Cathode magnetic bar for magnetron sputtering vacuum coating device

Abstract

The utility model discloses a cathode magnetic bar for a magnetron sputtering vacuum coating device, and relates to the technical field of vacuum magnetron sputtering coating, the cathode magnetic bar comprises a core tube, a fixed plate and a movable plate, the fixed plate is fixedly arranged at the end part of the core tube, the fixed plate is provided with an opening so as to be communicated with the core tube, and the movable plate is arranged on the fixed plate. The movable plate is detachably installed on the fixed plate, and the movable plate blocks the opening. According to the technical scheme, the fixing plate is fixedly installed at the end of the core pipe, and the opening is formed in the fixing plate so that the fixing plate can be communicated with the core pipe; a movable plate is additionally arranged and detachably installed on the fixed plate, and the movable plate blocks the opening in the fixed plate. Due to the fact that the movable plate and the fixed plate are detachably installed, the cathode magnetic bar can be maintained only by taking down the movable plate in the maintenance process, the service life of the cathode magnetic bar is prolonged, the mode that a sealing cover is cut open for maintenance is avoided, and the maintenance cost is greatly reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum magnetron sputtering coating, and particularly relates to a cathode magnetic rod for a magnetron sputtering vacuum coating device. Background Art

[0002] At present, in a magnetron sputtering vacuum coating device, a cathode sputtering target is one of the very important components. The magnetic field intensity distribution and stability of the magnetic rod in the cathode sputtering target will directly affect the film layer quality, film layer thickness, color uniformity, etc.

[0003] However, since the end of the magnetic rod in the existing cathode sputtering target adopts a sealing cover structure integrated with the core tube. Once various problems occur to the magnetic rod that need to be repaired, such as sudden changes in magnetic field distribution, poor magnetism, water leakage, etc., it is often only possible to cut open the sealing cover, and then extract the magnetic rod from the cathode sputtering target; after solving various problems, the magnetic rod also needs to be reinstalled and welded and sealed again. This results in high maintenance costs, and the welded joints cut multiple times are likely to shorten the service life of the magnetic rod. Summary of the Utility Model

[0004] The main purpose of the utility model is to propose a cathode magnetic rod for a magnetron sputtering vacuum coating device, aiming to solve the problem that the end of the magnetic rod in the existing cathode sputtering target adopts a sealing cover structure integrated with the core tube, and only the sealing cover can be cut open during maintenance, resulting in high maintenance costs.

[0005] To achieve the above object, the cathode magnetic rod for a magnetron sputtering vacuum coating device proposed by the utility model includes:

[0006] A core tube;

[0007] A fixing plate, the fixing plate is fixedly installed at the end of the core tube, and the fixing plate is provided with an opening for communicating with the core tube; and

[0008] A movable plate, the movable plate is detachably installed on the fixing plate, and the movable plate blocks the opening, and the movable plate and the fixing plate are connected to form a sealing cover.

[0009] In one embodiment, the fixing plate includes a connecting portion and an installation portion, the connecting portion is arranged at the outer peripheral edge of the installation portion, the connecting portion is used for welding with the core tube, the installation portion is provided with the opening, and the cathode magnetic rod further includes a locking member, and the locking member connects the movable plate and the installation portion.

[0010] In one embodiment, the installation portion is further provided with a first installation hole, the movable plate is provided with a second installation hole corresponding to the first installation hole, and the locking member sequentially penetrates through the second installation hole and the first installation hole to connect the fixing plate and the movable plate.

[0011] In one embodiment, a convex portion is provided on a surface of the movable plate facing the fixed plate, a groove is provided on the fixed plate corresponding to the convex portion, and the convex portion is inserted into the groove so that the movable plate is limitedly installed on the fixed plate.

[0012] In one embodiment, the number of the convex portions is multiple, and the multiple convex portions are arranged close to the second mounting hole.

[0013] In one embodiment, at least two first cooling inlets are provided in the mounting portion, the first cooling inlets are arranged to avoid the opening, a second cooling inlet is provided on the movable plate corresponding to the first cooling inlet, and the first cooling inlet communicates with the second cooling inlet.

