Vacuum evaporation system

Abstract

The vacuum evaporation system comprises a sliding way, an evaporation mechanism and a first driving mechanism, the evaporation mechanism is located below the first end of the sliding way or located obliquely below the first end of the sliding way, and the evaporation mechanism and the sliding way are sequentially arranged in the extending direction of the sliding way; the first driving mechanism comprises a clamp and a first driving piece, and the first driving piece can drive the clamp to reciprocate along the slide way; and / or, the first driving mechanism comprises a pushing piece and a first driving piece, and the first driving piece can drive the pushing piece to reciprocate along the slide way. During application, the first end of the bar exceeds the sliding groove and extends to the position above an evaporation mechanism of the vacuum evaporation system, and when the first end of the bar is gradually melted, the first driving mechanism drives the bar to slide in the extending direction of the sliding groove. And after a new bar is replaced, the first driving mechanism reciprocates to drive the bar to slide in the extending direction of the sliding groove again, so that the intermittent time of feeding the bar can be shortened, and the production efficiency and the product yield are improved.

Description

Technical Field

[0001] The present application relates to the field of vacuum evaporation technology, and in particular to a vacuum evaporation system. Background Art

[0002] Solar cells are now being used more and more widely as a new energy alternative. Among them, photovoltaic solar cells are devices that convert sunlight into electrical energy. Specifically, solar cells use the photovoltaic principle to generate carriers, and then use electrodes to lead the carriers out, thereby facilitating the effective use of electrical energy.

[0003] In the manufacturing process of solar cells, vacuum evaporation process is generally used to form various functional layers, conductive layers, electrode layers, etc. of solar cells. However, vacuum evaporation process has high requirements on the continuity of feeding. If the interruption time of feeding is too long, it will affect the efficiency of vacuum evaporation process and the yield of products. Utility Model Content

[0004] The purpose of the present application is to provide a vacuum evaporation system to reduce the interruption time of feeding rod materials and improve production efficiency and product yield.

[0005] In order to achieve the above objectives, this application provides the following technical solutions:

[0006] A vacuum evaporation system, comprising:

[0007] A slideway, the slideway having a slide groove capable of accommodating the bar material;

[0008] An evaporation mechanism, the evaporation mechanism is located below the first end of the slide, or the evaporation mechanism is located obliquely below the first end of the slide, and the evaporation mechanism and the slide are arranged in sequence in the extension direction of the slide;

[0009] A first driving mechanism, the first driving mechanism can drive the bar to move along the slideway;

[0010] The first driving mechanism includes a clamp and a first driving member, the clamp can clamp the rod in the slide groove, and the first driving member can drive the clamp to reciprocate along the slide; and / or, the first driving mechanism includes a pushing member and a first driving member, the pushing member can support one end of the rod in the slide groove, and the first driving member can drive the pushing member to reciprocate along the slide.

[0011] When applying the above vacuum evaporation system, first place the rod stock in the chute of the slideway, and then use the first driving mechanism to drive the rod stock in the chute to slide along the extension direction of the chute, so that the first end of the rod stock extends beyond the chute and reaches above the evaporation mechanism of the vacuum evaporation system. The first end of the rod stock gradually melts during the high-temperature heating process and falls into the evaporation mechanism. In this way, while the first end of the rod stock is gradually melting, the first driving mechanism gradually drives the rod stock to slide along the extension direction of the chute, so that the first end of the rod stock is always located above the evaporation mechanism, realizing feeding the evaporation mechanism. When the rod stock melts to a short length, a new rod stock can be replaced, and the first driving mechanism reciprocates to drive the rod stock in the chute to slide along the extension direction of the chute again. In this way, the first driving mechanism reciprocates, which can reduce the interruption time of feeding the rod stock, thereby improving the production efficiency and the yield of the product.

[0012] In one implementation, the first driving mechanism includes a clamp and a first driving member; the clamp includes a first clamping portion, a second clamping portion and a clamping driving member, and the clamping driving member can drive the first clamping portion and the second clamping portion to approach or separate from each other;

[0013] The first clamping portion and the second clamping portion are arranged opposite to each other in the horizontal direction, and the notch of the clamping groove formed between the first clamping portion and the second clamping portion is arranged downward. When the first clamping portion and the second clamping portion move away from each other, the rod stock falls by its own gravity, which is more convenient for discarding waste materials; or, the first clamping portion and the second clamping portion are arranged opposite to each other in the vertical direction, and a clamping groove is formed between the first clamping portion and the second clamping portion. The vacuum evaporation system further includes a ejector rod and an ejector rod driving member, and the ejector rod can push the rod stock to move along the clamping groove. In this way, when the rod stock is short, the first driving member drives the clamp to move reversely to the third position. At this time, the clamp and the waste are located above the tail stock box, and then the ejector rod driving member drives the ejector rod to push the rod stock clamped by the clamp to move, so that the short rod stock is separated from the clamping groove, facilitating the discard of waste materials.

[0014] In one implementation, the slideway includes a plurality of sub-slideways arranged in sequence along its extension direction, and there is a gap between adjacent sub-slideways. With such a setting, when the rod stock is short and waste materials need to be discarded, the first driving member can drive the clamp or the ejector to move to the gap position between adjacent sub-slideways, so that the waste materials can fall from the gap between adjacent sub-slideways, increasing the positions where waste materials can be discarded and increasing the capacity of the tail stock box.

