Constant temperature structure and linear motor

By setting a constant temperature structure of cooling channels between the scale and the base, and using cold fluid to block heat transfer, the thermal expansion problem during linear motor operation is solved, the measurement accuracy of the grating system is improved and the processing complexity is reduced.

CN223156902UActive Publication Date: 2025-07-25SHENZHEN DYNAMIKWELL TECH
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Patent Information

Application Number
CN202422367785.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-09-26
Publication Date
2025-07-25
Estimated Expiration
2034-09-26

AI Technical Summary

Technical Problem

The heat generated by linear motors during operation causes changes in the thermal expansion coefficient of the scale, affecting the measurement accuracy of the grating system. The existing cooling system is not effective in high-frequency operation or high-temperature environments, which increases manufacturing cost and processing difficulty.

Method used

A constant temperature structure is set up between the scale of the grating system and the linear motor base, and cold fluid is used to carry away heat through the cooling channel, separate the scale from the base, keep the scale working within the appropriate temperature range, and adopt a T-shaped structure to improve stability.

Benefits of technology

It effectively reduces the change in the thermal expansion coefficient of the scale, improves the heat dissipation effect, reduces the impact of thermal expansion on measurement accuracy, and reduces the difficulty and cost of processing.

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Abstract

The utility model is applicable to the technical field of linear motors, and discloses a constant-temperature structure and a linear motor, the constant-temperature structure comprises a base, the base is provided with a cooling duct for a cold fluid to pass through, the base is provided with a first surface and a second surface which are oppositely arranged, the first surface is used for installing a grating ruler, and the second surface is used for being installed on a base. The constant temperature structure is arranged between the grating ruler of the grating system and the base of the linear motor, the heat dissipation effect on the grating ruler can be improved, the phenomenon that the thermal expansion coefficient of the grating ruler changes can be effectively reduced, and the influence of thermal expansion on the measurement precision of the grating ruler is reduced.
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Description

Technical Field

[0001] This application relates to the technical field of linear motors, and particularly to a constant temperature structure and a linear motor. Background Art

[0002] The grating system, also known as the grating system displacement sensor, is a device that uses the optical principle of gratings for displacement detection and is often applied to linear motors. The grating system realizes the function of displacement detection through the cooperation of a grating head (also known as a grating encoder) and a grating scale. Among them, the grating head is installed on the slide table of the linear motor, and the grating scale is installed on the scale mounting surface of the linear motor.

[0003] However, the heat generated during the operation of the linear motor can be transferred to the scale mounting surface of the linear motor through the heat transfer effect of the components in the linear motor, causing the temperature of the scale mounting surface to rise, resulting in a change in the thermal expansion coefficient of the grating scale, affecting the use accuracy of the grating scale, and thus affecting the operation accuracy of the linear motor. Utility Model Content

[0004] The first object of this application is to provide a constant temperature structure that can improve the heat dissipation effect on the grating scale, effectively reduce the phenomenon of change in the thermal expansion coefficient of the grating scale, and reduce the influence of thermal expansion on the measurement accuracy of the grating scale.

[0005] To achieve the above object, the solution provided by this application is:

[0006] A constant temperature structure for being arranged between the grating scale of the grating system and the base of the linear motor, the constant temperature structure comprising:

[0007] A base provided with cooling channels for a cooling fluid to pass through;

[0008] The base has a first surface and a second surface that are oppositely arranged, the first surface is used for mounting the grating scale, and the second surface is used for mounting on the base.

[0009] The second object of this application is to provide a linear motor, comprising a linear motor main body, a grating system, and the above constant temperature structure. The linear motor main body comprises a base, a guide rail, and a slide table. The guide rail and the constant temperature structure are both mounted on the base, and the slide table is slidably connected to the guide rail;

[0010] The grating system comprises a grating head and a grating scale. The grating scale is mounted on the first surface, and the grating head is arranged on the slide table and slides with the slide table to perform reciprocating motion along the extending direction of the grating scale.

