Oxidation source antenna for vacuum sputtering coating device

Abstract

The utility model discloses an oxidation source antenna for a vacuum sputtering coating device. The oxidation source antenna comprises a first end, a second end and a main body part located between the first end and the second end, wherein the first end and the second end are used for being connected with a radio frequency power supply; the main body part comprises a first working part, a second working part, a first connecting part, a second connecting part and a third connecting part; the first working part is connected with the first end through a first connecting part, the second working part is connected with the second end through a second connecting part, and the first working part is connected with the second working part through a third connecting part; the first working part and the second working part are oppositely arranged, and a substrate is placed between the first working part and the second working part; the first connecting part and the third connecting part are connected with the bottom of the first working part, and the second connecting part and the third connecting part are connected with the bottom of the second working part. The oxidation source antenna can ionize oxygen into plasma, separation of an oxidation system and a sputtering system is achieved, the system complexity is reduced, and the risk of target material poisoning is reduced.

Description

Technical Field

[0001] This specification relates to the technical field of vacuum coating, and particularly to an oxygen source antenna for a vacuum sputtering coating device. Background Art

[0002] When using a metal target for dielectric film coating in existing sputtering coating continuous line equipment, the commonly used method is as follows: an AC power supply is used, and the gas introduced on the surface of the target is a mixed gas of Ar and O2. While sputtering, the metal film is oxidized simultaneously to obtain an oxide dielectric film.

[0003] However, this method has the following defects:

[0004] 1. Using an AC power supply results in low production efficiency;

[0005] 2. It is very difficult to grasp the balance between the ratio of the mixed gas (argon and oxygen) and the sputtering power. If the oxidation rate is greater than the sputtering rate, an oxide dielectric film will be generated on the surface of the target, resulting in target poisoning. Summary of the Utility Model

[0006] In view of the deficiencies of the prior art, an object of this specification is to provide an oxygen source antenna for a vacuum sputtering coating device, which can ionize oxygen into plasma, realize the separation of the oxidation system and the sputtering system, reduce the system complexity, and reduce the risk of target poisoning.

[0007] To achieve the above object, an embodiment of this specification provides an oxygen source antenna for a vacuum sputtering coating device, including: a first end, a second end, and a main body portion located between the first end and the second end;

[0008] Wherein, the first end and the second end are used to be connected to a radio frequency power supply; the main body portion includes a first working portion, a second working portion, a first connecting portion, a second connecting portion, and a third connecting portion; the first working portion and the first end are connected through the first connecting portion, the second working portion and the second end are connected through the second connecting portion, and the first working portion and the second working portion are connected through the third connecting portion; the first working portion and the second working portion are arranged opposite to each other, and a substrate is placed between the first working portion and the second working portion; the first connecting portion and the third connecting portion are connected to the bottom of the first working portion, and the second connecting portion and the third connecting portion are connected to the bottom of the second working portion.

[0009] As a preferred embodiment, the plane where the first working portion is located is parallel to the plane where the second working portion is located.

[0010] As a preferred embodiment, the first connecting portion and the second connecting portion are located on the same straight line and are parallel to the straight line where the third connecting portion is located.

[0011] As a preferred embodiment, the plane where the first working part is located is perpendicular to the straight line where the first connecting part is located.

[0012] As a preferred embodiment, the first end is located below the first connecting part, the second end is located below the second connecting part, and the third connecting part is located above the first connecting part and the second connecting part.

[0013] As a preferred embodiment, the first end and the second end are arranged in parallel, and the first end is perpendicular to the straight line where the first connecting part is located.

[0014] As a preferred embodiment, the first working part includes at least three turns of antennas, and the second working part includes at least three turns of antennas.

[0015] As a preferred embodiment, the heights of the first working part and the second working part are greater than the thickness of the substrate.

[0016] As a preferred embodiment, the widths of the first working part and the second working part are greater than or equal to the width of the substrate, and the distance between the first working part and the second working part is greater than the length of the substrate.

[0017] As a preferred embodiment, the lengths of the first connecting part and the second connecting part are equal, and the length of the third connecting part is equal to the distance between the first working part and the second working part. Beneficial effects

[0018] The oxygen source antenna for a vacuum sputtering coating device provided by this embodiment, by setting the first end, the second end and the main body part, the main body part includes the first working part, the second working part, the first connecting part, the second connecting part and the third connecting part. During operation, the substrate can be placed between the first working part and the second working part. The first end and the second end are connected to the radio frequency power supply. After oxygen is introduced, the radio frequency power supply supplies power to the oxygen source antenna, and the oxygen source antenna can ionize oxygen into plasma, that is, oxygen plasma is formed near the substrate, and the metal film layer just deposited on the substrate surface can be oxidized to obtain the required dielectric film. Through the layout and structure of this oxygen source antenna, the oxidation system can be separated separately from the sputtering system, thus greatly reducing the complexity of the system and reducing the risk of target poisoning.

