Anode layer ion source

Abstract

The utility model discloses an anode layer ion source, which comprises a base and an anode, the top surface of the base sinks inwards to form a first accommodating cavity, the anode is arranged in the first accommodating cavity, the base is provided with an air guide channel, two ends of the air guide channel respectively penetrate through the top surface and the bottom surface of the base, and the air guide channel is arranged in the first accommodating cavity. The air guide channel is arranged around the first containing cavity and located on the outer side of the first containing cavity. The gas guide channel is arranged around the outer side of the first accommodating cavity, and the anode is arranged in the first accommodating cavity, so that compared with the prior art in which the working gas is introduced from the bottom of the anode, the contact area between the working gas and the anode can be greatly reduced, and the pollution of the working gas to the anode can be greatly reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of ion source assisted coating, and particularly relates to an anode layer ion source. Background Art

[0002] An ion source is a device that generates and accelerates ions. Its working principle is to generate plasma (the plasma consists of electrons, ions, and neutral particles) by gas discharge, and the plasma is extracted from the discharge chamber to form a high-energy ion beam. According to different gas ionization methods, it can be divided into RF ion sources, Hall ion sources, anode layer ion sources, DC ion sources, etc.

[0003] The anode layer ion source is one of the commonly used components in vacuum coating equipment. It is mainly used for cleaning workpieces on a large scale to improve the energy distribution of the surface of the workpiece to be coated, modulate and increase the energy of the reaction gas, improve the bonding strength between the film and the substrate, and the hardness, wear resistance, and corrosion resistance of the film itself.

[0004] In the existing anode layer ion source, the working gas is mainly introduced from the bottom of the anode. Such an air inlet mode will result in a relatively large contact area between the working gas and the anode, thereby increasing the pollution of the working gas to the anode.

[0005] In view of the above deficiencies, it is necessary to design a new anode layer ion source to overcome the above deficiencies. Summary of the Utility Model

[0006] Therefore, the technical problem to be solved by the utility model is that the existing air inlet mode of the working gas will result in a relatively large contact area between the working gas and the anode, increasing the pollution of the working gas to the anode, so as to provide an anode layer ion source.

[0007] To solve the above technical problem, the technical solution of the utility model is as follows:

[0008] An anode layer ion source includes a base and an anode. A first accommodation cavity is formed by inward depression on the top surface of the base. The anode is installed in the first accommodation cavity. A gas guiding channel is formed on the base. Both ends of the gas guiding channel penetrate through the top surface and the bottom surface of the base respectively. The gas guiding channel surrounds the first accommodation cavity and is located outside the first accommodation cavity.

[0009] Further, the base is an integrally formed structure.

[0010] Further, the gas guiding channel includes a first annular gas guiding groove and a second annular gas guiding groove respectively formed by inward depression on the top surface and the bottom surface of the base. The gas guiding channel further includes a plurality of gas guiding holes evenly distributed. Both ends of the gas guiding holes are respectively communicated with the first annular gas guiding groove and the second gas guiding groove.

[0011] Further, the widths of all parts of the first annular air guide groove are the same, and / or, the widths of all parts of the second annular air guide groove are the same.

[0012] Further, the anode layer ion source further includes an outer cathode and an inner cathode. The top surface of the side wall of the first annular air guide groove far from the first accommodation cavity abuts against the bottom surface of the outer cathode. There is a slit between the top surface of the shared side wall of the first annular air guide groove and the first accommodation cavity and the bottom surface of the outer cathode. The slit laterally communicates with the ion beam outlet between the outer cathode and the inner cathode, and the ion beam outlet spacing is located above the anode.

[0013] Further, the bottom surface of the base is recessed inward to form a second accommodation cavity. The anode layer ion source further includes a gas equalizing structure and a gas distribution box fixedly connected to the base. The gas equalizing structure is clamped between the gas distribution box and the bottom wall of the second accommodation cavity. A plurality of gas equalizing holes are evenly distributed on the gas equalizing structure, and the gas equalizing holes communicate with the second annular air guide groove upward.

[0014] Further, a cooling element and a magnet assembly are further installed in the first accommodation cavity. The cooling element is annular and has an annular cavity inside. The magnet assembly is located in the annular cavity and is connected to the cooling element. The top surface of the cooling element is connected to the bottom of the inner cathode, and an annular channel for accommodating a cooling medium is formed inside the cooling element.

[0015] Further, the cooling element laterally fixes the magnet assembly, and / or, the bottom surface of the inner cathode presses the magnet assembly toward the base.