[0011] The constant temperature structure provided by this application has the following beneficial effects:

[0012] In the constant temperature structure of this embodiment, the first surface of the base is used to install the scale, and the second surface of the base is used to be installed on the base, so that the base can separate the scale and the base of the linear motor to avoid direct contact between the scale and the base. At the same time, the cold fluid is used to take away the heat on the base, and the cold fluid is used to keep the temperature of the first surface within a temperature range suitable for the operation of the scale. This is beneficial for isolating the heat source and improving the heat dissipation effect of the scale installed on the first surface, thereby effectively reducing the phenomenon of changes in the thermal expansion coefficient of the scale, thereby effectively reducing the influence of thermal expansion on the measurement accuracy of the scale, and further reducing the influence on the operating accuracy of the linear motor. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0014] Figure 1 It is a schematic diagram of the assembly structure of the grating system and the constant temperature structure provided in the embodiment of the present application;

[0015] Figure 2 is a structural schematic diagram of a constant temperature structure provided in an embodiment of the present application at a first viewing angle;

[0016] Figure 3 is a structural schematic diagram of the constant temperature structure provided in an embodiment of the present application at a second viewing angle;

[0017] Figure 4 is a structural schematic diagram of the constant temperature structure provided in an embodiment of the present application at a third viewing angle;

[0018] Figure 5 It is a structural schematic diagram of the constant temperature structure provided in an embodiment of the present application at a fourth viewing angle.

[0019] Description of Figure Numbers:

[0020] 1. Constant temperature structure; 2. Grating system; 201. Grating reader; 202. Grating scale;

[0021] 10. base; 10a. first surface; 10b. second surface; 10c. first side surface; 10d. second side surface; 11. first seat body; 12. second seat body;

[0022] 20. Cooling channel; 21. First part; 22. Second part;

[0023] 30. Extension plate; 30a. Fixing surface; 31. Mounting hole; 40. Mounting surface. Detailed implementation manners

[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without making creative efforts belong to the scope protected by the present application.

[0025] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present application are only used to explain the relative positional relationship and movement conditions between components in a specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0026] It should also be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or there may be a middle element at the same time. When an element is referred to as "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element through a middle element.

[0027] In addition, the descriptions involving "first", "second", etc. in the present application are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between various embodiments can be combined with each other, but it must be based on the fact that those of ordinary skill in the art can implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present application.

[0028] In some related technologies, a linear motor includes a base, a slide table, a guide rail, and a mover. The guide rail is disposed on the base, the slide table is precisely installed with the guide rail, the mover is connected to the side of the slide table facing the base, the grating reader of the grating system is installed on the slide table, a scale surface is provided on the base, and the grating ruler of the grating system is attached to the scale surface. During the operation of the linear motor, the heat generated when the mover runs will be transferred to the scale surface of the linear motor through the slide table, causing the temperature of the scale surface to rise, resulting in a change in the thermal expansion coefficient of the grating system, affecting the use accuracy of the grating system, and thus affecting the operation accuracy of the linear motor.

[0029] Currently, a water-cooling or air-cooling system is designed inside a linear motor (such as the base) to dissipate heat from the ruler surface of the linear motor. However, this cannot effectively solve the above problems. Especially when the linear motor operates at high frequencies or the ambient temperature is relatively high, the temperature of the linear motor rises more significantly during operation, resulting in an increase in the temperature of the ruler surface and affecting the use accuracy of the grating system. At the same time, adding a water-cooling or air-cooling system inside the linear motor will greatly increase the manufacturing cost and processing difficulty of the linear motor.

[0030] Therefore, the embodiments of the present application provide a constant-temperature structure and a linear motor. The constant-temperature structure is installed on the base of the linear motor and is used to separate the grating ruler of the grating system from the base. It can dissipate heat from the grating ruler without changing the main structure of the linear motor, and can also improve the heat dissipation effect on the grating ruler, reduce the phenomenon of change in the coefficient of thermal expansion of the grating ruler, and reduce the influence of thermal expansion on the measurement accuracy of the grating ruler.

