Gallium arsenide wafer cutting device

Abstract

The utility model discloses a gallium arsenide wafer cutting device, which relates to the technical field of gallium arsenide wafer processing, and comprises a rack, a processing box is arranged at the top of the rack, a cleaning assembly is arranged on one side in the processing box, the cleaning assembly comprises a protection frame, a bidirectional motor is arranged in the middle of the protection frame, and the bidirectional motor is connected with the processing box. A linkage rod is arranged on one side of the bidirectional motor, a driving gear is arranged at one end of the linkage rod, a driven gear is arranged on one side of the bottom of the driving gear, a lead screw is arranged in the middle of the driven gear, a sliding block is arranged outside the lead screw, and a cleaning strip is arranged on the side face of the sliding block. According to the observation window cleaning device, the observation window is cleaned through the arranged cleaning assembly, the linkage rod and the driving gear are driven to rotate through the arranged bidirectional motor, the driven gear drives the lead screw to rotate, the sliding block drives the clamping frame, the T-shaped connecting plate and the cleaning strip to move, and the observation window is cleaned in the moving process; the surface definition of the observation window is kept.

Description

Technical Field

[0001] The utility model relates to the technical field of gallium arsenide wafer processing, and particularly relates to a gallium arsenide wafer cutting device. Background Art

[0002] Gallium arsenide belongs to the III-V group compound semiconductor, which is composed of two elements, arsenic and gallium. It appears bright gray in appearance, has metallic luster, is brittle and hard, and can be used for chip production. During the production and processing of gallium arsenide wafers, cutting is required according to the process. When a wafer cutting device with a blade cuts a wafer, a large amount of ultrapure water is required to cool the blade and the wafer, and a large amount of liquid will splash to various positions inside the device, including the observation window. When the liquid splashes onto the observation window, it is likely to affect the staff's observation of the cutting situation.

[0003] In a gallium arsenide wafer cutting device mentioned in the patent with the publication number CN220373622U, the patent enables the knob to rotate each bevel gear to rotate the reciprocating lead screw through structures such as a control rod, a transmission rod, a reciprocating lead screw, and a cleaning strip. The rotation of the reciprocating lead screw drives the wire sleeve, the clamping plate, and the cleaning strip to reciprocally clean the liquid on the surface of the observation window, realizing the ability of the staff to clean the observation window during the operation of the wafer cutting device so that the staff can observe the cutting situation of the wafer, and solving the problem that the staff needs to observe the cutting situation during the operation of the device. However, there are still the following problems in this patent:

[0004] The effect of quickly disassembling the cleaning strip in this device is not ideal. After long-term use of the cleaning strip, a large amount of dust accumulates on its surface, and the cleaning strip needs to be disassembled, cleaned, and replaced to prevent the dust accumulation on the surface of the cleaning strip from affecting the cleaning effect of the observation window. Therefore, a gallium arsenide wafer cutting device is needed to solve the above problems. Summary of the Utility Model

[0005] The main purpose of the utility model is to provide a gallium arsenide wafer cutting device, which can effectively solve the problems in the background art.

[0006] To achieve the above purpose, the technical solution adopted by the utility model is as follows:

[0007] A gallium arsenide wafer cutting device includes a frame. A processing box is arranged at the top of the frame, and a box door is arranged on the side of the processing box. An observation window is arranged in the middle of the box door. A cleaning component is arranged on one side inside the processing box.

[0008] The cleaning component includes a protective frame, a two-way motor is arranged in the middle of the protective frame, a linkage rod is arranged on one side of the two-way motor, a driving gear is arranged at one end of the linkage rod, a driven gear is arranged on one side of the bottom of the driving gear, a lead screw is arranged in the middle of the driven gear, a slider is arranged on the outer part of the lead screw, a connecting frame is arranged on the outer part of the slider, a clamping frame is arranged on the side of the slider, a connecting component is arranged on the top of the clamping frame, a T-shaped connecting plate is arranged in the middle of the clamping frame, and a cleaning strip is arranged on the side of the T-shaped connecting plate;

[0009] The connecting component includes a limiting slide bar, a limiting top plate is arranged on the top of the limiting slide bar, a connecting spring is arranged on the bottom of the limiting top plate, and a pulling plate is arranged on the top of the limiting top plate.

