Adjustable roller coating device
By adjusting the horizontal movement and angle adjustment of the coating roller device, the problem of uneven distribution of the coating film on the surface of the silicon wafer is solved, the full utilization of the coating and the improvement of coating quality are achieved, and the production efficiency and product quality are improved.
Patent Information
- Application Number
- CN202422233709.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-12
- Publication Date
- 2025-07-25
- Estimated Expiration
- 2034-09-12
AI Technical Summary
Existing roller coating equipment cannot make the coating material evenly distributed on the surface of the silicon wafer, making it difficult to control the coating thickness, resulting in coating accumulation or unevenness, affecting production efficiency and product quality.
The adjustable coating roller device is adopted, including horizontal movement and angle adjustment devices. The dual coating roller movement is driven by the horizontal movement device. The angle adjustment device adjusts the coating roller angle to ensure uniformity of the coating, and adjusts the coating layer thickness through the scraper to accurately control the layer thickness and reduce defects such as bubbles.
Make full use of coatings to reduce waste, improve coating uniformity, reduce edge effects, accurately control layer thickness, reduce bubbles and other defects, improve coating quality, reduce rework, and improve production efficiency.
Smart Images
Figure CN223145102U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of silicon wafer processing, and particularly relates to an adjustable coating roller device. Background Art
[0002] In the field of semiconductor manufacturing, in order to prevent silicon wafers from being damaged during the manufacturing process, prevent particles and chemical contaminants from adhering to the surface of the silicon wafers, and avoid affecting the performance of the devices, it is necessary to roll coat and laminate the silicon wafers. At the same time, the coating film can be used as an insulating material to isolate different conductive layers, can control the reflectivity of the silicon wafers, improve the lithography accuracy and quality, and improve the surface characteristics of the silicon wafers. The quality of the roll coating and lamination directly affects the electrical performance of the final product. The existing roll coating equipment cannot evenly distribute the coating material on the entire surface of the silicon wafer, is difficult to control the coating thickness, resulting in coating accumulation or unevenness, causing rework, affecting production efficiency, and affecting product quality.
[0003] Therefore, the above problems need to be solved urgently. Summary of the Utility Model
[0004] Purpose of the utility model: In order to overcome the above deficiencies, the utility model provides an adjustable coating roller device, which makes full use of the coating on the coating roller, reduces the waste of the coating, saves production costs, improves the coating uniformity, reduces the edge effect, reduces the accumulation of the coating at the edge of the silicon wafer, accurately controls the layer thickness, reduces defects such as bubbles, improves the coating quality, reduces rework, and improves production efficiency.
[0005] Technical solution: In order to achieve the above purpose, the utility model provides an adjustable coating roller device, which includes a roller frame, a double coating roller is arranged on the upper side of the roller frame, and the roller frame and the double coating roller are connected by an adjusting device. The adjusting device includes a horizontal moving device and an angle adjusting device. The horizontal moving device is connected to the top surface of the roller frame, and the angle adjusting device is drivingly connected to the top surface of the horizontal moving device. The double coating roller is connected to the top surface of the angle adjusting device through supporting plates on both sides, and the double coating roller shaft is movably connected to the supporting plates. The double coating roller is drivingly connected with a rotation driving device, and the rotation driving device drives the double coating roller to rotate. During the coating process of the silicon wafer, the length of the coating roller is greater than the width of the silicon wafer, and only a part of the coating on the coating roller can be used, resulting in waste of the coating. The horizontal moving device of this device drives the double coating roller to move to one side. First, the coating at one end of the double coating roller is used to coat the silicon wafer, and then the horizontal moving device drives the double coating roller to move, gradually using the unused part of the double coating roller for coating, making full use of the coating on the double coating roller, reducing the waste of the coating, saving production costs, and improving processing efficiency. The angle adjusting device drives the double coating roller to rotate, and the double coating roller is in a specific angular state for coating work. It gradually covers and coats from one corner of the silicon wafer, and the double coating roller exits from the opposite corner of the silicon wafer, improving the coating uniformity, reducing the edge effect, reducing the accumulation of the coating at the edge of the silicon wafer, accurately controlling the layer thickness, reducing defects such as bubbles, improving the coating quality, reducing rework, and improving production efficiency.