[0016] Further, an annular coolant channel for accommodating a cooling medium is formed in the anode.

[0017] Further, the anode layer ion source further includes a coolant input pipeline and an access pipe. The annular channel in the cooling element communicates with the coolant input pipeline, and the coolant channel communicates with the access pipe.

[0018] The technical solution of the present utility model has the following advantages:

[0019] 1. For the anode layer ion source provided by the present utility model, since the air guide channel is arranged around the outside of the first accommodation cavity and the anode is installed in the first accommodation cavity, compared with the prior art in which the working gas is introduced from the bottom of the anode, the contact area between the working gas and the anode can be greatly reduced, and thus the pollution of the working gas to the anode can be greatly reduced.

[0020] 2. The anode layer ion source provided by the present utility model has a base in an integrally formed structure, and the gas guiding channel is formed on the base. Compared with installing a gas guiding seat in the base and opening a gas guiding channel on the gas guiding seat, the structure of the anode layer ion source can be simplified.

[0021] 3. The anode layer ion source provided by the present utility model further includes an outer cathode and an inner cathode. The top surface of the side wall of the first annular gas guiding groove away from the first accommodating cavity abuts against the bottom surface of the outer cathode. There is a slit between the top surface of the shared side wall of the first annular gas guiding groove and the first accommodating cavity and the bottom surface of the outer cathode. The slit laterally communicates with the ion beam outlet between the outer cathode and the inner cathode. The ion beam outlets are located above the anode. Since the working gas can reach the ion beam outlets laterally, the probability of blowing out attachments to the workpiece to be purged can be reduced, thereby reducing the contamination of the deposited article.

[0022] 4. The anode layer ion source provided by the present utility model further installs a cooling element and a magnet assembly in the first accommodating cavity. The cooling element is annular, with an annular cavity inside. The magnet assembly is located in the annular cavity and is connected to the cooling element. The top surface of the cooling element is connected to the bottom of the inner cathode. An annular channel for accommodating a cooling medium is formed inside the cooling element. In this way, the cooling element can cool the magnet assembly and the inner cathode simultaneously, thereby simplifying the cooling structure and improving the cooling efficiency.

[0023] 5. The anode layer ion source provided by the present utility model laterally fixes the magnet assembly, and the bottom surface of the inner cathode presses the magnet assembly towards the base. In this way, the magnet assembly can be better fixed. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the specific embodiments of the present utility model or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0025] Figure 1 It is a three-dimensional exploded view of the anode layer ion source in the embodiment of the present utility model;

[0026] Figure 2 It is a three-dimensional combined view of the base, the outer cathode and the inner cathode in the embodiment of the present utility model;

[0027] Figure 3 It is a three-dimensional exploded view of the base, the anode, the gas equalizing structure and the gas distribution box in the embodiment of the present utility model;

[0028] Figure 4Schematic cross-sectional view of the anode layer ion source in the embodiment of the present utility model;

[0029] Figure 5 is Figure 4 an enlarged view of the position F in;

[0030] Figure 6 Schematic perspective combined view of the base and the anode in the embodiment of the present utility model;

[0031] Figure 7 is Figure 6 an enlarged view of the position G in;

[0032] Figure 8 Schematic perspective view of the cooling element in the embodiment of the present utility model;

[0033] Figure 9 Another schematic cross-sectional view of the anode layer ion source connected with an access pipe in the embodiment of the present utility model;

[0034] Figure 10 Another schematic cross-sectional view of the anode layer ion source connected with a coolant input pipeline in the embodiment of the present utility model.

[0035] Explanation of reference numerals:

[0036] 1. Base; 11. First accommodation cavity; 12. Second accommodation cavity; 13. Air guide channel; 131. First annular air guide groove; 132. Second annular air guide groove; 133. Air guide hole; 14. Groove; 2. Outer cathode; 3. Inner cathode; 23. Ion beam extraction port; 4. Anode; 40. Coolant channel; 41. Access pipe; 5. Gas equalizing structure; 51. Gas equalizing hole; 6. Gas distribution box; 7. Cooling element; 70. Annular cavity; 71. Annular channel; 73. Coolant input pipeline; 8. Magnet assembly; 81. Magnetic strip; 82. Magnet; A. Slit; B. Sealing ring; C. First sealing ring; D. Second sealing ring; 90. Insulating flange; 91. Ceramic insulating sleeve; 92. Polytetrafluoroethylene sleeve; 93. Pressure cover. Detailed implementation manners

[0037] Next, the technical solutions of the present utility model will be clearly and completely described in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0038] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation to the present utility model. In addition, the terms "first", "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0039] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "mounted", "connected", "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0040] In addition, the technical features involved in different embodiments of the present utility model described below can be combined with each other as long as they do not conflict with each other.