[0010] Preferably, the bottom of the protective frame is installed on the top of the processing box through bolts, the two-way motor is installed in the middle of the interior of the protective frame through bolts, the output end of the two-way motor is in transmission connection with the linkage rod, the driving gear is clamped at one end of the linkage rod away from the two-way motor, the driven gear is arranged on one side of the bottom of the driving gear, and the driving gear meshes with the driven gear.

[0011] Preferably, the lead screw is clamped in the middle of the driven gear, the connecting frame is installed on the outer part of the lead screw through a bearing, the side of the connecting frame is connected to the inner wall of the processing box through bolts, there are two connecting frames, which are symmetrically distributed on both sides inside the processing box respectively, and the lead screw is arranged corresponding to the connecting frame.

[0012] Preferably, a slider is sleeved on the outer wall of the lead screw, the slider is slidably connected inside the connecting frame, the clamping frame is installed on the side of the slider through bolts, the T-shaped connecting plate is clamped in the middle of the clamping frame, the cleaning strip is installed through bolts in the middle of the side of the T-shaped connecting plate away from the clamping frame, and the side of the cleaning strip away from the T-shaped connecting plate is in contact with the side of the observation window.

[0013] Preferably, T-shaped limiting sliding rails are fixedly connected to the inner wall of the clamping frame, there are four T-shaped limiting sliding rails, which are symmetrically distributed on the top and bottom of the clamping frame respectively, the T-shaped limiting sliding rails are slidably connected to the T-shaped connecting plate, a sliding groove is opened on one side of the T-shaped connecting plate close to the top and bottom of the clamping frame, the T-shaped limiting sliding rails are slidably connected inside the sliding groove, a connecting groove is opened on the top of the T-shaped connecting plate, and the connecting groove is located in the middle of the two sliding grooves.

[0014] Preferably, a limiting slide bar is slidably connected to the top of the clamping frame, and the bottom end of the limiting slide bar penetrates through the clamping frame and is inserted into the connecting groove inside the top of the T-shaped connecting plate. A limiting top plate is installed at the top of the limiting slide bar through a bolt, and a connecting spring is fixedly connected to the bottom of the limiting top plate. The connecting spring is sleeved outside the limiting slide bar, and the end of the connecting spring away from the limiting top plate is fixedly connected to the top of the clamping frame. A pulling plate is installed in the middle of the top of the limiting top plate through a bolt.

[0015] Compared with the prior art, the utility model has the following beneficial effects:

[0016] 1. The cleaning assembly is provided to clean the observation window. The bidirectional motor drives the linkage rod and the driving gear to rotate, so that the driven gear drives the lead screw to rotate, and the slider drives the clamping frame, the T-shaped connecting plate and the cleaning strip to move, and the observation window is cleaned during the movement, maintaining the clarity of the surface of the observation window and facilitating the observation of the staff.

[0017] 2. The connecting assembly is provided to install the clamping frame, the T-shaped connecting plate and the cleaning strip. The limiting slide bar penetrates through the clamping frame and is connected to the connecting groove inside the top of the T-shaped connecting plate, so as to realize the stable connection of the clamping frame and the T-shaped connecting plate. At the same time, it is convenient to disassemble the T-shaped connecting plate and the cleaning strip, improving the use convenience of the device, facilitating the replacement and cleaning of the cleaning strip, and preventing dust accumulation caused by long-term use of the cleaning strip and affecting the use effect. Description of the Drawings

[0018] Figure 1 is the structural schematic diagram of the whole device of the utility model;

[0019] Figure 2 is the structural schematic diagram inside the processing box of the utility model;

[0020] Figure 3 is the structural schematic diagram of the cleaning assembly of the utility model;

[0021] Figure 4 is the utility model Figure 3 The enlarged structural schematic diagram at A in;

[0022] Figure 5 is the structural schematic diagram inside the protective frame of the utility model.

