Radiating water-cooling plate of radio frequency generator

Abstract

The utility model discloses a heat dissipation water cooling plate of a radio frequency generator, which comprises a cooling plate body, a cooling water channel is embedded in the cooling plate body, and the cooling water channel is arranged right below a power amplifier tube of the radio frequency generator; according to the heat dissipation water cooling plate for the radio frequency generator, the cooling water channel embedded in the cooling plate body is arranged under the power amplifier tube of the radio frequency generator, cooling water in the cooling water channel takes away heat generated by the power amplifier tube of the radio frequency generator when passing through the cooling water channel, so that the power amplifier tube of the radio frequency generator always works in an optimal temperature range, and the service life of the power amplifier tube of the radio frequency generator is prolonged. Heat accumulation caused by long-term work of the radio frequency generator power amplifier tube is avoided, and the situations that the service life of the radio frequency generator power amplifier tube is shortened and shutdown maintenance is needed after damage are avoided; the cooling plate body is made of 6061 aluminum, compared with a copper cooling plate body of a traditional radio frequency generator, the cooling plate body is lighter in weight, the aluminum cooling plate body is easier to machine, the machining cost is lower, the heat dissipation effect is better, and the heat dissipation requirement of the radio frequency generator is met.

Description

Technical Field

[0001] The utility model relates to the technical field of radio frequency generators, and particularly relates to a radio frequency generator water-cooling plate for heat dissipation. Background Art

[0002] In semiconductor FAB factories, there are strict requirements for radio frequency generators. Radio frequency generators are required to be used for wafer production at any time. Therefore, the importance of the cooling plate for radio frequency generators is also reflected.

[0003] In traditional radio frequency generators, the water channels in the cooling plate are only designed around the radio frequency power amplifier tubes. This method not only cannot take away the heat of the radio frequency power amplifier tubes in time, but also may cause the service life of the radio frequency power amplifier tubes to be greatly reduced due to heat generation during long-term use. Seriously, it may cause damage to the radio frequency power amplifier tubes and result in high maintenance costs. Summary of the Utility Model

[0004] In order to solve the defects existing in the prior art, the utility model provides a radio frequency generator water-cooling plate for heat dissipation.

[0005] In order to solve the above technical problems, the utility model provides the following technical solutions:

[0006] A radio frequency generator water-cooling plate for heat dissipation of the utility model includes a cooling plate body, and a cooling water channel is embedded in the cooling plate body. The cooling water channel is arranged directly below the power amplifier tube of the radio frequency generator.

[0007] Preferably, a water inlet and a water outlet communicated with the cooling water channel are arranged on one side surface of the cooling plate body.

[0008] Preferably, at least two installation and fixing holes are opened on each of the three side surfaces of the cooling plate body.

[0009] Preferably, the material of the cooling plate body is aluminum.

[0010] Preferably, the cooling water channel includes a first connection section, a heat dissipation section and a second connection section which are connected in sequence. The first connection section is connected with the water inlet, the second connection section is connected with the water outlet, and the heat dissipation section is of a continuous bending type.

[0011] The beneficial effects of the utility model are:

[0012] 1. The water-cooled heat dissipation plate of this radio frequency generator has the cooling water channels embedded in the cooling plate body directly below the power amplifier tube of the radio frequency generator. When the cooling water inside the cooling water channels passes by, it takes away the heat generated by the power amplifier tube of the radio frequency generator, enabling the power amplifier tube of the radio frequency generator to always operate within the optimal temperature range. This avoids the accumulation of heat during the long-term operation of the power amplifier tube of the radio frequency generator, prevents the reduction of the service life of the power amplifier tube of the radio frequency generator, and avoids situations such as damage and the need for shutdown for maintenance.

[0013] 2. The water-cooled heat dissipation plate of this radio frequency generator is made of 6061 aluminum for the cooling plate body. Compared with the copper cooling plate body of traditional radio frequency generators, it is lighter in weight. The aluminum cooling plate body is easier to process, has lower processing costs, and better heat dissipation effects, meeting the heat dissipation requirements of the radio frequency generator. Brief Description of the Drawings

[0014] The drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation to the present invention. In the drawings:

[0015] Figure 1 is the top view of the present invention;

[0016] Figure 2 is the left view of the present invention;

[0017] Figure 3 is the right view of the present invention;

[0018] Figure 4 is the top view of the present invention.

[0019] Figure 5 is the top view of the connection between the cooling plate body and the power amplifier tube of the present invention;

[0020] Figure 6 is the schematic structural diagram of the connection between the cooling plate body and the power amplifier tube of the present invention;

[0021] In the figures: 1, cooling plate body; 2, cooling water channel; 21, first connection section; 22, heat dissipation section; 23, second connection section; 3, water inlet port; 4, water outlet port; 5, installation and fixing hole; 6, power amplifier tube. Detailed Description of the Embodiments

[0022] The following is a description of the preferred embodiments of the present invention with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention and are not used to limit the present invention.