[0006] Furthermore, in the above adjustable coating roller device, the horizontal movement device includes a linear guide rail connected to the top surface of the roller frame. A horizontal support plate is provided above the linear guide rail, and the horizontal support plate and the linear guide rail are slidably connected through a slider. A horizontal driving device is connected to the top surface of the roller frame. The above horizontal driving device is drivingly connected to the horizontal support plate, and the horizontal driving device drives the horizontal support plate to slide along the linear guide rail. The horizontal driving device is preferably a servo motor and a lead screw provided on the top surface of the roller frame. The servo motor drives the lead screw to rotate, and the lead screw drives the horizontal support plate to slide along the linear guide rail.
[0007] Furthermore, in the above adjustable coating roller device, the angle adjustment device includes an arc guide rail connected to the top surface of the horizontal support plate. An angle adjustment bottom plate is provided above the arc guide rail, and the angle adjustment bottom plate is slidably connected to the arc guide rail through a slider. The horizontal support plate is provided with an arc driving device. The above arc driving device is drivingly connected to the angle adjustment bottom plate, and the arc driving device drives the angle adjustment bottom plate to slide along the arc guide rail. The arc driving device is preferably a gear and an arc rack. The gear shaft is connected to the bottom surface of the angle adjustment bottom plate, and the arc rack is connected to the top surface of the horizontal support plate. The gear and the arc rack are meshed. The arc of the arc rack corresponds to the arc guide rail. The gear is drivingly connected to a servo motor, and the servo motor drives the gear to rotate. The gear moves along the arc rack, and further the gear drives the angle adjustment bottom plate to move along the arc rack to adjust the angle of the double coating roller.
[0008] Furthermore, in the above adjustable coating roller device, the rotation driving device includes a gear box coupled to the double coating roller. The gear box is drivingly connected to a driving motor, and the driving motor drives the gear box to rotate, and the gear box drives the double coating roller to rotate.
[0009] Furthermore, in the above adjustable coating roller device, a scraper is provided between the two support plates. The scraper is connected to a scraper shaft, and both ends of the scraper shaft are movably connected to the support plates by shafts. The scraper shaft is arranged parallel to the double coating roller. One end of the scraper shaft is provided with a scraper driving device. The above scraper driving device includes a scraper gear box, and the scraper gear box is drivingly connected to a motor, and the above motor is a servo motor. The motor drives the scraper gear box to rotate, and the scraper gear box drives the scraper to rotate through the scraper shaft. The scraper abuts against the double coating roller. The scraper removes excessive coating on the surface of the double coating roller, adjusts the thickness of the coating layer on the double coating roller, controls the film thickness, makes the coating evenly distributed on the surface of the double coating roller, prevents coating unevenness phenomena such as streaks, bubbles or particles, and improves the flatness of the coating film.
[0010] Furthermore, in the above adjustable coating roller device, the double coating roller includes a fixed coating roller and a movable coating roller. Both ends of the fixed coating roller are movably connected to the support plates by shafts. The movable coating roller is slidably connected to the support plates. Scrapers are respectively provided on the fixed coating roller and the movable coating roller. By adjusting the gap between the movable coating roller and the fixed coating roller, the coating thickness can be accurately controlled. The movable coating roller can eliminate defects caused by the fixed coating roller, improve the coating film quality, and improve the coating efficiency.
[0011] Furthermore, in the above adjustable coating roller device, the two ends of the movable coating roller are movably connected to the sliding blocks, and the support plate is connected with limiting blocks. There are two limiting blocks, and the two limiting blocks are arranged in parallel. The sliding blocks are slidably connected between the two limiting blocks, and the sliding blocks slide along the limiting blocks.
[0012] Furthermore, in the above adjustable coating roller device, the sliding blocks are connected with a coating roller adjusting device. The coating roller adjusting device includes two coating roller adjusting gearboxes, which are respectively arranged at both ends of the movable coating roller. The coating roller adjusting gearboxes are coupled with lead screws, and the lead screws are drivingly connected to the bushings provided on the sliding blocks. The two coating roller adjusting gearboxes are connected by shaft keys, and the coating roller adjusting gearboxes are drivingly connected with a motor. The motor drives the coating roller adjusting gearboxes, and the two coating roller adjusting gearboxes rotate synchronously through the shaft key connection. The lead screws rotate, and the sliding blocks at both ends of the movable coating roller move synchronously, precisely controlling the gap between the fixed coating roller and the movable coating roller, and avoiding the deviation of the fixed coating roller and the movable coating roller.
[0013] Furthermore, in the above adjustable coating roller device, a recovery bin is provided at one end of the double coating roller. The recovery bin is connected to the support plate and is arranged close to the double coating roller. The recovery bin can recover the excess coating and reduce the waste of coating.