[0031] The following will Figure 1 be described in detail in conjunction with the attached Figure 5 drawings. In the case of no conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0032] As Figure 1 shown in Figure 2 FIGs. and, the constant-temperature structure 1 provided by the embodiments of the present application is used to be arranged between the grating ruler 202 of the grating system 2 and the base of the linear motor (not shown in the figure) to separate the grating ruler 202 and the base. The grating system 2 can be an LAMOTION ABS series absolute grating, or other types of grating systems or grating sensors. This embodiment does not make any limitations. Specifically, the constant-temperature structure 1 includes a base 10. The base 10 is provided with cooling channels 20 through which a cooling fluid can pass. The cooling fluid can be a cooling liquid such as cold water, or a cooling gas such as cold air. The base 10 has a first surface 10a and a second surface 10b which are oppositely arranged. The first surface 10a is used to mount the grating ruler 202, and the second surface 10b is used to mount on the base.

[0033] In the constant temperature structure 1 of this embodiment, the first surface 10a of the base 10 is used to mount the grating scale 202, and the second surface 10b of the base 10 is used to be mounted on the base, so that the base 10 can separate the grating scale 202 from the base of the linear motor, avoiding direct contact between the grating scale 202 and the base. At the same time, when the cold fluid passes through the cooling channels 20 of the base 10, it can take away the heat transferred to the base 10 during the operation of the linear motor, so as to dissipate heat from the grating scale 202 mounted on the first surface 10a. This is beneficial for separating the heat source and can also improve the heat dissipation effect on the first surface 10a, thereby improving the heat dissipation effect on the grating scale 202, reducing the phenomenon of change in the thermal expansion coefficient of the grating scale 202, and effectively reducing the influence of thermal expansion on the measurement accuracy of the grating scale 202. In specific applications, the temperature of the first surface 10a can also be adjusted by adjusting the temperature of the cold fluid flowing through the cooling channels 20, so that the temperature of the first surface 10a is maintained within the temperature range suitable for the operation of the grating scale 202, further reducing the phenomenon of change in the thermal expansion coefficient of the grating scale 202, thereby effectively reducing the influence of thermal expansion on the measurement accuracy of the grating scale 202, and further reducing the influence on the operation accuracy of the linear motor.

[0034] It can be seen that in this embodiment, while setting the base 10 to separate the grating scale 202 from the base, the cold fluid is also used to keep the temperature of the first surface 10a in a constant temperature state (i.e., within a stable temperature range), which can cut off the heat transfer of the linear motor, improve the heat dissipation effect on the first surface 10a, thereby improving the heat dissipation effect on the grating scale 202, and can also effectively ensure that the grating scale 202 can work within an appropriate temperature range. It should be understood that the appropriate temperature range can be the working temperature range of the grating system 2. In actual applications, the temperature of the first surface 10a can be adjusted within the temperature range suitable for the operation of the grating system 2 according to the working temperature of different grating systems 2.

[0035] In addition, compared with directly setting a cooling system in the base of the linear motor to reduce the temperature of the surface where the grating is attached to the linear motor, this embodiment uses this constant temperature structure 1 to separate the grating scale 202 from the base of the linear motor and dissipate heat from the grating scale 202, without changing the structure of the linear motor body, which can reduce the processing difficulty and processing cost of the linear motor.