[0015] In one implementation, among a plurality of sub-slides, there are a first sub-slide and a second sub-slide, and both the first sub-slide and the second sub-slide are conductive slides; the vacuum evaporation system further includes a signal detection controller, and the signal detection controller is electrically connected to the first sub-slide and the second sub-slide through high-temperature resistant cables. During the process that the first sub-slide and the second sub-slide jointly support the bar stock, an electrical circuit is formed by the signal detection controller, the first sub-slide, the bar stock, and the second sub-slide. With this technical solution, the signal detection controller only needs to receive the electrical signals output by the slide supporting the bar stock, and can realize the induction detection of the bar stock without signal conversion, improving the detection efficiency; in addition, the signal detection controller has a simple structure, is convenient to install, has a low cost, and is arranged outside the vacuum chamber, so it will not be affected by high-temperature conditions.

[0016] In one implementation, the vacuum evaporation system further includes a tail stock box;

[0017] The tail stock box is arranged below the first end of the slide; or, the tail stock box is arranged below the second end of the slide; or, the slide includes a plurality of sub-slides arranged in sequence along its extending direction, and the tail stock box is arranged below the gap between adjacent sub-slides to facilitate discarding waste materials.

[0018] In one implementation, the vacuum evaporation system further includes a heating device, and the heating device is arranged on the upper side, lower side, side, and / or circumferentially around the slide. With this technical solution, the bar stock can be fully utilized, waste of shorter bar stock can be avoided, the production cost is reduced, and the continuous production time is increased.

[0019] In one implementation, the heating device includes an electromagnetic coil, a resistance heating element, an ultrasonic welding element, a laser welding element, and / or a high-frequency welding element. The above various heating devices have a simple structure and a low cost.

[0020] In one implementation, the vacuum evaporation system further includes a second driving mechanism, and the second driving mechanism is arranged on the upper side, lower side, and / or side of the slide. The second driving mechanism can drive the slide to reciprocate along its extending direction. After the first driving mechanism drives the bar stock to gradually move from the first position to the second position, the second driving mechanism drives the slide to move towards the evaporation mechanism. In this way, the bar stock and the first driving mechanism can be closer to the evaporation mechanism, so that the waste material is shorter, it is more conducive to fully utilizing the bar stock, and at the same time, the collection frequency of the tail stock is reduced, and the bar feeding efficiency is improved.

[0021] In one implementation, the cross-section of the chute of the slide is V-shaped, square, trapezoidal or arc-shaped; and / or, the slide includes a plurality of support members, and the support members include vertical rods and support rods fixed to the tops of the vertical rods, and the support rods are bent to form chutes. The contact area between the bar stock and the support members is small, reducing the friction of the bar stock.

[0022] In one implementation, the slideway includes a plurality of support members. Each support member includes a vertical rod and a support rod fixed to the top of the vertical rod. The support rod is bent to form a chute.

[0023] The vacuum evaporation system further includes a first rotation driving member for driving the vertical rod to rotate along the horizontal axis. When the fixture or the pushing member passes by the support member, the first rotation driving member drives the support member to rotate to an inclined position to avoid blocking the passage of the fixture or the pushing member.

[0024] In one implementation, the vacuum evaporation system further includes a blocking member disposed on the sidewall of the slideway and a second rotation driving member for driving the blocking member to rotate around the horizontal axis. When the fixture or the pushing member passes by the blocking member, the second rotation driving member drives the blocking member to rotate to an inclined position to avoid blocking the passage of the fixture or the pushing member and enable the fixture or the pushing member to pass through smoothly.

[0025] In one implementation, rollers are provided on the top of the blocking member; and / or, a first limiting portion and a second limiting portion are further provided on the blocking member. The first limiting portion is provided on the top of the blocking member, and the second limiting portion is provided on the bottom of the blocking member. The blocking member can rotate until its first limiting portion or second limiting portion abuts against the slideway. The blocking member can rotate clockwise until its first limiting portion abuts against the slideway, or can rotate reversely until its second limiting portion abuts against the slideway to prevent over-rotation during the process of the second rotation driving member driving the blocking member to rotate. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The schematic embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation to the present application. In the drawings:

[0027] Figure 1 is a schematic diagram of a vacuum evaporation system provided by an embodiment of the present application;

[0028] Figure 2 is Figure 1 a schematic diagram of the fixture driving the bar stock to move to the second position in ;

[0029] Figure 3 is Figure 1 a schematic diagram of the fixture discarding waste in ;

[0030] Figure 4 is Figure 1 a schematic diagram after the slideway moves in a direction away from the evaporation mechanism in ;

[0031] Figure 5 is a schematic diagram of a vacuum evaporation system provided by another embodiment of the present application;

[0032] Figure 6 is Figure 5 a schematic diagram of the fixture discarding waste in ;

[0033] Figure 7 Schematic diagram of a fixture provided by an embodiment of the present application;

[0034] Figure 8 Schematic diagram of another fixture provided by an embodiment of the present application;

[0035] Figure 9 Schematic diagram of a vacuum evaporation system provided by another embodiment of the present application;

[0036] Figure 10 For Figure 9 Schematic diagram of the waste discarded by the fixture in