[0041] As Figures 1 to 10 shown, the present utility model provides an anode layer ion source, which includes a base 1 and an anode 4. The top surface of the base 1 is recessed inward to form a first accommodation cavity 11 (as Figure 1 shown). The anode 4 is installed in the first accommodation cavity 11. A gas guiding channel 13 is formed on the base 1. Both ends of the gas guiding channel 13 penetrate through the top surface and the bottom surface of the base 1 respectively. The gas guiding channel 13 is arranged around the first accommodation cavity 11 and is located outside the first accommodation cavity 11.

[0042] In the present utility model, since the gas guiding channel 13 is arranged around the outside of the first accommodation cavity 11, and the anode 4 is installed in the first accommodation cavity 11, compared with the prior art in which the working gas is introduced from the bottom of the anode 4, the contact area between the working gas and the anode 4 can be greatly reduced, and thus the pollution of the working gas to the anode 4 can be greatly reduced.

[0043] In this embodiment, the base 1 is an integrally formed structure, and the gas guiding channel 13 is formed on the base 1. Compared with installing a gas guiding seat in the base 1 and forming a gas guiding channel 13 on the gas guiding seat, the structure of the anode layer ion source can be simplified.

[0044] Further, the air guiding channel 13 includes a first annular air guiding groove 131 and a second annular air guiding groove 132 respectively formed by inward depressions from the top surface and the bottom surface of the base 1. The air guiding channel 13 further includes a plurality of air guiding holes 133 evenly distributed. The two ends of each air guiding hole 133 communicate with the first annular air guiding groove 131 and the second annular air guiding groove 132 respectively. In order to improve the uniformity of the distribution of the working gas, the widths of various parts of the first annular air guiding groove 131 are the same, and / or the widths of various parts of the second annular air guiding groove 132 are the same. Preferably, the widths of the first annular air guiding groove 131 and the second annular air guiding groove 132 are the same. In this embodiment, the distance between two adjacent air guiding holes 133 is 8 mm to 12 mm, preferably 10 mm.

[0045] In this embodiment, the anode layer ion source further includes an outer cathode 2 and an inner cathode 3. The bottom surfaces of the inner cathode 3 and the outer cathode 2 are both horizontally arranged and flush. The top surface of the side wall of the first annular air guiding groove 131 away from the side wall of the first accommodating cavity 11 abuts against the bottom surface of the outer cathode 2, while the top surface of the shared side wall of the first annular air guiding groove 131 and the first accommodating cavity 11 is lower than the top surface of the side wall of the first annular air guiding groove 131 away from the first accommodating cavity 11, and thus there is a slit A between it and the bottom surface of the outer cathode 2 (as Figure 5 shown), and the slit A laterally communicates with the ion beam outlet 23 between the outer cathode 2 and the inner cathode 3 (as Figure 5 shown). The ion beam outlet 23 is located above the anode 4. Since the working gas can reach the ion beam outlet 23 laterally, the probability of the attached substances blown out to the workpiece to be purged can be reduced, thereby reducing the pollution to the deposited articles. Of course, the corresponding shared side arms of the outer cathode 2 and the inner cathode 3 and the bottom surface of the anode 4 can also be recessed inward, so as to form a slit A between the bottom surface of the outer cathode 2 and the top surface of the shared side wall of the first annular air guiding groove 131 and the first accommodating cavity 11, and the slit A can communicate with the ion beam outlet 23.

[0046] Further, a second accommodating cavity 12 is formed by inward depression of the bottom surface of the base 1 (as Figure 3 shown), and the anode layer ion source further includes a gas equalizing structure 5 (as Figure 3 shown), and a gas distribution box 6 fixedly connected to the base (as Figure 3 shown). The gas equalizing structure 5 is clamped between the gas distribution box 6 and the bottom wall of the second accommodating cavity 12. A plurality of gas equalizing holes 51 are evenly distributed on the gas equalizing structure 5 (as Figure 5 shown), and the gas equalizing holes 51 communicate with the second annular air guiding groove 132 upward.