[0019] Moreover, by setting two working parts (the first working part and the second working part), oxygen plasma can be formed on both sides of the substrate at the same time, so that the oxidation of the metal film layer is more uniform, the obtained dielectric film is more uniform, and the coating effect is optimized.

[0020] With reference to the following description and the accompanying drawings, specific embodiments of the present invention are disclosed in detail, indicating the ways in which the principles of the present invention can be employed. It should be understood that the embodiments of the present invention are not limited in scope thereby.

[0021] Features described and / or illustrated for one embodiment can be used in the same or similar way in one or more other embodiments, combined with features in other embodiments, or substituted for features in other embodiments.

[0022] It should be emphasized that the term "comprising / including" when used herein refers to the presence of features, wholes, steps or components, but does not exclude the presence or addition of one or more other features, wholes, steps or components. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or in the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those skilled in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0024] Figure 1 FIG. is a three-dimensional structural schematic diagram of an oxidation source antenna for a vacuum sputtering coating device provided in this embodiment;

[0025] Figure 2 is Figure 1 front view of;

[0026] Figure 3 is Figure 1 right view of;

[0027] Figure 4 is Figure 1 top view of.

[0028] Description of Reference Numerals:

[0029] 1, first end; 2, second end; 31, first working part; 32, second working part; 33, first connecting part; 34, second connecting part; 35, third connecting part. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0030] To enable those skilled in the art to better understand the technical solutions in the present utility model, the following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0031] It should be noted that when an element is referred to as being "disposed on" another element, it can be directly on the other element or there can also be another intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be another intermediate element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are only for illustrative purposes and do not represent the only implementation manner.

[0032] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field to which the present utility model belongs. The terms used in the description of the present utility model herein are only for the purpose of describing specific implementation manners and are not intended to limit the present utility model. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0033] Please refer to Figures 1 to 4 。This application embodiment provides an oxidation source antenna for a vacuum sputtering coating device, including: a first end 1, a second end 2, and a main body portion located between the first end 1 and the second end 2.

[0034] Among them, the first end 1 and the second end 2 are used to be connected to a radio frequency power supply, and the radio frequency power supply can supply power to the oxidation source antenna. A part of the first end 1 and a part of the second end 2 extend out of the vacuum coating chamber, and the other parts of the oxidation source antenna are all within the vacuum coating chamber.

[0035] The main body portion includes a first working portion 31, a second working portion 32, a first connecting portion 33, a second connecting portion 34, and a third connecting portion 35. The first working portion 31 and the first end 1 are connected through the first connecting portion 33, the second working portion 32 and the second end 2 are connected through the second connecting portion 34, and the first working portion 31 and the second working portion 32 are connected through the third connecting portion 35. The first working portion 31 and the second working portion 32 are arranged oppositely, and a substrate is placed between the first working portion 31 and the second working portion 32. The first connecting portion 33 and the third connecting portion 35 are connected to the bottom of the first working portion 31, and the second connecting portion 34 and the third connecting portion 35 are connected to the bottom of the second working portion 32.

[0036] The oxygen source antenna for a vacuum sputtering coating device provided in this embodiment includes a first end 1, a second end 2, and a main body. The main body includes a first working part 31, a second working part 32, a first connecting part 33, a second connecting part 34, and a third connecting part 35. During operation, a substrate can be placed between the first working part 31 and the second working part 32. The first end 1 and the second end 2 are connected to a radio frequency power supply. After oxygen is introduced, the radio frequency power supply supplies power to the oxygen source antenna, and the oxygen source antenna can ionize oxygen into plasma, that is, oxygen plasma is formed near the substrate, and the metal film layer just deposited on the substrate surface can be oxidized to obtain the required dielectric film. Through the layout and structure of this oxygen source antenna, the oxidation system can be separated separately from the sputtering system, thus greatly reducing the complexity of the system and the risk of target poisoning.

[0037] Furthermore, by providing two working parts (the first working part 31 and the second working part 32), oxygen plasma can be formed simultaneously on both sides of the substrate, so that the oxidation of the metal film layer is more uniform, the obtained dielectric film is more uniform, and the coating effect is optimized.

