Electrode assembly and reaction furnace

Abstract

The utility model relates to the technical field of semiconductors and photovoltaics, in particular to an electrode assembly and a reaction furnace, and solves the problem that an electrode needs to be frequently replaced due to the fact that the electrode is easily coated in the prior art. The electrode assembly is applied to the reaction furnace, the reaction furnace is provided with a hearth extending in the first direction, the hearth can contain a bearing body bearing a substrate, the two ends, in the first direction, of the hearth are a furnace opening and a furnace tail respectively, and the electrode assembly is arranged in at least one of the position, close to the furnace opening, in the hearth and the position, close to the furnace tail, in the hearth. The electrode assembly comprises at least one electrode which is arranged at the position, close to the furnace opening and / or the furnace tail, in the hearth and can be in contact fit with the bearing body; and the at least one heat dissipation piece wraps at least part of the electrode, and the heat dissipation piece is used for cooling gas around the electrode. According to the electrode assembly and the reaction furnace provided by the invention, the surface of the electrode can be prevented from being plated with an insulating film, so that the service life of the electrode assembly is prolonged.

Description

Technical Field

[0001] The present disclosure relates to the fields of semiconductor and photovoltaic technologies, and particularly relates to an electrode assembly and a reaction furnace. Background Art

[0002] In the manufacturing processes of semiconductors and solar cells, there is a processing technology that includes coating the surface of wafers carried on a graphite boat through a coating device. During coating, it is necessary to bring the graphite boat into contact with an electrode. When the electrode is energized, an electric field is generated between adjacent substrates, which can be used to deposit a thin film on the surface of the substrate. However, during the process of depositing the thin film on the surface of the substrate, it is also easy to deposit the thin film on the surface of the electrode. When the surface of the electrode in contact with the graphite boat is gradually deposited with the thin film, the resistance of the electrode increases accordingly, which easily causes high-voltage discharge and power fluctuation, and even makes the electrode insulated from the graphite boat and unable to deposit the thin film on the surface of the wafer. Then, the electrode needs to be frequently replaced, resulting in a low service life of the electrode. Summary of the Utility Model

[0003] In view of this, embodiments of the present disclosure provide an electrode assembly and a reaction furnace to solve the problem that the electrode is easily coated and needs to be frequently replaced in the related art.

[0004] In a first aspect, an embodiment of the present disclosure provides an electrode assembly applied to a reaction furnace. The reaction furnace has a furnace chamber extending in a first direction. The furnace chamber can accommodate a carrier, and the carrier is configured to carry substrates. The two ends of the furnace chamber in the first direction are respectively a furnace mouth and a furnace tail. At least one of the positions near the furnace mouth and the furnace tail in the furnace chamber is provided with an electrode assembly. The electrode assembly includes: at least one electrode disposed at a position near the furnace mouth and / or the furnace tail in the furnace chamber and capable of being in contact and cooperation with the carrier; at least one heat dissipation member that covers at least a part of the electrode, and the heat dissipation member is used to cool the gas around the electrode.

[0005] In some embodiments, the electrode has an electrode contact surface that is in contact and cooperation with the carrier, and the heat dissipation member covers at least a part of the electrode contact surface.

[0006] In some embodiments, at least one support rod extending in the first direction is provided in the furnace chamber. The carrier is supported by the support rod. The electrode includes: an electrode block sleeved on the support rod, and the electrode contact surface is disposed on the electrode block; an electrode rod extending in the first direction, one end of the electrode rod is electrically connected to the electrode block, and the other end is located at the furnace mouth and / or the furnace tail to be electrically connected to an external power source.

[0007] In some embodiments, the electrode contact surface has a depression, and at least a part of the heat dissipation member extends into the depression so that the heat dissipation member can cool the ionized gas around the electrode contact surface to a non-ionized state.

[0008] In some embodiments, a flange is provided at the furnace opening of the furnace chamber. The flange is connected to a liquid inlet pipe and a liquid outlet pipe. An electrode assembly is disposed at a position near the furnace opening inside the furnace chamber. The heat dissipation member includes: a heat exchange block detachably connected to the recess. A heat exchange flow channel is provided inside the heat exchange block, and the heat exchange flow channel has a liquid inlet and a liquid outlet; two heat exchange pipelines, one end of one heat exchange pipeline is connected to the liquid inlet, the other end is connected to the liquid inlet pipe, one end of the other heat exchange pipeline is connected to the liquid outlet, and the other end is connected to the liquid outlet pipe.