[0047] Further, a cooling element 7 (as Figure 1 , Figure 5 and Figure 8 shown) and a magnet assembly 8 (as Figure 1 andFigure 4 As shown in the figure, the cooling element 7 is annular and has an annular cavity 70 that penetrates vertically inside (as Figure 8 shown). The magnet assembly 8 is located in the annular cavity 70 and is connected to the cooling element 7. The top surface of the cooling element 7 is connected to the bottom of the inner cathode 3. An annular channel 71 for accommodating a cooling medium is formed inside the cooling element 7. In this way, after the cooling medium is injected into the annular channel 71, the cooling element 7 can cool the magnet assembly 8 and the inner cathode 3 at the same time, thereby simplifying the cooling structure and improving the cooling efficiency.

[0048] In this embodiment, as Figure 4 shown, the magnet assembly 8 includes two magnetic strips 81 and a magnet 82. The magnet 82 is clamped between the two magnetic strips 81. The bottom surface of the inner cathode 3 presses the magnet 82 against the bottom surface of the lower magnetic strip 81 and the first accommodation cavity 11 in the direction of the base 1 through the upper magnetic strip 81. At the same time, the cooling element 7 laterally fixes the magnet assembly 8, thereby fixing the magnet assembly 8 well in the first accommodation cavity 11. In other embodiments, the bottom wall of the annular cavity 70 is closed.

[0049] Furthermore, as Figure 10 shown, the anode 4 is a hollow structure, and a connection pipe 41 for water and electricity access is connected to the lower end. In this embodiment, a cooling medium access pipe and a circuit access pipe are provided in the connection pipe 41 at the same time. A polytetrafluoroethylene sleeve 92 (as Figure 3 and Figure 5 shown) is provided on the outer wall of the connection pipe 41 near the anode 4 for isolating the anode 4 from other components. In other embodiments, the connection pipe 41 includes an independent cooling medium access pipe and a circuit access pipe. The coolant channel 40 in the anode 4 communicates with the cooling medium access pipe in the connection pipe 41.

[0050] Furthermore, the anode 4 is provided with a mounting hole for mounting a ceramic insulating sleeve 91 (as Figure 5 shown). A groove 14 for inserting the ceramic insulating sleeve 91 is formed in the base 1 (as Figure 6 shown). The ceramic insulating sleeve 91 passes through the mounting hole and is inserted into the groove 14 to fix the anode 4 to the base 1. The ceramic insulating sleeve 91 can also ensure the insulation between the anode 4 and other components, ensuring the stability of the discharge.

[0051] Furthermore, the anode layer ion source further includes a coolant input pipeline 73, and the annular channel 71 in the cooling element 7 communicates with the coolant input pipeline 73.

[0052] Furthermore, a sealing ring B is provided between the gas equalizing structure 5 and the bottom wall of the second accommodation cavity 12, and a sealing ring B is also provided between the gas distribution box 6 and the gas equalizing structure 5 to prevent air leakage.

[0053] Furthermore, as Figure 9As shown, an insulating flange 90 is provided at the bottom of the gas distribution box 6 (as Figure 9 shown). The insulating flange 90 is used to isolate the aforementioned access pipe 41 from other components, ensuring safety and stable discharge. The insulating flange 90 and the gas distribution box 6 are sealed by a sealing ring B. A first sealing ring C and a second sealing ring D are provided between the inner wall of the insulating flange 90 and the access pipe 41. The first sealing ring C and the second sealing ring D are arranged at intervals along the length direction of the access pipe 41 to perform radial sealing on the access pipe 41. Among them, the second sealing ring D located below has a conical sealing surface, and the gland 93 (as Figure 9 shown) can squeeze the second sealing ring D towards the small end of the conical sealing surface, so that the second sealing ring D can closely adhere to the outer wall of the access pipe 41 to prevent air leakage.

[0054] Furthermore, as Figure 10 shown, the setting of the sealing structure on the coolant input pipeline 73 is the same as that on the access pipe 41, which will not be elaborated here.

[0055] During the working process of the anode layer ion source in the present utility model, after the working gas enters the gas distribution box 6, it sequentially enters the second annular gas guide groove 132, the gas guide hole 133, the first annular gas guide groove 131, and the slit A along the gas equalizing holes 51 on the gas equalizing structure 5, and reaches the ion beam outlet 23. During the flow of the working gas, it is evenly dispersed by the gas equalizing structure 5, the second annular gas guide groove 132, and the second annular gas guide groove 132, so that the working gas can evenly reach the ion beam outlet 23, thereby improving the uniformity of the plasma concentration coming out of the ion beam outlet 23, making the ion beam current more stable, ultimately improving the cleaning quality and the coating quality. And because the working gas enters the ion beam outlet from the slit A between the outer cathode 2 and the shared side wall, the contact area between the working gas and the anode 4 can be reduced, thereby reducing the pollution of the working gas to the anode 4. In addition, the slit A is located above the anode 4, and the working gas will flow horizontally and then enter the ion beam outlet 23, which can further reduce the probability of blowing out attached substances, thereby reducing the pollution to the deposited articles.