[0037] Figure 11 Schematic diagram of a vacuum evaporation system provided by another embodiment of the present application;

[0038] Figure 12 For Figure 11 Schematic diagram of the waste discarded by the fixture in

[0039] Figure 13 Schematic diagram of a vacuum evaporation system provided by another embodiment of the present application;

[0040] Figure 14 For Figure 13 Schematic diagram of the pusher pushing the bar stock to move in

[0041] Figure 15 For Figure 13 Schematic diagram of the waste discarded by the pusher in

[0042] Figure 16 Schematic diagram of a platform provided on one side of the slideway close to the evaporation mechanism in an embodiment of the present application;

[0043] Figure 17 Schematic diagram of a pusher provided by an embodiment of the present application;

[0044] Figure 18 Schematic diagram of another pusher provided by an embodiment of the present application;

[0045] Figure 19 Schematic diagram of multiple sub-slideways provided by an embodiment of the present application;

[0046] Figure 20 Schematic diagram of a vacuum evaporation system provided by another embodiment of the present application;

[0047] Figure 21 Schematic diagram of a vacuum evaporation system provided by another embodiment of the present application;

[0048] Figure 22Schematic diagram of a vacuum evaporation system provided by another embodiment of the present application;

[0049] Figure 23 Schematic diagram of a vacuum evaporation system provided by another embodiment of the present application;

[0050] Figure 24 Schematic diagram of a vacuum evaporation system provided by another embodiment of the present application;

[0051] Figure 25 Schematic diagram of a vacuum evaporation system provided by another embodiment of the present application;

[0052] Figure 26 Schematic diagram of a support member provided by an embodiment of the present application;

[0053] Figure 27 Schematic diagram of a slideway and a blocking member provided by an embodiment of the present application;

[0054] Figure 28 Schematic diagram of a slideway and a blocking member provided by another embodiment of the present application;

[0055] Figure 29 Schematic diagram of a slideway and a blocking member provided by another embodiment of the present application;

[0056] Figure 30 Schematic diagram of a slideway and a blocking member provided by another embodiment of the present application;

[0057] Figure 31 Schematic diagram of a slideway and a blocking member provided by another embodiment of the present application.

[0058] Reference numerals:

[0059] 1 - clamp, 1a - first clamping portion, 1b - second clamping portion, 1c - elastic member, 2 - slideway, 2a - first sub-slideway, 2b - second sub-slideway, 2c - support member, 2d - chute, 3 - bar stock, 4 - tail stock box, 5 - evaporation mechanism, 6 - ejector rod, 7 - ejecting member, 8 - platform, 9 - second driving mechanism, 10 - heating device, 11 - blocking member, 11a - first limiting portion, 11b - second limiting portion, 11c - roller, 12 - baffle. Detailed implementation manners

[0060] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application clearer and more understandable, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0061] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0062] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present application, the meaning of "a plurality" is two or more unless otherwise specifically defined. The meaning of "several" is one or more unless otherwise specifically defined.

[0063] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation on the present application.

[0064] In the description of the present application, it should be noted that unless otherwise clearly specified and defined, the terms "mounted", "connected", and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0065] When forming various functional layers, conductive layers, and electrode layers of a solar cell by a vacuum evaporation process, the vacuum evaporation process has relatively high requirements for the continuity of material feeding. The commonly used materials in the vacuum evaporation process are generally filamentous materials, liquid materials, rod materials, etc. Among them, the rod material 3 has a stable structure and is not easily bent or deformed, and does not need to be refilled frequently. Therefore, a device for feeding the rod material 3 is provided in the present application.

[0066] Such as Figures 1 to 6As shown in the figure, the vacuum evaporation system provided by the embodiment of the present application includes a slideway 2, an evaporation mechanism 5 and a first driving mechanism. Among them, the slideway 2 has a chute 2d capable of accommodating the rod material 3. The rod material 3 can be placed in the chute 2d, and the inner wall of the chute 2d restricts the rolling of the rod material 3, playing a limiting role on the rod material 3. The first driving mechanism can drive the rod material 3 to move along the slideway 2, that is, the first driving mechanism can drive the rod material 3 in the chute 2d to slide along the extending direction of the chute 2d.

[0067] The evaporation mechanism 5 may include a crucible and a heating component. The heating component can be arranged around the crucible to heat the material inside the crucible. The heating component can be set according to the application environment. For example, it can be an electron gun, an induction heating device or a resistance wire heating device, etc. The present application does not limit this. The evaporation mechanism 5 can be located below the first end of the slideway 2, or the evaporation mechanism 5 is located obliquely below the first end of the slideway 2, and the evaporation mechanism 5 and the slideway 2 are arranged in sequence in the extending direction of the slideway 2. If the first end of the slideway 2 is the front end and the second end of the slideway 2 is the rear end, in this solution, the evaporation mechanism 5 is located below the front of the slideway 2 to prevent the material from adhering to the first end of the slideway 2 and affecting the normal use and service life of the slideway 2.