[0009] In some embodiments, the recess is a U-shaped groove structure provided on the electrode contact surface, and the heat exchange block is arranged as a U-shaped block structure matching the U-shaped groove. The thickness of the heat exchange block in the vertical direction is less than or equal to the depth of the recess.

[0010] In some embodiments, the flange is provided with a communication port. The electrode further includes: a conductive connection block passing through the communication port, so that one end of the conductive connection block is connected to the electrode rod, and the other end extends out of the furnace chamber and is connected to an external power source.

[0011] In some embodiments, the number of electrodes is multiple, and the number of heat dissipation members is multiple. The multiple heat dissipation members are arranged in one-to-one correspondence with the multiple electrodes; wherein, at least one electrode is connected to the positive pole of the external power source, and at least another electrode is connected to the negative pole of the external power source.

[0012] In some embodiments, the multiple electrodes are arranged at intervals in the second direction at a position near the furnace opening and / or the furnace tail inside the furnace chamber, and the second direction is perpendicular to the first direction.

[0013] In a second aspect, an embodiment of the present disclosure further provides a reaction furnace, including a furnace body having a furnace chamber extending in the first direction. The two ends of the furnace chamber in the first direction are respectively a furnace opening and a furnace tail, and the furnace chamber can accommodate a carrier, and the carrier is configured to carry a substrate; the above-described electrode assembly is disposed at at least one of a position near the furnace opening and the furnace tail inside the furnace chamber.

[0014] An electrode assembly and a reaction furnace provided by an embodiment of the present disclosure. The electrode is in contact with the graphite boat. When the electrode is energized, the graphite boat is conducted, which is equivalent to applying an alternating voltage between two adjacent substrates on the graphite boat, so that the adjacent substrates form positive and negative electrodes, enabling glow discharge, thereby ionizing the gas between the adjacent substrates into ions. The ionized ions can be recombined and finally deposited on the process surface of the substrate, thus depositing a thin film on the process surface. At the same time, when the electrode is energized, the gas around the electrode can also be ionized into ions. Through the heat sink covering at least part of the electrode, the heat sink can cool the ionized ions surrounding the electrode, so that the ionized ions are converted from the ionized state to the non-ionized state, which will not cause the surface of the electrode to be covered with an insulating silicon nitride film, thereby avoiding the increase in the resistance of the electrode resulting in power fluctuations and affecting the coating effect. Moreover, it can even avoid the situation that the electrode is insulated from the graphite boat and cannot be coated after long-term use, without the need to frequently replace the electrode, and improves the service life of the electrode.

[0015] In addition, through the setting of the heat sink covering at least part of the electrode, there is no need to repeatedly heat up and cool down the reaction furnace frequently to reduce the silicon nitride film covering the surface of the electrode, thereby avoiding the problem that the furnace tubes in the furnace are prone to cracking due to repeated heating and cooling, and reducing the maintenance cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] By describing the embodiments of the present disclosure in more detail in conjunction with the accompanying drawings, the above and other objects, features, and advantages of the present disclosure will become more obvious. The drawings are used to provide a further understanding of the embodiments of the present disclosure, and constitute a part of the specification. They are used together with the embodiments of the present disclosure to explain the present disclosure, and do not constitute a limitation to the present disclosure. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The figure shows a schematic diagram of an electrode assembly disposed in a reaction furnace provided by an embodiment of the present disclosure.

[0018] Figure 2 As shown Figure 1 A partial enlarged view of area A in

[0019] Figure 3 As shown Figure 2 A partial enlarged view of area B in

[0020] Figure 4 The figure shows a schematic diagram of an electrode assembly provided by an embodiment of the present disclosure.

[0021] Figure 5 The figure shows a schematic diagram of another electrode assembly provided by an embodiment of the present disclosure.

