Wet flower basket structure suitable for large-size silicon wafer

Abstract

The utility model discloses a wet flower basket structure suitable for a large-size silicon wafer, which relates to the technical field of silicon wafer processing, and comprises a top plate, a first threaded rod, rear latches and side latches, a bottom plate is arranged below the top plate, and a first support rod and a second support rod are arranged between the top plate and the bottom plate; side clamping teeth are arranged on the surfaces of the first supporting rods, rear clamping teeth are arranged on one sides of the second supporting rods, the number of the first supporting rods and the number of the second supporting rods are both two, and by rotating two first adjusting bolts, the first adjusting bolts can drive first threaded rods to rotate; when the first threaded rod rotates, the two first supporting rods can be synchronously driven to move through threads on the outer wall, so that the distance between the two first supporting rods can be adjusted and increased, and the basket can fix silicon wafers with large widths; and the slide bar can be used for placing silicon wafers with larger widths.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer processing, in particular to a wet flower basket structure suitable for large-size silicon wafers. Background Art

[0002] The wet flower basket structure is designed to load a certain number of silicon wafers for convenient batch processing. During wet chemical processing such as texturing, cleaning, and etching of silicon wafers, the wet flower basket structure can ensure that the silicon wafers are uniformly processed in the chemical solution. After retrieval, the patent with the authorization number CN210837691U in China discloses a wet flower basket device suitable for large-size silicon wafers. Although this flower basket structure limits the silicon wafers from three directions through the left rod, right rod, and rear rod, and the side teeth and rear teeth play a role in supporting the silicon wafers, the overall deformation of the silicon wafers is relatively small; the adjacent rear teeth are arranged in a left-right staggered manner, which is also beneficial to reducing the occurrence of wafer sticking. However, the left rod, right rod, and rear rod of this flower basket adopt a fixed structure and cannot adjust the distance between the left rod, right rod, and rear rod according to the actual size of the silicon wafers, resulting in that this flower basket can only place silicon wafers of a specified size. Content of the Utility Model

[0003] Aiming at the deficiencies of the prior art, the utility model provides a wet flower basket structure suitable for large-size silicon wafers, which solves the problem that the left rod, right rod, and rear rod of the existing flower basket structure adopt a fixed structure, resulting in that this flower basket can only place silicon wafers of a specified size as mentioned in the background art.

[0004] To achieve the above purposes, the utility model is realized through the following technical solutions: A wet flower basket structure suitable for large-size silicon wafers, including a top plate, a first threaded rod, rear teeth, and side teeth. A bottom plate is arranged below the top plate. A first support rod and a second support rod are arranged between the top plate and the bottom plate. Side teeth are arranged on the surface of the first support rod. Rear teeth are arranged on one side of the second support rod. There are two first support rods and two second support rods respectively. One end of the top and the bottom of the first support rod is internally provided with a first threaded rod, and the first threaded rod is located inside a first chute. The first chutes are respectively opened on the surfaces of the top plate and the bottom plate. First adjusting bolts are welded at both ends of the first threaded rod, and the outer walls of the first adjusting bolts are rotatably connected to both ends of the first chute.

[0005] Preferably, the surface of the first threaded rod is threadedly distributed at both ends, and the threads at both ends of the first threaded rod face in opposite directions. The two ends of the first threaded rod are respectively threadedly connected to the first support rod. Through the opposite threads at both ends, it is beneficial to enable the first threaded rod to drive the two first support rods to move in opposite directions when rotating.

[0006] Preferably, the other ends of the top plate and the bottom plate are provided with second sliding grooves, and a second threaded rod is arranged inside the second sliding grooves. One end of the second threaded rod is rotatably connected to the inside of the second sliding groove, and the other end of the second threaded rod is welded with a second adjusting bolt. The second adjusting bolt is rotatably connected to the other end of the second sliding groove. The second threaded rod is threadedly connected to both ends of the second support rod. By rotating the second adjusting bolt, the second adjusting bolt can drive the second threaded rod to rotate, and then the second threaded rod can drive the second support rod to move horizontally, so as to adjust the distance between the second support rod and the first support rod.

[0007] Preferably, the side teeth and the rear teeth are respectively distributed on the surfaces of the first support rod and the second support rod at equal intervals from top to bottom, which is beneficial to evenly placing the silicon wafers at equal intervals up and down inside the flower basket.

[0008] Preferably, the surface of the side teeth has a quadrangular pyramid structure, and the shape of the rear teeth is the same as that of the side teeth. By contacting the silicon wafer surface with the edges of the side teeth and the rear teeth, it is beneficial to reduce the contact area between the side teeth and the rear teeth and the silicon wafer. By reducing the contact area between the silicon wafer and the flower basket and increasing the exposed area of the silicon wafer, it is beneficial to the uniform contact between the silicon wafer and the external environment and promotes the texturing process.