[0068] When applying the above vacuum evaporation system, first place the rod material 3 in the chute 2d of the slideway 2, and then use the first driving mechanism to drive the rod material 3 in the chute 2d to slide along the extending direction of the chute 2d, so that the first end of the rod material 3 extends beyond the chute 2d and reaches above the evaporation mechanism 5 of the vacuum evaporation system. The first end of the rod material 3 gradually melts during the high-temperature heating process and falls into the evaporation mechanism 5. In this way, while the first end of the rod material 3 is gradually melting, the first driving mechanism gradually drives the rod material 3 to slide along the extending direction of the chute 2d, so that the first end of the rod material 3 is always located above the evaporation mechanism 5, realizing feeding into the evaporation mechanism 5. When the rod material 3 melts to a short length, a new rod material 3 can be replaced, and the first driving mechanism reciprocates to drive the rod material 3 in the chute 2d to slide along the extending direction of the chute 2d again. In this way, the first driving mechanism reciprocates, which can reduce the interruption time of feeding the rod material 3, make the interruption time of feeding the rod material 3 less than 5 minutes, thereby improving the production efficiency and the yield of the product.

[0069] Among them, the cross-section of the rod material 3 can be circular, oval, polygonal, etc. The polygon can be a triangle, a square, a regular pentagon, etc. In addition, the length of the rod material 3 can be 5 mm to 3000 mm, the outer diameter of the rod material 3 can be 2 mm to 30 mm, and the material of the rod material 3 can include one or more of aluminum, copper, nickel, tin, silver, titanium, chromium, iron, silicon, germanium, quartz, etc. Specifically, it can include alloys, compounds, mixtures, etc. of any of the above materials.

[0070] Such as 2 to Figure 3As shown in the figure, the first driving mechanism includes a fixture 1 and a first driving member. The fixture 1 can clamp the bar stock 3 in the chute 2d, and the first driving member can drive the fixture 1 to reciprocate along the slideway 2. Specifically, the first driving member drives the fixture 1 and the bar stock 3 clamped by the fixture 1 to gradually move from the first position to the second position. During the moving process, the first end of the bar stock 3 is always located above the evaporation mechanism 5 and gradually melts. As Figure 3 shown in the figure, when the bar stock 3 is short, for example, when the length of the bar stock 3 is shortened to 5 mm to 200 mm, the first driving member drives the fixture 1 and the bar stock 3 clamped by the fixture 1 to move to the second position. At this time, the shorter bar stock 3 can be discarded, and the first driving member drives the fixture 1 to move in the reverse direction to the first position, clamps a new bar stock 3, and feeds the material into the evaporation mechanism 5 again. Among them, the speed at which the first driving member drives the fixture 1 and the bar stock 3 to move can be 0.1 mm / s to 20 mm / s. With this technical solution, the first driving member is used to drive the fixture 1 to reciprocate between the first position and the second position, thereby reducing the interruption time of feeding the bar stock 3.

[0071] As Figure 7 and Figure 8 shown in the figure, the fixture 1 can include a first clamping portion 1a, a second clamping portion 1b, and a clamping driving member. The clamping driving member can drive the first clamping portion 1a and the second clamping portion 1b to approach or separate from each other. Specifically, when the first clamping portion 1a and the second clamping portion 1b approach each other, they can clamp the bar stock 3 located between the first clamping portion 1a and the second clamping portion 1b. When the first clamping portion 1a and the second clamping portion 1b separate from each other, the bar stock 3 can be released to facilitate discarding the bar stock 3. The clamping driving member can drive only the first clamping portion 1a to move, or only the second clamping portion 1b to move, or can also drive both the first clamping portion 1a and the second clamping portion 1b to move simultaneously. The clamping driving member can include an electromagnetic driver, a stepper motor, a motor, an electric motor, etc.

[0072] As Figure 7 shown in the figure, the first clamping portion 1a and the second clamping portion 1b can be arranged oppositely in the horizontal direction, and the notch of the clamping groove formed between the first clamping portion 1a and the second clamping portion 1b is arranged downward. In this way, when the clamping driving member drives the first clamping portion 1a and / or the second clamping portion 1b to move horizontally, the first clamping portion 1a and the second clamping portion 1b can approach or separate from each other. The notch of the clamping groove formed between the first clamping portion 1a and the second clamping portion 1b is arranged downward. When the first clamping portion 1a and the second clamping portion 1b separate from each other, the bar stock 3 falls by its own gravity, which is more convenient for discarding waste materials.

[0073] In another embodiment, as Figure 8As shown, the first clamping portion 1a and the second clamping portion 1b can also be arranged opposite to each other in the vertical direction, and a clamping groove is formed between the first clamping portion 1a and the second clamping portion 1b. In this way, when the clamping driving member drives the first clamping portion 1a and / or the second clamping portion 1b to move vertically, the first clamping portion 1a and the second clamping portion 1b can be brought closer to or away from each other. In this technical solution, as Figure 9 and Figure 10 shown, the device for feeding the bar stock 3 further includes a ejector rod 6 and an ejector rod driving member. The ejector rod 6 can push the bar stock 3 to move along the clamping groove. In this way, when the bar stock 3 is short, the first driving member drives the fixture 1 to move in the reverse direction to the third position. At this time, the fixture 1 and the waste material are located above the tail stock box 4, and then the ejector rod driving member drives the ejector rod to push the bar stock 3 clamped by the fixture 1 to move, so that the short bar stock 3 is separated from the clamping groove, facilitating the discarding of the waste material.