[0022] Reference Signs:

[0023] 100, reactor; 100a, furnace chamber; 10, electrode assembly; 1, electrode; 11, electrode block; 111, electrode contact surface; 111a, depression; 1111, contact plane; 1112, arc surface; 12, electrode rod; 13, conductive connection block; 2, heat dissipation member; 21, heat exchange block; 22, heat exchange pipeline; 23, connection pipeline; 20, furnace body; 20a, furnace opening; 20b, furnace tail; 201, flange; 2011, communication port; 202, support rod; 30, graphite boat; 301, protrusion; 40, substrate; 50, rod-shaped electrode; X, first direction; Y, second direction. Detailed implementation manners

[0024] Next, the technical solutions in the embodiments of the present disclosure will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present disclosure.

[0025] Figure 1 The figure shows a schematic diagram of an electrode assembly disposed in a reactor provided by an embodiment of the present disclosure. Figure 2 As shown in Figure 1 a partial enlarged view of area A in Figure 3 As shown in Figure 2 a partial enlarged view of area B in Figure 4 The figure shows a schematic diagram of an electrode assembly provided by an embodiment of the present disclosure. Figure 5 The figure shows a schematic diagram of another electrode assembly provided by an embodiment of the present disclosure. Among them, the direction indicated by arrow X is the first direction, and the direction indicated by arrow Y is the second direction. The first direction X and the second direction Y are perpendicular to each other in the horizontal plane, and will not be emphasized separately hereafter.

[0026] The embodiments of the present disclosure provide an electrode assembly, as shown in Figure 1 and Figure 2, the electrode assembly 10 is applied to the reaction furnace 100. The reaction furnace 100 has a furnace chamber 100a extending along the first direction X. The furnace chamber 100a can accommodate a carrier 30, and the carrier is configured to carry a substrate 40. The two ends of the furnace chamber 100a along the first direction X are respectively a furnace mouth 20a and a furnace tail 20b. The electrode assembly 10 is provided at least at one of the positions near the furnace mouth 20a and the furnace tail 20b in the furnace chamber 100a. The electrode assembly 10 includes at least one electrode 1 and at least one heat dissipation member 2. The electrode 1 is provided at a position in the furnace chamber 100a near the furnace mouth 20a. The electrode 1 can be in contact and cooperation with the carrier. The heat dissipation member 2 covers at least part of the electrode 1. The heat dissipation member 2 is used to cool the gas around the electrode 1 so that the ionized gas around the electrode 1 is cooled to a non-ionized state.

[0027] It can be understood that the reaction furnace 100 can be, for example, the reaction furnace 100 in a coating device. The coating device can be, for example, a Plasma Enhanced Chemical Vapor Deposition (PECVD) device. The reaction furnace 100 includes a furnace body 20. The furnace body 20 is provided with a furnace chamber 100a extending along the first direction X. The gas filled into the furnace chamber 100a can include, for example, silane and ammonia gas, so as to deposit a silicon nitride thin film on the process surface of the substrate 40 through the electrode assembly 10. Hereinafter, an example in which silane and ammonia gas are filled in the furnace chamber 100a for depositing a silicon nitride thin film will be described.

[0028] It should be emphasized that the carrier can be a graphite boat 30 capable of carrying a plurality of substrates 40. The plurality of substrates 40 are arranged at intervals on the graphite boat 30 to facilitate the picking and placing of the plurality of substrates 40. The specific structure of the graphite boat 30 can be adaptively adjusted according to the placement requirements of the plurality of substrates 40. In addition, one graphite boat 30 can be accommodated in the furnace chamber 100a, or a plurality of graphite boats 30 can be accommodated simultaneously. The plurality of graphite boats 30 are arranged at intervals along the first direction X, and no specific limitation is made.

[0029] The electrode assembly 10 provided by the embodiments of the present disclosure has the electrode 1 in contact with the graphite boat 30. When the electrode 1 is energized, the graphite boat 30 is conducted, which is equivalent to applying an alternating voltage between two adjacent substrates 40 on the graphite boat 30 to form positive and negative electrodes between the adjacent substrates 40. When the pressure in the furnace chamber 100a and the filling of silane and ammonia meet the requirements, glow discharge can occur between the adjacent substrates 40 to decompose the silane and ammonia located between the adjacent substrates 40, forming silicon ions and nitrogen ions, which recombine to form silicon nitride molecules and are finally deposited on the process surface of the substrate 40, thereby achieving the purpose of coating the process surface. At the same time, when the electrode 1 is energized, an electric field can also be generated around the electrode 1 to ionize the silane and ammonia around the electrode 1, forming silicon ions and nitrogen ions. By using the heat sink 2 covering at least part of the electrode 1, the heat sink 2 can cool the silicon ions and nitrogen ions around the electrode 1, so that the silicon ions and nitrogen ions are converted from the ionized state to the non-ionized state. In this way, the situation where silicon ions and nitrogen ions combine to form silicon nitride molecules and deposit on the surface of the electrode 1 to form a silicon nitride film will not occur, thereby avoiding the increase in the resistance of the electrode 1 leading to power fluctuations and affecting the coating effect, and even avoiding the situation where the electrode 1 is insulated from the graphite boat 30 and cannot be coated after long-term use, without the need to frequently replace the electrode 1, and improving the service life of the electrode 1.

