Multi-section splicing type rotary joint

Abstract

The utility model provides a multi-section splicing type rotary joint which comprises a rotating shaft, a plurality of sealing shells are sleeved and spliced on the rotating shaft in the axial direction, and each sealing shell is provided with a mounting groove with an opening in the left end and a supporting part located at the bottom of the mounting groove. The rotating shaft is positioned in the mounting groove and is sleeved with a moving ring seat; moving rings are arranged on the two end faces of the moving ring base respectively, static rings and sealing springs are installed on the two end faces of the supporting part respectively, and the static rings are installed in the supporting part in a sliding mode; by arranging the structure of the multi-section spliced sealing shell, an integral structure is converted into a split structure, on one hand, the number of channels, suitable media or flow capacity can be adjusted according to working condition requirements, and on the other hand, the split structure reduces the machining difficulty, improves the machining precision of a single part and improves the sealing reliability.

Description

Technical Field

[0001] The utility model relates to the hydraulic field, in particular to a multi-section spliced rotary joint. Background Art

[0002] In the process of integrated circuit manufacturing, especially in the early stage of wafer processing, there are usually application scenarios where gas and liquid need to be transported to a rotating workbench. Due to the needs of manufacturing processes, various working media such as special or even toxic gases, high-purity water, and corrosive liquids often need to be transported. Usually, a rotary joint is used to complete the connection between the static pipeline and the pipeline of the rotating workbench.

[0003] Existing rotary joints are mostly of integral structure, and the transported medium, the number of channels, the flow capacity, etc. cannot be flexibly adjusted according to the working conditions. Moreover, the processing difficulty of the integral structure is relatively large, and there are high requirements for the roundness and cylindricity of the housing and the rotating shaft. Summary of the Utility Model

[0004] The technical problem to be solved by the utility model is that the transported medium, the number of channels, the flow capacity, etc. of the existing integral rotary joint cannot be flexibly adjusted and the overall processing difficulty is relatively high. The utility model provides a multi-section spliced rotary joint to solve the above problems.

[0005] The technical solution adopted by the utility model to solve its technical problems is: a multi-section spliced rotary joint, including a rotating shaft, and a plurality of sealing housings are sleeved and spliced along the axial direction on the rotating shaft. The sealing housing has an installation groove with an open left end and a supporting portion at the bottom of the installation groove;

[0006] Located in the installation groove, a moving ring seat is sleeved on the rotating shaft; moving rings are respectively arranged on both end faces of the moving ring seat, static rings and sealing springs are installed on both end faces of the supporting portion, and the static rings are slidably installed in the supporting portion; for the supporting portion to the left of the moving ring seat, the sealing spring installed on the right end face thereof pushes the static ring to the right, so that the static ring is hermetically attached to the moving ring on the left side of the moving ring seat; for the supporting portion to the right of the moving ring seat, the sealing spring installed on the left end face thereof pushes the static ring to the left, so that the static ring is hermetically attached to the moving ring on the right side of the moving ring seat.

[0007] Furthermore: on each supporting portion, a secondary flow channel is formed by enclosing between the static rings on both end faces; the rotary joint is provided with a main flow channel and a secondary flow channel. The main flow channel sequentially includes a main channel of the rotating shaft of the rotating shaft, a radial hole of the rotating shaft, a diversion hole of the moving ring seat, the installation groove and a main channel of the housing. The secondary flow channel sequentially includes a secondary channel of the rotating shaft of the rotating shaft, a radial hole of the rotating shaft, the secondary flow channel and a secondary channel of the housing.

[0008] Further: The adjacent two sealing shells are positioned by positioning steps and positioning holes and fixed by connecting bolts, and an end face sealing ring is arranged between the adjacent two sealing shells.

[0009] Further: Bearings are arranged at both ends of the rotating shaft, and anti-rotation pins are arranged on both end faces of the supporting part.

[0010] The beneficial effects of the present utility model are as follows. By setting the structure of multi-section spliced sealing shells, the integral structure is transformed into a split structure. On the one hand, the number of channels, the applicable medium or the flow capacity can be adjusted according to the working conditions. On the other hand, the split structure reduces the processing difficulty, improves the processing precision of individual parts, and enhances the reliability of the seal. Description of the Drawings

[0011] The present utility model will be further described below in conjunction with the drawings and embodiments.

[0012] Figure 1 is a schematic cross-sectional view of the structure of a multi-section spliced rotary joint of the present utility model;

[0013] Figure 2 is an external view of the structure of a multi-section spliced rotary joint.