[0014] In one embodiment, a spacer portion is provided between the first cooling inlet and the opening, and the spacer portion is connected to the core tube.

[0015] In one embodiment, a sealing groove is further recessed around the opening of the mounting portion, the cathode magnetic rod further includes a sealing ring, and the sealing ring is installed in the sealing groove.

[0016] In one embodiment, a limiting rib is provided on an outer wall of the sealing groove and protrudes in a direction of the movable plate, and the limiting rib is used to limit the sealing ring in the sealing groove.

[0017] In one embodiment, a support and holding portion is provided on a surface of the movable plate facing away from the fixed plate.

[0018] The technical solution of the present utility model is to fixedly install a fixed plate at an end of a core tube, the fixed plate is provided with an opening to communicate with the core tube; and a movable plate is additionally provided, the movable plate is detachably installed on the fixed plate, and the movable plate seals the opening on the fixed plate. Since the movable plate and the fixed plate are detachably installed, during maintenance, only the movable plate needs to be removed to repair the cathode magnetic rod, so as to extend the service life of the cathode magnetic rod, and avoid repairing by cutting the sealing cover, which greatly reduces the maintenance cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for describing the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on the structures shown in these drawings without creative efforts.

[0020] Figure 1Structural schematic diagram of an embodiment of the cathode magnetic rod for a magnetron sputtering vacuum coating device provided by the present utility model;

[0021] Figure 2 Exploded structural schematic diagram of an embodiment of the cathode magnetic rod for a magnetron sputtering vacuum coating device provided by the present utility model;

[0022] Figure 3 Exploded structural schematic diagram of an embodiment of the cathode magnetic rod for a magnetron sputtering vacuum coating device provided by the present utility model from another perspective;

[0023] Figure 4 Structural schematic diagram of an embodiment of the fixing plate provided by the present utility model.

[0024] Explanation of the reference numerals in the drawings:

[0025] 100, cathode magnetic rod; 10, core tube;

[0026] 20, fixing plate; 21, opening; 22, connecting part; 23, mounting part; 231, first mounting hole; 232, first cooling inlet; 233, spacer; 234, sealing groove; 235, groove; 236, limiting rib;

[0027] 30, movable plate; 31, second mounting hole; 32, protruding part; 33, second cooling inlet; 34, supporting and holding part;

[0028] 40, sealing cover; 50, locking member; 60, sealing ring.

[0029] The realization of the purpose, functional features and advantages of the present utility model will be further described with reference to the embodiments and the accompanying drawings. Detailed implementation manners

[0030] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0031] It should be noted that if there are directional indications (such as up, down, left, right, front, back...) in the embodiments of the present utility model, the directional indications are only used to explain the relative positional relationship and movement conditions between the components in a specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0032] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present utility model, the descriptions of "first", "second", etc. are only for descriptive purposes and should not be construed as indicating or implying their relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In addition, if "and / or" or "and / or" appears throughout the text, its meaning includes three parallel scenarios. Taking "A and / or B" as an example, it includes Scenario A, or Scenario B, or the scenario where both A and B are satisfied simultaneously. In addition, the technical solutions between various embodiments can be combined with each other, but it must be based on the fact that those of ordinary skill in the art can implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.

[0033] Since the end of the magnetic rod in the existing cathode sputtering target adopts a sealing cover 40 structure integrated with the core tube 10. Once various problems occur to the magnetic rod and need to be repaired, such as sudden changes in magnetic field distribution, poor magnetism, water leakage, etc., it is often only possible to cut open the sealing cover 40 and then extract the magnetic rod from the cathode sputtering target; after solving various problems, the magnetic rod also needs to be reinstalled and welded again for sealing. This results in high repair costs, and the welded joints that are cut open multiple times are likely to shorten the service life of the magnetic rod.

[0034] The present utility model provides a cathode magnetic rod 100 for a magnetron sputtering vacuum coating device. Please refer to Figures 1 to 3 , in an embodiment of the present utility model, the cathode magnetic rod 100 for a magnetron sputtering vacuum coating device provided by the present utility model includes:

[0035] A core tube 10;

[0036] A fixing plate 20, the fixing plate 20 is fixedly installed at the end of the core tube 10, and the fixing plate 20 is provided with an opening 21 to communicate with the core tube 10; and

[0037] A movable plate 30, the movable plate 30 is detachably installed on the fixing plate 20, and the movable plate 30 seals the opening 21, and the movable plate 30 and the fixing plate 20 are connected to form a sealing cover 40.