[0030] In addition, through the arrangement of the heat sink 2 covering at least part of the electrode 1, there is no need to repeatedly heat up and cool down the reaction furnace 100 frequently to reduce the silicon nitride film covering the surface of the electrode 1, thereby avoiding the problem that the furnace tubes in the furnace chamber 100a are prone to cracking due to repeated heating and cooling, and reducing the maintenance cost.

[0031] It can be understood that the number and placement position of the electrode assembly 10 in the furnace chamber 100a can be selected according to actual needs. For example, the electrode assembly 10 can be set as a group, and a group of electrode assemblies 10 can be set only at a position close to the furnace mouth 20a, or can be set only at a position close to the furnace tail 20b. Or, the electrode assembly 10 can be set as two groups or more than two groups. When the electrode assembly 10 is set as two groups, the two groups of electrode assemblies 10 can be respectively set at a position close to the furnace mouth 20a and a position close to the furnace tail 30b. Or, when the electrode assembly 10 is set as more than two groups, in addition to being set at positions close to the furnace mouth 20a and the furnace tail 20b, the electrode assembly 10 can also be set at other positions in the furnace chamber 100a, without specific limitation. In the embodiments of the present disclosure, for the convenience of observation and replacement, only the electrode assembly 10 is set at a position close to the furnace mouth 20a, and a rod-shaped electrode 50 extending along the first direction X can be directly provided at a position close to the furnace tail 20b in the furnace chamber 100a. One end of the rod-shaped electrode 50 is electrically connected to the carrier, and the other end extends out of the furnace tail 20b and is electrically connected to an external power supply.

[0032] Taking the example of arranging the electrode assembly 10 at a position close to the furnace mouth 20a, the electrode assembly 10 and the specific mating structure between the electrode assembly 10 and the reaction furnace 100 will be described in detail. It can be understood that when the electrode assembly 10 is arranged at a position close to the furnace tail 20b, the specific structure and mating relationship can refer to the relevant description when the electrode assembly 10 is arranged at the furnace mouth 20a, and will not be elaborated herein.

[0033] As Figure 2 and Figure 3 , the electrode 1 has an electrode contact surface 111, the electrode contact surface 111 is in contact and cooperation with the graphite boat 30, and the heat sink 2 covers at least a part of the electrode contact surface 111. By covering at least a part of the electrode contact surface 111 with the heat sink 2, it is ensured that while the electrode contact surface 111 can be in contact and cooperation with the graphite boat 30, the heat sink 2 can at least cool the ionized gas around the electrode contact surface 111 to avoid deposition of silicon nitride film on the electrode contact surface 111.

[0034] It can be understood that the covering can be understood as that the heat sink 2 can be in contact and cooperation with the electrode contact surface 111, or it can be understood that there is a small gap between the heat sink 2 and the electrode contact surface 111, without specific limitation.

[0035] Specifically, at least one support rod 202 extending in the first direction X is provided in the furnace chamber 100a. The two ends of the support rod 202 are respectively fixedly connected to the two end parts of the reaction furnace 100. The graphite boat 30 is placed on the support rod 202 so that the support rod 202 can support the graphite boat 30. The electrode 1 includes an electrode block 11 and an electrode rod 12. The electrode block 11 is sleeved on the support rod 202, the electrode contact surface 111 is arranged on the electrode block 11, the electrode rod 12 extends in the first direction X, one end of the electrode rod 12 is electrically connected to the electrode block 11, and the other end is located at the furnace mouth 20a to be electrically connected to an external power supply. By fixedly connecting the electrode block 11 to the support rod 202, the stability of the contact between the electrode block 11 and the graphite boat 30 is improved.

