheral surface of the power supply unit that contacts the liquid insulating material. According to such a structure, the area of the interface between the power supply unit, which is electrically connected to a structure with a large heat generation such as a target or an electron gun, and the liquid insulating material can be increased, and the thermal conductivity of this region can be improved. Thereby, an X-ray source can be provided that improves the heat dissipation efficiency from the power supply unit to the liquid insulating material and further improves the cooling performance.

[0012] (7) In any of the X-ray sources of the above (1) to (6), the uneven portion may also have a fifth uneven portion provided on the outer peripheral surface of the voltage supply unit that contacts the liquid insulating material. According to such a structure, the area of the interface between the voltage supply unit that supplies voltage to the power supply unit that has become high-temperature and the liquid insulating material can be increased, and the thermal conductivity of this region can be improved. Thereby, an X-ray source can be provided that improves the heat dissipation efficiency from the voltage supply unit to the liquid insulating material and further improves the cooling performance.

[0013] (8) In any of the X-ray sources of the above (1) to (7), the corner portion of the convex portion in the uneven portion may also be set as an R surface. According to such a structure, the area of the interface between the liquid insulating material and the component can be further increased, and an X-ray source can be provided that improves the heat exchange efficiency between the liquid insulating material and the component by improving the thermal conductivity and further improves the cooling performance. Description of the Drawings

[0014] Figure 1 is an exploded perspective view showing the overall structure of the X-ray source of the present embodiment.

[0015] Figure 2 is a longitudinal sectional view showing the internal structure of the X-ray source.

[0016] Figure 3 is a view for explaining the uneven portions.

[0017] Figure 4 is a view for explaining the increase in the surface area of the interface caused by the uneven portions.

[0018] Figure 5 is a view showing an uneven pattern example of the uneven portions.

[0019] Figure 6 is a view showing an uneven pattern example of the second uneven portion.

[0020] Figure 7 is for explaining Figure 6 the flow of the liquid insulating material caused by the second uneven portion shown. Detailed Embodiment

[0021] Hereinafter, with reference to the accompanying drawings, the embodiments will be described in detail. In each figure, the same or corresponding parts are denoted by the same reference numerals, and repeated explanations are omitted.

[0022] Figure 1 is an exploded perspective view showing the overall structure of the X-ray source 1 of the present embodiment. Figure 2 is a longitudinal sectional view showing the internal structure of the X-ray source 1. In addition, in Figure 2 , illustration of a part of the structure (specifically, the uneven portions 10 shown in (a) and (b) of Figure 3 ) is omitted. The structure and shape of the X-ray source 1 described in the present embodiment are always an example and are not limited thereto.

[0023] As Figure 1 and Figure 2 shown, the X-ray source 1 is configured to include a power supply unit 2, a first plate member 3, a second plate member 4, four fastening spacer members 5, a metal cylinder member 6 (metal cover), and an X-ray tube 7.

[0024] The power supply unit 2 has a structure in which a high voltage generation unit 2B (voltage generation unit) that supplies voltage to a high voltage application unit 7G (power supply unit) described below is molded in an insulating block 2A made of epoxy resin. Specifically, the power supply unit 2 has a structure in which the high voltage generation unit 2B, a high voltage wire 2C, a socket 2D, etc. are molded in the insulating block 2A. The socket 2D functions as a voltage supply unit that supplies voltage to the high voltage application unit 7G.

[0025] The insulating block 2A of the power supply unit 2 is formed in a short prism shape with a substantially square upper surface and a lower surface that are parallel to each other. At the center of the upper surface thereof, a cylindrical socket 2D (voltage supply unit) connected to the high voltage generation unit 2B via a high voltage wire 2C is disposed. Further, a ring-shaped wall portion 2E (insulating wall) concentrically arranged with the socket 2D is protrudingly provided on the upper surface of the insulating block 2A. The wall portion 2E is an insulating wall that surrounds at least a part of the periphery of the socket 2D and the high voltage application unit 7G, and prevents direct viewing between the socket 2D and the high voltage application unit 7G and the metal cylinder member 6, thereby suppressing possible discharge between the socket 2D and the high voltage application unit 7G and the metal cylinder member 6. In addition, in the present embodiment, the wall portion 2E completely surrounds the periphery of the socket 2D and the high voltage application unit 7G, but it is sufficient to surround at least a part of the periphery of the socket 2D and the high voltage application unit 7G. For example, the wall portion 2E may also surround a part of the socket 2D and the high voltage application unit 7G at a height protruding upward from the wall portion 2E. A conductive tape 8 for making its potential the GND potential (ground potential) is attached to the peripheral surface of the insulating block 2A.