[0014] In the figure, 1 is a rotary joint, 2 is a rotating shaft, 3 is a sealing shell, 4 is a mounting groove, 5 is a dynamic ring seat, 6 is a dynamic ring, 7 is a static ring, 8 is a sealing spring, 9 is a supporting part, 10 is a secondary flow channel, 11 is a main flow channel, 12 is a secondary flow channel, 13 is an end face sealing ring, 14 is a bearing, and 15 is an anti-rotation pin. Detailed Description of the Embodiment

[0015] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation of the present utility model. On the contrary, the embodiments of the present utility model include all changes, modifications and equivalents that fall within the spirit and scope of the appended claims.

[0016] In the description of the present utility model, it should be understood that the orientation or positional relationships indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. are based on the orientation or positional relationships shown in the drawings. These are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present invention.

[0017] In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "connected" and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances. In addition, in the description of the present utility model, unless otherwise stated, the meaning of "a plurality of" is two or more.

[0018] Any process or method description shown in a flowchart or described in other ways herein can be understood as representing a module, segment, or part of code including one or more executable instructions for implementing a specific logical function or process. The scope of the preferred embodiments of the present utility model includes additional implementations, where the functions can be executed in a manner that is not in the order shown or discussed, including in a substantially simultaneous manner according to the functions involved or in a reverse order, which should be understood by those skilled in the technical field to which the embodiments of the present utility model belong.

[0019] As Figures 1 to 2 shown, the present utility model provides a multi - joint splicing type rotary joint, which includes a rotating shaft 2. A plurality of sealing shells 3 are sleeved and spliced along the axial direction on the rotating shaft 2. The sealing shell 3 has an installation groove 4 with an open left end and a supporting part 9 located at the bottom of the installation groove 4.

[0020] Located within the installation groove 4, a moving ring seat 5 is sleeved on the rotating shaft 2; moving rings 6 are respectively arranged on both end faces of the moving ring seat 5, and static rings 7 and sealing springs 8 are installed on both end faces of the supporting portion 9, and the static ring 7 is slidably installed in the supporting portion 9; for the supporting portion 9 located to the left of the moving ring seat 5, the sealing spring 8 installed on the right end face thereof pushes the static ring 7 to the right, so that the static ring 7 is sealingly attached to the moving ring 6 on the left side of the moving ring seat 5; for the supporting portion 9 located to the right of the moving ring seat 5, the sealing spring 8 installed on the left end face thereof pushes the static ring 7 to the left, so that the static ring 7 is sealingly attached to the moving ring 6 on the right side of the moving ring seat 5.

[0021] For the multi-section spliced rotary joint of the present application, the rotating shaft 2 adopts an integral structure, and its shaft body part is integrally processed. The housing on the rotating shaft 2 adopts a spliced structure, and several split sealing housings 3 are sequentially sleeved on the rotating shaft 2. Each sealing housing 3 and the components installed therein form a sealing area. Specifically, there is a moving ring seat 5 in the installation groove 4, and static rings 7 are sealingly attached to both the left and right end faces of the moving ring seat 5. Taking one of the sealing housings 3 as an example, to the left of the moving ring seat 5 within the sealing housing 3, the static ring 7 installed on the right end face of the supporting portion 9 of the sealing housing 3 adjacent to the left of this sealing housing 3 is pushed by the sealing spring 8 and fits onto the moving ring 6 on the left side of this moving ring seat 5. Similarly, to the right of this moving ring seat 5, the static ring 7 installed on the left side of the supporting portion 9 of the sealing housing 3 where it is located will fit onto the moving ring 6 on the right side of this moving ring seat 5.

[0022] In this way, dynamic sealing surfaces can be formed on both sides of the moving ring seat 5, and an independent sealing section is formed inside the installation groove 4. Since the number of sealing housings 3 is multiple, the number of such sealing sections can be set according to the needs of the use of the rotary joint 1. In this way, the rotary joint 1 has the ability to convey media in multiple channels.

[0023] In this structure, since the sealing housings 3 are installed in a spliced manner, the problem of low boring machining accuracy of the housing of the existing rotary joint 1 is avoided. There is no need for long-cantilever boring machining. The spliced structure divides the original integral part for machining, which can improve the machining accuracy of components such as the sealing housing 3, the moving ring 6, and the static ring 7. Through high-precision assembly, the manufacturing accuracy of the overall rotary joint 1 is improved, and various surface treatments can be performed on each component, having good sealing performance and service reliability. At the same time, this spliced structure improves the assembly processability of the rotary joint 1, facilitating assembly, disassembly, and maintenance.

[0024] On each of the support portions 9, a secondary flow passage groove 10 is formed by enclosing between the stationary rings 7 on the two end faces thereof; the rotary joint 1 is provided with a main flow passage 11 and a secondary flow passage 12. The main flow passage 11 successively includes a main passage of the rotating shaft 2 of the rotating shaft 2, a radial hole of the rotating shaft, a flow guiding hole of the moving ring seat, an installation groove 4 and a main passage of the housing. The secondary flow passage 12 successively includes a secondary passage of the rotating shaft 2 of the rotating shaft 2, a radial hole of the rotating shaft, the secondary flow passage groove 10 and a secondary passage of the housing.