[0036] Optionally, the support rod 202 can be set to one, or can be set to a plurality of support rods arranged at intervals in the second direction Y, such as two, four, five, six, etc., which can be adaptively adjusted according to actual needs without specific limitation. In the embodiment of the present disclosure, the support rod 202 is set to two, and the two support rods 202 are arranged at intervals in the horizontal plane in the second direction Y, and the distance between the two support rods 202 is less than the width of the graphite boat 30 in the second direction Y, so that the two support rods 202 can support the graphite boat 30 more stably.

[0037] In some embodiments, the electrode contact surface 111 has a recess 111a, and the heat sink 2 at least partially extends into the recess 111a so that the heat sink 2 can cool the ionized gas around the electrode contact surface 111 to a non-ionized state. By providing the recess 111a on the electrode contact surface 111, at least part of the heat sink 2 can extend into the recess 111a to ensure that the electrode contact surface 111 and the graphite boat 30 can be smoothly brought into contact and cooperation, and to ensure that the electrode contact surface 111 and the graphite boat 30 have a sufficient contact area, ensuring that the electrode 1 can be electrically connected to the graphite boat 30, so that glow discharge occurs between adjacent substrates, thereby extending the service life of the electrode 1.

[0038] In some embodiments, the electrode contact surface 111 includes a contact plane 1111, at least part of the contact plane 1111 abuts against the bottom surface of the graphite boat 30, and the recess 111a is located on the contact plane 1111. By abutting the contact plane 1111 against the bottom surface of the graphite boat 30, the relative stability between the graphite boat 30 and the electrode block 11 is improved. The electrode block 11 sleeved on the support rod 202 stably supports the graphite boat 30 through the contact plane 1111, improving the stability of the abutment between the contact plane 1111 and the bottom surface of the graphite boat 30.

[0039] Optionally, the electrode contact surface 111 further includes an arc surface 1112, the arc surface 1112 is connected to the contact plane 1111, and a plurality of protrusions 301 (which can also be referred to as boat feet) are provided on the bottom of the graphite boat 30. The plurality of protrusions 301 can be provided, for example, at the four corners of the bottom surface of the graphite boat 30. When the support rod 202 supports the graphite boat 30, the surface of the protrusion 301 facing the support rod 202 abuts against the arc surface 1112 of the electrode block 11, and the bottom surface of the graphite boat 30 abuts against the contact plane 1111 of the electrode block 11. While increasing the contact area between the electrode block 11 and the carrier boat, the support stability of the graphite boat 30 can be improved, ensuring good contact stability between the electrode contact surface 111 and the surface of the electrode block 11.

[0040] In some alternative embodiments, the heat sink 2 can also cover at least part of the arc surface 1112. For example, a groove can be provided on the arc surface 1112, and part of the heat sink 2 extends into the groove, so that the heat sink 2 provided on the arc surface 1112 does not affect the abutment between the arc surface 1112 and the protrusion 301, and at the same time the heat sink 2 can also cool the ionized gas around the arc surface 1112, thereby preventing the deposition of an insulating film on the arc surface 1112. It can be understood that the specific shape of the electrode contact surface 111 can be adaptively adjusted according to the specific shape of the provided protrusion 301, and no specific limitation is made.

[0041] It can be understood that the heat dissipation member 2 can also cover at least some other surfaces of the electrode block 11. For example, the heat dissipation member 2 can be sleeved around the circumference of the electrode block 11 in a ring shape, or the heat dissipation member 2 can be dispersedly arranged at different positions on different surfaces of the electrode block 11. That is, the specific area and specific position of the electrode block 11 covered by the heat dissipation member 2 can be adaptively adjusted according to actual needs and are not specifically limited. In the embodiment of the present disclosure, the heat dissipation member 2 is only provided at a part of the electrode contact surface 111 of the electrode block 11 to prevent the surface of the electrode block 11 in contact with the graphite boat 30 from being deposited with a silicon nitride film, thereby preventing the electrode contact surface 111 from being deposited with a silicon nitride film, enabling the electrode assembly 10 to be electrically connected to the graphite boat 30, and further improving the service life of the electrode assembly 10.