[0026] The first plate member 3 is a plate member disposed on the upper surface side of the insulating block 2A. The second plate member 4 is a plate member disposed on the lower surface side of the insulating block 2A. The first plate member 3 and the second plate member 4 are, for example, members that sandwich the insulating block 2A of the power supply unit 2 in the vertical direction shown in the figure in cooperation with four fastening spacer members 5 and eight fastening screws 9, and are formed in a substantially square shape larger than the upper surface and the lower surface of the insulating block 2A. Screw insertion holes 3A and 4A for inserting the respective fastening screws 9 are formed at the four corners of these first plate member 3 and second plate member 4. Further, a circular opening 3B surrounding the ring-shaped wall portion 2E protruding from the upper surface of the insulating block 2A is formed in the first plate member 3.

[0027] The four fastening spacer members 5 are formed in a prism shape and are disposed at the four corners of the first plate member 3 and the second plate member 4. The length of each fastening spacer member 5 is set to be slightly shorter than the interval between the upper surface and the lower surface of the insulating block 2A, that is, the fastening amount of the insulating block 2A is shortened. Screw holes 5A for screwing in the fastening screws 9 are formed at the upper and lower end surfaces of each fastening spacer member 5.

[0028] The metal cylindrical member 6 is disposed on the first plate member 3. It is a metal cover that houses the valve portion 7A of the following X-ray tube 7, fixes the X-ray tube 7, and is filled with insulating oil 100 (liquid insulating material) that impregnates the valve portion 7A. The metal cylindrical member 6 is formed in a cylindrical shape, and the mounting flange 6A formed at its base end is screwed and fixed to the periphery of the opening 3B of the first plate member 3 via a sealing member (not shown). The peripheral surface of the front end portion of the metal cylindrical member 6 is formed as a conical surface 6B, for example, and the metal cylindrical member 6 can be configured to be tapered without a corner portion at the front end portion by using this conical surface 6B. In addition, an opening 6C through which the valve portion 7A of the X-ray tube 7 is inserted is formed in the flat front end surface of the metal cylindrical member 6 that is continuous with the conical surface 6B.

[0029] The X-ray tube 7 is a reflection type X-ray tube and is fixed via the metal cylindrical member 6. The X-ray tube 7 includes a valve portion 7A that holds a rod-shaped anode 7B (anode) having a target 7C provided at its front end portion in an insulated state, a target housing portion 7D that houses the target 7C electrically connected to the rod-shaped anode 7B, and an electron gun portion 7E (not shown) that houses an electron gun that emits an electron beam toward the electron incident surface (X-ray generation surface) of the target 7C. In addition, the base end portion of the rod-shaped anode 7B becomes a high-voltage application portion 7G (power supply portion) that protrudes from the valve portion 7A. In addition, the X-ray tube 7 may be a transmission type X-ray tube. In this case, the electron gun is held by the valve portion 7A, and the high-voltage application portion (power supply portion) of the electron gun protrudes from the valve portion 7A. At this time, it is preferable that the target 7C is held by the target housing portion 7D.

[0030] The valve portion 7A and the target housing portion 7D are coaxially arranged, and the axis of the electron gun portion 7E is substantially orthogonal to these axes. Further, a mounting flange 7F for fixing to the front end surface of the metal cylindrical member 6 is formed between the valve portion 7A and the target housing portion 7D. In addition, as described above, the base end portion of the rod-shaped anode 7B protrudes downward from the center portion of the valve portion 7A as the high-voltage application portion 7G (see Figure 2 ).

[0031] In addition, an exhaust pipe (not shown) is attached to the X-ray tube 7. By evacuating the inside of the valve portion 7A, the target housing portion 7D, and the electron gun portion 7E via this exhaust pipe, a vacuum-sealed container is formed.