[0014] Furthermore, in the above adjustable coating roller device, the top surface of the roller frame is connected with a machine shell, and the double coating roller is arranged inside the machine shell. The coating is completed in the machine shell, avoiding the influence of pollutants such as dust and oil stains on the coating, and improving the coating quality.
[0015] As can be seen from the above technical solutions, the present utility model has the following beneficial effects: The adjustable coating roller device of the present utility model makes full use of the coating on the double coating roller, reduces the waste of coating, saves the production cost, and improves the processing efficiency. The double coating roller is in a specific angular state for coating work, gradually covering the coating from one corner of the silicon wafer and exiting from the opposite corner, improving the coating uniformity, reducing the edge effect, reducing the accumulation of coating at the edge of the silicon wafer, precisely controlling the coating thickness, reducing defects such as bubbles, improving the coating quality, reducing rework, and providing the production efficiency. By adjusting the gap between the movable coating roller and the fixed coating roller, the coating thickness can be accurately controlled. The second coating roller can eliminate the defects caused by the first coating roller, improve the coating film quality, and improve the coating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 is a schematic structural diagram of the adjustable coating roller device of the present utility model;
[0017] Figure 2 is Figure 1 the partial perspective view shown;
[0018] Figure 3 is a schematic structural diagram of the arc-shaped guide rail;
[0019] Figure 4 It is a schematic structural diagram of the coating roller adjusting device.
[0020] In the figure: 1. Roller frame, 2. Double coating roller, 21. Support plate, 22. Rotation driving device, 221. Gearbox, 222. Driving motor, 231. Scraper, 232. Scraper shaft, 233. Scraper gearbox, 24. Fixed coating roller, 25. Movable coating roller, 251. Sliding block, 252. Limit block, 261. Coating roller adjusting gearbox, 262. Lead screw, 31. Horizontal moving device, 311. Linear guide rail, 312. Horizontal support plate, 32. Angle adjusting device, 321. Arc guide rail, 322. Angle adjusting bottom plate, 4. Machine shell, 5. Recycling bin. Specific embodiments
[0021] Embodiment 1
[0022] As Figure 1 shown, an adjustable coating roller device includes a roller frame 1. A double coating roller 2 is provided on the upper side of the roller frame 1. The roller frame 1 and the double coating roller 2 are connected by an adjusting device. The above-mentioned adjusting device includes a horizontal moving device 31 and an angle adjusting device 32. The horizontal moving device 31 is connected to the top surface of the roller frame 1. The angle adjusting device 32 is drivingly connected to the top surface of the horizontal moving device 31. The double coating roller 2 is connected to the top surface of the angle adjusting device 32 through support plates 21 on both sides. The double coating roller 2 is movably connected to the support plates 21 through its shaft. The double coating roller 2 is drivingly connected to a rotation driving device 22, and the rotation driving device 22 drives the double coating roller 2 to rotate. During the coating process of the silicon wafer, the length of the coating roller is greater than the width of the silicon wafer, and only a part of the coating on the coating roller can be used, resulting in waste of the coating. The horizontal moving device 31 of this device drives the double coating roller 2 to move to one side. First, the coating at one end of the double coating roller 2 is used to coat the silicon wafer. Then, the horizontal moving device 31 drives the double coating roller 2 to move, and the unused part of the double coating roller 2 is used for coating, making full use of the coating on the double coating roller 2. The angle adjusting device 32 drives the double coating roller 2 to rotate, and the double coating roller 2 is in a specific angular state for coating work, gradually covering from one corner of the silicon wafer, and the double coating roller 2 exits from the opposite corner of the silicon wafer. The adjustable coating roller device includes a machine shell 4, and the machine shell 4 is connected to the top surface of the roller frame 1. The double coating roller 2 is arranged inside the machine shell 4.