[0025] The rotary joint 1 can be used for working conditions such as conveying nitrogen, compressed air, negative pressure vacuum, etc. The design of the passage can adopt the above-mentioned compact structure design. A sealed cavity area is formed between the moving ring seat 5 and the stationary rings 7 on both sides. Cooperating with the passages on the rotating shaft 2 and the sealed housing 3 forms the so-called main flow passage 11, which can convey nitrogen, compressed air, etc. with a relatively large flow rate. At the same time, a secondary flow passage groove 10 is also formed between two adjacent stationary rings 7, which also constitutes a sealed cavity area. Cooperating with the passages on the rotating shaft 2 and the sealed housing 3 forms the so-called secondary flow passage 12. Since the flow cross-section of the secondary flow passage 12 is relatively small, it can generally be used for conveying gases with a relatively small flow rate or connecting vacuum tubes or negative pressure tubes. Because the conveyed media are all gases, such a mechanism can be adopted to enable the rotary joint 1 to have more flow passages, improving the conveying capacity and efficiency.

[0026] Between two adjacent sealed housings 3, they are positioned by a positioning step and a positioning hole and fixed by connecting bolts. An end face sealing ring 13 is arranged between two adjacent sealed housings 3. The use of the positioning step and the positioning hole can achieve accurate positioning between the sealed housings 3, and the use of connecting bolts can achieve rapid installation and disassembly of the sealed housings 3, ensuring the overall installation accuracy after the rotary joint 1 is assembled. The end face sealing ring 13 can ensure the formation of a reliable sealed cavity inside and at the same time prevent external water vapor, etc. from entering the passage.

[0027] Bearings 14 are arranged at both ends of the rotating shaft 2, and anti-rotation pins 15 are arranged on the two end faces of the support portion 9. The bearings 14 have high positioning accuracy and centering property. Due to the multi-section splicing structure. Precise positioning with bearings 14 at both ends can ensure the overall installation accuracy of the rotary joint 1 and improve the reliability during use. The anti-rotation pins 15 adopted can ensure that on the one hand, the stationary ring 7 can slide axially to adjust the sealing fit state, and on the other hand, it will not rotate with the moving ring 6 due to the friction force, ensuring reliable sealing.

[0028] In the description of this specification, the descriptions referring to terms such as "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic representations of the terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0029] Based on the above inspiration from the ideal embodiment of the present utility model, through the above description, relevant staff can completely make various changes and modifications without departing from the technical idea of this utility model. The technical scope of this utility model is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A multi - joint splicing type rotary joint, including a rotating shaft (2), characterized in that: A plurality of seal housings (3) are sleeved and spliced along the axial direction on the rotating shaft (2). The seal housing (3) has a mounting groove (4) with an open left end and a supporting portion (9) at the bottom of the mounting groove (4). A moving ring seat (5) is sleeved on the rotating shaft (2) within the mounting groove (4). Moving rings (6) are respectively arranged on both end faces of the moving ring seat (5). Static rings (7) and seal springs (8) are installed on both end faces of the supporting portion (9). The static ring (7) is slidably installed in the supporting portion (9). For the supporting portion (9) to the left of the moving ring seat (5), the seal spring (8) installed on the right end face pushes the static ring (7) to the right, so that the static ring (7) is in sealing contact with the moving ring (6) on the left side of the moving ring seat (5). For the supporting portion (9) to the right of the moving ring seat (5), the seal spring (8) installed on the left end face pushes the static ring (7) to the left, so that the static ring (7) is in sealing contact with the moving ring (6) on the right side of the moving ring seat (5).

2. The multi-section spliced rotary joint according to claim 1, characterized in that: On each supporting portion (9), a secondary flow channel (10) is formed by enclosing between the static rings (7) on both end faces. The rotary joint (1) is provided with a main flow channel (11) and a secondary flow channel (12). The main flow channel (11) successively includes a main channel of the rotating shaft of the rotating shaft (2), a radial hole of the rotating shaft, a guiding hole of the moving ring seat, the mounting groove (4), and a main channel of the housing. The secondary flow channel (12) successively includes a secondary channel of the rotating shaft of the rotating shaft (2), a radial hole of the rotating shaft, the secondary flow channel (10), and a secondary channel of the housing.

3. The multi-section spliced rotary joint according to claim 2, characterized in that: Adjacent two seal housings (3) are positioned by a positioning step and a positioning hole and fixed by connecting bolts. An end face sealing ring (13) is arranged between adjacent two seal housings (3).

4. The multi-section spliced rotary joint according to claim 3, characterized in that: Bearings (14) are arranged at both ends of the rotating shaft (2), and anti-rotation pins (15) are arranged on both end faces of the supporting portion (9).

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