[0074] In addition, as Figure 7 and Figure 8 shown, the inner walls of the first clamping portion 1a and the second clamping portion 1b can be V-shaped walls to facilitate clamping with the outer wall of the bar stock 3. Of course, the inner walls of the first clamping portion 1a and the second clamping portion 1b can also be arc-shaped walls or any other shape.

[0075] In order to clamp the bar stock 3 more firmly, a flexible layer can also be provided on the inner walls of the first clamping portion 1a and the second clamping portion 1b; or, elastic members 1c can be provided on the inner walls of the first clamping portion 1a and the second clamping portion 1b. The flexible layer or the elastic members 1c are in contact with the outer wall of the bar stock 3, which can play a buffering role, increase the contact area, make the clamping of the bar stock 3 more firm, and at the same time prevent damage to the outer wall of the bar stock 3. Among them, the elastic members 1c can include flexible wire meshes, springs, metal or other material sheets, etc., and the flexible layer can include silica gel layers, rubber layers, Teflon layers, acetal layers, polyethylene layers, polyurethane layers, etc.

[0076] It can be understood that when the fixture 1 clamps the bar stock 3 and moves in the chute 2d of the slideway 2, the gap between the outer wall of the fixture 1 and the inner wall of the chute 2d can be 3 mm to 7 mm, specifically 3 mm, 4 mm, 5 mm, 6 mm or 7 mm, so as to avoid excessive friction between the fixture 1 and the chute 2d and damage the fixture 1 or the slideway 2.

[0077] In view of the high temperature in the vacuum chamber, the material of the slideway 2 can be selected as a high-temperature resistant material, such as ceramics, metals, etc. Among them, the metals can include stainless steel, aluminum alloy, titanium alloy, etc.

[0078] In another embodiment, as Figures 13 to 15As shown in the figure, the first driving mechanism includes a pushing member 7 and a first driving member. The pushing member 7 can abut against one end of the bar stock 3 in the chute 2d, and the first driving member can drive the pushing member 7 to reciprocate along the slideway 2. Specifically, the first driving member drives the pushing member 7 to push the bar stock 3 in the chute 2d to move from the first position to the second position. During the movement, the first end of the bar stock 3 is always located above the evaporation mechanism 5 and gradually melts. As Figure 15 shown in the figure, when the bar stock 3 is short, for example, when the length of the bar stock 3 is shortened to 5 mm to 200 mm, the first driving member drives the pushing member 7 and the bar stock 3 to move to the second position. At this time, the short bar stock 3 can be discarded. The first driving member drives the pushing member 7 to move reversely to the first position, pushes a new bar stock 3, and feeds the material into the evaporation mechanism 5 again. By adopting this technical solution, the first driving member drives the pushing member 7 to reciprocate between the first position and the second position, reducing the intermittent time of feeding the bar stock 3. In this technical solution, there is no need to set a clamping driving member, which simplifies the structure, reduces the cost, and can avoid the failure problems caused by the overheating of the clamping driving member itself.

[0079] In the above technical solution, as Figure 17 shown in the figure, the pushing member 7 can include a push rod, and the push rod is inserted into the chute 2d to push the bar stock 3 to move. Or, as Figure 18 shown in the figure, the pushing member 7 can include a push plate, and the push plate abuts against the bar stock 3 to push the bar stock 3 to move.

[0080] As Figure 11 and Figure 12 shown in the figure, the slideway 2 can include a plurality of sub-slideways arranged in sequence along its extending direction, and there is a gap between adjacent sub-slideways. With such a setting, when the bar stock 3 is short and waste needs to be discarded, the first driving member can drive the fixture 1 or the pushing member 7 to move to the gap position between adjacent sub-slideways, so that the waste can fall from the gap between adjacent sub-slideways, increasing the position where waste can be discarded and the capacity of the tail stock box 4.

[0081] The device for feeding the bar stock 3 further includes a tail stock box 4, and the tail stock box 4 is used to receive the dropped waste. Specifically, as Figure 1 shown in the figure, the tail stock box 4 can be arranged below the first end of the slideway 2, and the first end of the slideway 2 is close to the evaporation mechanism 5. In this way, after the first driving member drives the fixture 1 or the pushing member 7 to move to the second position, the bar stock 3 is short. After the first driving member drives the fixture 1 or the pushing member 7 to continue to move above the tail stock box 4, the waste can be discarded.

[0082] Or, as Figure 5 and Figure 6As shown, the tailstock box 4 can be located below one side of the second end of the slideway 2 that is away from the evaporation mechanism 5. In this way, after the first driving member drives the clamp 1 to move to the second position, when the bar stock 3 is short, the first driving member drives the clamp 1 to move in the reverse direction to the third position. At this time, the clamp 1 and the waste are located above the tailstock box 4, and the waste can be discarded.

[0083] Alternatively, as Figure 10 shown, the tailstock box 4 can also be arranged below the second end of the slideway 2, and the second end of the slideway 2 is arranged away from the evaporation mechanism 5. In this way, after the first driving member drives the clamp 1 to move to the second position, when the bar stock 3 is short, the first driving member drives the clamp 1 to move in the reverse direction to the third position. At this time, the clamp 1 and the waste are located above the tailstock box 4, and the waste can be discarded. With this technical solution, the distance between the first end of the slideway 2 and the evaporation mechanism 5 can be relatively short, which is beneficial to the full utilization of the bar stock 3 and more cost-saving.