[0023] As Figures 2-3The adjustable coating roller device shown, the horizontal movement device 31 includes a linear guide rail 311 connected to the top surface of the roller frame 1. A horizontal support plate 312 is provided on the upper side of the linear guide rail 311. The horizontal support plate 312 and the linear guide rail 311 are slidably connected through a slider. A horizontal driving device is connected to the top surface of the roller frame 1. The above horizontal driving device is drivingly connected to the horizontal support plate 312. The above horizontal driving device drives the horizontal support plate 312 to slide along the linear guide rail 311. The horizontal driving device is preferably a servo motor and a lead screw provided on the top surface of the roller frame 1. The servo motor drives the lead screw to rotate, and the lead screw drives the horizontal support plate 312 to slide along the linear guide rail 311. The angle adjustment device 32 includes an arc guide rail 321 connected to the top surface of the horizontal support plate 312. An angle adjustment bottom plate 322 is provided on the upper side of the arc guide rail 321. The angle adjustment bottom plate 322 is slidably connected to the arc guide rail 321 through a slider. The horizontal support plate 312 is provided with an arc driving device. The above arc driving device is drivingly connected to the angle adjustment bottom plate 322. The above arc driving device drives the angle adjustment bottom plate 322 to slide along the arc guide rail 321. The arc driving device is preferably a gear and an arc rack. The gear shaft is connected to the bottom surface of the angle adjustment bottom plate 322. The arc rack is connected to the top surface of the horizontal support plate 312. The radian of the arc rack corresponds to that of the arc guide rail 321. The gear is drivingly connected to a servo motor. The servo motor drives the gear to rotate. The gear moves along the arc rack. Furthermore, the gear drives the angle adjustment bottom plate 322 to move along the arc rack to adjust the angle of the double coating roller 2. The rotation driving device 22 includes a gear box 221 coupled to the double coating roller 2. The gear box 221 is drivingly connected to a driving motor 222. The driving motor 222 drives the gear box 221 to rotate, and the gear box 221 drives the double coating roller 2 to rotate. A scraper 231 is provided between the two support plates 21. The scraper 231 is connected to a scraper shaft 232. The two ends of the scraper shaft 232 are rotatably connected to the support plates 21. The scraper shaft 232 is arranged parallel to the double coating roller 2. One end of the scraper shaft 232 is provided with a scraper driving device. The above scraper driving device includes a scraper gear box 233. The scraper gear box 233 is drivingly connected to a motor. The above motor is a servo motor. The motor drives the scraper gear box 233 to rotate. The scraper gear box 233 drives the scraper 231 to rotate through the scraper shaft 232. The scraper 231 abuts against the double coating roller 2. The scraper 231 removes excessive coating on the surface of the double coating roller 2, adjusts the thickness of the coating layer on the double coating roller 2, controls the coating film thickness, makes the coating evenly distributed on the surface of the double coating roller 2, prevents coating unevenness phenomena such as streaks, bubbles or particles, and improves the flatness of the coating film.
[0024] As Figure 4The adjustable coating roller device shown, the double coating roller 2 includes a fixed coating roller 24 and a movable coating roller 25. The two ends of the fixed coating roller 24 are axially movably connected to the support plate 21. The movable coating roller 25 is slidably connected to the support plate 21. Scrapers 231 are respectively provided on the fixed coating roller 24 and the movable coating roller 25. By adjusting the gap between the movable coating roller 25 and the fixed coating roller 24, the coating thickness can be accurately controlled. The second coating roller can eliminate the defects caused by the first coating roller, improve the coating film quality, and improve the coating efficiency. The two ends of the movable coating roller 25 are axially movably connected to the sliding blocks 251. The support plate 21 is connected with two limit blocks 252. The two limit blocks 252 are arranged in parallel. The sliding blocks 251 are slidably connected between the two limit blocks 252, and the sliding blocks 251 slide along the limit blocks 252. The sliding blocks 251 are connected with a coating roller adjusting device. The above-mentioned coating roller adjusting device includes two coating roller adjusting gearboxes 261. The coating roller adjusting gearboxes 261 are respectively arranged at both ends of the movable coating roller 25. The coating roller adjusting gearboxes 261 are coupled with lead screws 262, and the lead screws 262 are drivingly connected to the bushings provided on the sliding blocks 251. The two coating roller adjusting gearboxes 261 are connected by shaft keys, and the coating roller adjusting gearboxes 261 are drivingly connected with a motor. The motor drives the coating roller adjusting gearboxes 261, and the two coating roller adjusting gearboxes 261 rotate synchronously through shaft key connection. The lead screws 262 rotate, and the sliding blocks 251 at both ends of the movable coating roller 25 move synchronously, accurately controlling the gap between the fixed coating roller 24 and the movable coating roller 25, and preventing the fixed coating roller 24 and the movable coating roller 25 from shifting. One end of the double coating roller 2 is provided with a recovery bin 5. The recovery bin 5 is connected to the support plate 21 and is arranged close to the double coating roller 2. The recovery bin 5 recovers the excess coating material.
[0025] The above embodiments are exemplary. The purpose is to illustrate the technical concept and characteristics of the present invention so that those skilled in this field can understand the content of the present invention and implement it accordingly. It should not be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit and essence of the present invention should be covered within the protection scope of the present invention.