[0009] Preferably, the side teeth are made of rubber, and the rear teeth have the same material as the side teeth. The rubber material can protect the surface of the silicon wafer during loading and unloading to avoid scratches and abrasions.

[0010] The utility model provides a wet flower basket structure suitable for large-size silicon wafers, which has the following beneficial effects:

[0011] (1). For the wet flower basket structure suitable for large-size silicon wafers, by rotating two first adjusting bolts, the first adjusting bolts can drive the first threaded rod to rotate. While the first threaded rod rotates, it can synchronously drive two first support rods to move through the threads on the outer wall, so that the first support rods can move in opposite directions synchronously, and then the distance between the two first support rods can be adjusted to become larger, so that the flower basket can fix silicon wafers with a larger width. Then, the two ends of the silicon wafer are inserted between the side teeth in sequence, so that the silicon wafers can be placed one above the other inside the flower basket, which is beneficial to placing silicon wafers with a larger width through adjustment by the sliding rod.

[0012] (2) The wet flower basket structure applicable to large-sized silicon wafers can drive the second threaded rod to rotate by turning the second adjusting bolt. Then, the second threaded rod can drive the second support rod to move horizontally, thereby adjusting the distance between the second support rod and the first support rod. As a result, the flower basket can place silicon wafers of different lengths. When one end of the silicon wafer is inserted between the rear teeth, it can be fixed and placed inside the flower basket, improving the adjustability of the device.

[0013] This solves the problem that the left rod, right rod, and rear rod of the existing flower basket structure adopt a fixed structure, resulting in the flower basket being able to place only silicon wafers of a specified size. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a schematic diagram of the overall structure of the present invention;

[0015] Figure 2 is a schematic side view structure diagram of the present invention;

[0016] Figure 3 is a schematic front view structure diagram of the present invention;

[0017] Figure 4 is a schematic diagram of the connection structure between the side teeth and the first support rod of the present invention;

[0018] Figure 5 is a schematic diagram of the first threaded rod structure of the present invention.

[0019] In the figure, 1, top plate; 2, bottom plate; 3, first support rod; 4, second support rod; 5, first chute; 6, first threaded rod; 7, first adjusting bolt; 8, rear teeth; 9, second chute; 10, second threaded rod; 11, second adjusting bolt; 12, side teeth. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0020] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0021] Embodiment 1:

[0022] Please refer to Figures 1-5, an embodiment of the present utility model provides a technical solution: a wet flower basket structure suitable for large-size silicon wafers, including a top plate 1, a first threaded rod 6, a rear clamping tooth 8 and a side clamping tooth 12. A bottom plate 2 is arranged below the top plate 1. A first support rod 3 and a second support rod 4 are arranged between the top plate 1 and the bottom plate 2. The side clamping tooth 12 is arranged on the surface of the first support rod 3. The rear clamping tooth 8 is arranged on one side of the second support rod 4. There are two first support rods 3 and two second support rods 4. One end of the top and the bottom of the first support rod 3 are internally provided with the first threaded rod 6. The first threaded rod 6 is located inside the first sliding groove 5. The first sliding grooves 5 are respectively opened on the surfaces of the top plate 1 and the bottom plate 2. Both ends of the first threaded rod 6 are welded with first adjusting bolts 7. The outer walls of the first adjusting bolts 7 are rotationally connected to both ends of the first sliding groove 5. The surface of the first threaded rod 6 is threadedly distributed at both ends, and the threads at both ends of the first threaded rod 6 face in opposite directions. Both ends of the first threaded rod 6 are threadedly connected to the first support rod 3. Through the opposite threads at both ends, the surface of the side clamping tooth 12 is in a quadrangular pyramid structure, and the shape of the rear clamping tooth 8 is the same as that of the side clamping tooth 12. By rotating the two first adjusting bolts 7, the first adjusting bolts 7 can drive the first threaded rod 6 to rotate. While the first threaded rod 6 rotates, it can synchronously drive the two first support rods 3 to move through the threads on the outer wall, so that the first support rods 3 can move in opposite directions synchronously, and then the distance between the two first support rods 3 can be adjusted to become larger, so that the flower basket can fix silicon wafers with a larger width. Then, the two ends of the silicon wafer are sequentially inserted between the side clamping teeth 12, so that the silicon wafers can be placed one above the other inside the flower basket, which is beneficial to placing silicon wafers with a larger width on the slide bar.