[0042] Such as Figures 3 to 5 , a flange 201 is provided at the furnace opening 20a of the furnace chamber 100a. The flange 201 is connected with a liquid inlet pipe and a liquid outlet pipe. The heat dissipation member 2 includes a heat exchange block 21 and two heat exchange pipelines 22. The heat exchange block 21 is detachably connected to the recess 111a. A heat exchange flow channel is provided in the heat exchange block 21, and the heat exchange flow channel has a liquid inlet and a liquid outlet; one end of one heat exchange pipeline 22 is connected to the liquid inlet, and the other end is connected to the liquid inlet pipe. One end of the other heat exchange pipeline 22 is connected to the liquid outlet, and the other end is connected to the liquid outlet pipe. By using the cooperating heat exchange block 21 and heat exchange pipelines 22 to communicate with the original liquid inlet pipe and liquid outlet pipe on the flange 201, cold water enters the heat exchange flow channel of the heat exchange block 21 from the liquid inlet. During the movement of the cold water in the heat exchange flow channel, it can absorb heat and cool down the ionized gas around the electrode contact surface 111. The heated water after heat absorption flows out of the liquid outlet pipe along the heat exchange pipeline 22 from the liquid outlet. Through the circulating water, continuous water cooling is realized for the ionized gas around the electrode contact surface 111, thereby avoiding the situation that the ionized gas recombines into silicon nitride molecules and falls on the electrode contact surface 111 to form a silicon nitride film, which is beneficial to improving the service life of the electrode 1.

[0043] Optionally, the heat exchange pipeline 22 extends from the position of the heat exchange block 21 to the position of the furnace opening 20a along the first direction X. The liquid inlet pipe and the liquid outlet pipe provided on the flange 201 can be respectively connected to the two heat exchange pipelines 22 through bendable connecting pipelines 23. The specific bending form of the connecting pipeline 23 can be adaptively adjusted according to the specific positions of the heat exchange pipeline 22, the liquid inlet pipe, and the liquid outlet pipe and is not specifically limited. In addition, in order to prevent water leakage during the circulation process, the heat exchange block 21, the two heat exchange pipelines 22, and the two connecting pipelines 23 can be an integrally formed structure.

[0044] In some alternative embodiments, the recess 111a is a U-shaped groove structure provided on the electrode contact surface 111, the heat exchange block 21 is provided as a U-shaped block structure adapted to the U-shaped groove, and the thickness of the heat exchange block 21 in the vertical direction is less than or equal to the depth of the recess 111a. By providing the recess 111a and the heat exchange block 21 as a matching U-shaped structure, the heat sink 2 can cover more of the electrode contact surface 111, so as to improve the cooling efficiency of the ionized gas around the electrode contact surface 111.

[0045] It can be understood that the recess 111a can also be a W-shaped groove, a wavy groove structure, etc. provided on the electrode contact surface 111, and the heat exchange block 21 and the heat exchange flow channels provided therein can be adaptively adjusted according to the shape of the provided recess 111a, without specific limitation.

[0046] Optionally, when the electrode contact surface 111 abuts against the bottom surface of the graphite boat 30, the surface of the heat exchange block 21 can abut against the bottom surface of the graphite boat 30, or can have a gap with the bottom surface of the graphite boat 30, and the gap is not greater than 2 mm, so that the heat exchange block 21 can achieve a better heat exchange and cooling effect.

[0047] Optionally, the heat exchange block 21 can be in a small-gap fit with the recess 111a, or the heat exchange block 21 can be restricted within the recess 111a by means of clamping members, fixing members, etc. without falling off, without specific limitation.

[0048] In addition, it should be emphasized that the extending direction of the heat exchange flow channels provided in the heat exchange block 21 can be adaptively adjusted according to the specific shape of the heat exchange block 21, as long as it is ensured that both the liquid inlet and the liquid outlet are located in the direction towards the furnace opening 20a. The shape, size, etc. of the cross-section of the heat exchange flow channels can be matched with the shape, size of the cross-section of the heat exchange pipeline 22, without specific limitation.