[0038] In this embodiment, as Figure 2 and Figure 4 shown, the plane where the first working part 31 is located is parallel to the plane where the second working part 32 is located. Preferably, the planes where the first working part 31 and the second working part 32 are located are vertical planes and perpendicular to the plane where the substrate is located. Oxygen can be introduced from the bottom of the vacuum coating chamber near the first working part 31 and the second working part 32. The vertically arranged first working part 31 and second working part 32 ionize oxygen into plasma, and a molecular pump is provided at the top of the vacuum coating chamber to evacuate the coating chamber, and the excess oxygen can be pumped away to avoid contact between oxygen and the target surface and reduce the risk of target poisoning.

[0039] In a preferred embodiment, both the first working part 31 and the second working part 32 include multiple turns of antennas. The first working part 31 includes at least three turns of antennas, and the second working part 32 includes at least three turns of antennas, so that ionization work can be better carried out and the coating efficiency can be improved.

[0040] In this embodiment, the heights of the first working part 31 and the second working part 32 are greater than the thickness of the substrate, so that the ionized oxygen plasma can oxidize the metal film layer on the substrate surface.

[0041] Furthermore, the widths of the first working part 31 and the second working part 32 are greater than or equal to the width of the substrate, and the distance between the first working part 31 and the second working part 32 is greater than the length of the substrate, so as to ensure the realization of the oxidation effect. The width described in this embodiment is the dimension in the up and down direction when the reader faces Figure 4 ; the length described in this embodiment is the dimension when the reader facesFigure 4 The dimension in the left - right direction at [specific time].

[0042] As Figure 4 shown, the first connecting portion 33 and the second connecting portion 34 are located on the same straight line and parallel to the straight line where the third connecting portion 35 is located, which can make the structure of the oxidation source antenna have symmetry and reduce the loss of the connecting wire. Preferably, the plane where the first working portion 31 is located is perpendicular to the straight line where the first connecting portion 33 is located.

[0043] In this embodiment, as Figure 2 and Figure 3 shown, the first end 1 is located below the first connecting portion 33, and the second end 2 is located below the second connecting portion 34, which is convenient for extending a part of the first end 1 and a part of the second end 2 outside the vacuum coating chamber and connecting them to the radio - frequency power supply.

[0044] Specifically, as Figure 1 shown, the connection position between the first working portion 31 and the first connecting portion 33 is at the lowermost end of the first working portion 31. The antenna winds to form the first working portion 31, and the connection position between the first working portion 31 and the third connecting portion 35 is at the uppermost end of the bottom coil of the first working portion 31. The connection position between the second working portion 32 and the second connecting portion 34 is at the lowermost end of the second working portion 32. The antenna winds to form the second working portion 32, and the connection position between the second working portion 32 and the third connecting portion 35 is at the uppermost end of the bottom coil of the second working portion 32. Thus, as Figure 2 shown, the third connecting portion 35 is located above the first connecting portion 33 and the second connecting portion 34, and the positions where the third connecting portion 35 is connected to the first working portion 31 and the second working portion 32 are located inside the inner circles of the two coils.

[0045] Preferably, the first end 1 and the second end 2 are arranged in parallel, and the first end 1 is perpendicular to the straight line where the first connecting portion 33 is located. The straight line where the first connecting portion 33 is located is parallel to the horizontal plane, and the first end 1 and the second end 2 are perpendicular to the horizontal plane, which is convenient for connecting the first end 1 and the second end 2 to the radio - frequency power supply and also convenient for installing the oxidation source antenna in the vacuum coating chamber.

[0046] To make the structure more symmetrical and convenient for manufacturing, the lengths of the first connecting portion 33 and the second connecting portion 34 are made equal. The length of the third connecting portion 35 is equal to the distance between the first working portion 31 and the second working portion 32.

[0047] The oxidation source antenna provided by the embodiments of the present application may be made of copper, iron, aluminum, titanium, etc. In the embodiments of the present application, the straight line where the first connecting portion 33 (or the second connecting portion 34, the third connecting portion 35) is located can be understood as the straight line where the center line of the first connecting portion 33 (or the second connecting portion 34, the third connecting portion 35) is located, and the plane where the first working portion 31 (or the second working portion 32) is located can be understood as the plane where the multiple center lines of the first working portion 31 (or the second working portion 32) are located.

[0048] It should be noted that in the description of this specification, the terms "first", "second", etc. are only used for descriptive purposes and to distinguish similar objects, and there is no sequence between them, nor can they be understood as indicating or implying relative importance. In addition, in the description of this specification, unless otherwise stated, the meaning of "a plurality" is two or more.