[0032] Such an X-ray tube 7 is configured to be fitted with a socket 2D of an insulating block 2A fixed to a power supply unit 2 at the lower end of a high-voltage application unit 7G (power supply unit), and receives high-voltage supply from a high-voltage generation unit 2B via a high-voltage line 2C. In addition, it is not limited to the socket 2D (voltage supply unit) and the high-voltage application unit 7G (power supply unit) being in direct contact through fitting or the like, and it may also be via further electrical connection components. Further, in this state, when an electron gun (not shown) built in the electron gun unit 7E emits an electron beam toward the electron incident surface of the target 7C, X-rays generated due to the incidence of the electron beam on the target 7C are emitted from an X-ray emission window 7H installed at the opening of the target housing unit 7D.

[0033] In the X-ray source 1 having the above structure, as Figure 2 shown, insulating oil 100 (liquid insulating material) impregnating the valve unit 7A is enclosed inside a metal cylinder member 6. The insulating oil 100 can be injected into the inside of the metal cylinder member 6 from the opening 6C, for example, at the assembly stage of the X-ray source 1.

[0034] Here, as Figure 3 in (a) and Figure 3 in (b) shown, uneven portions 10 having a height lower than that of the wall portion 2E (insulating wall) are formed on at least a part of each component in contact with the insulating oil 100. The uneven portions 10 have a structure in which concave shapes and convex shapes are continuously repeated periodically. The height of the wall portion 2E may be, for example, the length of the longest part in the vertical direction of the wall portion 2E. The height of the uneven portions 10 may be, for example, the length of the longest part of the convex shape. That is, in the X-ray source 1, uneven portions 10 having a convex shape with a length shorter than the length of the longest part in the vertical direction of the wall portion 2E are formed on at least a part of each component in contact with the insulating oil 100. Hereinafter, changes in the uneven portions 10 will be described. In addition, in Figure 3 in (a), Figure 3 in (b) and the following Figure 4 the arrows indicate the flow of heat.

[0035] As Figure 3As shown in (a) of [reference], the uneven portion 10 has a first uneven portion 11 provided on the outer peripheral surface of the valve portion 7A that contacts the insulating oil 100. The first uneven portion 11 has a side uneven portion 11a provided on the outer peripheral surface of the side surface of the valve portion 7A and a lower surface uneven portion 11b provided on the outer peripheral surface of the lower surface of the valve portion 7A. The side uneven portion 11a may be formed in substantially the entire area of the side surface of the valve portion 7A or may be formed in a partial area. The lower surface uneven portion 11b may be formed in substantially the entire area of the lower surface of the valve portion 7A or may be formed in a partial area. The side uneven portion 11a and the lower surface uneven portion 11b may be formed by machining the valve portion 7A (i.e., may also be a part of the valve portion 7A) or may be constituted by other components integrally provided with the valve portion 7A.

[0036] As Figure 3 shown in (a) of [reference], the uneven portion 10 has a second uneven portion 12 provided on the inner peripheral surface of the metal cylindrical member 6 that contacts the insulating oil 100. The second uneven portion 12 may be formed along the inner peripheral surface of the cylindrical metal cylindrical member 6 in substantially the entire area of the inner peripheral surface or may be formed in a partial area. The second uneven portion 12 may be formed by machining the metal cylindrical member 6 (i.e., may also be a part of the metal cylindrical member 6) or may be constituted by other components integrally provided with the metal cylindrical member 6.

[0037] As Figure 3 shown in (a) of [reference], the uneven portion 10 has a third uneven portion 13 provided on the upper surface of the insulating block 2A that contacts the insulating oil 100 at the bottom of the area constituting the housing of the valve portion 7A. The third uneven portion 13 is formed, for example, in substantially the central area of the upper surface of the insulating block 2A (an area closer to the inside than the metal cylindrical member 6). The third uneven portion 13 may be formed by machining the insulating block 2A (i.e., may also be a part of the insulating block 2A) or may be constituted by other components integrally provided with the insulating block 2A.