[0036] Such as Figure 1As shown, in the embodiment of the present application, one end of the cooling channel 20 is used to connect to the inlet of a cold flow pipeline (not shown in the figure), and the other end of the cooling channel 20 is used to connect to the outlet of the cold flow pipeline. The cold flow pipeline is used to convey cold fluid, so that the cold fluid enters the cooling channel 20 from one end of the cooling channel 20 and flows out of the cooling channel 20 from the other end of the cooling channel 20. Thus, the cold fluid can flow in one direction along the entire cooling channel 20, taking away the heat on the base 10. In some embodiments, the cold fluid is cold water or cold air. Correspondingly, the cold flow pipeline is a water pipe or an air pipe. One end of the cooling channel 20 is locked and connected to the inlet of the cold flow pipeline through an air pipe joint or a water pipe joint, and the other end of the cooling channel 20 is locked and connected to the outlet of the cold flow pipeline through an air pipe joint or a water pipe joint.

[0037] As Figure 1 , Figure 2 and Figure 4 As shown, in the embodiment of the present application, the constant temperature structure 1 further includes two extension plates 30. The two extension plates 30 are arranged at intervals in the first direction, and the first direction is perpendicular to the length direction of the base 10. Each extension plate 30 is connected to the side surface of the base 10. It should be noted that the first direction can be understood as the width direction of the base 10, or it can be understood as the left-right direction of the base 10 when the base 10 is placed horizontally. The two extension plates 30 are respectively connected to the left and right sides of the base 10. At the same time, the second surface 10b and the surface of the extension plate 30 away from the first surface 10a belong to the same plane, and the two are connected to form a mounting surface 40. The mounting surface 40 is used to be mounted on the base, which is convenient for installation. It can be understood that the bottom surface of the base 10 and the bottom surface of the extension plate 30 belong to the same plane. Thus, the two extension plates 30 and the base 10 form a T-shaped structure. It can be known that the T-shaped structure has high stability and good bending and torsion resistance. Therefore, it can improve the structural stability of the constant temperature structure 1, effectively ensuring that the grating scale 202 remains stable during use and effectively avoiding the phenomenon that the grating scale 202 generates measurement errors due to mechanical deformation of the constant temperature structure 1. At the same time, the two extension plates 30 and the base 10 form a T-shaped structure, which also helps to mount the constant temperature structure 1 on platforms such as the base of a linear motor to be applicable to different equipment platforms.

[0038] As Figure 1 and Figure 4 As shown, in some embodiments, a scale mounting position with precision is provided on the base of the linear motor. The linear motor can provide a high-precision measurement environment. The mounting surface 40 is used to be fixed on the scale mounting position to mount the constant temperature structure 1 on the scale mounting position. When the cold fluid passes through the cooling channel 20, it can take away the heat transferred to the base 10. At the same time, the base 10 can also isolate the heat source, effectively ensuring that the grating system 2 can provide stable and repeatable measurement results in situations such as high-frequency operation of the linear motor or high ambient temperature.

[0039] As Figure 2 and Figure 3 shown, in the embodiment of the present application, the base 10 includes a first base body 11 and a second base body 12 that are integrally formed and connected. The first base body 11 is located above the second base body 12. The integral formation and connection of the first base body 11 and the second base body 12 helps to reduce the processing steps when preparing the base 10. The surface of the first base body 11 facing away from the second base body 12 is the first surface 10a, and the surface of the second base body 12 facing away from the first base body 11 is the second surface 10b. Two extension plates 30 are respectively connected to the opposite side surfaces of the second base body 12 along the first direction, where the first direction is the width direction of the base 10. The cooling channel 20 is provided in the first base body 11, or a part of the cooling channel 20 is provided in the first base body 11 and the other part is provided in the second base body 12. In both cases, when the cold fluid passes through the cooling channel 20, heat dissipation of the base 10 can be achieved.

[0040] As Figure 3 shown, in some embodiments, in the thickness direction of the base 10, the thickness of the first base body 11 is greater than the thickness of the second base body 12, which is beneficial for processing the cooling channel 20. Herein, the thickness direction of the base 10 can also be understood as the up-and-down direction of the base 10.