[0023] Embodiment: As Figures 1-4, a water-cooled heat dissipation plate for a radio frequency generator of the present utility model. There is a power amplifier tube 6 on the radio frequency generator. The water-cooled heat dissipation plate includes a cooling plate body 1. The setting of the cooling plate body 1 can effectively help the core components of the radio frequency generator (such as radio frequency power MOS tubes, DC power tubes, DC power transformers, PCB substrates, etc.) to dissipate heat effectively and well, ensuring the stable operation of the core components of the radio frequency generator in a good working environment. A cooling water channel 2 is embedded inside the cooling plate body 1. After the cooling water channel 2 of the cooling plate body 1 is connected to cooling water, the cooling water sequentially passes through the cooling water channel 2 under heat-generating devices such as a rectifier bridge, a PFC inductor, a DC power module, a DC power transformer, a radio frequency power amplifier tube, a radio frequency power board, and a radio frequency power combining module, taking away the generated heat and enabling each device to work in the best state. The cooling water channel 2 is arranged directly below the power amplifier tube 6 of the radio frequency generator and other heat-generating components. By arranging the cooling water channel 2 embedded in the cooling plate body 1 directly below the power amplifier tube 6 of the radio frequency generator, when the cooling water inside the cooling water channel 2 passes through, it takes away the heat generated by the power amplifier tube 6 of the radio frequency generator, allowing the power amplifier tube 6 of the radio frequency generator to always work within the best temperature range, avoiding the accumulation of heat due to the long-term operation of the power amplifier tube 6 of the radio frequency generator, preventing the reduction of the service life of the power amplifier tube 6 of the radio frequency generator, and even avoiding the situation where the radio frequency generator is damaged and needs to be shut down for repair, and avoiding the situation of high repair costs required for repair.

[0024] Among them, a water inlet port 3 and a water outlet port 4 communicating with the cooling water channel 2 are provided on one side of the cooling plate body 1. The water inlet port 3 and the water outlet port 4 can be set without distinction, and it is determined according to the connection situation of the connected inlet and outlet water pipes with the water inlet port 3 and the water outlet port 4.

[0025] Among them, at least two mounting and fixing holes 5 are provided on each of three sides of the cooling plate body 1, and the cooling plate body 1 can be fixedly installed by using bolts.

[0026] Among them, the material of the cooling plate body 1 is 6061 aluminum. By using 6061 aluminum for the cooling plate body 1, compared with the copper cooling plate body 1 of traditional radio frequency generators, it is lighter in weight, easier to process, lower in processing cost, and better in heat dissipation effect, meeting the heat dissipation requirements of the radio frequency generator.

[0027] As Figure 1 shown, the cooling water channel 2 includes a first connection section 21, a heat dissipation section 22, and a second connection section 23 that are sequentially connected. The first connection section 21 is connected to the water inlet port 3, the second connection section 23 is connected to the water outlet port 4, and the heat dissipation section 22 is of a continuous bending type, increasing the heat dissipation area by adding multiple bends.

[0028] During operation, for the radiator water-cooled plate of this kind of radio frequency generator, by arranging the cooling water channel 2 embedded in the cooling plate body 1 directly below the power amplifier tube 6 of the radio frequency generator, when the cooling water inside the cooling water channel 2 passes through, it takes away the heat generated by the power amplifier tube 6 of the radio frequency generator, enabling the power amplifier tube 6 of the radio frequency generator to always work within the optimal temperature range, avoiding the accumulation of heat caused by the long-term operation of the power amplifier tube of the radio frequency generator, and preventing the reduction of the service life of the power amplifier tube of the radio frequency generator and situations such as damage that require shutdown for maintenance.

[0029] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing embodiments or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A radio frequency generator heat dissipation water-cooled plate, characterized in that It includes a cooling plate body (1), and a cooling water channel (2) is embedded inside the cooling plate body (1). The cooling water channel (2) is arranged directly below the power amplifier tube (6) of the radio frequency generator.

2. The water-cooled plate for dissipating heat of a radio frequency generator according to claim 1, wherein One side of the cooling plate body (1) is provided with a water inlet (3) and a water outlet (4) that are connected to the cooling water channel (2).

3. The water-cooled plate for dissipating heat of a radio frequency generator according to claim 1, wherein, At least two mounting and fixing holes (5) are provided on each of the three sides of the cooling plate body (1).

4. The water-cooled plate for dissipating heat of the radio frequency generator according to claim 1, wherein The cooling plate body (1) is made of 6061 aluminum.

5. The water-cooling plate for dissipating heat of a radio frequency generator according to claim 2, characterized in that The cooling water channel (2) includes a first connection section (21), a heat dissipation section (22), and a second connection section (23) that are connected in sequence. The first connection section (21) is connected to the water inlet (3), and the second connection section (23) is connected to the water outlet (4). The heat dissipation section (22) is of a continuous bending type.

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