[0023] In the figure: 1, frame; 2, processing box; 3, box door; 4, observation window; 5, cleaning component; 6, protective frame; 7, bidirectional motor; 8, linkage rod; 9, driving gear; 10, driven gear; 11, lead screw; 12, slider; 13, clamping frame; 14, T-shaped connecting plate; 15, cleaning strip; 16, connecting component; 17, T-shaped limiting slide rail; 18, chute; 19, limiting slide bar; 20, connecting spring; 21, limiting top plate; 22, pulling plate; 23, connecting groove; 24, connecting frame. Detailed implementation manner

[0024] In order to make the technical means, creative features, achieved purposes and effects of the present utility model easy to understand, the present utility model will be further described below in conjunction with specific implementation manners.

[0025] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 5 As shown, a gallium arsenide wafer cutting device includes a frame 1. A processing box 2 is arranged at the top of the frame 1. A box door 3 is arranged on the side of the processing box 2. An observation window 4 is arranged in the middle of the box door 3. A cleaning component 5 is arranged on one side inside the processing box 2;

[0026] The cleaning component 5 includes a protective frame 6. A two-way motor 7 is arranged in the middle of the protective frame 6. One side of the two-way motor 7 is provided with a linkage rod 8. One end of the linkage rod 8 is provided with a driving gear 9. One side of the bottom of the driving gear 9 is provided with a driven gear 10. A lead screw 11 is arranged in the middle of the driven gear 10. A slider 12 is arranged outside the lead screw 11. A connecting frame 24 is arranged outside the slider 12. A clamping frame 13 is arranged on the side of the slider 12. A connecting component 16 is arranged on the top of the clamping frame 13. A T-shaped connecting plate 14 is arranged in the middle of the clamping frame 13. A cleaning strip 15 is arranged on the side of the T-shaped connecting plate 14. The bottom of the protective frame 6 is installed on the top of the processing box 2 through bolts. The two-way motor 7 is installed in the middle of the interior of the protective frame 6 through bolts. The output end of the two-way motor 7 is in transmission connection with the linkage rod 8. One end of the linkage rod 8 away from the two-way motor 7 is clamped with the driving gear 9. One side of the bottom of the driving gear 9 is provided with the driven gear 10. The driving gear 9 and the driven gear 10 are meshed with each other. The lead screw 11 is clamped in the middle of the driven gear 10. The connecting frame 24 is installed on the outside of the lead screw 11 through a bearing. The side of the connecting frame 24 is connected to the inner wall of the processing box 2 through bolts. There are two connecting frames 24, which are symmetrically distributed on both sides inside the processing box 2 respectively. The lead screw 11 is arranged corresponding to the connecting frame 24. The outer wall of the lead screw 11 is sleeved with the slider 12. The slider 12 is slidably connected to the inside of the connecting frame 24. The clamping frame 13 is installed on the side of the slider 12 through bolts. The T-shaped connecting plate 14 is clamped in the middle of the clamping frame 13. The middle of one side of the T-shaped connecting plate 14 away from the clamping frame 13 is installed with the cleaning strip 15. One side of the cleaning strip 15 away from the T-shaped connecting plate 14 is in contact with the side of the observation window 4. The cleaning of the observation window 4 is realized through the arranged cleaning component 5. The two-way motor 7 drives the linkage rod 8 and the driving gear 9 to rotate, so that the driven gear 10 drives the lead screw 11 to rotate. The slider 12 drives the clamping frame 13, the T-shaped connecting plate 14 and the cleaning strip 15 to move. The cleaning of the observation window 4 is realized during the movement, maintaining the clarity of the surface of the observation window 4 and facilitating the observation of the staff;