[0084] Alternatively, as Figure 11 and Figure 12 shown, the slideway 2 can include a plurality of sub-slideways 2 arranged in sequence along its extending direction, and there is a gap between adjacent sub-slideways. The tailstock box 4 is arranged below the gap between adjacent sub-slideways. In this way, the first driving member can drive the clamp 1 or the pushing member 7 to move to the position of the gap between adjacent sub-slideways, so that the waste can fall from the gap between adjacent sub-slideways, increasing the positions where the waste can be discarded and increasing the capacity of the tailstock box 4.

[0085] As Figure 16 shown, a platform 8 can also be arranged at one end of the slideway 2. The platform 8 is located above the tailstock box 4, and there is no obstruction around the platform 8, which is more conducive to the waste rolling down from the platform 8. In addition, the platform 8 and the slideway 2 can be hinged, and a telescopic support member is arranged between the bottom of the platform 8 and the slideway 2. When the platform 8 is needed to support the bar stock 3, the telescopic support member extends to support the platform 8, so that the platform 8 maintains a horizontal state to support the bar stock 3. When the waste needs to be discarded, the telescopic support member contracts, and the platform 8 rotates to a vertical state, facilitating the waste on the platform 8 to fall. The platform 8 and the slideway 2 can be hinged through a hinge or a hinge.

[0086] In a specific embodiment, among the multiple sub-slides, there are a first sub-slide 2a and a second sub-slide 2b, and the device for feeding the bar stock 3 further includes a signal detection controller. Among them, both the first sub-slide 2a and the second sub-slide 2b are conductive slides. The first sub-slide 2a and the second sub-slide 2b can both be made of conductive metal, that is, electrical signals can pass through the first sub-slide 2a and the second sub-slide 2b. The first sub-slide 2a and the second sub-slide 2b are insulated from each other, and both the first sub-slide 2a and the second sub-slide 2b are insulated from the bottom surface. The signal detection controller is electrically connected to both the first sub-slide 2a and the second sub-slide 2b through high-temperature resistant cables. The high-temperature resistant cables can be copper wires, etc. The signal detection controller can be arranged outside the vacuum chamber. The signal detection controller is used to input an electrical limit signal to the first sub-slide 2a and is used to receive the electrical signal output by the second sub-slide 2b. The first sub-slide 2a and the second sub-slide 2b can be adjacent or not adjacent. In addition, the number of the first sub-slides 2a can be one or more, and the number of the second sub-slides 2b can be one or more.

[0087] During the process that the first sub-slide 2a and the second sub-slide 2b jointly support the bar stock 3, the signal detection controller, the first sub-slide 2a, the bar stock 3, and the second sub-slide 2b form an electrical circuit. Specifically, turn on the signal detection controller to input an electrical signal to the first sub-slide 2a. After the bar stock 3 is conveyed in the slide, due to the conductive property of the bar stock 3, an electrical circuit is formed among the first sub-slide 2a, the bar stock 3, the second sub-slide 2b, and the signal detection controller. The current flows from the first sub-slide 2a to the bar stock 3, then from the bar stock 3 to the second sub-slide 2b, and finally is received by the signal detection controller. After that, the signal detection controller confirms the approximate position of the bar stock 3 according to the electrical signal from the second sub-slide 2b, and controls other components to perform subsequent operations on the bar stock 3 according to the position of the bar stock 3.

[0088] Based on the above structure, the signal detection controller only needs to receive the electrical signal output by the slide carrying the bar stock 3 to realize the induction detection of the bar stock 3, without signal conversion, which improves the detection efficiency; in addition, the signal detection controller has a simple structure, is convenient to install, has a low cost, and is arranged outside the vacuum chamber, so it will not be affected by high-temperature conditions.

[0089] As Figure 20 shown, the second end of the shorter bar stock 3 and the first end of the new bar stock 3 can be fusion-bonded at the bonding position to make full use of the bar stock 3. Based on this, as Figures 21 to 25As shown, the vacuum evaporation system further includes a heating device 10, and the heating device 10 can heat the end of the bar stock 3 in the chute 2d. In this technical solution, the first driving mechanism drives the bar stock 3 to gradually move from the first position to the second position. When the bar stock 3 is short, the first driving mechanism drives the short bar stock 3 to move to the joining position, and then the first driving mechanism drives the new bar stock 3 to also move to the joining position, so that the second end of the short bar stock 3 contacts the first end of the new bar stock 3. After that, the heating device 10 heats the second end of the short bar stock 3 and the first end of the new bar stock 3, so that the second end of the short bar stock 3 and the first end of the new bar stock 3 are heated and fused together. By adopting this technical solution, the bar stock 3 can be fully utilized, the waste of short bar stock 3 can be avoided, the production cost is reduced, and the continuous production time is increased.

[0090] In the above technical solution, the heating device 10 can be arranged on the upper side, lower side, below, or side of the slideway 2; or the heating device 10 can also be arranged around the slideway 2. In this case, when heating the end of the bar stock 3, it is more uniform, which is beneficial to the heating and fusion joining of the second end of the short bar stock 3 and the first end of the new bar stock 3.