[0038] In an embodiment, the number of the fixing plates 20 is two, and the two fixing plates 20 are respectively fixedly installed at both ends of the core tube 10. The number of the movable plates 30 is also two, and the two movable plates 30 are respectively connected to the two fixing plates 20 to form two sealing covers 40, and the two sealing covers 40 are used to respectively seal both ends of the core tube 10 to prevent the magnets inside the core tube 10 from coming out.

[0039] The technical solution of the present utility model is to fixedly install a fixing plate 20 at the end of the core tube 10. The fixing plate 20 is provided with an opening 21 to communicate with the core tube 10. A movable plate 30 is additionally provided. The movable plate 30 is detachably installed on the fixing plate 20, and the movable plate 30 blocks the opening 21 on the fixing plate 20. Since the movable plate 30 is detachably installed with the fixing plate 20, during maintenance, only the movable plate 30 needs to be removed to repair the cathode magnet 100, so as to extend the service life of the cathode magnet 100 and avoid repairing by cutting open the sealing cover 40, greatly reducing the maintenance cost.

[0040] Among them, a magnet is installed on the core tube 10. During maintenance, after separating the movable plate 30 from the fixing plate 20, the magnet inside the core tube 10 can be taken out through the opening 21 on the fixing plate 20 for replacement.

[0041] In order to connect and fix the fixing plate 20 and the movable plate 30 so as to install the cathode magnet 100 at the corresponding installation position of the magnetron sputtering vacuum coating device, in an embodiment, the fixing plate 20 includes a connecting portion 22 and an installation portion 23. The connecting portion 22 is arranged on the outer peripheral edge of the installation portion 23. The connecting portion 22 is used for welding with the core tube 10. The installation portion 23 is provided with the opening 21. The cathode magnet 100 further includes a locking member 50. The locking member 50 connects the movable plate 30 and the installation portion 23.

[0042] Among them, the connecting portion 22 of the fixing plate 20 and the core tube 10 can be welded by full welding so that the fixing plate 20 can be firmly fixed on the core tube 10.

[0043] Furthermore, the locking member 50 can be used to connect the installation portion 23 of the fixing plate 20 and the movable plate 30 so that the movable plate 30 can block the opening 21 on the fixing plate 20, thereby preventing the magnet inside the core tube 10 from detaching from the opening 21. And a support and holding portion 34 protrudes from the side of the movable plate 30 facing away from the fixing plate 20 to install the cathode magnet 100 at the corresponding installation position of the magnetron sputtering vacuum coating device through the support and holding portion 34.

[0044] In order to be able to connect the fixing plate 20 and the movable plate 30, specifically, please refer to Figures 1 to 4, in one embodiment, the mounting portion 23 is further provided with a first mounting hole 231, the movable plate 30 is provided with a second mounting hole 31 corresponding to the first mounting hole 231, and the locking member 50 sequentially passes through the second mounting hole 31 and the first mounting hole 231 to connect the fixed plate 20 and the movable plate 30.

[0045] In one embodiment, the locking member 50 can be a positioning pin or a screw. The first mounting hole 231 and the second mounting hole 31 can be threaded holes. The locking member 50 passes through the second mounting hole 31 on the movable plate 30 and the first mounting hole 231 on the fixed plate 20, so that the fixed plate 20 and the movable plate 30 are connected by the locking member 50 and connected to form a sealing cover 40. The sealing cover 40 can block the opening 21 of the fixed plate 20 to prevent the magnet inside the core tube 10 from detaching from the opening 21.