[0056] During the working process of the anode layer ion source in the present utility model, coolant is input into the cooling element 7 through the coolant input pipeline 73. The cooling element 7 can cool the inner cathode 3 and the magnet assembly 8 at the same time. Coolant is input into the coolant channel 40 of the anode 4 through the access pipe 41 to cool the anode 4.

[0057] Obviously, the above embodiments are merely examples given for clear illustration and are not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to exhaustively list all implementation manners here. And the obvious changes or modifications derived therefrom still fall within the protection scope of this utility model creation.

Claims

1. An anode layer ion source, characterized in that, It includes a base (1) and an anode (4). A first accommodation cavity (11) is formed by inward depression on the top surface of the base (1). The anode (4) is installed in the first accommodation cavity (11). An air guiding channel (13) is provided on the base (1). The two ends of the air guiding channel (13) penetrate through the top surface and the bottom surface of the base (1) respectively. The air guiding channel (13) is arranged around the first accommodation cavity (11) and is located outside the first accommodation cavity (11).

2. The anode layer ion source according to claim 1, characterized in that, The base (1) is an integrally formed structure.

3. The anode layer ion source according to claim 1, wherein The air guiding channel (13) includes a first annular air guiding groove (131) and a second annular air guiding groove (132) which are respectively formed by inward depression from the top surface and the bottom surface of the base (1). The air guiding channel (13) further includes a plurality of air guiding holes (133) evenly distributed. The two ends of the air guiding holes (133) communicate with the first annular air guiding groove (131) and the second annular air guiding groove (132) respectively.

4. The anode layer ion source according to claim 3, characterized in that, The width of each part of the first annular air guiding groove (131) is the same, and / or the width of each part of the second annular air guiding groove (132) is the same.

5. The anode layer ion source according to claim 3, characterized in that, The anode layer ion source further includes an outer cathode (2) and an inner cathode (3). The top surface of the side wall of the first annular air guiding groove (131) far from the first accommodation cavity (11) abuts against the bottom surface of the outer cathode (2). There is a slit (A) between the top surface of the shared side wall of the first annular air guiding groove (131) and the first accommodation cavity (11) and the bottom surface of the outer cathode (2). The slit (A) laterally communicates with the ion beam outlet (23) between the outer cathode (2) and the inner cathode (3). The ion beam outlet (23) is spaced above the anode (4).

6. The anode layer ion source according to claim 3, characterized in that, A second accommodation cavity (12) is formed by inward depression on the bottom surface of the base (1). The anode layer ion source further includes a gas equalizing structure (5) and a gas distribution box (6) fixedly connected to the base (1). The gas equalizing structure (5) is clamped between the gas distribution box (6) and the bottom wall of the second accommodation cavity (12). A plurality of gas equalizing holes (51) are evenly distributed on the gas equalizing structure (5). The gas equalizing holes (51) communicate with the second annular air guiding groove (132) upward.

7. The anode layer ion source according to claim 5, wherein A cooling element (7) and a magnet assembly (8) are also installed in the first accommodation cavity (11). The cooling element (7) is annular and has an annular cavity (70) inside. The magnet assembly (8) is located in the annular cavity (70) and is connected to the cooling element (7). The top surface of the cooling element (7) is connected to the bottom of the inner cathode (3). An annular channel (71) for accommodating a cooling medium is formed inside the cooling element (7).

8. The anode layer ion source according to claim 7, wherein The cooling element (7) laterally fixes the magnet assembly (8), and / or the bottom surface of the inner cathode (3) presses the magnet assembly (8) towards the base (1).

9. The anode layer ion source according to claim 7, characterized in that, An annular coolant channel (40) for accommodating a cooling medium is formed in the anode (4).

10. The anode layer ion source according to claim 9, characterized in that, The anode layer ion source further includes a coolant input pipeline (73) and an access pipe (41). The annular channel (71) in the cooling element (7) communicates with the coolant input pipeline (73), and the coolant channel (40) communicates with the access pipe (41).

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