[0023] Embodiment 2:

[0024] An embodiment of the present utility model provides a technical solution: a wet flower basket structure suitable for large-sized silicon wafers. The other ends of the top plate 1 and the bottom plate 2 are provided with second sliding grooves 9. A second threaded rod 10 is arranged inside the second sliding groove 9. One end of the second threaded rod 10 is rotatably connected to the inside of the second sliding groove 9, and a second adjusting bolt 11 is welded to the other end of the second threaded rod 10. The second adjusting bolt 11 is rotatably connected to the other end of the second sliding groove 9. The second threaded rod 10 is respectively threadedly connected to both ends of the second support rod 4. The side clamping teeth 12 and the rear clamping teeth 8 are respectively distributed on the surfaces of the first support rod 3 and the second support rod 4 in an equidistant and regular pattern from top to bottom. The side clamping teeth 12 are made of rubber, and the rear clamping teeth 8 are made of the same material as the side clamping teeth 12. The rubber material can protect the surface of the silicon wafer during the loading and unloading processes, avoiding scratches and abrasions. By rotating the second adjusting bolt 11, the second adjusting bolt 11 can drive the second threaded rod 10 to rotate, and then the second threaded rod 10 can drive the second support rod 4 to move in the horizontal direction, thereby adjusting the distance between the second support rod 4 and the first support rod 3, so that the flower basket can place silicon wafers of different lengths. Then, one end of the silicon wafer is inserted between the rear clamping teeth 8 and can be fixed, and thus placed inside the flower basket, improving the adjustability of the device.

[0025] Working principle: By rotating the two first adjusting bolts 7, the first adjusting bolts 7 can drive the first threaded rod 6 to rotate. While the first threaded rod 6 is rotating, it can synchronously drive the two first support rods 3 to move through the threads on the outer wall, so that the first support rods 3 can move in opposite directions synchronously, and then the distance between the two first support rods 3 can be adjusted to become larger. By rotating the second adjusting bolt 11, the second adjusting bolt 11 can drive the second threaded rod 10 to rotate, and then the second threaded rod 10 can drive the second support rod 4 to move in the horizontal direction, thereby adjusting the distance between the second support rod 4 and the first support rod 3. The two ends of the silicon wafer are sequentially inserted between the side clamping teeth 12, and then one end of the silicon wafer is inserted between the rear clamping teeth 8 and can be fixed, and thus placed inside the flower basket.

[0026] The above shows and describes the basic principles, main features and advantages of the present utility model. For those skilled in the art, it is obvious that the present utility model is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic features of the present utility model. Therefore, in any regard, the embodiments should be regarded as exemplary and non-limiting. The scope of the present utility model is defined by the appended claims rather than the above description. Therefore, it is intended to include all changes falling within the meaning and scope of the equivalent elements of the claims in the present utility model. Any reference signs in the claims should not be regarded as limiting the claimed rights.

[0027] In addition, it should be understood that although this specification is described in terms of embodiments, not every embodiment contains only one independent technical solution. This narrative style of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A wet flower basket structure applicable to large-sized silicon wafers, characterized in that: It includes a top plate (1), a first threaded rod (6), a rear engaging tooth (8), and a side engaging tooth (12). A bottom plate (2) is provided below the top plate (1). A first support rod (3) and a second support rod (4) are provided between the top plate (1) and the bottom plate (2). The side engaging tooth (12) is provided on the surface of the first support rod (3). The rear engaging tooth (8) is provided on one side of the second support rod (4). There are two of both the first support rod (3) and the second support rod (4). One end of the top and the bottom of the first support rod (3) is internally provided with a first threaded rod (6). The first threaded rod (6) is located inside the first sliding groove (5). The first sliding groove (5) is respectively opened on the surfaces of the top plate (1) and the bottom plate (2). Both ends of the first threaded rod (6) are welded with first adjusting bolts (7). The outer wall of the first adjusting bolt (7) is rotatably connected to both ends of the first sliding groove (5).

2. The wet flower basket structure applicable to large-sized silicon wafers according to claim 1, wherein: The surface of the first threaded rod (6) is threadedly distributed at both ends, and the threads at both ends of the first threaded rod (6) face in opposite directions. Both ends of the first threaded rod (6) are threadedly connected to the first support rod (3).

3. The wet flower basket structure applicable to large-sized silicon wafers according to claim 1, wherein: The other ends of the top plate (1) and the bottom plate (2) are provided with second sliding grooves (9). A second threaded rod (10) is provided inside the second sliding groove (9). One end of the second threaded rod (10) is rotatably connected to the inside of the second sliding groove (9), and the other end of the second threaded rod (10) is welded with a second adjusting bolt (11). The second adjusting bolt (11) is rotatably connected to the other end of the second sliding groove (9). The second threaded rod (10) is threadedly connected to both ends of the second support rod (4).

4. The wet flower basket structure applicable to large-sized silicon wafers according to claim 1, characterized in that: The side engaging teeth (12) and the rear engaging teeth (8) are regularly distributed at equal intervals from top to bottom on the surfaces of the first support rod (3) and the second support rod (4) respectively.

5. The wet flower basket structure applicable to large-sized silicon wafers according to claim 1, characterized in that: The surface of the side engaging tooth (12) has a quadrangular pyramid structure, and the shape of the rear engaging tooth (8) is the same as that of the side engaging tooth (12).

6. The wet flower basket structure applicable to large-sized silicon wafers according to claim 1, wherein: The side engaging tooth (12) is made of rubber material, and the rear engaging tooth (8) has the same material as the side engaging tooth (12).

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