[0027] Please refer to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4As shown, the connecting component 16 includes a limiting slide bar 19. A limiting top plate 21 is provided at the top of the limiting slide bar 19, and a connecting spring 20 is provided at the bottom of the limiting top plate 21. A pulling plate 22 is provided at the top of the limiting top plate 21. T-shaped limiting slide rails 17 are fixedly connected to the inner wall of the clamping frame 13, and there are four T-shaped limiting slide rails 17, which are symmetrically distributed at the top and bottom of the clamping frame 13 respectively. The T-shaped limiting slide rails 17 are slidably connected to the T-shaped connecting plate 14, and a chute 18 is opened on one side of the T-shaped connecting plate 14 close to the top and bottom of the clamping frame 13. The T-shaped limiting slide rails 17 are slidably connected inside the chute 18. A connecting groove 23 is opened at the top of the T-shaped connecting plate 14, and the connecting groove 23 is located between the two chutes 18. The limiting slide bar 19 is slidably connected to the top of the clamping frame 13, and the bottom end of the limiting slide bar 19 penetrates through the clamping frame 13 and is inserted into the connecting groove 23 at the top of the T-shaped connecting plate 14. The top of the limiting slide bar 19 is installed with a limiting top plate 21 through bolts, and the bottom of the limiting top plate 21 is fixedly connected with a connecting spring 20. The connecting spring 20 is sleeved outside the limiting slide bar 19, and the end of the connecting spring 20 away from the limiting top plate 21 is fixedly connected to the top of the clamping frame 13. A pulling plate 22 is installed in the middle of the top of the limiting top plate 21 through bolts. The installation of the clamping frame 13, the T-shaped connecting plate 14, and the cleaning strip 15 is realized through the provided connecting component 16. By setting the limiting slide bar 19 to penetrate through the clamping frame 13 and be connected to the connecting groove 23 at the top of the T-shaped connecting plate 14, the stable connection between the clamping frame 13 and the T-shaped connecting plate 14 is realized. At the same time, it is convenient to disassemble the T-shaped connecting plate 14 and the cleaning strip 15, improving the use convenience of the device, facilitating the replacement and cleaning of the cleaning strip 15, and preventing dust accumulation caused by long-term use of the cleaning strip 15, which affects the use effect.

[0028] It should be noted that the present utility model is a gallium arsenide wafer cutting device. During use, the residue and clean water generated during cutting are blocked by the set box door 3 and observation window 4. When it is necessary to clean the observation window 4, the set bidirectional motor 7 drives the linkage rod 8 to rotate, causing the linkage rod 8 to drive the driving gear 9 and the driven gear 10 to rotate. The driven gear 10 meshes with the driving gear 9. A lead screw 11 is installed in the middle of the driven gear 10, and the lead screw 11 rotates following the driven gear 10. The slider 12 drives the clamping frame 13 and the T-shaped connecting plate 14 to reciprocate along the lead screw 11. During the movement, the T-shaped connecting plate 14 drives the cleaning strip 15 to clean the surface of the observation window 4, ensuring the cleanliness and clarity of the observation window 4, facilitating the observation of the staff. At the same time, the T-shaped connecting plate 14 and the clamping frame 13 are connected by a connecting component 16. When it is necessary to disassemble and replace, pull the pulling plate 22, causing the pulling plate 22 to drive the limiting top plate 21 and the connecting spring 20 to be stretched upward. The limiting slide rod 19 separates from the inside of the connecting groove 23 at the top of the T-shaped connecting plate 14, and pull the T-shaped connecting plate 14 to the side away from the clamping frame 13, causing the T-shaped limiting slide rail 17 in the middle of the clamping frame 13 to slide inside the chute 18 at the top of the T-shaped connecting plate 14. The T-shaped limiting slide rail 17 separates from the chute 18, and the T-shaped connecting plate 14 separates from the clamping frame 13, completing the disassembly of the T-shaped connecting plate 14 and the cleaning strip 15. There is no need for bolt fixation, which is convenient and fast, improving the convenience of use of the device.

[0029] The above shows and describes the basic principles, main features and advantages of the present utility model. Those skilled in the art of this industry should understand that the present utility model is not limited by the above embodiments. The above embodiments and the descriptions in the specification only illustrate the principles of the present utility model. Without departing from the spirit and scope of the present utility model, the present utility model will have various changes and improvements, and these changes and improvements all fall within the scope of the present utility model claimed. The scope of protection claimed by the present utility model is defined by the appended claims and their equivalents.