[0046] When the cathode magnetic rod 100 needs to be repaired, first remove the movable plate 30 of the cathode magnetic rod 100 from the magnetron sputtering vacuum coating device, then loosen the locking member 50 and remove the locking member 50 from the movable plate 30, and the movable plate 30 can be separated from the fixed plate 20 to expose the opening 21 on the fixed plate 20, thereby facilitating the removal of the magnet inside the core tube 10 from the opening 21 on the fixed plate 20 and replacing it with a new magnet. The entire repair process does not require cutting the sealing cover 40 for repair, greatly reducing the repair cost.

[0047] Among them, in one embodiment, the number of the second mounting holes 31 is four, and the number of the first mounting holes 231 is correspondingly set to four. The four locking members 50 lock the movable plate 30 and the fixed plate 20 more stably to prevent the movable plate 30 from loosening from the fixed plate 20.

[0048] Among them, the fixed plate 20 and the movable plate 30 are installed at both ends of the core tube 10, and each fixed plate 20 and each movable plate 30 are connected and locked by a locking member 50. Then, the cathode magnetic rod 100 equipped with the fixed plate 20 and the movable plate 30 can be installed at the corresponding installation position of the magnetron sputtering vacuum coating device.

[0049] To facilitate the positioning of the movable plate 30 and prevent the movable plate 30 from deflecting or shifting relative to the fixed plate 20, a protruding portion 32 is provided on the surface of the movable plate 30 facing the fixed plate 20 in a protruding manner, and a groove 235 is provided on the fixed plate 20 corresponding to the protruding portion 32. The protruding portion 32 is inserted into the groove 235 so that the movable plate 30 is limited and installed on the fixed plate 20.

[0050] In one embodiment, four protruding portions 32 are protrudingly provided on one side of the movable plate 30 facing the fixed plate 20. The four protruding portions 32 are spaced apart from each other. Correspondingly, four grooves 235 are provided on the fixed plate 20. The four protruding portions 32 are respectively inserted into the four grooves 235, so that the movable plate 30 can be limit-mounted on the fixed plate 20, and the movable plate 30 is not prone to deflection or offset. Then, the locking member 50 is used to connect and lock the movable plate 30 and the fixed plate 20, so that the movable plate 30 and the fixed plate 20 can be connected to form a sealing cover 40 to seal the core tube 10 and prevent the magnet inside the core tube 10 from coming out.

[0051] Wherein, the number of the protruding portions 32 is multiple, and the multiple protruding portions 32 are arranged close to the second mounting hole 31.

[0052] In one embodiment, the four protruding portions 32 are respectively arranged close to the four second mounting holes 31.

[0053] To facilitate the inflow of the coolant into the cathode magnet 100, in one embodiment, the mounting portion 23 is provided with at least two first cooling inlets 232. The first cooling inlets 232 are arranged to avoid the opening 21. The movable plate 30 is provided with second cooling inlets 33 corresponding to the first cooling inlets. The first cooling inlets 232 communicate with the second cooling inlets 33.

[0054] Wherein, the two first cooling inlets 232 are arranged oppositely, and the two second cooling inlets 33 are arranged corresponding to the two first cooling inlets 232.

[0055] Further, the core tube 10 includes a receiving channel and a cooling channel. The receiving channel is used to receive the magnet, and the cooling channel is used for the coolant to flow through. After the movable plate 30 is mounted on the fixed plate 20, the coolant can flow into the cooling channel in the core tube 10 through the second cooling inlet 33 and the first cooling inlet 232.

[0056] To improve the connection stability between the fixed plate 20 and the core tube 10, a spacer portion 233 is arranged between the first cooling inlet 232 and the opening 21, and the spacer portion 233 is connected to the core tube 10.

[0057] The spacer portion 233 on the fixed plate 20 can be welded to the core tube 10, and the connecting portion 22 on the fixed plate 20 is also welded to the core tube 10, so that the fixed plate 20 can be firmly fixed on the core tube 10.

[0058] In order to reduce the coolant from entering the accommodation channel of the core tube 10 that houses the magnet and reduce the corrosion of the magnet, in one embodiment, a sealing groove 234 is further recessed around the opening 21 of the mounting portion 23. The cathode magnet bar 100 further includes a sealing ring 60, and the sealing ring 60 is installed in the sealing groove 234.