[0049] It should be emphasized that the provided heat sink 2 can also be provided with air-cooling for cooling, or a combination of air-cooling and water-cooling. For example, when the heat sink 2 is provided to include air-cooling, an air-cooling heat sink can be provided in the recess 111a of the electrode contact surface 111. The air-cooling heat sink is provided with a circulation space for accommodating a fan, and an air inlet and outlet pipeline communicating with the circulation space and passing through the flange 201 and communicating with the outside. The fan is connected to an external power supply through a power cord. The rotation of the fan can drive the internal air circulation, and the heat of the ionized gas around the electrode contact surface 111 can be carried to the outside during the circulation process, thereby realizing the cooling of the ionized gas. The specific setting of the heat sink 111 can be schematically adjusted according to actual needs, without specific limitation.

[0050] In some embodiments, the flange 201 is provided with a communication port 2011. The electrode 1 further includes a conductive connection block 13. The conductive connection block 13 passes through the communication port 2011 so that one end of the conductive connection block 13 is connected to the electrode rod 12 and the other end extends out of the furnace chamber 100a to be connected to an external power supply. It can be understood that the shape, size, etc. of the conductive connection block 13 can be adaptively adjusted according to actual needs and are not specifically limited.

[0051] In some embodiments, the number of electrodes 1 is multiple, and the number of heat dissipation members 2 is multiple. The multiple heat dissipation members 2 are arranged in one-to-one correspondence with the multiple electrodes 1. Among them, at least one electrode 1 is connected to the positive pole of the external power supply, and at least another electrode 1 is connected to the negative pole of the external power supply. In the embodiments of the present disclosure, taking the number of electrodes 1 being two as an example, the conductive connection block 13 of one of the two electrodes 1 is electrically connected to the positive pole of the external power supply, and the other is connected to the negative pole. The two electrodes 1 are arranged at intervals along the second direction Y, that is, the electrode blocks 11 of the two electrodes 1 are respectively sleeved on different support rods 202. The structures of the two electrodes 1 are the same and can be arranged on the two support rods 202 in a relatively mirror image manner, which will not be elaborated here.

[0052] It should be emphasized that a flange structure can also be connected to the position of the furnace tail 20b of the reactor 100. When the electrode assembly 10 is arranged at a position close to the furnace tail 20b, the electrode rod 12 of the electrode assembly 10 can pass through the flange structure of the furnace tail 20b to be electrically connected to the external power supply. The electrode assembly 10 arranged at the position close to the furnace tail 20b and its cooperation with the reactor 100 can refer to the relevant descriptions of setting the electrode assembly 10 at the furnace mouth 20a above and will not be elaborated here.

[0053] The present disclosure also provides a reactor. The reactor 100 includes a furnace body 20 and an electrode assembly 10. The furnace body 20 has a furnace chamber 100a extending along the first direction X. The two ends of the furnace chamber 100a along the first direction X are respectively a furnace mouth 20a and a furnace tail 20b. The furnace chamber 100a can accommodate a carrier, and the carrier is configured to carry a substrate 40. The electrode assembly 10 is arranged at least at one of the positions in the furnace chamber 100a close to the furnace mouth 20a and the furnace tail 20b.

[0054] It can be understood that the electrode assembly 10 can refer to the relevant descriptions of the above embodiments and will not be elaborated here.

[0055] In the embodiments of the present disclosure, if not clearly defined, the connection form can be detachable connection by means of bolts and nuts, screws, buckles, magnetic attraction, etc. In some connections, if there is no special requirement for the form of detachable cooperation, non-detachable connection can be carried out by means of welding, bonding, etc.

[0056] The basic principles of the present disclosure have been described in connection with specific embodiments. However, it should be noted that the advantages, benefits, effects, etc. mentioned in the present disclosure are merely examples and not limitations. It cannot be considered that these advantages, benefits, effects, etc. are essential for each embodiment of the present disclosure. Additionally, the specific details disclosed above are for illustrative and facilitating understanding purposes only, and not for limitation. The above details do not limit the present disclosure to necessarily implementing with the above specific details.

[0057] The block diagrams of the devices, apparatuses, equipment, and systems involved in the present disclosure are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open-ended terms, meaning "including but not limited to", and can be used interchangeably with each other. The word "or" and "and" used herein refer to the phrase "and / or", and can be used interchangeably with each other unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to", and can be used interchangeably with each other.

[0058] It should also be noted that in the devices, equipment, and methods of the present disclosure, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be regarded as equivalent solutions of the present disclosure.