[0041] As Figure 3 and Figure 4 shown, in the embodiment of the present application, each extension plate 30 is integrally formed and connected to the side surface of the base 10. It can be understood that in the first direction, that is, the width direction of the base 10, the base 10 has a first side surface 10c and a second side surface 10d that are oppositely arranged. Among the two extension plates 30, one extension plate 30 is connected to the first side surface 10c, and the other extension plate 30 is connected to the second side surface 10d. In this embodiment, the integral formation and connection of the base 10 and the extension plate 30 is beneficial to improve the connection stability between the extension plate 30 and the base 10, and is also beneficial for preparing the constant temperature structure 1.

[0042] As Figure 3 shown, in the embodiment of the present application, each extension plate 30 is arranged at an angle with the side surface of the base 10, such as a 90-degree angle, which helps the base 10 and the two extension plates 30 to form a T-shaped structure and improve the structural stability of the constant temperature structure 1.

[0043] As Figure 5 shown, in the embodiment of the present application, each extension plate 30 is provided with a mounting hole 31 corresponding to the fixing hole of the base. A fixing member (not shown in the figure) is provided on the mounting hole 31, and the fixing member sequentially passes through the mounting hole 31 and the fixing hole to mount the extension plate 30 on the base.

[0044] In this embodiment, the epitaxial plate 30 and the base are fixedly installed through fixing members, so as to fixedly install the constant temperature structure 1 on the base. Exemplarily, both the fixing holes and the mounting holes 31 can be screw holes, and the fixing members are screws. Combining with the screw - tightening technique, the epitaxial plate 30 can be locked on the base, thereby locking the constant temperature structure 1 on the base.

[0045] As Figure 3 and Figure 5 shown, in the embodiment of the present application, each epitaxial plate 30 has a fixing surface 30a, and the fixing surface 30a of each epitaxial plate 30 is perpendicular to the side surface of the base 10, which helps to improve the connection stability between the base 10 and the epitaxial plate 30; in the same epitaxial plate 30, the mounting holes 31 penetrate through the fixing surface 30a and the side of the epitaxial plate 30 away from the first surface 10a, so that the fixing member can pass through the epitaxial plate 30 to fix the epitaxial plate 30 on the base of the linear motor.

[0046] Combined with Figure 2 , in the embodiment of the present application, the outer surface of the base 10 and / or the epitaxial plate 30 is surface - treated to form a protective layer (not shown in the figure), which can protect the substrate and / or the epitaxial plate 30 and extend the service life of the constant temperature structure 1. In specific applications, different surface - treatment processes can be selected according to the actual situation to form a protective layer on the outer surface of the base 10 and / or the epitaxial plate 30.

[0047] Combined with Figure 2 , in some embodiments, the outer surface of the base 10 and / or the epitaxial plate 30 is anti - corrosion - treated to form a protective layer to enhance the anti - corrosion ability of the base 10 and / or the epitaxial plate 30, so as to extend the service life of the base 10 and / or the epitaxial plate 30, thereby extending the service life of the constant temperature structure 1. In other embodiments, the outer surfaces of the base 10 and the epitaxial plate 30 are anodized to form a protective layer, so that the base 10 and the epitaxial plate 30 can effectively resist thermal expansion, thereby improving the dimensional stability of the base 10 and the epitaxial plate 30 under different temperature conditions, and extending the service life of the base 10 and the epitaxial plate 30, thereby extending the service life of the constant temperature structure 1.

[0048] Combined with Figure 1 and Figure 2 , in some embodiments, sandblasting treatment, such as chrome plating, can be performed on the outer surface of the base 10 and / or the epitaxial plate 30, which can also play a role in protecting the base 10 and / or the epitaxial plate 30 to a certain extent. In some embodiments, on the basis of forming a protective layer on the outer surface of the base 10 and / or the epitaxial plate 30, the protective layer can be smoothed, so that the outer surface of the constant temperature structure 1 is smooth, which helps to reduce the friction between the first surface 10a and the grating scale 202, and reduce the friction between the second surface 10b and the base. At the same time, it is convenient to clean and maintain the constant temperature structure 1.