[0091] As Figure 21 shown, when the slideway 2 includes a plurality of sub-slideways, the heating device 10 can be located in the gap between two sub-slideways. The sub-slideway cannot pass through the heating device 10, and the bar stock 3 can pass through the heating device 10. As Figure 24 shown, the heating device 10 can be located in the gap between two sub-slideways, and both the sub-slideway and the bar stock 3 can pass through the heating device 10. In this way, the second driving mechanism 9 can drive the slideway 2 to pass through the heating device 10. As Figure 22 and Figure 23 shown, when there is one slideway 2, the slideway 2 can move through the heating device 10.

[0092] In addition, the heating device 10 can include an electromagnetic coil, a resistance heating element, an ultrasonic welding element, a laser welding element, and / or a high-frequency welding element, etc. When the heating device 10 is an electromagnetic coil or a resistance heating element, the heating device 10 can be annular, U-shaped, or flat.

[0093] In another embodiment, as Figure 19 shown, the device for feeding the bar stock 3 further includes a second driving mechanism 9, and the second driving mechanism 9 can drive the slideway 2 to reciprocate along its extending direction. The second driving mechanism 9 can be arranged on the upper side, lower side, and / or side of the slideway 2, and the slideway 2 can be fixedly connected to the output end of the second driving mechanism 9. As Figure 3 and Figure 4 shown, after the first driving mechanism drives the bar stock 3 to move to the second position, the second driving mechanism 9 drives the slideway 2 to move away from the evaporation mechanism 5, which is convenient for the fixture 1 to discard the waste. In addition, as Figure 13As shown, after the first driving mechanism drives the bar stock 3 to gradually move from the first position to the second position, the second driving mechanism 9 drives the slideway 2 to move in the direction close to the evaporation mechanism 5. In this way, the bar stock 3 and the first driving mechanism can be closer to the evaporation mechanism 5, so that the waste material is shorter, which is more conducive to making full use of the bar stock 3. At the same time, the collection frequency of the tail stock is reduced, and the bar feeding efficiency is improved.

[0094] When the slideway 2 can move along its extending direction, when the length of the bar stock 3 is relatively long, the evaporation mechanism 5 is located below and in front of the first end of the slideway 2 to prevent the material from adhering to the first end of the slideway 2; when the bar stock 3 is relatively short, the evaporation mechanism 5 can be located below the first end of the slideway 2 to facilitate the full melting of the bar stock 3 and make full use of the bar stock 3.

[0095] In the above technical solution, when the slideway 2 includes a plurality of sub-slideways, the second driving mechanism 9 can only drive the sub-slideway closest to the evaporation mechanism 5 to move.

[0096] The cross-section of the chute 2d of the slideway 2 can be V-shaped, square, trapezoidal or arc-shaped. Such a structure is simple and convenient for processing and manufacturing.

[0097] Or, as Figure 26 shown, the slideway 2 includes a plurality of support members 2c, and the plurality of support members 2c are arranged in sequence along the extending direction of the slideway 2. The support member 2c includes a vertical rod and a support rod fixed to the top of the vertical rod. The support rod is bent to form the chute 2d. It can be understood that the support rod can be bent to form a chute 2d of any shape such as V-shaped, square, trapezoidal, etc. In this way, the first driving mechanism drives the bar stock 3 to move along the plurality of support members 2c in sequence. The contact area between the bar stock 3 and the support member 2c is small, reducing the friction of the bar stock 3. The support member 2c can be Y-shaped. In this way, when the clamp 1 or the pushing member 7 drives the bar stock 3 to move on the Y-shaped support member, the friction is smaller and it is not easy to roll off the Y-shaped support member.

[0098] In the above technical solution, the vacuum evaporation system further includes a first rotation driving member for driving the vertical rod to rotate along the horizontal axis. When the clamp 1 or the pushing member 7 passes through the support member 2c, the first rotation driving member drives the support member 2c to rotate to an inclined state to avoid blocking the passage of the clamp 1 or the pushing member 7.

[0099] As Figures 27 to 31As shown, in order to prevent the bar stock 3 from rolling off the slideway 2 due to inertia during the loading process, the vacuum evaporation coating system further includes a blocking member 11 provided on the side wall of the slideway 2. The top end of the blocking member 11 can be set higher than the slideway 2 to block the bar stock 3. In this technical solution, the vacuum evaporation coating system further includes a second rotation driving member for driving the blocking member 11 to rotate around a horizontal axis. When the fixture 1 or the pushing member 7 passes by the blocking member 11, the second rotation driving member drives the blocking member 11 to rotate to an inclined position to avoid blocking the passage of the fixture 1 or the pushing member 7, so that the fixture 1 or the pushing member 7 can pass through smoothly.

[0100] In the above technical solution, as Figure 30 shown, a roller 11c is provided at the top of the blocking member 11. Such a setting can reduce the friction between the fixture 1 and the blocking member 11 when the fixture 1 slides across the blocking member 11, enabling the fixture 1 to pass through more smoothly.