[0059] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present disclosure. Various modifications to these aspects are very obvious to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the present disclosure. Therefore, the present disclosure is not intended to be limited to the aspects shown herein, but rather to the broadest scope consistent with the principles and novel features disclosed herein.

[0060] The above description has been given for purposes of illustration and description. In addition, this description is not intended to limit the embodiments of the present disclosure to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions, and sub-combinations thereof.

Claims

1. An electrode assembly, characterized in that, Applied to a reactor, the reactor having a furnace chamber extending in a first direction, the furnace chamber being capable of accommodating a carrier configured to carry a substrate, the two ends of the furnace chamber in the first direction being a furnace mouth and a furnace tail respectively, and an electrode assembly being provided at at least one of a position near the furnace mouth and a position near the furnace tail in the furnace chamber; Wherein, the electrode assembly includes: At least one electrode, provided at a position near the furnace mouth and / or a position near the furnace tail in the furnace chamber, and capable of being in contact and cooperation with the carrier; At least one heat dissipation member, the heat dissipation member covering at least a part of the electrode, and the heat dissipation member being used for cooling the gas around the electrode.

2. The electrode assembly according to claim 1, characterized in that, The electrode has an electrode contact surface which is in contact and cooperation with the carrier, and the heat dissipation member covers at least a part of the electrode contact surface.

3. The electrode assembly according to claim 2, wherein At least one support rod extending in the first direction is provided in the furnace chamber, the carrier is supported by the support rod, and the electrode includes: An electrode block sleeved on the support rod, and the electrode contact surface is provided on the electrode block; An electrode rod extending in the first direction, one end of the electrode rod being electrically connected to the electrode block, and the other end being located at the furnace mouth and / or the furnace tail to be electrically connected to an external power source.

4. The electrode assembly according to claim 3, characterized in that, The electrode contact surface has a depression, and the heat dissipation member at least partially extends into the depression so that the heat dissipation member can cool the ionized gas around the electrode contact surface to a non-ionized state.

5. The electrode assembly according to claim 4, wherein A flange is provided at the furnace mouth of the furnace chamber, the flange is connected with a liquid inlet pipe and a liquid outlet pipe, the electrode assembly is provided at a position near the furnace mouth in the furnace chamber, and the heat dissipation member includes: A heat exchange block detachably connected to the depression, a heat exchange flow channel is provided in the heat exchange block, and the heat exchange flow channel has a liquid inlet and a liquid outlet; Two heat exchange pipelines, one end of one heat exchange pipeline is connected to the liquid inlet, the other end is connected to the liquid inlet pipe, and one end of the other heat exchange pipeline is connected to the liquid outlet, and the other end is connected to the liquid outlet pipe.

6. The electrode assembly according to claim 5, characterized in that, The depression is a U-shaped groove structure provided on the electrode contact surface, the heat exchange block is provided as a U-shaped block structure matching the U-shaped groove, and the thickness of the heat exchange block in the vertical direction is less than or equal to the depth of the depression.

7. The electrode assembly according to claim 5, wherein The flange is provided with a communication port, and the electrode further includes: A conductive connection block passing through the communication port so that one end of the conductive connection block is connected to the electrode rod and the other end extends out of the furnace chamber to be connected to the external power source.

8. The electrode assembly according to any one of claims 1-7, characterized in that, The number of the electrodes is multiple, the number of the heat dissipation members is multiple, and the multiple heat dissipation members are provided in one-to-one correspondence with the multiple electrodes; Wherein, at least one of the electrodes is connected to the positive pole of the external power source, and at least another electrode is connected to the negative pole of the external power source.

9. The electrode assembly according to claim 8, wherein, The multiple electrodes are arranged at intervals in a second direction at a position near the furnace mouth and / or a position near the furnace tail in the furnace chamber, and the second direction is perpendicular to the first direction.

10. A reactor, characterized in that, Including: A furnace body having a furnace chamber extending in a first direction, the two ends of the furnace chamber in the first direction being a furnace mouth and a furnace tail respectively, the furnace chamber being capable of accommodating a carrier configured to carry a substrate; The electrode assembly according to any one of claims 1 to 9 is disposed at least at one of a position near the furnace mouth and a position at the furnace tail within the furnace.

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