[0059] The sealing ring 60 is installed in the sealing groove 234, and then the movable plate 30 is installed on the fixed plate 20. The movable plate 30 can press the sealing ring 60 against the fixed plate 20, and the sealing ring 60 is located between the fixed plate 20 and the movable plate 30. When the coolant flows through the second cooling inlet 33 and the first cooling inlet 232, the sealing ring 60 blocks the opening 21 of the fixed plate 20 and can seal the gap between the fixed plate 20 and the movable plate 30, thereby preventing the coolant from flowing into the accommodation channel of the core tube 10 through the opening 21 of the fixed plate 20 from the gap between the fixed plate 20 and the movable plate 30, greatly reducing the occurrence of the magnet being corroded by the coolant.

[0060] In order to prevent the sealing ring 60 from falling into the opening 21 of the fixed plate 20 or the accommodation channel of the core tube 10, in one embodiment, a limiting rib 236 protrudes from the outer wall of the sealing groove 234 towards the movable plate 30, and the limiting rib 236 is used to limit the sealing ring 60 in the sealing groove 234.

[0061] In one embodiment, a support and grip portion 34 protrudes from the side of the movable plate 30 facing away from the fixed plate 20, which not only facilitates locking the support and grip portion 34 into the magnetron sputtering vacuum coating device, but also facilitates gripping the support and grip portion 34 to remove the movable plate 30 from the fixed plate 20.

[0062] The above are only exemplary embodiments of the present invention, and do not limit the patent scope of the present invention. Any equivalent structural transformation made under the technical concept of the present invention by using the content of the specification and drawings of the present invention, or any direct / indirect application in other related technical fields, is included in the patent protection scope of the present invention.

Claims

1. A cathode magnetic rod for a magnetron sputtering vacuum coating device, characterized in that, include: Core tube; A fixing plate, the fixing plate is fixedly mounted on the end of the core tube, and the fixing plate is provided with an opening to communicate with the core tube; as well as The movable plate is detachably mounted on the fixed plate, and the movable plate blocks the opening. The movable plate is connected with the fixed plate to form a sealing cover.

2. The cathode magnetic rod according to claim 1, characterized in that, The fixed plate includes a connecting portion and a mounting portion, wherein the connecting portion is arranged at the outer peripheral edge of the mounting portion, the connecting portion is used for welding with the core tube, the mounting portion is provided with the opening, and the cathode magnetic bar also includes a locking piece, which connects the movable plate and the mounting portion.

3. The cathode magnetic rod according to claim 2, wherein The mounting portion is further provided with a first mounting hole, the movable plate is provided with a second mounting hole corresponding to the first mounting hole, and the locking piece passes through the second mounting hole and the first mounting hole in sequence to connect the movable plate and the fixed plate.

4. The cathode magnetic rod according to claim 3, characterized in that, The movable plate is provided with a protruding portion on one side facing the fixed plate, and the fixed plate is provided with a groove corresponding to the protruding portion. The protruding portion is inserted into the groove so that the movable plate is limitedly installed on the fixed plate.

5. The cathode magnetic rod according to claim 4, wherein There are multiple protrusions, and the multiple protrusions are arranged close to the second mounting hole.

6. The cathode magnetic rod according to any one of claims 2 to 5, characterized in that, The mounting portion is provided with at least two first cooling inlets, the first cooling inlets are arranged to avoid the opening, the movable plate is provided with a second cooling inlet corresponding to the first cooling inlet, and the first cooling inlet is communicated with the second cooling inlet.

7. The cathode magnetic rod according to claim 6, wherein A spacer is provided between the first cooling inlet and the opening, and the spacer is connected to the core tube.

8. The cathode magnetic rod according to any one of claims 2 to 5, characterized in that, The installation portion is further provided with a sealing groove around the opening, and the cathode magnetic bar further comprises a sealing ring, which is installed in the sealing groove.

9. The cathode magnetic rod according to claim 8, wherein The outer wall of the sealing groove is provided with a limiting rib protruding toward the direction of the movable plate, and the limiting rib is used to limit the sealing ring in the sealing groove.

10. The cathode magnetic rod according to any one of claims 2 to 5, characterized in that, A support grip portion is protruding from a side of the movable plate away from the fixed plate.

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