[0049] Combined withFigure 1 , in the embodiment of the present application, the base 10 is a heat-conducting base and / or the epitaxial plate 30 is a heat-conducting plate, which can conduct the heat on the base 10. Exemplarily, the material of the base 10 is a heat-conducting material with good heat conduction, and the material of the epitaxial plate 30 is a heat-conducting material with good heat conduction, which can quickly conduct the excess heat on the base 10, improve the heat dissipation effect on the grating scale 202, and the heat-conducting material can be a metal material, such as aluminum. In some embodiments, the materials of both the base 10 and the epitaxial plate 30 are selected as aluminum, which is beneficial to both the base 10 and the epitaxial plate 30 to resist thermal expansion, and is also beneficial to processing cooling channels 20 on the constant temperature structure 1, and performing anodic oxidation treatment on the outer surfaces of the base 10 and the epitaxial plate 30.

[0050] Such as Figure 1 and Figure 4 As shown, in the embodiment of the present application, a shock-absorbing layer (not shown in the figure) is stacked on the mounting surface 40 to avoid, to a certain extent, the measurement error of the grating scale 202 caused by vibrations brought about by environmental vibrations or mechanical operations. In some embodiments, the shock-absorbing layer is interposed between the mounting surface 40 and the base. In other embodiments, a shock-absorbing layer is formed on the mounting surface 40, for example, a shock-absorbing material is coated on the mounting surface 40 to form a shock-absorbing layer.

[0051] Such as Figure 1 , Figure 2 and Figure 5 As shown, in the embodiment of the present application, the cooling channel 20 penetrates through the opposite side surfaces of the base 10 along the length direction of the base 10 and extends linearly along the length direction of the base 10, which helps the cold fluid to pass through the base 10, and the cooling pipe arranged linearly is easy to process, which helps to reduce the processing difficulty of the cooling channel 20. Further, in combination with the embodiment in which the base 10 includes a first body 11 and a second body 12, the cooling channel 20 includes a first part 21 and a second part 22 which are arranged in an up-and-down communication manner. The first part 21 is located in the first body 11, and the second part 22 is located in the second body 12. In the length direction of the base 10, the orthographic projection area of the first part 21 is larger than the orthographic projection area of the second part 22. For example, the orthographic projection area of the first part 21 occupies more than 95% of the orthographic projection area of the cooling channel 20, which helps the cold fluid flowing through the cooling channel 20 to cool the first surface 10a.

[0052] Combined with Figure 1 and Figure 2The present embodiment further provides a linear motor, which includes a linear motor body (not shown), a grating system 2 and the above-mentioned constant temperature structure 1. The linear motor body includes a base (not shown), a guide rail (not shown) and a slide (not shown). The guide rail and the constant temperature structure 1 are both installed on the base. The guide rail and the constant temperature structure 1 can be arranged at intervals along the width direction of the base 10, and the slide is slidably connected to the guide rail; the grating system 2 includes a grating reader 201 and a scale 202. The grating reader 201 can move relative to the scale 202. The scale 202 is installed on the first surface 10a. The grating reader 201 is set on the slide and slides with the slide to perform reciprocating motion along the extension direction of the scale 202.

[0053] The linear motor of this embodiment uses the above-mentioned constant temperature structure 1, and the constant temperature structure 1 is installed between the scale 202 and the base. The constant temperature structure 1 can separate the scale 202 and the base of the linear motor to avoid direct contact between the scale 202 and the base, which helps to isolate the heat source. At the same time, when the cold fluid passes through the cooling channel 20 of the base 10, it can take away the heat transferred to the base 10 when the linear motor is running, so as to dissipate the heat of the scale 202.