[0101] The blocking member 11 is further provided with a first limiting portion 11a and a second limiting portion 11b. The blocking member 11 can rotate to make its first limiting portion 11a or second limiting portion 11b abut against the slideway 2. Specifically, the first limiting portion 11a is provided at the top of the blocking member 11, and the second limiting portion 11b is provided at the bottom of the blocking member 11. In this way, the blocking member 11 can rotate clockwise to make the first limiting portion 11a abut against the slideway 2, or can rotate in the reverse direction to make the second limiting portion 11b abut against the slideway 2, so as to prevent the blocking member 11 from rotating too far during the process of being driven by the second rotation driving member. As Figure 29 and Figure 30 shown, the first limiting portion 11a and the second limiting portion 11b can be arc-shaped surfaces to reduce friction.

[0102] As Figure 31 shown, a baffle 12 can also be provided on one side of the slideway 2. The baffle 12 and the blocking member 11 are respectively located on both sides of the slideway 2 to prevent the bar stock 3 from rolling off from the other side of the slideway 2.

[0103] The above-mentioned vacuum evaporation coating system includes but is not limited to a thermal evaporation coating system, an electron beam evaporation coating system, an induction evaporation coating system, etc.

[0104] In the description of the above embodiments, the specific features, structures, materials or characteristics can be combined in a suitable manner in any one or more embodiments or examples.

[0105] The above is only the specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present application, and all should be covered by the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claimed rights.

Claims

1. A vacuum evaporation system, characterized in that, Comprising: A slideway, the slideway having a chute capable of accommodating a bar stock; An evaporation mechanism, the evaporation mechanism being located below the first end of the slideway, or the evaporation mechanism being located obliquely below the first end of the slideway, and the evaporation mechanism and the slideway being arranged in sequence in the extending direction of the slideway; A first driving mechanism, the first driving mechanism being capable of driving the bar stock to move along the slideway; The first driving mechanism includes a fixture and a first driving member, the fixture being capable of clamping the bar stock in the chute, and the first driving member being capable of driving the fixture to reciprocate along the slideway; And / or, the first driving mechanism includes a pushing member and a first driving member, the pushing member being capable of abutting against one end of the bar stock in the chute, and the first driving member being capable of driving the pushing member to reciprocate along the slideway.

2. The vacuum evaporation system according to claim 1, wherein The first driving mechanism includes a fixture and a first driving member; The fixture includes a first clamping portion, a second clamping portion and a clamping driving member, the clamping driving member being capable of driving the first clamping portion and the second clamping portion to approach or separate from each other; The first clamping portion and the second clamping portion are oppositely arranged in the horizontal direction, and the notch of the clamping groove formed between the first clamping portion and the second clamping portion is arranged downward; Or, the first clamping portion and the second clamping portion are oppositely arranged in the vertical direction, a clamping groove is formed between the first clamping portion and the second clamping portion, and the vacuum evaporation coating system further includes a push rod and a push rod driving member, the push rod being capable of pushing the bar stock to move along the clamping groove.

3. The vacuum evaporation system according to claim 1, wherein, The slideway includes a plurality of sub-slideways arranged in sequence along its extending direction, and there is a gap between adjacent sub-slideways.

4. The vacuum evaporation system according to claim 3, wherein Among the plurality of sub-slideways, there are a first sub-slideway and a second sub-slideway, and both the first sub-slideway and the second sub-slideway are conductive slideways; The vacuum evaporation coating system further includes a signal detection controller, the signal detection controller is electrically connected to both the first sub-slideway and the second sub-slideway through high-temperature resistant cables, and during the process that the first sub-slideway and the second sub-slideway jointly support the bar stock, an electrical circuit is formed by the signal detection controller, the first sub-slideway, the bar stock and the second sub-slideway.

5. The vacuum evaporation system according to any one of claims 1 to 4, characterized in that, The vacuum evaporation coating system further includes a tail stock box; The tail stock box is arranged below the first end of the slideway; or, the tail stock box is arranged below the second end of the slideway; or, the slideway includes a plurality of sub-slideways arranged in sequence along its extending direction, and the tail stock box is arranged below the gap between adjacent sub-slideways.

6. The vacuum evaporation system according to any one of claims 1 to 4, characterized in that, The vacuum evaporation coating system further includes a heating device, the heating device is arranged on the upper side, lower side, side of the slideway and / or circumferentially surrounds the slideway; 7. The vacuum evaporation system according to claim 1, wherein The vacuum evaporation coating system further includes a second driving mechanism, the second driving mechanism is arranged on the upper side, lower side and / or side of the slideway, and the second driving mechanism is capable of driving the slideway to reciprocate along its extending direction; 8. The vacuum evaporation system according to claim 1, wherein The cross-section of the chute of the slideway is V-shaped, square, trapezoidal or arc-shaped; And / or, the slideway includes a plurality of support members, the support members include vertical rods and support rods fixed to the tops of the vertical rods, the support rods are bent to form the chute, and the vacuum evaporation coating system further includes a first rotation driving member for driving the vertical rods to rotate along a horizontal axis.

9. The vacuum evaporation system according to claim 1, characterized in that, The vacuum evaporation coating system further includes a blocking member disposed on the side wall of the slideway and a second rotation driving member for driving the blocking member to rotate about a horizontal axis.

10. The vacuum evaporation system according to claim 9, wherein, Rollers are provided at the top of the blocking member; and / or, a first limiting portion and a second limiting portion are further provided on the blocking member, the first limiting portion is provided at the top of the blocking member, the second limiting portion is provided at the bottom of the blocking member, and the blocking member can rotate until its first limiting portion or the second limiting portion abuts against the slideway.

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