Claims
1. An adjustable coating roller device, characterized in that: It includes a roller frame (1), on the upper side of which there is a double coating roller (2). The roller frame (1) and the double coating roller (2) are connected by an adjusting device. The adjusting device includes a horizontal moving device (31) and an angle adjusting device (32). The horizontal moving device (31) is connected to the top surface of the roller frame (1), and the angle adjusting device (32) is drivingly connected to the top surface of the horizontal moving device (31). The double coating roller (2) is connected to the top surface of the angle adjusting device (32) through support plates (21) on both sides, and the double coating roller (2) is rotatably connected to the support plates (21). The double coating roller (2) is drivingly connected to a rotation driving device (22), and the rotation driving device (22) drives the double coating roller (2) to rotate.
2. The adjustable coating roller device according to claim 1, characterized in that: The horizontal moving device (31) includes a linear guide rail (311) connected to the top surface of the roller frame (1). On the upper side of the linear guide rail (311), there is a horizontal support plate (312). The horizontal support plate (312) and the linear guide rail (311) are slidably connected through a slider. A horizontal driving device is connected to the top surface of the roller frame (1). The horizontal driving device is drivingly connected to the horizontal support plate (312), and the horizontal driving device drives the horizontal support plate (312) to slide along the linear guide rail (311).
3. The adjustable coating roller device according to claim 1, characterized in that: The angle adjusting device (32) includes an arc guide rail (321) connected to the top surface of the horizontal support plate (312). On the upper side of the arc guide rail (321), there is an angle adjusting bottom plate (322). The angle adjusting bottom plate (322) is slidably connected to the arc guide rail (321) through a slider. The horizontal support plate (312) is provided with an arc driving device. The arc driving device is drivingly connected to the angle adjusting bottom plate (322), and the arc driving device drives the angle adjusting bottom plate (322) to slide along the arc guide rail (321).
4. The adjustable coating roller device according to claim 1, wherein: The rotation driving device (22) includes a gear box (221) coupled to the double coating roller (2). The gear box (221) is drivingly connected to a driving motor (222). The driving motor (222) drives the gear box (221) to rotate, and the gear box (221) drives the double coating roller (2) to rotate.
5. The adjustable coating roller device according to claim 1, wherein: There is a scraper (231) between the two support plates (21). The scraper (231) is connected to a scraper shaft (232). The two ends of the scraper shaft (232) are rotatably connected to the support plates (21). The scraper shaft (232) is arranged parallel to the double coating roller (2). One end of the scraper shaft (232) is provided with a scraper driving device. The scraper driving device includes a scraper gear box (233), and the scraper gear box (233) is drivingly connected to a motor.
6. The adjustable coating roller device according to claim 1, wherein: The double coating roller (2) includes a fixed coating roller (24) and a moving coating roller (25). The two ends of the fixed coating roller (24) are rotatably connected to the support plates (21). The moving coating roller (25) is slidably connected to the support plates (21).
7. The adjustable coating roller device according to claim 6, wherein: Both ends of the moving coating roller (25) are movably connected to the sliding blocks (251). The support plate (21) is connected with limit blocks (252). There are two limit blocks (252), and the two limit blocks (252) are arranged in parallel. The sliding block (251) is slidably connected between the two limit blocks (252), and the sliding block (251) slides along the limit blocks (252).
8. The adjustable coating roller device according to claim 7, characterized in that: The sliding block (251) is connected with a coating roller adjusting device. The coating roller adjusting device includes coating roller adjusting gearboxes (261). There are two coating roller adjusting gearboxes (261), and the coating roller adjusting gearboxes (261) are respectively arranged at both ends of the moving coating roller (25). The coating roller adjusting gearboxes (261) are coupled to lead screws (262), and the lead screws (262) are drivingly connected to the bushings provided on the sliding block (251). The two coating roller adjusting gearboxes (261) are connected by shaft keys, and the coating roller adjusting gearboxes (261) are drivingly connected to a motor.
9. The adjustable coating roller device according to claim 1, characterized in that: One end of the double coating roller (2) is provided with a recovery bin (5). The recovery bin (5) is connected to the support plate (21), and the recovery bin (5) is arranged close to the double coating roller (2).
10. The adjustable coating roller device according to claim 1, characterized in that: The top surface of the roller frame (1) is connected with a machine housing (4), and the double coating roller (2) is arranged in the machine housing (4).