[0038] As Figure 3 shown in (b) of [reference], the uneven portion 10 has a fourth uneven portion 14 provided on the outer peripheral surface of the high-voltage application portion 7G (power supply portion) that contacts the insulating oil 100. The fourth uneven portion 14 may be formed in substantially the entire area of the side surface of the high-voltage application portion 7G or may be formed in a partial area. The fourth uneven portion 14 may be formed by machining the high-voltage application portion 7G or may be constituted by other components integrally provided with the high-voltage application portion 7G.

[0039] As Figure 3As shown in (b), the uneven portion 10 has a fifth uneven portion 15 provided on the outer peripheral surface of the socket 2D (high-voltage cup) fitted to the lower end of the high-voltage application portion 7G and in contact with the insulating oil 100. The fifth uneven portion 15 may be formed in substantially the entire area of the side surface of the socket 2D or may be formed in a partial area. The fifth uneven portion 15 may be formed by processing the socket 2D or may be constituted by other components provided integrally with the socket 2D.

[0040] Thus, as Figure 4 shown, by forming the uneven portion 10 at the interface between the tube sphere and the peripheral portion of the tube sphere (i.e., the valve portion 7A, the high-voltage application portion 7G, the socket 2D) and the insulating oil 100, and at the interface between the insulating oil 100 and the metal cylindrical member 6, the surface area at the interface can be increased and the heat conductivity at the interface can be improved.

[0041] In addition, as the shape of the uneven portion 10 (here, as an example, the side uneven portion 11a), as Figure 5 shown in (a), the corner portion of the convex portion may have sharp edges, and as Figure 5 shown in (b), the corner portion of the convex portion may be set to an R surface. By making the corner portion an R surface, the surface area of the interface with the insulating oil 100 can be increased, and the heat conductivity can be further improved.

[0042] In addition, as Figure 6 shown, the uneven shape (uneven pattern) of the second uneven portion 12 may also be formed in a spiral shape. According to such a structure, as Figure 7 shown, a spiral flow can be formed when the insulating oil 100 is injected, and defoaming can be easily performed.

[0043] Next, the effects of the X-ray source 1 of the present embodiment will be described.

[0044] The X-ray source 1 of the present embodiment includes: an X-ray tube 7 having a valve portion 7A that holds a target 7C and a high-voltage application portion 7G that protrudes from the valve portion 7A and is electrically connected to the target 7C; a power supply portion 2 having a high-voltage generation portion 2B molded in an insulating block 2A and supplying voltage to the X-ray tube 7, a socket 2D that supplies voltage to the high-voltage application portion 7G, and a wall portion 2E that surrounds the periphery of the socket 2D; and a metal cover 6 that houses the valve portion 7A and is filled with an insulating oil 100 that impregnates the valve portion 7A, and an uneven portion 10 having a height lower than that of the wall portion 2E is formed on at least a part of the member in contact with the insulating oil 100.

[0045] In such a structure, since uneven portions 10 smaller than the wall portion 2E are formed at the interface between the insulating oil 100 and the components, the heat conductivity can be improved in each of the insulating oil 100 and the components via the uneven portions 10. Thus, an X-ray source 1 can be provided that can improve the heat exchange efficiency between the insulating oil 100 and the components and can improve the cooling performance.

[0046] The uneven portion 10 may also have a first uneven portion 11 provided on the outer peripheral surface of the valve portion 7A that contacts the insulating oil 100. According to such a structure, the area of the interface between the valve portion 7A, which holds a structure with a large amount of heat generation such as the target 7C, and the insulating oil 100 can be increased, and the heat conductivity of this region can be improved. Thus, an X-ray source 1 can be provided that can improve the heat dissipation efficiency from the valve portion 7A to the insulating oil 100 and can further improve the cooling performance.

[0047] The uneven portion 10 may also have a second uneven portion 12 provided on the inner peripheral surface of the metal cylinder member 6 that contacts the insulating oil 100. According to such a structure, the area of the interface between the insulating oil 100 and the metal cylinder member 6 can be increased, and the heat conductivity of this region can be improved. Thus, an X-ray source 1 can be provided that can improve the heat dissipation efficiency from the insulating oil 100 to the metal cylinder member 6 and can further improve the cooling performance. In addition, since the metal cylinder member 6 can actively dissipate heat from the atmosphere side by air cooling or water cooling, etc., and the surface area can be made larger, the heat dissipation efficiency from the insulating oil 100 can be further improved.