[0054] In this embodiment, while providing a constant temperature structure 1 to separate the scale 202 from the base, a cold fluid is used to maintain the temperature of the first surface 10a in a constant temperature state (i.e., within a stable temperature range), which can cut off the heat transfer of the linear motor and improve the heat dissipation effect of the scale 202, so that the temperature of the first surface 10a is maintained within a temperature range suitable for the operation of the scale 202, thereby reducing the phenomenon of changes in the thermal expansion coefficient of the scale 202, avoiding the influence of thermal expansion on the measurement accuracy of the scale 202, and thus reducing the influence on the operating accuracy of the linear motor.

[0055] In addition, compared to directly setting up a cooling system in the base of the linear motor to reduce the temperature of the scale surface of the linear motor, this embodiment uses the constant temperature structure 1 to separate the scale 202 and the base of the linear motor and dissipate heat for the scale 202. There is no need to change the structure of the linear motor body, which can reduce the processing difficulty and processing cost of the linear motor.

[0056] The above description is only a preferred embodiment of the present application, and does not limit the patent scope of the present application. All equivalent structural changes made by using the contents of the present application specification and drawings under the application concept of the present application, or directly / indirectly used in other related technical fields are included in the patent protection scope of the present application.

Claims

1. A constant temperature structure for being arranged between a grating ruler of a grating system and a base of a linear motor, characterized in that, The constant temperature structure includes: a base provided with cooling channels for a cooling fluid to pass through; The base has a first surface and a second surface which are oppositely arranged. The first surface is used for mounting the grating scale, and the second surface is used for mounting on the base.

2. The constant temperature structure according to claim 1, characterized in that, The constant temperature structure further includes: two extension plates spaced along a first direction perpendicular to the length direction of the base, and each extension plate is connected to the side surface of the base; The second surface and the side of the extension plate away from the first surface belong to the same plane and are connected to form a mounting surface for mounting on the base.

3. The constant temperature structure according to claim 2, characterized in that, The base includes a first body and a second body integrally formed and connected. The side of the first body facing away from the second body is the first surface, and the side of the second body facing away from the first body is the second surface; The two extension plates are respectively connected to the opposite side surfaces of the second body along the first direction; The cooling channels are provided in the first body, or a part of the cooling channels is provided in the first body and another part of the cooling channels is provided in the second body.

4. The constant temperature structure according to claim 3, characterized in that, Each extension plate is integrally formed and connected to the side surface of the base; and / or Each extension plate is arranged at an angle with the side surface of the base.

5. The constant temperature structure according to claim 3, characterized in that Each extension plate is provided with mounting holes corresponding to the fixing holes of the base. Fixing members are provided on the mounting holes, and the fixing members sequentially pass through the mounting holes and the fixing holes to mount the extension plates on the base.

6. The constant temperature structure according to claim 5, wherein, Each extension plate has a fixing surface, and the fixing surface of each extension plate is perpendicular to the side surface of the base; In the same extension plate, the mounting holes penetrate through the fixing surface and the side of the extension plate away from the first surface.

7. The constant temperature structure according to claim 2, wherein The outer surface of the base and / or the extension plate is surface-treated to form a protective layer; and / or The base is a heat-conducting base and / or the extension plate is a heat-conducting plate.

8. The constant temperature structure according to claim 2, wherein A shock-absorbing layer is stacked on the mounting surface.

9. The constant temperature structure according to any one of claims 1-8, characterized in that, The cooling channels penetrate through the opposite side surfaces of the base along the length direction of the base and extend linearly along the length direction of the base; and / or One end of the cooling channels is used for connecting the inlet of the cold flow pipeline, and the other end of the cooling channels is used for connecting the outlet of the cold flow pipeline.

10. A linear motor, characterized in that, It includes a linear motor main body, a grating system, and the constant temperature structure according to any one of claims 1-9. The linear motor main body includes a base, a guide rail, and a slide table. The guide rail and the constant temperature structure are both mounted on the base, and the slide table is slidably connected to the guide rail; The grating system includes a grating reader head and a grating scale. The grating scale is mounted on the first surface, and the grating reader head is arranged on the slide table and slides with the slide table to perform reciprocating motion along the extension direction of the grating scale.