[0049] Any numerical value cited herein includes all values from the lower value to the upper value increasing by one unit between the lower limit and the upper limit, as long as there is an interval of at least two units between any lower value and any higher value. For example, if the value of the number of components or process variables (such as temperature, pressure, time, etc.) is stated to be from 1 to 90, preferably from 20 to 80, more preferably from 30 to 70, then the purpose is to illustrate that values such as 15 to 85, 22 to 68, 43 to 51, 30 to 32, etc. are also explicitly listed in this specification. For values less than 1, a unit is appropriately considered to be 0.0001, 0.001, 0.01, 0.1. These are merely examples intended to be clearly expressed, and it can be considered that all possible combinations of the numerical values listed between the lowest value and the highest value are explicitly set forth in this specification in a similar manner.

[0050] Unless otherwise stated, all ranges include the endpoints and all numbers between the endpoints. The "about" or "approximate" used in conjunction with a range applies to both endpoints of the range. Thus, "about 20 to 30" is intended to cover "about 20 to about 30", including at least the specified endpoints.

[0051] All articles and references disclosed, including patent applications and publications, are incorporated herein by reference for various purposes. The term "consisting essentially of" describing a combination should include the identified elements, components, parts or steps and other elements, components, parts or steps that do not substantially affect the basic novel features of the combination. The use of the terms "comprising" or "including" to describe the combinations of elements, components, parts or steps herein also contemplates embodiments consisting essentially of these elements, components, parts or steps. By using the term "may" herein, it is intended to indicate that any attribute described as "may" included is optional.

[0052] Multiple elements, components, parts, or steps can be provided by a single integrated element, component, part, or step. Alternatively, a single integrated element, component, part, or step may be separated into discrete multiple elements, components, parts, or steps. The disclosure of "a" or "an" used to describe an element, component, part, or step does not preclude the presence of other elements, components, parts, or steps.

[0053] It should be understood that the above description is for illustrative purposes and not for limitation. Many embodiments and many applications other than the examples provided will be apparent to those skilled in the art upon reading the above description. Therefore, the scope of the present teachings should not be determined with reference to the above description, but rather should be determined with reference to the appended claims and the full scope of equivalents to which those claims are entitled. For the sake of completeness, all articles and references, including patent applications and publications, are incorporated herein by reference. The omission of any aspect of the subject matter disclosed herein from the foregoing claims is not intended to abandon such subject matter, nor should it be considered that the inventor has not considered such subject matter to be a part of the disclosed utility model subject matter.

Claims

1. An oxidation source antenna for a vacuum sputtering coating device, characterized in that, Comprising: A first end, a second end, and a body portion located between the first end and the second end; Wherein, the first end and the second end are used to be connected to a radio frequency power supply; the body portion includes a first working portion, a second working portion, a first connecting portion, a second connecting portion, and a third connecting portion; the first working portion and the first end are connected through the first connecting portion, the second working portion and the second end are connected through the second connecting portion, and the first working portion and the second working portion are connected through the third connecting portion; the first working portion and the second working portion are arranged opposite to each other, and a substrate is placed between the first working portion and the second working portion; the first connecting portion and the third connecting portion are connected to the bottom of the first working portion, and the second connecting portion and the third connecting portion are connected to the bottom of the second working portion.

2. The oxidation source antenna for a vacuum sputtering coating device according to claim 1, wherein The plane where the first working portion is located is parallel to the plane where the second working portion is located.

3. The oxidation source antenna for a vacuum sputtering coating device according to claim 2, characterized in that, The first connecting portion and the second connecting portion are located on the same straight line and are parallel to the straight line where the third connecting portion is located.

4. The oxidation source antenna for a vacuum sputtering coating device according to claim 3, characterized in that, The plane where the first working portion is located is perpendicular to the straight line where the first connecting portion is located.

5. The oxidation source antenna for a vacuum sputtering coating device according to claim 4, characterized in that, The first end is located below the first connecting portion, the second end is located below the second connecting portion, and the third connecting portion is located above the first connecting portion and the second connecting portion.

6. The oxidation source antenna for a vacuum sputtering coating device according to claim 5, characterized in that, The first end and the second end are arranged in parallel, and the first end is perpendicular to the straight line where the first connecting portion is located.

7. The oxidation source antenna for a vacuum sputtering coating device according to claim 1, characterized in that, The first working portion includes at least three turns of antennas, and the second working portion includes at least three turns of antennas.

8. The oxidation source antenna for a vacuum sputtering coating device according to claim 1, wherein The height of the first working portion and the second working portion is greater than the thickness of the substrate.

9. The oxidation source antenna for a vacuum sputtering coating device according to claim 1, characterized in that, The width of the first working portion and the second working portion is greater than or equal to the width of the substrate, and the distance between the first working portion and the second working portion is greater than the length of the substrate.

10. The oxidation source antenna for a vacuum sputtering coating device according to claim 1, characterized in that, The lengths of the first connecting portion and the second connecting portion are equal, and the length of the third connecting portion is equal to the distance between the first working portion and the second working portion.

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