[0048] As Figure 6 and Figure 7 shown, the second uneven portion 12 may also be formed in a spiral shape. According to such a structure, when the insulating oil 100 is injected, the flow of the insulating oil 100 can be easily formed along the spiral second uneven portion 12, and the ease of defoaming can be improved.

[0049] The uneven portion 10 may also have a third uneven portion 13 provided on the surface of the insulating block 2A that contacts the insulating oil 100. According to such a structure, the area of the interface between the insulating oil 100 and the insulating block 2A can be increased, and the heat conductivity of this region can be improved. Thus, an X-ray source 1 can be provided that can improve the heat dissipation efficiency from the power supply unit 2 to the insulating oil 100 and can further improve the cooling performance. In addition, since such a third uneven portion 13 can be formed using a mold during the molding of the insulating block 2A, it can be easily formed.

[0050] The uneven portion 10 may also have a fourth uneven portion 14 provided on the outer peripheral surface of the high-voltage application portion 7G that contacts the insulating oil 100. With such a structure, it is possible to increase the area of the interface between the high-voltage application portion 7G, which is electrically connected to a structure with a large amount of heat generation such as the target 7C, and the insulating oil 100, thereby improving the thermal conductivity of this region. As a result, it is possible to provide the X-ray source 1 that improves the heat dissipation efficiency from the high-voltage application portion 7G to the insulating oil 100 and further improves the cooling performance.

[0051] The uneven portion 10 may also have a fifth uneven portion 15 provided on the outer peripheral surface of the socket 2D that is fitted to the lower end of the high-voltage application portion 7G and contacts the insulating oil 100. With such a structure, it is possible to increase the area of the interface between the socket 2D that supplies voltage to the high-voltage application portion 7G that has become hot and the insulating oil 100, thereby improving the thermal conductivity of this region. As a result, it is possible to provide the X-ray source 1 that improves the heat dissipation efficiency from the socket 2D to the insulating oil 100 and further improves the cooling performance.

[0052] In the X-ray source 1, as Figure 5 shown, the corner portion of the convex portion in the uneven portion 10 (for example, the side uneven portion 11a) may also be set as an R surface. With such a structure, it is possible to further increase the area of the interface between the insulating oil 100 and the component, and it is possible to provide the X-ray source 1 that improves the heat exchange efficiency between the insulating oil 100 and the component by improving the thermal conductivity and further improves the cooling performance.

Claims

1. An X-ray source, wherein, comprises: an X-ray tube having a valve portion that holds at least one of a target and an electron gun, and a power supply portion that protrudes from the valve portion and is electrically connected to at least one of the target and the electron gun; a power supply unit having a voltage generation portion molded in an insulating block and supplying voltage to the X-ray tube, a voltage supply portion supplying the voltage to the power supply portion, and an insulating wall surrounding at least a part of the periphery of the voltage supply portion; and a metal cover that houses the valve portion and is filled with a liquid insulating material that impregnates the valve portion, wherein uneven portions having a height lower than that of the insulating wall are formed on at least a part of the member in contact with the liquid insulating material.

2. The X-ray source according to claim 1, wherein, the uneven portion has a first uneven portion provided on the outer peripheral surface of the valve portion in contact with the liquid insulating material.

3. The X-ray source according to claim 1, wherein, the uneven portion has a second uneven portion provided on the inner peripheral surface of the metal cover in contact with the liquid insulating material.

4. The X-ray source according to claim 3, wherein, the second uneven portion is formed in a spiral shape.

5. The X-ray source according to claim 1, wherein, the uneven portion has a third uneven portion provided on the surface of the power supply unit in contact with the liquid insulating material.

6. The X-ray source according to claim 1, wherein, the uneven portion has a fourth uneven portion provided on the outer peripheral surface of the power supply portion in contact with the liquid insulating material.

7. The X-ray source according to claim 1, wherein, the uneven portion has a fifth uneven portion provided on the outer peripheral surface of the voltage supply portion in contact with the liquid insulating material.

8. The X-ray source according to any one of claims 1 to 7, wherein, the corners of the convex portions in the uneven portions are provided as R surfaces.

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