Claims

1. A gallium arsenide wafer cutting device, comprising a frame (1), characterized in that: A processing box (2) is provided at the top of the frame (1), and a box door (3) is provided on the side of the processing box (2). An observation window (4) is provided in the middle of the box door (3). A cleaning component (5) is provided on one side inside the processing box (2). The cleaning component (5) includes a protective frame (6). A bidirectional motor (7) is provided in the middle of the protective frame (6). A linkage rod (8) is provided on one side of the bidirectional motor (7). A driving gear (9) is provided at one end of the linkage rod (8). A driven gear (10) is provided on the bottom side of the driving gear (9). A lead screw (11) is provided in the middle of the driven gear (10). A slider (12) is sleeved on the outside of the lead screw (11). A connecting frame (24) is provided on the outside of the slider (12). A clamping frame (13) is provided on the side of the slider (12). A connecting component (16) is provided on the top of the clamping frame (13). A T-shaped connecting plate (14) is provided in the middle of the clamping frame (13). A cleaning strip (15) is provided on the side of the T-shaped connecting plate (14). The connecting component (16) includes a limiting slide bar (19). A limiting top plate (21) is provided at the top of the limiting slide bar (19). A connecting spring (20) is provided at the bottom of the limiting top plate (21). A pulling plate (22) is provided at the top of the limiting top plate (21).

2. The gallium arsenide wafer cutting device according to claim 1, characterized in that: The bottom of the protective frame (6) is installed on the top of the processing box (2) by bolts. The bidirectional motor (7) is installed in the middle of the inside of the protective frame (6) by bolts. The output end of the bidirectional motor (7) is drivingly connected to the linkage rod (8). The driving gear (9) is clamped at the end of the linkage rod (8) away from the bidirectional motor (7). The driven gear (10) is provided on the bottom side of the driving gear (9). The driving gear (9) and the driven gear (10) are meshed with each other.

3. The gallium arsenide wafer cutting device according to claim 2, characterized in that: The lead screw (11) is clamped in the middle of the driven gear (10). The connecting frame (24) is installed on the outside of the lead screw (11) through a bearing. The side of the connecting frame (24) is connected to the inner wall of the processing box (2) by bolts. There are two connecting frames (24), which are symmetrically distributed on both sides inside the processing box (2). The lead screw (11) is correspondingly arranged with the connecting frame (24).

4. The gallium arsenide wafer cutting device according to claim 3, characterized in that: The outer wall of the lead screw (11) is sleeved with the slider (12). The slider (12) is slidably connected to the inside of the connecting frame (24). The clamping frame (13) is installed on the side of the slider (12) by bolts. The T-shaped connecting plate (14) is clamped in the middle of the clamping frame (13). The cleaning strip (15) is installed in the middle of the side of the T-shaped connecting plate (14) away from the clamping frame (13) by bolts. The side of the cleaning strip (15) away from the T-shaped connecting plate (14) is in contact with the side of the observation window (4).

5. The gallium arsenide wafer cutting device according to claim 4, characterized in that: On the inner wall of the clamping frame (13), there are fixedly connected T-shaped limiting sliding rails (17), and there are four T-shaped limiting sliding rails (17), which are symmetrically distributed at the top and bottom of the clamping frame (13) respectively. The T-shaped limiting sliding rails (17) are slidably connected with the T-shaped connecting plate (14), and on one side of the T-shaped connecting plate (14) close to the top and bottom of the clamping frame (13), there are provided sliding grooves (18). The T-shaped limiting sliding rails (17) are slidably connected inside the sliding grooves (18). On the top of the T-shaped connecting plate (14), there is provided a connecting groove (23), and the connecting groove (23) is located in the middle of the two sliding grooves (18).

6. The gallium arsenide wafer cutting device according to claim 5, characterized in that: On the top of the clamping frame (13), there is a slidably connected limiting sliding rod (19), and the bottom end of the limiting sliding rod (19) penetrates through the clamping frame (13) and is inserted into the connecting groove (23) on the top of the T-shaped connecting plate (14). On the top of the limiting sliding rod (19), there is a limiting top plate (21) installed through a bolt, and on the bottom of the limiting top plate (21), there is fixedly connected a connecting spring (20). The connecting spring (20) is sleeved outside the limiting sliding rod (19), and the end of the connecting spring (20) far from the limiting top plate (21) is fixedly connected to the top of the clamping frame (13). In the middle of the top of the limiting top plate (21), there is a pulling plate (22) installed through a bolt.

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